TEMPERATURE OF CERAMICS
CORROSION
Copyright @ 1989 by Noyes Data Corporation Library of Congress Catalog Card Number: 88-38242 ISBN: O-8155-1188-4 Printed in the United States Published in the United States of America Noyes Data Corporation Mill Road, Park Ridge, New Jersey 07656 10987654321 by
Library
of Congress Cataloging-in-Publication
Data
Blachere, J.R. High temperature corrosion of ceramics / by J.R. Blachere and F.S. Pettit. cm. P. Bibliography: p. Includes index. ISBN O-8155-1188-4 : 1. Ceramic materials--Corrosion. I. Pettit, F.S. (Frederick S.), 1930. II. Title. TA455C43B57 1989 620.1404217--dc19 88-38242 CIP
CERAMIC
RAW MATERIALS
Edited by D.J. De Renzo
The broad-based ceramics Industry encompasses all types of glass; refractones; abrasives; whitewares. such as porcelain and pottery, structural clay materials; etc. Increasing use of advanced ceramic materials in the automotive and aerospace Industries, as well as in such diverse areas as electronics and medical devices, IS expected to push the demand for raw materials far beyond that associated with the traditional ceramics industry. Prepared directly from manufacturers data sheets and tables at no cost to, nor influence from, the contributing companies, this book Parr I Alumina Alumina Chrome Alumina Zirconia Aluminum Nitride Aluminum Titanate Andalusite Antimony Compounds Ball Clays Barium Compounds Bauxite Beryllium Oxide Bismuth Compounds Bone Ash Borates Borax Boric Acid Boron Boron Carbide Boron Nitride Calcium Compounds Carbon Celestite Chlorite Mineral Chrome Ore Chromium Oxide Clays (Miscellaneous) Cobalt Compounds -. . Cofemamte Copper 8 Copper Oxide Cordierite Corundum Diatomaceous Earlh Dolomite Feldspar Ferrites Fireclay Flint Clay Fluorspar Fluxes Frits Garnet Graphite Iron Oxide Kaolin Kyanite Lanthanide Compounds Lead Compounds Lime Limestone Lithium Compounds Magnesia Magnesite Manganese Compounds Mica Mullite Nepheline Syenite Nickel Compounds Ochre Periclase Petalite Phosphates
provides chemical and physlcal property data for more than 1000 products supplied by 181 ceramic raw material suppliers in the U.S. and Canada. Part I is an alphabetical listing of 99 raw material categories. Raw material suppliers are then included alphabetically under each category, along with their product information. The categories in Part II include additives; semiprocessed materials, some of which are available as unfinished shapes or substrates; and materials intended for specific end uses. Raw materials categories are: Potassium Compounds Pyrophyllite Duartz Rutile Sand Silica Silicon Silicon Carbide Silicon Nitride Sillimanite Slags Soapstone Soda Ash Sodium Silicate Sodium Sulfate Spars Spine1 Spodumene Stannates Stannic Oxide Strontium Carbonate Talc Titanates Titanium Boride Titanium Carbide Titanium Dioxide Titanium Nitride Ulexite Vermiculite Whiting Wollastonite Yttrium Oxide Zinc Oxide Zircon Zirconates Zirconia Zirconium Boride Zirconium Nitride
Part II Binders Ceramic Additives Ceramic Adhesives, Potting Materials, and Putty Ceramic Coatings Ceramic Colors Ceramic Fibers and Whiskers Ceramic Materials Ceramic Precursors Dielectric Compositions Dispersing Agents Electronic Ceramics Reagents Glazes Glaze Stains Pie20 Compositions Refractory Materials Sealing and Solder Glasses
ISBN O-8155-1143-4
(1987)
8% x 11
900
pages
Foreword
This
book
high to
The nitride
inengiby also
vestigated carbide. neering conditions Na2S04 performed. tures, changes major electron silicon
alumina,
materials,
purities
were
included gaseous
experiments
containing
microscope.
instrument
research.
method
measurement
microprobe carbide.
was developed
experiments
In the use of materials parent and this that, in most While then, resistance. study,
in harsh resistant
ceramics ceramics
polymers,
the corrosion
of ceramics
to develop
a theory
to develop to
applicable
it was necessary
corrosive
keep the
the ceramic
selected
produce in
encountered
vi
Foreword
The
information by J.R.
is from December
High 1987.
Temperature
Corrosion
prepared
of the University
of Pittsburgh
of contents
is organized
in such a way
index
contained
Advanced composition and production methods developed by Noyes Data Corporation are employed to bring this durably bound book to you in a minimum of time. Special techniques are used to close the gap between manuscript and completed book. In order to keep the price of the book to a reasonable level, it has been partially reproduced by photo-offset directly from the original report and the cost saving passed on to the reader. Due to this method of publishing, certain portions of the book may be less legible than desired.
NOTICE
The materials the in this book United States were prepared Government as an account of Energy. nor any of employees, or imfor nor the Depart-
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nor any of their employees, sub-contractors, makes or their any warranty, or usefulness not infringe
express
or assumes any legal liability completeness, product its use would apparatus,
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resents that
privately-owned
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suitability
of any
informauser, of
by any
of that
is warned advice
must always
dealing
at high temper-
and expert
implementation.
INTRODUCTION.........................................l EXPERIMENTAL
. . . .
. . . . .
. . . . .
. . . .
. . . . .
.......... .......... .......... .......... .......... .......... ...... ...... ...... ...... ...... ......
.6 .6 .7 .7 .9 .9
GASEOUS
CORROSION
Introduction. Silica.
....................... .............................
of Silica and Alumina.
. . . . 11
. . . . 11 ... 11 . . . 11
Gaseous Corrosion
..........
. . 13
. . . . 14 . .16 .21
. . . . . .
. . . . . .. . . . . . . . . . .
AND
. .. . . . . .
. . . .
. . . . .. . . . . . . .
NITRIDE.
CARBIDE
SILICON
. . .26
REFERENCES..........................................30 APPENDIX IN SULFUR A-GASEOUS OXIDE CORROSION F.S. Pettit OF SILICA AND ALUMINA
ENVIRONMENTS
. . . . . . . . . . . . . . . . . . . . . . . . 31
viii
Contents
and Subject
Index
Experimental Materials
Procedure. .............. ....................... Experiments. .................... Results and Discussion ................ Silica. ......................... Alumina ....................... General Results. ................ Thermodynamics Single Crystal Polycrystalline of Sulfate Formation
..................
