DIAMOND WIRE-SAWN SILICON WAFERS FROM THE LAB TO THE CELL PRODUCTION A. Bidiville1,2, K. Wasmer3, R. Kraft1, C.

. Ballif2 Q-Cells SE, DE-06766 Bitterfeld-W lfe!, "erma!# 2 E$%&, $' t v ltai(s a!d t'i! film ele(tr !i(s la) rat r#, C*-2000 +e,('-tel, S.it/erla!d 3 Em0a - S.iss federal la) rat ries f r testi!1 materials a!d resear(', C*-3600 2',!, S.it/erla!d
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Wafers f r t'e $3 i!d,str# are mai!l# sa.! .it' a m,lti-.ire sl,rr# sa.. 2'is 0r (ess is sl . 4it ta5es alm st 'alf a da# t ( m0lete a (,t6 a!d 1e!erates a l t f .aste7 ar ,!d 'alf t'e sili( ! is sa.! a.a# a!d ( !tami!ati!1 t'e sl,rr#, a!d t'e .ire is . r! a!d 'as l st stre!1t'. After ea(' (,t, t'e sl,rr# 'as t )e (lea!ed fr m t'e sili( ! de)ris a!d t'e .ire 'as t )e e8('a!1ed. 9! ( !trast, sa.i!1 t'e .afers .it' a diam !d-0lated .ire is faster, re:,ires !l# a ( li!1 li:,id t'at is eas# t filter fr m sili( ! de)ris a!d ,ses a .ire t'at (a! )e 5e0t f r several (,t. B,t t'is !e. sa.i!1 te('!i:,e !l# 'as a ('a!(e t devel 0 if t'e s lar (ell 0r d,(ti ! li!es devel 0ed f r sl,rr# sa.! .afers is (a0a)le t 0r (ess t'ese diam !d-0lated .ire sa.! .afers effi(ie!tl#. 2'is st,d# f (,sed ! t'e differe!(es f s,rfa(es 0r 0erties f .afers (,t via a sl,rr# .ire-sa.! a!d via a diam !d-0lated .ire-sa.. %r m t'ese s,rfa(e differe!(es, it is 0 ssi)le t e80lai! t'e differe!(es i! (ell 0r (essi!1 )e'avi ,r a!d t ,0date t'e (ell 0r d,(ti ! li!e. %i!all#, it is s' .! t'at .afers sa.! .it' a diam !d-0lated .ire (a! 1ive (ells t'at are as effi(ie!t as t'e sl,rr# sa.! .afers, .'i(' validates t'is !e. diam !d-0lated .ire .aferi!1 met' d f r t'e 0r d,(ti ! f s lar (ells. Ke#. rds7 (-Si, .ire sa., te8t,risati !

9+2R;D<C29;+ 2'e mai!stream .aferi!1 te('! l 1# is (,rre!tl# sl,rr# .ire-sa.i!17 t'e sili( ! )l (5s are (,t )# t'e a(ti ! f a sm t' steel .ire ! .'i(' a! a)rasive sl,rr# is 0 ,red =1, 2, 3>. 2'is sl,rr# is made f a fl,id ? ,s,all# 0 l#et'#le!e 1l#( l 4$E"6 ? a!d f a)rasive 0arti(les ? ,s,all# sili( ! (ar)ide 4SiC6. 2'e a(ti ! f t'e 0arti(les (,t t'e sili( ! i!t .afers, ),t als .ears t'e .ire, .'i(' 'as t )e ('a!1ed after ea(' (,t. 2'is 0r (ess is fairl# sl . 4alm st 'alf a da#6 a!d 1e!erates a l t f .astes7 t'e . r! steel .ire, ),t als t'e sl,rr# t'at ( !tai!s sili( ! de)ris t'at 'ave t )e ta5e! ,t )ef re t'e sl,rr# is ,sed a1ai!. A! alter!ative t t'is met' d is emer1i!1 i! t'e f rm f diam !d-0lated .ire (,tti!1 =@, A>. 2'e same sa. is ,sed f r sl,rr# .ire-sa.i!1, ),t t'e .ire is re0la(ed )# a .ire ! .'i(' diam !d 0arti(les 'ave )ee! atta('ed a!d t'e a)rasive sl,rr# is re0la(ed )# a ( li!1 li:,id. 9t 0r vides ma!# adva!ta1es, li5e a 'i1'er 0r d,(tivit#, a! easier re(#(li!1 f t'e ( li!1 li:,id 4as all t'e 0arti(les 'ave t )e rem ved i! rder t 'ave a refres'ed li:,id, i! ( !trast t t'e sta!dard a)rasive sl,rr# .'ere t'e small sili( ! de)ris 'ave t )e rem ved, ),t t'e ( arser SiC 0arti(les 'ave t )e 5e0t6, a!d a l .er .ear f t'e .ire 4t'e diam !ds !l# are .eari!1 ff, ),t m,(' sl .er t'a! t'e steel .ire ,sed f r sl,rr# .aferi!16, .'i(' (a! )e ,sed f r ma!# (,ts. %,rt'erm re, t'e .aferi!1 .it' a diam !d-0lated .ire is m,(' faster t'a! t'e sl,rr# .aferi!1, i!(reasi!1 t'e 0r d,(tivit# f t'e .ire-sa.. * .ever, t'e s,rfa(e f t'e .afers 0r d,(ed .it' t'is !e. te('! l 1# is differe!t a!d t'is met' d is s,ited f r t'e $3 i!d,str# !l# if it re:,ires a mi!imal ,01rade f t'e s lar (ell 0r d,(ti ! li!es. 2'is st,d# ( !(e!trates ! t'e f,!dame!tal s,rfa(e differe!(es )et.ee! a sl,rr# sa.! .afer a!d a diam !d-.ire sa.! .afer. 2 EB$ER9CE+2A& CE2*;D

