Micro-Electro-

Mechanical Systems
-The Future Technology, but Today’s choice

Presented by… Vinayak Hegde

Guide: Mrs. Priti Mishra
 AIM OF THE
PRESENTATION

 To introduce about the MEMS TECHNOLOGY

 To introduce the MEMS Design process.

 Applications, Advantages and Disadvantages

of the MEMS.

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 Introduction
What is MEMS Technology?
 MEMS technology is based on a number of tools
and methodologies, which are used to form
small structures with dimensions in the
micrometer scale

 MEMS fabrication approach that conveys the

advantages of miniaturization, multiple
components, and microelectronics to the design
and construction of integrated
MarchElectromechanical
7, 2009 systems 3
 Introduction Conti…
What are MEMS?
• Micro - Small size, microfabricated
structures
• Electro - Electrical signal /control ( In /
Out )
• Mechanical - Mechanical functionality
(Out/ In )
• Systems - Structures, Devices,
Systems controls
What is the size of MEMS?
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 Building Blocks In
MEMS
 How MEMS are prepared?
 There are three basic building blocks in MEMS
technology.
 Deposition: The ability to deposit thin
films of material on a
substrate.
 Lithography: To apply a patterned mask
on top of
the films by photolithograpic
imaging.
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 Etching: To etch the films selectively to the
 MEMS Deposition
Technology
MEMS deposition technology can be classified in
two groups:

 Depositions that happen because of a

chemical reaction:
 Chemical Vapor Deposition (CVD)
 Electrodeposition
 Epitaxy
 Thermal oxidation
 Depositions that happen because of a physical
reaction:
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 Physical Vapor Deposition (PVD)
 MEMS Lithography
Technology
MEMS lithography technology can be
classified in two groups:
2. Pattern Transfer
3. Lithographic Module
a. Dehydration bake and HMDS prime
b. Resist spin/spray and Soft bake
c. Alignment, Exposure
d. Post exposure bake and Hard bake
e. Descum
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 MEMS Etching
Technology
There are two classes of etching process:

 Wet etching: The material is dissolved

when immersed in a chemical solution.

 Dry etching: The material is sputtered or

dissolved using reactive ions or a vapor
phase etchant.

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 MEMS Applications
 Micro-engines –Micro Reactors,
Vibrating Wheel
 Inertial Sensors –Virtual Reality Systems
 Accelerometers –Airbag Accelerometer
 Pressure Sensors –Air Pressure Sensors
 Optical MEMS –Pill Camera
 Fluidic MEMS -Cartridges for Printers
 Bio MEMS -Blood Pressure Sensors
 MEMS Memory Units -Flash Memory

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 Advantages and
Disadvantages
Minimize energy and Farm establishment
materials use in requires huge
manufacturing investments
Cost/performance Micro-components are
advantages Costly compare to
Improved macro-components
reproducibility Design includes very
Improved accuracy much complex
and reliability procedures
Increased selectivity Prior knowledge is
and
March sensitivity
7, 2009
needed to integrate 10
 Conclusion
The medical, wireless technology,
biotechnology, computer, automotive and
aerospace industries are only a few that will
benefit greatly from MEMS.

This enabling technology promises to create

entirely new categories of products

 MEMS will be the indispensable factor for

advancing technology in the 21st century
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 My Next Presentation
Includes, details about..
Historical Background
(MEMS Evolution)
Preparation Peocess of MEMS
(Fabrication Process)
Interrelationship between MEMS and
Nano
(Future Scope of MEMS)
Applications of MEMS
(Fields where MEMS Used)
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 References for MEMS
IEEE Explore
http://ieeexplore.ieee.org/Xplore/DynWel.jsp
PDF Files http://www.scribd.com/mems/

Introduction to Microengineering
http://www.dbanks.demon.co.uk/ueng/
MEMS Clearinghouse
http://www.memsnet.org/
MEMS Exchange
http://www.mems-exchange.org/
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