Aluminas.
..........
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. .35
. . . . . .
. .35 . .35
.37
. .37
. .39 . .39 . .41
.................
M. G. Lawson, Introduction.
H. R. Kim,
F.S. Pettit,
J. R. Blachere
.................................... ................................... Experimental Procedure ............................. Materials ..................................... Gaseous Corrosion. .............................. ................................. Hot Corrosion. Results and Discussion .............................. Gaseous Corrosion. .............................. Wetting by Sulfates .............................. ................................. Hot Corrosion. ......................... Kinetics of Crystallization. General Discussion. .............................. .................. Discussion of Crystallization Kinetics ..................... Hot Corrosion of Silica Formers. Conclusions ..................................... ..................................... References.
Hot Corrosion. APPENDIX M.G. C-HOT CORROSION OF ALUMINA .
. . . : . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Lawson,
J.R. Blachere
Introduction.
. . . .. . . . . . Materials . . . . . . . . . . . . . . Hot Corrosion Experiments. . Results and Discussion . . . . . . . Wetting . . . . . . .. . . . Hot Corrosion of Al*Os .. . . Results, Acidic Conditions . . .
Experimental Single High Low Results, Medium Crystal Purity Purity Purity Alumina. Polycrystalline Polycrystalline Polycrystalline
. . . . . . . .
. . . . . . .
. . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Alumina.
Alumina. Alumina
. . . . . . . .
. . . . . .
. . . .
. . . . . . . . . . .
. .
Basic Conditions
. . . . . . .
. . . . ..
Contents
and Subject
Index
ix
. .. . . . . Medium Purity Polycrystalline Alumina. . Low Purity Polycrystalline Alumina .. . . Discussion of Results . . . . . . . . . . . . . . . . References. . . . . . . .. . . .. . . . . . . .. .
Single Crystal High Purity Polycrystalline Alumina APPENDIX SILICON D-HOT CARBIDE CORROSION OF SILICON NITRIDE AND
. . . . . . . . .. . . . .
. . . . . . . .
...............................
F.S. Pettit
. . . . . . .
J. R. Blachere, D. F. Klimovich,
Introduction. Experimental Acidic Acidic Procedure
............
Nitride.
Discussion Model
.....
............
of Silicon
..............
of Silica
..........................
and Stoichiometry Carbide
Structure
.......
References.
............................. .......................................
Introduction
In the use of materials is apparent corrosion metallic at elevated temperatures in harsh environments, to provide than it
ceramics
resistant
and to develop
a theory
applicable
are available
to investigate of different
materials
exposed
order to keep the number of experiments materials corrosion used in this study were selected was developed, passivity. in particular, Furthermore,
at a reasonable
number,
corrosion
in practice
and their severity. A material is in equilibrium practice achieved material elevated is considered to be immune to a particular Total or complete required environment immunity when it
is rare in to be
but in some cases the amount of reaction is very small, and consequently are very small. temperatures, For example,
for equilibrium
the changes
in the properties
of the
in oxygen at
in the Al.303 may not be the same as into or removed from the Al303 Upon obtaining long
that in the gas, and oxygen will be incorporated depending equilibrium upon the oxygen activities between
extremely
High Temperature
Corrosion
of Ceramics
times depending upon the temperature, the Al303 does not exhibit any significant changes in mechanical properties. The concentrations of point defects in the
Al303 however will change and there could be significant changes in properties such as electrical and ionic conductivities. Nevertheless, in terms of a corrosion
reaction the Al303 may be considered to be immune to this gaseous environment. Alumina and silica are two ceramic materials which can be considered to be immune to many environments which are extremely corrosive to metallic systems, and therefore these two materials were studied in the present investigation. The
purity and structure of these ceramics can also affect their behavior in different corrosive environments and therefore these two parameters were also examined in the present investigation. Four types of crystalline Al303 were studied of
varying purity as defined in Table I. Only one type of silica was studied. As described in Table I it was of relatively high purity and was vitreous. Passivity to corrosive environments is achieved by the formation of a reaction product barrier through which the reactants involved in the corrosion process must diffuse. The development of passivity is the principal means by
which metallic alloys achieve resistance to corrosive environments, but passivity is also an important mechanism in certain ceramic materials, depending upon the ceramic and upon the environment causing corrosion. For example, Si3N4 and
Sic react with most environments encountered at elevated temperatures and resistance to corrosion is achieved via the formation of a passive reaction product barrier. Furthermore, Al303 can react with gaseous environments containing sufficient SO3 to form sulfates and again the properties of the sulfate reaction product play a significant role in the corrosion properties.
Si3N4
and SIC specimens with purities as defined in Table I were therefore used.
Material Sapphire
poly
Supplier Saphikon Lucalox (G.E.) AlSi Mag 772 (3M) or ADS 995 (Coors) S-697 (Saxonburg) Corning Deposits Al, 02) Airesearch W.J. Choyke W. J. Choyke 7940 & Composites
A120; (a)
99.6 - 99.5(0.17 M@ 0.17 Si02) 97.4 (0.75 MgO, 1.6SiO2 0.1 Na20) 99.99 99.99 93(6Y203Fe, 99.99
99.98
975 Silica SIN CVD SiN H.P. Sic SC. Sic CVD Sic H.P.
poly A1203 (a) fused silica CVD*Si3N4 H.P.** Si 3N4 s.c.*** (a6H S.C.)