Cells SE. 2'e a!al#sis ( !sisted i!t a st,d# f t'e t 0 1ra0'# 4.it' SEC 0i(t,res a!d 0ti(al r ,1'!ess meas,reme!ts6, a! EDB ('emi(al a!al#sis a!d a Rama! a!al#sis f t'e s,rfa(e, a st,d# f t'e K;* te8t,risati ! )e'avi ,r, a!d fi!all# a ('ara(terisati ! f t'e (ell effi(ie!(#. 2'e SEC a!al#sis .as made .it' a 2es(a! &#ra SEC a!d t'e EDB s0e(tra .ere ta5e! .it' a *ita('i S@E00 %E" SEC. 2'e Rama! s0e(tra .ere a(:,ired .it' a Dil r BFE00 .it' a A1@ !m laser a!d a s0 t si/e f 1 Dm. 2'e Rama! s0e(tr s( 0# all .s t meas,re t'e (r#stalli!e 0'ases 0rese!t ! t'e sam0le, as Sili( ! (a! )e 0rese!t ! t !l# i! t'e sta)le, diam !d latti(e t'at is .ell 5! .!, ),t (a! als 0rese!t meta-sta)le 0'ases li5e !a! (r#stalli!e Si-999 a!d Si-B99 t'at are f rmed .'e! t'e sam0le is sl .l# rela8i!1 fr m 'i1', r am r0' ,s sili( ! t'at is f rmed .'e! t'e rela8ati ! .as fast 0ress,res =6, 7, E, G>. %,rt'erm re, it is als 0 ssi)le t meas,re t'e stress ! t'e sam0le )# meas,ri!1 t'e dis0la(eme!t f t'e 0ea5s t .ards 'i1'er r l .er .avele!1t's. 2'e r ,1'!ess a!d 223 f t'e .afers .ere meas,red .it' a Cir( $r f ('r mati( .'ite li1't 0r fil meter fr m %ries Resear(' H 2e('! l 1#. 2'e r ,1'!ess .as meas,red ! A ! ! se:,e!tial .afers ver A.6 mm l !1 0r files, as re( mme!ded )# t'e ! rm 9S; @2E7. 2'e 223 .as meas,red ! 0r files 0er0e!di(,lar t t'e .ire dire(ti !, als ! A ! ! se:,e!tial .afers f r ea(' .afer t#0e. 2'e .afers .ere fi!all# 0r (essed i!t s lar (ells ! a! i!d,strial 0r d,(ti ! li!e )# Q-Cells SE, ea(' )at(' ( !sisted f ar ,!d A0 .afers. 2'e 0r 0erties f ea(' (ell .ere fi!all# meas,red i!-li!e at t'e e!d f t'e 0r d,(ti !. 3 RES<&2S

C ! (r#stalli!e 40016, 12A812A mm2, 0se,d -s:,are i!1 ts .ere se0arated i!t t. )at('es. ;!e )at(' .as (,t .it' a sl,rr# .ire sa. i!t 200 Dm t'i(5 .afers as refere!(e, t'e t'er .it' a diam !d-.ire sa. i!t 200 Dm t'i(5 .afers. 2'ese .afers .ere a!al#sed a!d ('ara(terised )ef re )ei!1 0r (essed i!t s lar (ells at Q-

