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23/11/2009 02:23:52 p.m.

Project: Ajuste Pelculas AlGaSb

Operator: Benemerita Uni de Puebla

Sample:

Site: Mexico

Synopsis
hkl: Scan Start: Step: Stop:
1.037*10
-2

(0 0 4) 30.226600 degrees 0.0002000 degrees 0.156610 degrees 2501 Rocking Curve Symmetric

Points: Type: Geometry:

1.037*10

-3

Wavelength: 0.15406000 nm Mode: continuous Surface Normal: (0 0 4) Measurement Time: 00:20:50 Comment: Interface Model: Nevot-Croce RMF: 4x4 Instrumental Function: Voigt (200.0; 0.0010; 0.300)

Intensity

1.037*10

-4

1.037*10

-5

Fit Method: Chi^2: 0e0 Chi^2 mode: Fit Area: Exit Status: Exit status is undefined :-99999 Scale Factor: 1 (not fitted) Background: 0E0 (not fitted) Internal Parameters: Tolerance: 1.0E-4

-.326 Raw curve

-.272 Sim curve

-.217

-.163

-.109

-.054

.054

.109

.163

Sample
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N R Material Cell input Thickness Roughness Conc X Top, % Conc X Bot, % Relax. Top Relax. Bot Profile Grading Density T 1 1 Al(x)Ga(1-x)Sb Cx(Cy) + R 500.00 5.000 23.00 23.00 0.000 0.000 No Gradient 10 5.30679 SUB 1 GaSb density 0.00 0.000 0.00 0.00 0.000 0.000 No Gradient 0 5.61430

Cost Function
5.5 5 4.5
Mass Density, g/cm3

Density Profile

4 3.5 3 2.5 2 1.5 1 0.5 0 0 50 100 150 200 250 Depth, nm 300 350 400 450 500

Sample Parameters
N Repeat 1 SUB 1 1 Material Al(x)Ga(1-x)Sb GaSb Super Lattice Miscut (0 0 0) 0.0000 (0 0 0) 0.0000 Parameter Fitted from to with result

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