94(3Al203,
Norton
NC-203
*
**
Chemical
Vapor Deposition
*** +
Hot Pressed
High Temperature
Corrosion
of Ceramics
When ceramic materials are used in practical applications, a variety of corrosive environments can be encountered. Most of these environments will
contain oxygen but other reactants such as sulfur, nitrogen, carbon and chlorine can also be present. Moreover, deposits such as metallic sulfates, carbonates or
chlorides may also accumulate upon exposed surfaces and substantially affect the corrosion processes. In the case of studies concerned with the corrosion of
metallic alloys it has been useful to examine corrosion reactions in environments of increasing severity extending from gaseous environments containing oxygen, to mixed gases containing one or more reactants in addition to oxygen, and finally considering the effects of deposits such as Na3S04, Na3C03 or NaCl. The environments used in the present studied are identified in Table II. These environments consisted of gases containing oxygen, and other reactants such as sulfur, carbon and hydrogen at temperatures of 700, 1000 and 14OOOC. The effects of deposits were studies by using Na3S04 deposits in O3-SO3-SO3 gas mixtures at temperatures of 700 and 1000C. These conditions were selected because they are frequently present in many environments encountered in practice. Furthermore, as established from studies using metallic alloys, the
principles established from studies using these selections should be generally applicable to other corrosive systems. In the following sections of this report the experimental procedures will be described and then a summary of the results will be presented and discussed. Some of these results have been presented in previous reports for this program.(l) Other results are included in student theses and are also presented Consequently, some of
the results will not be repeated in this report but will be referred to by references or by draft papers included in appendices in the present report.
introduction
Results obtained from studies using gaseous environments will be discussed first and then results obtained from studies using deposits on silica, alumina, Sic and Si3N4 will be presented in sequence.
Experimental
Experimental Conditions
Procedures
The materials that were studied in this program and the environments that were used to produce gaseous corrosion and hot corrosion attack have been briefly discussed previously in this report (Tables I and II). The ceramics that were studied (Table I) consisted of Al3O3, SiO3, Sic and Si3N4. A range of purities were examined in the case of Al3O3, Sic and Si3N4. Single crystals of SIC and Al303 were also studied and compared to polycrystalline specimens. The gas compositions that were used are presented in Table II. Gas mixtures consisting of O3-SO3-SO3 were used in both gaseous corrosion studies and the hot corrosion studies. Hot corrosion experiments were also performed in pure oxygen. The gaseous corrosion studies were performed at temperatures of 700, 1000 and 1400C whereas the hot corrosion investigations used temperatures of 700 and 1000C. When O3-SO3-SO3 mixtures were used at 700C, this mixture
was passed over a platinum catalyst to ensure that equilibrium was achieved. The catalyst was not required to achieve equilibrium at 1OOOOC.The flow of the gas was 1 cm3/s. The experimental procedures have been discussed in detail in previous reports and are also discussed in Appendices A, 0, C and D. The procedure usually consisted of exposing specimens in a horizontal tube furnace at a fixed temperature to a flowing gas stream of fixed composition. In the case of the hot
corrosion studies the specimens were coated with deposits of Na3S04 for
Experimental Procedures
investigations at 1000C, or a NaSS04-CoSO4 equimolar solution for studies performed at 700C. These deposits were applied on specimens by spraying warm specimens with an aqueous solution saturated with NaSS04 or the sulfate mixture. Most specimens were diamond polished and they were ail cleaned before the experiments. The characterization techniques consisted of morphological studies in the
light microscope and particularly the Scanning Electron Microscope (SEM) with microanalysis of salient features by EDS (Energy Dispersive X-ray Spectroscopy) and WDS (Wavelength Dispersive X-ray Spectroscopy used particularly for light elements). These techniques were supplemented by X-ray diffraction, weight
change measurements and in some cases surface analysis techniques (ESCA). A large number of other techniques were used in special cases they are SIMS, ISS, FTIR, Laser beam ellipsometry. Furthermore, since after the corrosion tests some deposited salt often remained on the sample, the Nag.504 was washed off to reveal the sample surface. The samples were characterized before and after this washing.
Experience has shown that the examination of the sample before washing is extremely fruitful, and the observed morphologies have taken many forms. The washwater was analyzed as described in a previous report (l); this analysis is now a routine semi-quantitative method which allows the identification of the
Special techniques Measurement of oxide thickness A method using WDS measurements in the electron microprobe (EPMA) was adapted from that described by Yakovitz and Newbury to estimate the The
High Temperature
Corrosion
of Ceramics
intensity of the oxygen Ka line is used in the present research to measure the thickness of oxide layers generated on non-oxide materials. This intensity is measured under constant conditions (say 1OkVaccelerating voltage and 2 x lo8 A beam current) for a scale and a bulk standard of pure fused SiO2. Both samples are coated with 200A of carbon. The ratio k of their intensities corrected for background is correlated to the thickness of the oxide layer. The calibration curve for the relationship between the k ratio and the oxide thickness was calculated with a computer program written for this research following the semiempirical approach of Yakovitz and Newbury(2) to generate the Q (pz) curve which is the intensity of X-ray generated at a weighted PZ depth into the sample. This calculation includes many corrections and correlations used to predict the characteristic X-ray intensity. It must be understood that the data available for these corrections (such as absorption) for light elements is relatively poor and that this calibration can only be approximate. based on light element are usually not used quantitatively. Measurements
developed in this research gives good reproducibility ? 2% for thickness measurements on silica layers up to about 0.8pm - lum. It was published recently(3) and more details will be found in Appendix E which contains a copy of the article on this measurement. It must be emphasized that since the characteristic X-ray intensity for oxygen is used to calculate the oxide This
may lead to significant error if the composition of the scale deviates markedly from that assumed in the calculations. However the method is quite
reproducible and has a high spatial resolution. The direct measurement of scale thicknesses on cross sections in the SEM is probably not better than + 10% in accuracy considering magnification
Experimental Procedures
It is good down
to about lum and depends greatly on the thickness of the layer (constancy and magnitude). In some cases the scales are difficult to separate from the substrates in cross sections in the SEM.
Measurement of contact angles The contact angles of the deposits have been measured in the SEM at room temperature using a method previously described by Murr(4). The wetting angle is particularly important since deposits often break into droplets decreasing the area of interaction between the sample and the melt. After coating with carbon (about ZOOA)the samples are placed in a tilted position in the SEM which allows the location of the drop under the electron beam and then they are tilted further to a vertical position to record the profile of the drop. The edges of the drops are enlarged for the measurement. A number of drops are measured under those conditions on the same sample. Experience with the measurements show that their reproducibility is about f: 2O. Since this reproducibility is very good, it has been possible to establish when two wetting behaviors occurred simultaneously on the same sample.