3.1 SEC a!al#sis Sam0les fr m ) t' .afer t#0es .ere a!al#sed. 2#0i(al s,rfa(e f t'e .afers are s' .! i! %i1,re 1. 2'e s,rfa(e f t'e sl,rr# sa.! .afer 4%i1. 1.a6 is t#0i(al fr m t'is sa.i!1 0r (ess7 a r ,1' s,rfa(e (a! )e see!, .it' ! i!di(ati ! f t'e .ire dire(ti ! d,ri!1 sa.i!1. ;! t'e

( !trar#, t'e s,rfa(e f t'e diam !d-.ire sa.! .afers 4%i1. 1.)6 s' .s sm t' 0arallel 1r ves d !e )# t'e diam !d 0arti(les s(rat('i!1 t'e s,rfa(e. 2'ese sm t' 1r ves are s metimes i!terr,0ted )# ('i0s t'at .ere )r 5e! ff, leavi!1 a r ,1'er s,rfa(e. ;! t'e side f t'e 1r ves, sl,m0s f sili( ! (a! als )e see!. ;! ) t' s,rfa(es, (ra(5s are ! t visi)le. 2'e s,rfa(e f t'e diam !d-.ire sa.! .afers s' .s t'at t'e diam !d 0arti(les are s(rat('i!1 t'e s,rfa(e ver l !1 dista!(es, 0 ssi)l# 1ivi!1 rise t a t'i(5er 8ide la#er. EDB meas,reme!ts .ere d !e at l . a((elerati!1 v lta1e 43536 t e!'a!(e t'e dete(ti ! f t'e 8ide. As a refere!(e, a sam0le f 40016 sili( ! .it' a 20 !m t'ermi(all# 1r .! 8ide la#er .as ta5e!, as .ell as a sl,rr# sa.! .afer. 2'e 0arts f t'e diam !d-.ire sa.! .afer .'ere sili( ! ('i00ed ff s' ,ld ! t 'ave )ee! affe(ted )# t'e diam !ds s(rat('i!1 ! t'e s,rfa(e a!d t',s s' . a! 8ide la#er t'i(5!ess ( m0ara)le .it' t'e sl,rr# sa.! .afers. %i1,re 2.a s' .s s0e(tra f r t'e 20 !m t'i(5 refere!(e7 t'e sili( ! 0ea5 4at 1.E536 is (learl# visi)le, as .ell as t'e 8#1e! 0ea5 4at 0.A 536. 2'e sl,rr# .afer 4%i1. 2.)6 s' .s a small, ),t disti!1,is'a)le 8#1e! 0ea5, t'at s' ,ld ( rres0 !d t a 8ide t'i(5!ess ar ,!d 1-2 !m. 2'e s0e(tr,m fr m t'e ('i00ed- ff re1i ! f t'e diam !d-.ire sa.! .afer 4%i1. 2.(6 0rese!ts a! 8#1e! 0ea5 a little smaller t'a! t'e !e ! t'e sl,rr# sa.! sam0le. 2'e s0e(tr,m ta5e! ! t'e 1r ve 4%i1. 2.d6 s' .s a sli1'tl# lar1er 8#1e! 0ea5, ),t still m,(' smaller t'a! t'e !e f t'e refere!(e s0e(tr,m, mea!i!1 t'at t'e 8ide la#er is t'i(5er t'a! ! t'e ('i00ed- ff re1i !s, ),t still !l# ar ,!d 2 !m t'i(5 i! its t'i(5est 0arts. 2'e ma1!it,de variati !s f t'e 8#1e! 0ea5 f t'e diam !d-.ire sa.! .afer ( rres0 !d r ,1'l# t t'e ma1!it,de variati !s t'at (a! )e )served ! t'e sl,rr# sa.! sam0le, im0l#i!1 t'at t'e 8ide la#er t'i(5!ess ! ) t' t#0es f sam0les are ( m0ara)le. 3.2 Rama! a!al#sis As sili( ! is )rittle a!d as t'e sm t' 1r ves (a!! t )e e80lai!ed )# a melti!1-:,e!('i!1 f t'e s,rfa(e leadi!1 t t'e f rmati ! f a t'i(5 8ide la#er, t'e sam0les .ere a!al#sed .it' a Rama! s0e(tr meter t ('e(5 f r a 0'ase tra!sf rmati !. 9t is 5! .! t'at .'e! s(rat('ed at l . l ad, sili( ! ,!derta5es a 0'ase tra!sf rmati ! re!deri!1 it d,(tile =6>. 2'is res,lts i! a la#er f am r0' ,s sili( ! r ? if t'e s(rat(' is sl . e! ,1' ? i!t a mi8t,re f am r0' ,s a!d metasta)le 0'ases, i! t'e same fas'i ! as t'e 0'ase tra!sf rmati ! see! d,ri!1 !a! i!de!tati ! =7>. W'e! t'e i!de!ti!1 4 r s(rat('i!16 ti0 is 0ressed ! t'e sili( !, it i!d,(es a 'i1' l (al 0ress,re, tra!sf rmi!1 t'e )rittle sili( ! i!t a d,(tile 0'ase. ;! ,!l adi!1, t'is d,(tile 0'ase i! ! t sta)le a!d tra!sf rms i!t a mi8t,re f am r0' ,s a!d metasta)le sili( ! 0'ases, .'i(' relative im0 rta!(e de0e!ds ! t'e i!de!tati ! 0arameters =E>.

