•K. D. Vora, B. Y. Shew, E. C. Harvey, J. P. Hayes, A. G. Peele, submitting to J. Micromech. Microeng. (Dec.2004)
•A. G. Peele, B. Y. Shew, K. D. Vora, H. C. Li, accepted by Microsystem Tech. (Aug, 2004)
LIGA !!
th d
detector
surface R
f=R/2
center of symmetry
LIGA Lab
BiOptics