Cross sections and related techniques The study of cross sections is necessary for a number of measurements. However the samples are often damaged (silica and silica formers) during exposures and processing. Also, cross sections are often desired with salt on the sample, so
that sawing or polishing in wet media has been avoided to preserve the soluble sodium compounds. or fractured. Most cross sections were either dry-cut with a diamond saw
10
High Temperature
Corrosion
of Ceramics
established
The multilayer
nature of the scale and sometimes its apparent layered growth is shown clearly in cross sections. The cross sections can also be used directly for the measurement
of oxide layer thickness (~l~rn). In some cases salt drops have been crossed by the fracture giving valuable information. However the lack of flat cross sections
has limited the use of the crystal spectrometers of the electron microprobe. In many cases the deposit drops do not adhere welt to the sample surface after cooling so that the underside of the drops and the area of the sample which was under the drops can be examined and analyzed at least qualitatively. Mechanical bursting of bubbles in surface layers and removal of drops are also used to study the underlying microstructure prior to washing of the specimens.
Gaseous
Introduction
Corrosion
The results from the gaseous corrosion studies will be discussed by considering first the studies of silica and alumina, and then the studies performed using Sic and Si3N4.
Gaseous Corrosion of Silica and Alumina The gaseous corrosion of silica and alumina were performed at temperatures of 700, 1000 and 14000C in a number of different gas environments which included oxygen, 02-H20-H2, 02-CO2-CO and O2-SO2-SO3 gas mixtures (Table II). The
results obtained from these studies are discussed in detail in Reference 1 and Appendix A. The specific conclusions developed from these studies are as follows: Silica (1) Devitrification of silica glass to cristobalite took place rapidly under all atmospheres studied at 14OOOC. The rate of crystallization increases with increasing temperature and time. (2) The devitrified layer undergoes a displacive transformation with a large volume change on cooling which causes cracking. Such a transformation in crystalline SiO2 is important with regards to the use of crystalline SiO2 scales on Sic, Si3N4 and metallic alloys as protective barriers for high temperature applications. (3) The silica is significantly affected when exposed to low oxygen pressure at 1400C. Silica weight losses occurred after exposure to either wet hydrogen or a CO-CO2 gas mixture and are related to the decomposition of silica in the low oxygen pressure and the reaction of either hydrogen or CO with silica to form SiO vapor and either H20 or CO2 gas. Weight losses increase with increasing temperature and decreasing oxygen pressure.
11
12
High Temperature
Corrosion
of Ceramics
Gaseous Corrosion
13
(4) No significant reaction of silica in CO2 or 02 was observed at all temperatures except for devitrification at 14OOOC.
(5) Silica is very resistant to attack by SO2-SO3-02 gas mixture under the test conditions.
Alumina (1) Alumina is resistant to attack by H2-H20-02 gas mixture but impurities The
in the alumina materials such as SiO2 and Na20 can result in volatilization. volatilzation is favored by low oxygen pressures and high temperatures. (2) Alumina is very resistant to attack by CO2 gas.
(3) Alumina is resistant to corrosion by SO2-SO3-02 gas mixtures. Some reactions occurred especially at high SO3 pressures (e.g. 7~10~~ atm. SO3) and low temperature (7OOOC). (4) Corrosion of alumina in SO3 containing gas can occur even on the highest purity alumina where reaction products with activities less than unity are formed. It may be due to the formation of a solid solution of Al2(SO4)3 with Al203 or a nonstoichiometric sulfate. The observed sulfur was identified as a ~+6 (as in sulfate) by ESCA. (5) Degradation of alumina in SO3 containing gas becomes more severe when Mg or Ca containing impurities are present, and it increases as impurity content increases. The formation of products occurs preferentailly along the grain boundaries (i.e., on the impurity second phases at the grain boundaries). (6) Corrosion of alumina in SO3 containing gas becomes more favorable at higher SO3 pressures and lower temperature (e.g. at 7000 than 1000C), since a lower SO3 pressure is necessary to form sulfate at 700C than at 1000C. severity of corrosion increases with time. The
14
High Temperature
Corrosion
of Ceramics
Gaseous Corrosion
of Silicon Nitride
oxygen and at 1OOOoC in an 02 - SO2 - SO3 gas mixture pressure of 0.01 atm. These limited studies
at 1400C, at
studies
The studies
depending Sic
upon the
In the case of the single crystal was observed. and cracked These scales
The silica scales which formed most cases than those formed after surface 12 hours of oxidation. and contained
silicon carbide
bubbles resulting
was attributed
to impurities,
Some cristobalite
was identified
in these scales
a 10 urn thick scale which was composed The CVD silicon nitride, developed virtually specimens of oxidation an extremely no change
which was much purer than the other silicon thin silica scale after morphology 12 hours of oxidation. specimens
in surface
of the oxidized
prior to oxidation
after
Gaseous Corrosion
15
to measure weight change. No impurities were detected in these silica scales on CVD silicon nitride which XRD analyses showed to be a mixture of cristobalite and glass. The sintered silicon nitride developed a scale composed of glass containing some cristobalite. Yttrium silicate crystals were observed to protrude
out above the surface of the silica scale. Impurities influenced the oxidation of this material substantially. The results obtained from the studies performed at 1400C show that the oxidation of SIC and SiSN4 is dependent upon the structure and composition of the silica scales that are formed upon these materials. Glassy silica provides a more protective reaction product barrier than crystalline silica, however, the incorporation of impurities into the glassy silica can cause the protectiveness of the glass structure to be decreased very substantially by promoting devitrification. At 1000C the pressure of SO2 and SO3 in the gas mixture along with oxygen did not significantly affect the oxidation of pure silicon nitride or pure silicon carbide compared to oxidation in pure oxygen. The major effect of SO2 and SOS occurred when the specimens contained impurities. While the effects of impurities were significant but not documented extensively, these effects were not as substantial as those observed at 1400C, since the impurities cannot concentrate in the oxide scale at 1000C and thereby affect the protective properties of the glassy silica scales.