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Figure 1: SEC ima1e f t'e s,rfa(e f a6 a sl,rr# sa.! .afer. 2'e s,rfa(e is r ,1', ),t dire(ti ! f t'e .ire d,ri!1 sa.i!1 is ! t visi)le. )6 S,rfa(e f a diam !d.ire sa.! .afer. "r ves i!di(ati!1 t'e dire(ti ! f t'e .ire d,ri!1 sa.i!1 (a! )e see!. 2'ese 1r ves are m stl# sm t', ),t tra(es f ('i0s t'at )r 5e ff t'e s,rfa(e (a! )e see!. 2'e Rama! a!al#sis f t'e .afers s' .ed t'at t'ere is !l# (r#stalli!e sili( ! 0rese!t ! t'e sl,rr# sa.! .afer, ),t t'at am r0' ,s sili( ! is 0rese!t ! t'e diam !d-.ire sa.! .afers. As it .as alread# see! .it' t'e SEC, t. t#0es f s,rfa(es are 0rese!t7 t'e r ,1' 0arts .'ere material .as ('i00ed ff are !l# made f sta)le (r#stalli!e sili( ! 4%i1. 3.a6, a!d t'e sm t' 1r ves, .'ere am r0' ,s sili( ! 4a!d s metimes als metasta)le 0'ases6 is 0rese!t 4%i1. 3.)6. A ma0 f t'e s,rfa(e f a diam !d-.ire sa.! .afer 4%i1. @.a6 .as made )# ta5i!1 a! arra# f s0e(tra a!d fitti!1 t'em t a mi8 f a "a,ss distri),ti ! a!d a & re!t/ia! distri),ti ! f r t'e am r0' ,s sili( ! a!d a & re!t/ia! distri),ti ! f r t'e (r#stalli!e sili( !. 2'e e8(l,sivel# (r#stalli!e areas are .ell defi!ed )# t'e r ,1', ('i00ed- ff re1i !s, t'e sm t's re1i !s )ei!1 made mai!l# f am r0' ,s sili( !.

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stress6 .avele!1t's. A ma0 f t'e stress is 0rese!ted i! fi1,re @.). 9t s' .s t'at t'e am r0' ,s sili( ! i!d,(es a ( m0ressive stress i!t t'e (r#stalli!e sili( ! )eside it a!d t'at t'e small ('i00ed- ff re1i !s ! t'e side f 1r ves are ,!der a str !1 te!sile stress. a6

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Figure 3: Rama! s0e(tra f a6 a ('i00ed ff re1i ! a!d )6 a sm t' 1r ve. ;!l# (r#stalli!e sili( ! (a! )e see! i! t'e ('i00ed ff re1i ! a!d m stl# am r0' ,s sili( ! (a! )e see! ! t'e 1r ve.

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Figure 2: EDB S0e(tra f t'e s,rfa(e. 2'e 8#1e! 0ea5 is ar ,!d 0.A 53 a!d t'e sili( ! 0ea5 is ar ,!d 1.E 53. a6 a refere!(e sam0le .it' 20 !m f 8ide, )6 t'e s,rfa(e f a sl,rr# sa.! .afer, (6 i! a re1i ! .ere sili( ! ('i00ed ff a diam !d-.ire sa.! .afer, d6 9! a sm t' 1r ve f a diam !d-.ire sa.! .afer, .'ere t'e 8#1e! 0ea5 is sli1'tl# lar1er t'a! ! ('i00ed- ff re1i !s. %,rt'erm re, Rama! s0e(tr s( 0# all .s t meas,re t'e stress level f t'e (r#stalli!e sili( ! .it' t'e m veme!t f its 0ea5 t 'i1'er 4.'e! t'e sili( ! is ( m0ressi !6 r l .er 4.'e! t'e sili( ! is i! te!sile

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Figure : R ,1'!ess 4meas,red 0er0e!di(,larl# t t'e .ire dire(ti !6 f a sl,rr# sa.! .afer 4i! red6 a!d f a diam !d-.ire sa.! .afer 4i! )la(56. 9! ( !trast t t'e (lassi(al sl,rr# sa.! .afers, t'e diam !d-.ire sa.! .afers d ! t s' . a! ev l,ti ! f t'e r ,1'!ess .it' t'e dista!(e fr m t'e .ire e!tra!(e.

