BASICS OF SAW SENSOR TECHNOLOGY History Acoustic wave technology relies on piezoelectricity, discovered by Pierre and Jacques Curie

in 1880 during their analysis of materials like Quartz. Surface acoustic wave propagation mode and properties were first described by Lord Rayleigh in 1885. Industrial and commercial applications of SAW technology were first made around the 1950s. The most common use of SAW technology today is for mobile phone filters. SAW-based sensing devices have been in development for years and now perform optimally for a wide range of difficult measurement applications (industrial, chemical, medical). Operation Overview Acoustic wave-based sensors exploit Surface Acoustic Waves (SAW propagate on the piezoelectric material) or Bulk Acoustic Waves (BAW propagate through the piezoelectric material) depending on application requirements. Based on their piezoelectric properties, certain materials like Quartz create a mechanical displacement (acoustic waves) if an electrical field is applied. (Piezo means Pressure in Greek.) Sensing with acoustic waves is based on measuring variations of acoustic propagation velocity of wave, or wave attenuation. These variations imply changes in wave properties (frequency for resonators, delay for delay lines) which can be translated into the corresponding change of the physical parameter measured. Materials SAW-based sensors are built on single-crystal piezoelectric materials like Quartz (SiO2), Lithium Niobate (LiNbO3), Lithium Tantalate (LiTaO3), Langasite (LGS) and Aluminium Nitride (AlN) or Zinc Oxide (ZnO) / Silicon compounds. In the case of single crystals, different cut-angles produce largely different results.

Peizo electric saw pressure sensor

The design of the sensor needs to be adapted for each application by selecting the appropriate design alternative: Wave type: Rayleigh waves, Love waves, Transverse waves Choice of structure: delay lines, resonators Choice of material (high coupling, high velocity, temperature compensation, high quality factor etc.) Choice of frequency: from 30MHz up to 2.45GHz and more

System Components Typical SAW wireless sensing systems include: A packaged SAW sensor connected to an antenna (SENSeORs SAW sensors are wireless and can be mounted in various packages and housings like thermowells and PCB) A transceiver connected to one or multiple antennas Remote Interrogation of wireless sensors by radio waves The radio frequency (RF) transceiver sends an electromagnetic pulse. The pulse is converted into a surface acoustic wave (SAW) on the sensor (piezoelectric effect). Properties of the acoustic wave will be modified under the effect of the physical parameter which is sensed (e.g. temperature).The SAW sensor response transmits these modifications back to the RF transceiver. Wireless Enables measurements on moving and rotating parts Can be placed in confined and inaccessible places Avoids costly or impossible cabling Facilitates placement in harsh environments Passive Infinite autonomy No battery nor energy harvesting Small and light (e.g.: 5x5mm - 2g) Maintenance free Can be embedded into material Robust & Stable Operates in severe environments strong electro-magnetic fields, high acceleration, high temperature, explosive, corrosive, radiated environments Hermetically sealed e.g. performs even rotating in oil

Maintenance (and re-calibration) free Calibration free for some applications Time stable (based on differential structure) High performance Large measurement range (low to high temperature and strain) Multi-functional sensor - e.g. pressure and temperature High frequency e.g. 434, 868-915-950MHz or 2.45GHz High bandwidth High sensitivity (e.g. +/- 0.15bar for a 10-bar pressure sensor) - High access data rate (e.g. 2kHz) Read-out distance of several meters (up to 15m) Advanced digital transceiver easily connectible to customer systems through standard interface Continuous interrogation and display Green technology No battery disposal No chemicals needed for maintenance No cable or wire disposal Low profile, miniature, non-invasive Mature technology Very mature technology - millions of filters are produced each day for mobile phones Low cost in volume manufacturing Small manufacturing dispersion (+/- 10ppm) Sensors are powered by the energy of radio waves emitted by the associated transceiver unit when remotely interrogating the sensors in real-time. Inverse piezoelectricity induces a mechanical strain (e.g. a surface acoustic wave) on the substrate due to an electrical field generated at the electrodes of the sensor, whereas the direct effect allows for an electrical detection of acoustic wave propagation under the electrodes. The velocity of a surface acoustic wave is very sensitive to surface state. Under the effect of the physical parameter which is sensed, the velocity or the delay length is modified. We can measure: The delay or corresponding phase The attenuation The frequency of the sensors electrical response In order to compensate for unwanted effects due to other physical parameter variations, an independent reference sensor can be implemented on the same chip in order to benefit from a differential measurement. Also an adequate choice of crystal cut enables one to significantly minimize unwanted sensitivities. Differential structure advantages

When an independent reference sensor is added on a chip, the sensor provides a differential measurement that compensates for unwanted effects due to other physical parameter variations. SAW SENSOR PROGRAM BLOCK

#include <stdio.h> #include <stdlib.h> #include <math.h> double frand() { return 2*((rand()/(double)RAND_MAX) - 0.5); } int main() { //initial values for the saw filter float x_est_last = 0; float P_last = 0; //the noise in the system float Q = 0.022; float R = 0.617; float K; float P; float P_temp; float x_temp_est; float x_est; float z_measured; //the 'noisy' value we measured float z_real = 0.5; //the ideal value we wish to measure srand(0); //initialize with a measurement x_est_last = z_real + frand()*0.09; float sum_error_saw = 0; float sum_error_measure = 0; for (int i=0;i<30;i++) { //do a prediction x_temp_est = x_est_last; P_temp = P_last + Q; //calculate the gain K = P_temp * (1.0/(P_temp + R)); //measure z_measured = z_real + frand()*0.09; //the real measurement plus noise //correct

47. x_est = x_temp_est + K * (z_measured - x_temp_est); P = (1- K) * P_temp; sum_error saw += fabs(z_real - x_est); sum_error_measure += fabs(z_real-z_measured); P_last = P; x_est_last = x_est; } printf("T= %f\n",sum_saw_measure); return 0; }