16
Hot Corrosion
of Silica
17
The liquid sulfate deposits wetted the silica specimens in varying amounts depending upon the experimental conditions. Time at temperature and the
thickness of the deposit also affected wetting. Generally the liquid deposits wetted the silica more completely under basic conditions. At 1000C under
basic conditions the salt wetted most of the coupon after 1 hour with a wetting angle of 20. After 24 hours the wetting was continous. At this temperature and under acidic conditions droplets of liquid were formed with wetting angles Of 24O, and 130 on large droplets ( 0.2 mm dia), after 24 hours. Wetting was not as complete at 7OOoC. In the case of basic conditions droplets with wetting angles between 13 -240C were observed after 24 hours, whereas under acidic conditions the angles ranged between 36 - 49O. At 7000C under acidic conditions some limited localized attack of the silica was observed under of the salt droplets. No evidence of devitrification of
the silica was observed. After water washing to remove the salt, small weight losses (0.1 - 1 mg/cm2) were detected and small voids were evident in the silica where salt droplets had been present prior to water washing. The voids were more concentrated near the perimeter of the droplets. Analysis of these results has been complicated by the decomposition of the CoSO4 in the liquid via the reaction, coso4 * coo + so3
since the SC3 pressure in the gas was lower than the equilibrium pressure required to maintain the initial liquid deposit. The principal deposit reaction of the
with the silica should involve the Na20 component of liquid since conditions
sulfates and sulfides of silicon are not stable under the experimental that were employed. Hence,
18
High Temperature
Corrosion
of Ceramics
Inspection becomes
of this reaction shows that the formation less favorable as the SO3 pressure
is increased.
in the melt over most of the specimen formation. However, some dissolution
surfaces
of silica occurred
at localized
which caused voids to be evident upon water washing. is believed to result from impurities
dissolution
its stability. Under basic conditions at 700C the complication from decomposition of
of the liquid was more severe since there was no SOS in spherulites were observed beneath the salt drops. because
Cristobalite
after water washing were not meaningful from decomposition of CoSO4 remained
acidic conditions,
the activity
At 1OOOoCunder acid conditions all of the droplets, from the droplets. but no devitrification
Hot Corrosion
of Silica
19
degradation
silica occurred
under basic
was formed over the total from the salt-specimen after very long fused silica. rate law under proceeded products The The
of the fused silica specimens. the following sequence sodium silicate, of the crystallized conditions.
Proceeding
tridymite,
unaffected
silica conformed
to a parabolic
this crystallization
more rapidly and conformed spa&d observed from the specimen parabolic
to a linear rate law since the crystalline aa a result of thermally induced stresses.
of the fused silica is caused by sodium from the liquid deposit. question however, that some sodium silicate was formed.
shows that more water soluble corrosion process than after long reaction
the corrosion
of silica.
becomes richer in silica it is less soluble in water. previously in the section on gaseous corrosion, silica was not No
affected
at 700 or 1OOOOC. On the other hand in SOS-02 gas mixtures, This degradation and
The process which caused the most severe This process increased as the Na70 activity It requires in a
degradation
and it occurred
20
High Temperature
Corrosion
of Ceramics
Nag0 activity.
It was especially
severe
were of
products
of fused silica.
It appears
process
than vitreous
also increases
results are summarized. The weight changes measured small but not negligible. after hot corrosion of the aluminas reactions were
The sulfate tended to wet the aluminas partially conditions a function (~20~ after 24 hours). of time apparently The wetting
of the purer aluminas decreased into the sulfate At higher a little. and
of the sulfate
improved
as the impurities
is an indication wetting
of the reaction
of the sulfate
area between
the sulfate
also promotes
occurred
The corrosion
grains is a function
21
22
High Temperature
Corrosion
of Ceramics
in a
at 7OOoC sulfates
of aluminum
were formed and after long exposures polycrystailine silicate silica. materials.
This shows that under the most acidic conditions by the melt generating gradient sulfates
dissolution
of silica.
to the microstructure
is concentrated
at 700C and occurs on a the regions under the sulfate at the grain boundaries. and alumina is At
wider scale at 1OOOoC. At the higher temperature melt are smooth with no marked preferential 1000C magnesium incorporated sulfate attack
are formed
in sodium aluminum silicates. significant corrosion occurred at 700 and 1000C. aluminum The overall
Under basic conditions At 1000C sodium magnesium silicates attack were formed.
aluminum silicates
intergranular
behavior
of the
aluminas,
of the polycrystalline
materials.
aluminum silicates
Hot Corrosion
of Alumina
23
This is illustrated
by the perfect
decoration
of the
of this in the
Some magnesium
was present
was formed and the crystals potassium which were present crystals
contained
earth elements
as impurities
in the materials.
it plays a fundamental
This more acidic Na3S04 then can in the melt by acidic fluxing. will
dissolve the alumina grains by formation The two reactions, proceed the grain reaction
of sulfate
cooperatively,
by the other. of
Therefore polycrystalline
a fundamental
which means on
This may apply also to alumina scales grown on but in a general manner since they do not contain mechanism applies. the alumina even at silica-
on superalloys
based impurities
tends to dissolve
of alumina was already observed melt a wide range of activities little or no attack
in the can
In a sulfate
locally.
24
High Temperature
Corrosion
of Ceramics
presence
of silica-based
impurities
and
activities
of the silicates
the sulfate
tends to dissolve alumina and as this is done the is increased. This promotes thus decreasing the attack of the
can proceed
was always too low to form sodium silicates 1000C, higher Nag0 activities sodium aluminosilicates melt tends to attack of neighboring as discussed are generated
are formed.
Under basic initial conditions, phases, thus promoting The two reactions
the sulfate
proceed
aluminas
of the experiments,
slow and there was no experimental Under the would lead to slow acidic conditions by
circumstances continuous
attack
the sulfate
will be replenished
it might become
depleted. conditions
Higher temperatures
might increase
and basic
or less) sulfur
Hot Corrosion
of Alumina
25
concentrations
however deposits
the sulfate
vapor pressure
then will
at higher
results
are summarized
of silicon nitride
1% SO9-balance
oxygen initially
in the temperature
range 900-1000C.
the samples while during acidic corrosion increases the rate of oxidation
and the
of the oxide layers formed increases the drops) to basic hot corrosion
The oxide layers formed tend to be vitreous For the purer materials the sulfate droplets
and devitrify
devitrification
was sparse
In general,
behaviors
are observed
by the activity
does not
26
Hot Corrosion
of Silicon Carbide
and Silicon
Nitride
27
enriches
phase remains
drops
a high concentration
of silica initially by
by the wash water analysis and it has also been well documented The observations are consistent that the reaction with the mechanism proposed by than
for NagCOS which they studied. product layer since greater samples. Under acidic conditions reactivity
Some protection
degradation
was observed
after preoxidation
devitrified
or random globular formation. outside the drops except were similar. to be similar The for
layer formed
28
High Temperature
Corrosion
of Ceramics
conditions.