Figure 4: a6 a ma0 f t'e am ,!t f am r0' ,s sili( ! is s,0erim0 sed t a! 0ti(al mi(r 1ra0'. 2'e )l,e re1i !s i!di(ate a! im0 rta!t am ,!t f am r0' ,s sili( !, a!d t'e tra!s0are!t re1i !s i!di(ate a! a)se!(e f am r0' ,s sili( !. 9t (a! )e see! t'at t'e ('i00ed- ff re1i ! d es ! t 0rese!t a!# tra(e f am r0' ,s sili( !, ),t t'e re1i !s .'ere t'e 1r ves are 0rese!t are am r0' ,s. )6 ma0 f t'e stress i! t'e (r#stalli!e sili( ! at t'e same re1i ! t'at a6. 2'e red i!di(ate a ( m0ressive, t'e 1ree! a te!sile stress a!d )la(5 i!di(ates a! a)se!(e f stress. 3.3 R ,1'!ess a!al#sis C m0ari!1 t'e r ,1'!ess f t'e .afers, several differe!(es e8ist )et.ee! t'e t. t#0es f .afers. 2'e sl,rr# sa.! .afers are t#0i(al f a t'ree-) d# a)rasi ! 0r (ess =10> a!d d ! t s' . a str !1 i!fl,e!(e f t'e r ,1'!ess meas,reme!t dire(ti !, ),t t'e diam !d-.ire sa.! .afers 0rese!t a s,rfa(e t#0i(al f a t. -) d# a)rasi ! 0r (ess, .it' a str !1 a!is tr 0# f t'e s,rfa(e t 0 1ra0'#. %,rt'erm re, t'e r ,1'!ess f t'e sl,rr# sa.! .afers dimi!is'es )et.ee! t'e e!tra!(e f t'e .ire i!t t'e i!1 t a!d its e8it. 2'is is ! t t'e (ase f r t'e diam !d-.ire sa.! .afers7 t'e r ,1'!ess sta#s ( !sta!t ! t'e .' le 0at' f t'e .ire 4%i1. A6. B,t at t'e .afer s(ale, t'e s,rfa(e f t'e diam !d-.ire sa.! .afers s' . lar1er t'i(5!ess differe!(e ( m0ared t sl,rr# sa.! .afers. 2'is is d,e, f r s me 0art, t t'e fa(t t'at t'e diam !d-.ire sa.! .afers .ere (,t .it' t'e .ire 1 i!1 )a(5 a!d f rt' a!d a fast feed rate, t',s ma5i!1 'ills at ea(' .ire dire(ti ! i!versi ! 4%i1. 66, ),t t'is ((,rs m re fte! t'a! t'e lar1e t'i(5!ess variati ! t'at are meas,red, s t'at it (a!! t e80lai! m st f t'e t'i(5!ess variati !. 2'e sl,rr# sa.! .afers are (,t .it' t'e .ire 1 i!1 i! !e dire(ti ! !l#, a!d d ! t 0rese!t a re1,lar t'i(5!ess variati ! 0atter!.

Figure !: $r file f a sl,rr# sa.! .afer 4i! red6 a!d a diam !d-.ire sa.! .afer 4i! )la(56 i! a dire(ti ! 0er0e!di(,lar t t'e .ire dire(ti !. 2'e ('a!1es i! .ire dire(ti !s are (learl# mar5ed ! t'e diam !d-.ire sa.! .afer, ma5i!1 a lar1e t'i(5!ess differe!(e. 3.@ Et('i!1 f .afers 2'e first ste0 f t'e s lar (ell 0r d,(ti ! ( !sists f a te8t,risati ! .'i(' i!(reases t'e a)s r0ti ! f li1't. ;! m ! -(r#stalli!e .afers, it is d !e )# a! a!is tr 0i( et('i!1, f rmi!1 0#ramids ! t'e s,rfa(e f t'e .afers. 2'e t'i(5!ess f sili( ! et('ed a.a# is detrime!tal t determi!e t'e si/e f t'ese 0#ramids, a!d t',s t'eir effi(ie!(# i! li1't-tra00i!1. % r t'e sl,rr# sa.! .afers, a sta!dard et('i!1 time is e! ,1' t 0r d,(e a s,rfa(e t'at a)s r)s li1't .ell e! ,1'. 9t is ! t t'e (ase f diam !d.ire sa.! .afers7 t'e t'i(5!ess de(reased )# !l# 7 Dm 4i!stead f t'e 20 Dm e80e(ted6 a!d .ere refle(ti!1 li1't t m,('. A se( !d r ,!d f et('i!1 4.'i(' rem ved 1A Dm6 .as !e(essar# t 'ave a .ell-devel 0ed e! ,1' te8t,re. 2'e t'i(5!ess f t'e .afers after ea(' et('i!1 ste0 is s' .! i! fi1,re 7.