This is generally
consistent
with a mechanism
determined
independent
Indeed for the basic conditions was no more differentiation A model was proposed correlates
in the behavior of C-side and Si-side silicon carbide. of random cristobalite globules which Selective the
of bulk silica.
occurs by transport
the sulfate
droplets
is
apparently
by the formation
was obtained
in this research.
thin layer formed during the oxidation silicon carbide has different
so strongly.
During the acidic hot corrosion Kinetic data and apparent of each side.
activation
were obtained
of silicon carbide had not been proposed. results of others, oxidation a model was developed by diffusion vitreous on the
is controlled
the oxide layers to the substrate all cases, the different oxygen deficient
interface.
Although
are associated
vitreous
in the oxidation
Tentative
mechanisms
were proposed
Hot Corrosion
of Silicon
Carbide
and Silicon
Nitride
29
and therefore
are expected
of the parabolic
for the acidic hot corrosion that of silicon are predicted activation consistent energies
by these
models.
of silicon carbide
could not be estimated. The behavior impurities of engineering materials is strongly influenced by the
they contain.
during oxidation acidic conditions as the conditions atmosphere. these materials between
by equilibrium
Conversely,
those promoted
selected
to the product
Great progress
by the activity
the major role played in the degradation is emphasized attack occurred by these results.
It was shown also that Overall the hot The atomic and
mechanisms
of silicon nitride
for further
1.
J.R. Blachere and P.S. Pettit High Temperature DOE Report ER45117-2, March 1988 a) DOE Report ER45117-1, June 1985 b) DOE Report ER10915-4, June 1984 C) a) b)
Corrosion
of Ceramics
2.
H. Yakovitz and D.E. Newbury, SEM/1976/1, IIT Research Institute, Chicago, IP, p. 151. References J.I. Goldstein et al., Scanning Electron Microscopy and X-ray Microanalysis, Plenum, No. 4, 1981, p. 354. and D.F. Klimovich, J. Am. Ceram. Sot., 70 [ll] C324-C326 in Metals and Alloys, Addison-Wesley,
3. 4. 5. 6.
L.E. Murr, Interfacial Phenomena Reading, Mass., 1976, p. 67. N.S. Jacobson,
M.I. Mayer and F.L. Riley, J. Mat. Sci., l3, (1978) 1319-1328.
30
Abstract: A fused crystalline SOjsilica of high purity and alumina impurity The silica levels in single crystal and polyto mixtures resistant the silica. SO3 of
forms with
different
xiere exposed
SO2~02 at
and alumina
in these
No reaction at
was observed
formed
severe
greater
impurity
content,
particularly
Ca and Mg.
Supported
by the
U.S.
Department
of
Energy
under
Agreement
Number
Presented Society
in
part
to
the
1982 Fall
meetings
of
American
Ceramic
in Cambridge,
Mass.
31
32
High Temperature
Corrosion
of Ceramics
INTRODUCTION actively for is components because of they advanced have high power systems
operating
ness
at high
temperatures.
(1) This
refractorithrcugh
chemical
stability over
research in recent
demonstration in reliability
projects of
improvements
components
will
emphasis
on ceramic parts
processing. rePlacing
at high barrier
thermal
protecting problems.
metallic
environments
which
cause
them severe
One should
Corrosion to the the of steel
assume
however by oxide
that melts
ceramics such
are
totally
corrosion are
resistant. costly on
industries. in deep in
performed the
corrosion df
known about
gaseous
atmospheres. corrosive
encountered
products
and ceramics
to enhance as AlZO3,
gaseous
corrosion.
deposits studied to in of is
Na2S04 in this
has been of
research
to establish
susceptibility of those
ceramics
corrosion systems
on the of since
materials
as protective carbide
on superalloys environments.
on silicon
in oxidizing
Appendix
A-Gaseous
Corrosion
33
II.
of the are
of
formed
between is almost of
ceramic.
always electron
oxidized of the
transfer are
ceramics
already
following
corrosion to higher
cations
in oxygen in the
being
ceramic.
or merely role
changing with
being
a major
degradation
temperature of for
atmosphere
or molecules ceramic,
may form more stable silicon type of nitride reaction of the reacts will
cations silicon
example This
dioxide of the
products
surface oxygen of
ceramic be very
can also
formation the
volatile of
species (s)
such to CrOj
oxidation
CrpOj gaseous
probably
involve
diffusion to
proceed of
at rates
fast
compared on the
processes ceramics.
condensed such
phases
surface
gas
as SOj. or its
cationic carbonates
component
as sulfates
or hydrates.
34
High Temperature
Corrosion
of Ceramics
of
such
will
be dependent
upon transport
through
products
of of It
transport of the
process. of the
liquid,
the wettability interface major and the factors faster in than resulting of of
layer
of
The grain of
structure materials
dissolution.
grain
dissolve grain
grain
materials. of the
into
the
boundaries influence
in engulfment
(9,101 the
.The
on the so that
corrosion for
experiments
fundamental
also size,
corrosion
grain
structure
and the
boundaries
a similar There is
carbide
literature
on gaseous
to be on their at high
reduction under
silica.
temperature
forming or CO (12*13! at
by thermal significant
decomposition weight
hydrogen hydrogen
were
(51
Appendix
A-Gaseous
Corrosion
35
1400oc. to lose
is
to conditions temperatures.
of
this
tvpe
alumina Steam at of of
observed
temperatures,
with are this silica
19OOOC. (14)
temperatures refractories.
resulting on the
in degradation Influence
silicate sulfur
no reports is discussed
oxide
gases
on alumina III.
and silica;
below.
EXPERINENTAL PROCEDURE
(1)
Materials They include four aluminas relatively given and a fused high I. silica which and flat were were obtained from
suppliers
in
is
densities
description of
in Table
almost (S)
transparent alumina
washers;
impure
have
grain
L-kin I 1
microstructure
be discussed
later
as needed.
Experiments Flat specimens as received, cleaned ( z l~l.cm) polished were or exposed to sulfur oxide
eases at ml and lno~~c
relief
Prior heated
thoroughly at
in acetone
one hour.
The ~02 and 02 mixtures of the experiments relevance instances performed were s~ally
catalyst
before to gas
The conditions
to have in most
were
high
in hot
corrosion of
The initial
SO2 contents
1%. 0.1%
and
TABLE Designation Silica 8.C. L M S Materials fused silica sapphire a-A1203* u-A1203* a-A1203*
I. MATERIALS
(0.1 H20)
SiO2) (0.17 t&O, AlStiS 772 (4) 0.17 SiO2) (0.75 ugo, +l.6SiO2, O.lNa20 S-697 (5)
* Polycrystalline
(1) (2)
Corning
Glass
(3) General
Ceramic
Ceramics.
Inc.
Appendix
A-Gaseous
Corrosion
37
0.01% of II.
with
the balance
02 for
a total
pressure equilibrium
of
one
atmosphere
race
about
lcm3/sec.
Table
The exposure
performed
sequential sample,
follow before
on the are
same area
the
electrically
non-conductive in
samples
were Electron
coated
prior
Scanning
carbon in
in 02 before It the
samples
samples interfere
results tools
the
sequential SMs
were for
the
(EDS)
X-ray
the
products
by Electron of the
Soectroscopy
specimen
was checked
on an analytical
the experiments. IV. Results and Discussion in any of that the experiments. change of It D.Img/ of can
weight the
change size of
a weight of
exposed about
corresponds
formation were
layer
usually
little
coverage
of
be detected to a continuous
the of
EDS order
in no case These
were
equivalent described in
products
the
following.
very
resistant formed
to attack
by SD2-
at
700 or
1DDOC. exposure
product
and no sulfur
was detected
ESCA after
38
High Temperature
Corrosion
of Ceramics
Tr\BLEII:
in Experiments
on
Gas
Pressure 7oooc
(Atm) at 1ooooc
Sl. 10-2
-1. 8.7 1.3 %I. x 10-4 x 1O-4 8.7 1.3 %I. x 10-5 x 10-5 8.7 x 10-5 x 10-4 x 10-4 x 1O-3 x 10-3
%I. 10-3
-1. 10-4
1.3 x 10-5
Appendix
A-Gaseous
Corrosion
39
where silicon
is
no evidence sulfate.
of
sulfate
formation of
is
*o
thermotoo
pressure
experiments
was
formation were
of
silicon above
No experiments Sulfate
in C3-SO3-So3
is less favorable
atmospheres
as
performed
1OOOoC since
the
increases. 700 or
glass
was observed
Alumina General
Results samples were exposed to all including are the three atmospheres at 700cC to observe III. in This the
in extensive of the
on three of
products sulfates
SEM. the
detection only
identification were of
very
small were in
products limit
and
their only
when it
by at products,
least Su
one
technique
suRRested
the presence
table. that the products were sulfates by the of purer the combined valency observations of the replicas this
identification on the
sulfur 1 elements
as S-6
as in in
sulfates the
aluminas
products also
samples
showed sulfate
aluminum
aluminas,
temperature, in the
contents trends
increasinR
SO3 pressure
atmosphere.
SO3 pressure (atm.) in approx. 1 atm 02 7.2 x 10-3 7.2 x IF4 7.2 x IO-' 1.3 x 10-3 1.3 x 10-4 1.3 x 10-5
Aluminas S)97.4%"
P 1' P P P SU
P: N: su: *
Sulfur containing products present No sulfur containing products Presence of sulfur suggested but not confirmed Purity
Appendix
A-Gaseous
Corrosion
41
consistent (b)
with
Al*03+ 3SO3(g)= Al*(S04)3 at equilibrium one has: g_ a Al2 W4)3 a Al203 and the SO3 pressure The stability generated unit for the equilibrium Figure
(pso3j3
diagrams of
assuming
activity
the solid
The test
boundaries diagrams.
The oxide-sulfate
lower temperatures.
boundaries
shift
ac
for a given initial with decreasing to form at lov experimentally: for sulfate
eqdlibfiumSO3 sulfates
pressure
have a greater
temperatures It is also
of Figures that
formations
co A12(SO4; 3 so thar under similar form more readily with increasing than contents Al?(SO4)3
explains
*Preliminary sulfates
results formed
obtained
also
indicated
that
on S alumina
42
High Temperature
Corrosion
of Ceramics
cao C&m*
4-
WN Me
log
POY
-lo -
Al203
A12(so4
-1a
-10 4
A12S3
-1(1 0 I
log
Psoa
Ow
4-
log
Por
-10 *
log
Figure 1.
PSOl
Stability diagrams for A1203 in SO@03 atmospheres at: (a) 700C (b) 1OOOoC. The experimental conditions (+) and the boundaries for CaO and MgO are also shown.
Appendix
A-Gaseous
Corrosion
43
Cc)
Single
Very
Crystal
little
reaction the
of
the
single at
alumina IOCWC.
during tetragons the highest the was was the material most inter-
exposure about
to any of
0.5 pa
on a side of
after
of of
For
pressure
products indicated
be found
sulfur
exposure
at the
to
the
single
when the
conditions
reaction. formed
diagrams
Figure These
for
unit
phases. in
Solid Al2O3)
solutions or other
dissolved formed.
phases not
in
added
to the its
(L)
material
degrade limits
its
purity
but
it
is
that
solubility
solubility
solubility but
it
been
be expected
boundaries, at grain is
observed. even
greatly lnrterial
boundaries srr.alL.
Ca does
concentrat_
very
44
High Temperature
Corrosion
of Ceramics
were
on the evident
(L)
alumina
compared of
to
the
single to all of
Products at
after
exposures Figure
As shown in
2 the
increased at the
SO3 pressure. at
Corrosion III),
products but at
higher
1OOOnC (Table
in less
quantity not
7oonc. observable
Exposure
1OOWC did
products
by EDS and ESCA. the which cuboids. such of the as laths are
alumina of
conditions.
Two types
2 and 3 for
contains
other
shapes
evident faces
concentrated grains
on certain exhibited
same a
these
influence to such
crystallographic segregation of
in part
surface
in no case or in
impurities
on the
L.
single
These single
greater
content materials at
under 1000%.
conditions
under readily
In general.
products
formed
larger
(Figure
4) with
increasing in that
content.