Figure ": 2'i(5!ess f t'e .afers after t'e et('i!1 0r (ess. 9! )la(57 t'i(5!ess f t'e .afers as-sa.!, i! ra!1e after t'e 4sta!dard6 first et('i!1. 2'e diam !d.ire sa.! .afers .ere ! t et('ed as fast as t'e sl,rr# .afers a!d 'ad a 'i1' refle(tivit#. After a se( !d et('i!1 4i! #ell .6 .'i(' d es ! t ((,r i! t'e sta!dard 0r d,(ti !, t'e# 'ad a t'i(5!ess ( m0ara)le t t'e sl,rr# .afers after !e et(' a!d a! a((e0ta)le refle(tivit#. 3.A S lar (ell effi(ie!(# 2'e m st im0 rta!t res,lt t ( !sider t'e validit# f diam !d-.ire sa.i!1 t 0r d,(e .afers is t'e effi(ie!(# f t'e s lar (ells. As e80e(ted fr m t'e et('i!1 0r (ess, t'e diam !d-.ire sa.! .afers .'i(' .ere et('ed !l# !(e s' .ed a l .er effi(ie!(# ( m0ared t t'e sl,rr# .afers 42a)le 96. 2'e :,alit# f t'e sili( ! ( ,ld )e r,led ,t f t'e (a,se, as ) t' e!ds f t'e i!1 t .ere sa.! .it' sl,rr# a!d 1ave e:,ivale!t effi(ie!(# 4t'e sam0les are !amed Sl,rr# A a!d Sl,rr# B i! 2a)le 96, ),t t'e middle 0art f t'e i!1 t ? .'i(' .as sa.! .it' a diam !d .ire ? 1ave l .er effi(ie!(#. 9! ( !trast, t'e diam !d-.ire sa.! .afers t'at .ere et('ed t.i(e s' .ed a! effi(ie!(# ( m0ara)le t t'e sl,rr# .afers 4t'at .ere et('ed !(e6. T#$%e I: E&&i'ie(') *& +,e -*%#r 'e%%-. Sl,rr# A Diam !d Sl,rr# B Diam !d 2 et('es 1 et(' effi(ie!(# 16.EEI 17.07 I 17.03 I 16.21 I @ D9SC<SS9;+ 2'e SEC 0i(t,res s' . t'at t'e s,rfa(e f t'e .afers de0e!ds ! t'e sa.i!1 met' d. 2'e s,rfa(e f sl,rr# sa.! .afers is made )# a t'ree-) d# a)rasi ! 0r (ess .'ere t'e a)rasive 0arti(les are free )et.ee! t'e .ire a!d t'e sili( ! i!1 t. 2'e# are i!de!ti!1 t'e s,rfa(e, t',s rem vi!1 material a!d (reati!1 defe(ts 4(ra(5s a!d r ,1'!ess6 =1, 2, 3, 11, 12>. Wit' t'e diam !d-.ire sa.i!1, t'e material rem val 0r (ess is differe!t, as 0arallel 1r ves (a! )e see! ! t'e s,rfa(e. 2'is is t#0i(al f a 2-) d# a)rasi ! me('a!ism. 2'is (alls f r a ( m0lete ('a!1e f 0aradi1m, a differe!t .ear me('a!ism )ei!1 ! t 1 ver!ed )# t'e same 0arameters t'a! t'e sl,rr# sa.i!1. ;!e f t'e ( !se:,e!(es is t'at t'e .afer s,rfa(e r ,1'!ess (a!! t )e ,sed as a mea! t meas,re t'e sa.i!1 :,alit# as .it' sl,rr# sa.i!1 =11>. 2'e sl,rr# sa.i!1 (a! )e related t i!de!tati ! f t'e s,rfa(e )# t'e a)rasive 0arti(les, .'i(' (reates (ra(5s a!d r ,1'!ess t'at are ( rrelated. ;! t'e ( !trar#, t'e diam !d-.ire sa.i!1 0r (ess (a! )e )etter t' ,1't as s(rat('i!1 f t'e s,rfa(e, (reati!1 (ra(5s, ),t als a re1i ! f 0'ase tra!sf rmati ! =6>. "assill ,d et al =6> f ,!d t'at s(rat('i!1 at a l . l ad 0r d,(ed a sm t' 1r ve .it' eit'er am r0' ,s sili( ! ! its s,rfa(e, r a

mi8t,re f !a! (r#stalli!e metasta)le sili( ! a!d am r0' ,s sili( ! if t'e s(rat('i!1 .as sl .. 2'e s,rfa(e f .afers sa.! .it' a diam !d-0lated .ire s' .s e8a(tl# t'e same t 0 1ra0'#, .it' am r0' ,s sili( ! i!side t'e sm t' 1r ves. Sa.i!1 .it' a diam !d-0lated .ire is m,(' m re effi(ie!t t'a! sl,rr# sa.i!1. 2'e sa.i!1 s0eed (a! )e 3 times faster t'a! ,s,al sl,rr# sa.i!1 s0eed. 2',s, a lar1er fl . f 'eat 'as t )e e8tra(ted fr m t'e (,tti!1 / !e )# t'e ( la!t. 9f t'e 'eat e8tra(ti ! is ! t effi(ie!t e! ,1' ? f r i!sta!(e at t'e vi(i!it# f t'e diam !d 0arti(le s(rat('i!1 t'e sili( ! ? t'e sili( ! s,rfa(e (a! )e 'eated ,0, all .i!1 f r a t'i(5er 8ide la#er t f rm. %r m t'e t'i(5!ess f t'e 8ide la#er )tai!ed ! t'e diam !d.ire sa.! .afers, it (a! )e ( !(l,ded t'at t'e tem0erat,re f t'e s,rfa(e .as i! t'e same ra!1e t'a! t'e !e f t'e sl,rr# sa.! .afers. 2'e differe!(e i! sa.i!1 me('a!ism als e80lai!s t'e differe!(e i! t'e et('i!1 0r (ess. 2'e sl,rr# sa.! .afers are free f am r0' ,s sili( ! a!d !l# 'ave a t'i! !ative 8ide ! t'e s,rfa(e. ;! ( !trar#, diam !d-.ire sa.! .afers 'ave a! im0 rta!t fra(ti ! f t'e s,rfa(e ( vered .it' a la#er f am r0' ,s sili( !, a!d a sli1'tl# t'i(5er 8ide la#er. B t' t'e 8ide la#er a!d t'e am r0' ,s la#er a(t as mas5s .'e! et('i!1 t'e .afers7 t'ermal 8ide is r ,ti!el# ,sed f r str,(t,ri!1 sili( !, a!d Ka.ase1i et al =13> s' .ed t'at a la#er f am r0' ,s sili( ! f rmed )# s(rat('i!1 t'e s,rfa(e .it' a diam !d ti0 ( ,ld als a(t as a! effi(ie!t mas5. 2'e# stated t'at t'e am r0' ,s la#er 'ad a! et('i!1 rate a00r 8imatel# 30 times sl .er t'a! t'e 40016 dire(ti ! =13>, .'i(' ( rres0 !ds :,ite .ell .it' t'e et('i!1 rates f ,!d, as t'e first et(' rem ved 7 Dm f sili( ! i!stead f 20 Dm, mea!i!1 t'at t'e avera1e am r0' ,s sili( ! la#er .as @00 !m t'i(5 a!d t'e meas,red am r0' ,s la#er .as ar ,!d BBBB !m. 2'e 8ide la#er, !l# a fe. !a! metres t'i(5er t'a! t'e !e f sl,rr# sa.! .afers ? a!d ! t str !1l# var#i!1 ? (a!! t e80lai! t'e sl .er et('i!1 s0eed, ),t t'e am r0' ,s la#er, m,(' t'i(5er t'a! t'e 8ide la#er, (a! e80lai! t'e et('i!1 rate differe!(e. %r m a s lar (ell 0r d,(ti ! 0 i!t f vie., t'e diam !d-.ire sa.! .afers (a! )e )etter s,ited t'a! t'e sl,rr# sa.! .afers, as t'e 223 val,es are l .er. 9!deed, as t'e .afer t'i(5!ess is 1 i!1 t de(rease, t'e 223 is 1 i!1 t )e a m re a!d m re im0 rta!t fa(t r. 2'e diam !d-0lated .ire, )e(a,se t'e a)rasive 0arti(les are ) ,!d t it a!d are .eari!1 sl .l#, 0r d,(es .afers t'at 'ave m,(' less 223. Als , as "assill ,d et al =6> s' .ed, it is 0 ssi)le t s(rat(' sili( ! i! a! e!tirel# 0lasti( fas'i !, .it' ,t a!# (ra(5, if t'e s(rat('i!1 f r(e is l . e! ,1'. 2'is . ,ld, if a00li(a)le t t'e .aferi!1, 0r vide .afers .it' !l# s'all . (ra(5s ? t',s m,(' t ,1'er t'a! sta!dard .afers ? .'ile still 5ee0i!1 a! a((e0ta)le 0r d,(tivit#. 2'e mai! 0r )lem f t'e .afers des(ri)ed 'ere is t'e lar1e t'i(5!ess variati !. 2'is variati ! (a! i!deed limit t'e .afer t'i(5!ess de(rease, ),t mi1't )e (ir(,mve!ted )# a )etter ( !tr l f t'e 0r (ess, fr m t'e .ire diameter t t'e i!1 t feed s0eed ( !tr l. A C;+C&<S9;+

9! t'is st,d#, it .as s' .! t'at t'e s,rfa(e f diam !d-.ire sa.! .afers is f,!dame!tall# differe!t t'a! t'e s,rfa(e f sl,rr# sa.! .afers. 2'e s,rfa(e f t'e

diam !d-.ire sa.! .afers (a! )e ( m0ared t !a! s(rat('es f sili( !. 2'e s'a0e f t'e sm t' 1r ves a!d t'e 0rese!(e f am r0' ,s sili( ! is f ,!d ) t' ! t'e sa.! .afers a!d ! !a! -s(rat('es made ! a 0 lis'ed .afer. 2'e 0rese!(e f am r0' ,s sili( ! a(ti!1 as a mas5 d,ri!1 t'e et('i!1 im0 ses a ('a!1e i! t'e et('i!1 0r t ( l. 9t is 0 ssi)le t ver( me t'is iss,e eit'er )# ('a!1i!1 t'e et('i!1 0r t ( l, r )# i!(reasi!1 t'e et('i!1 time as it .as d !e 'ere. 2'e (ells )tai!ed .it' t'e ,0dated et('i!1 0r t ( l s' .ed a! effi(ie!(# ( m0ara)le t t'e sl,rr# sa.! .afers ,sed as a refere!(e. 2'is i!di(ates t'at it is 0 ssi)le t ,se diam !d-.ire sa.! .afers t 0r d,(e 'i1' :,alit# s lar (ells .it' ,t si1!ifi(a!t ('a!1es i! t'e (ell 0r d,(ti ! li!e a!d validates t'e ,se f a diam !d0lated .ire as a 0 ssi)le (,tti!1 medi,m. 6 ACK+;W&ED"ECE+2S

2'is . r5 .as 0erf rmed as 0art f a! RHD ( lla) rati ! )et.ee! Q-Cells SE 4"erma!#6, + rS,! AS 4+ r.a#6, Ce#er B,r1er A" 4S.it/erla!d6, Diam !d Wire 2e('! l 1# &&C 4<SA6 a!d "ar) Srl 49tal#6 ! t'e ,se f diam !d .ires f r fi8ed a)rasive sa.i!1 f sili( ! .afers. 7 RE%ERE+CES

=1> * J. CKller, Adv. E!1. Cat. 6, + . 7, A01 ? A13, 200@. =2> *. J. CKller, 0'#s. Stat. S l. 4a6 203, + .@, 6AG ? 66G, 2006. =3> C. B'a1avat, 3. $rasad, 9. Ka , J ,r!al f tri) l 1#, 3/4, 3 l. 122, 3G@ ? @0@, 2000. =@> $. 2s , B. Fa!, C. & , Caterials S(ie!(e % r,m 3 ls A0A-A07, 121G ? 122@, 2006. =A> F. K !d , +. Wata!a)e, D. 9de, et al. $r (eedi!1s f t'e 23rd E<$3SEC, 3ale!(ia, 12G7 ? 1301, 200E. =6> R. "assill ,d, C. Ballif, $. "asser, et al. $'#s. Stat. S l. 4a6 202, + . 1A, 2EAE ? 2E6G, 200A. =7> A. Kailer, F. ". " 1 tsi, K. ". +i(5el, J. A00l. $'#s. E1 476, 30A7 ? 3063, 1GG7. =E> J. Ja!1, C.J. &a!(e, S. We!, et al. A(ta Caterialia A3, 17AG ? 1770, 200A. =G> 3. D m!i(', F. " 1 tsi, Rev. Adv. Cater. S(i. 3, 1 ? 36, 2002 =G> K. Ada('i, 9. C. *,t('i!1s, Wear 2AA, 23 ? 2G, 200A. =10> A. Bidiville, K. Wasmer, J. Ci('ler, et al. $r (eedi!1s f t'e 22!d E<$3SEC, 2007. =11> A. Bidiville, K. Wasmer, J. Ci('ler, et al. 0r (eedi!1s f t'e 23rd E<$3SEC, 1311 ? 131A, 200E. =12> +. Ka.ase1i, +. C rita, S. Famada, et al. +a! te(' l 1# 1!, 1@11?1@1@, 200A.