The samples
4 were 700C
polished
and exposed
(7 x 10-3atm.S03at at grain
one week).
It
shows
also
form preferentially
boundaries.
Appendix
A-Gaseous Corrosion
45
Figure
2.
(L) alumina surfaces (A) as received, B,C,D, exposed for one week at 700oC to 7 x 10-4 atm. 503 and 7 x 10-3 atm. 503 respectively. More products form at higher P503 (5EM)
46
High Temperature
Corrosion of Ceramics
Figure
3.
L alumina surfaces exposed to 7 x 10-3 atm. SQJ at 700oC for one week. A shows various morphologies of reaction products and 8 only a few discrete ones. (SEM).
Appendix
A-Gaseous Corrosion
47
Figure
4.
Relief polished polycrystalline A1203 surfaces exposed to 7 x 10-3 atm. 803 at 700oC for one week (a) L , (b) M, (c) another M-type (d) 8 aluminas. Products increase in size and quantity with decreasing A1203 purity. They form preferentially along grain boundaries. (8EM).
48
High Temperature
Corrosion
of Ceramics
Two types
atm SO3 for with or
of
products
were found
one other
was
on the
larger
(M) alumina,
exposed
to
7 ~10~~
one week at in it
700c.
sulfate little
no ca1ci.m
and the
smaller
no magnesium. The lowest purfty (S) alumina had of the mosf product in both number Si, and Mg,
after
exposure.
EDS analysis
the
products
S, Al,
magnesium products
sulfate, mostly
sulfate which
were
identified grains
exposure. of the
as large
grain grain
products, As indicated
mostly
products are
extracted products. of It
silicon silicon
the
formed dissolved
by reaction in the
SO3 with
impurities this
talc and clay
while
sulfates. the
In the impurity
alumina, Since
aluminum
are
from
used
as sintering
products
as a function sample
of (S)
time after
is
the
30 days. initial
nucleate
on the
phases contrast
on the polishing.
and the
coarsening is
occurring
ddring sulfate
the
a calcium-magnesium
unknown aluminum
Appendix
A-Gaseous Corrosion
49
Figure
5.
Relief-polished 5 alumina exposed to 7 x 10-3 atm. 503 700oC for one week. EDS spectra (1) whole micrograph, areas indicated by numbers. (5EM).
at 2,3,4
50
High Temperature
Corrosion of Ceramics
Figure
6(a).
Same area of relief-polished (S) alumina exposed to 7 x 10-3 atm. SQ3 at 700oC. (A) before exposure, (6) for 3 days, (C) for 10 days, (D) for 30 days. (SEM).
Appendix
51
A-Gaseous Corrosion
E
'C:3 0 QJ '6' ~ ~ 0. QJ..~ ..~QJ ~ E ..r/)0. ~0.U QJ~r5 ..~ ~.,;< o.~.. ~:3 UVl ~o~ l1Jo.o
. VI ~QJ
<~~.. QJ
52
High Temperature
Corrosion
of Ceramics
V. GENERAL DISCUSSION Ihe results silica than the the with occur and alumina metallic alloys. that are have been obtained in the present studies show that gas mixture when studies
considerably Nevertheless.
do occur present
appropriate. of
In the the
however, by the
reactions purity
and these
were
significantly
specimens. On the on the reactions with the than at this aluminas building possible in the it appears perhaps by solid case of the that to a layer of sulfate is than first absorbed The
sample are
thicknesses of crystal
a monolayer.
solutions single
alumina other
materials. sulfate
Calcium so that
sulfate their of
aluminum PSO3.
lower
compounds
point
although occur in
sulfates of
known with
sulfation formed.
on the aluminas;
impurity
as documented formation
impure
however, a major in
appears explains
studied. in force
increase the
but
growth the
when greater
reaction
products
involving
impurities of the
their
thermodyhamic
stability,
reaction
becomes
possible.
Appendix
A-Gaseous
Corrosion
53
that with
corrosion data in
of the
alumina literature
is
dependent reaction
upon of
(19) for
oxygen
impurities products
such
been modify
found the
to accumulate protective
properties
scales results
formed
the
that
have been
obtained
Na7S04
influence have
corrosion
these
significant
be especially Moreover,
the
Na7304
the melting of
ooint
formation research
major
on the hot
IV CONCLUSIONS
Silica
are
very
resistant
to
corrosion
by SO3 gases.
found
between were
products
as sulfates purity
formed
only
sapphire.
They
formed
in greater materials.
(5)
agreement of alumina
becomesmore It is of of is
suggested
alumina. content.
the the
impurity
polycrystalline
aluminas
impurities
the
corrosion
54
High Temperature
Corrosion
of Ceramics
by formation
The corrosion
of various products
solid-solutions
of
and
Alp
(So,)-,
formed preferentially
boundaries.
Acknowledgements: The authors materials, preparation thank the 3M and Saxonburg M. Zedar Ceramics for Companies contributions for donating to the
B. Draskovich, of
and L. Fisher
the manuscript.
Appendix
A-Gaseous
Corrosion
55
References: 1. Anon., " Reliability of Ceramics for Heat Engine Applications". National Materials Advisory Board, Commission in Sociotechnical Systems NMAB-357. 2. A.F McLean, "Ceramic Technology for Automotive Turbines"
~~11. AIII.
&ram.
Sot. 61 (8) 861-71 (1982) 3. A.R. Cooper, "Kinetics of Refractory Corrosion" Ceram. Eng. Sci. Proc. 2. 1963-89 (1981) 4. R.H. Barkalow and F.S. Pettit, "Mechanisms of Hot Corrosion Attack of Ceramic Coating Materials" Conf. on Advanced Materials for Alternate Fuel Capable Directly Fired Heat Engines, Castine. Maine, Aug. 1979. 5. H.R. Kim u Gaseous Corrosion of Oxide Ceramics" M.S. Thesis University of Pittsburgh, 1983. 6. H.R. Kim, J.R. Blachire and F.S. Pettit "Gaseous Corrosion of Ceramics", paper 11411.164th Meeting Electrochemical Society, Washington, D.C. Oct. 1983.
7.
B. Draskovich, J.R. Blachere and F.S. Pettit, "Hot Corrosion of Silicon Nitride and Silicon Carbide", Basic Sci. Div. Fall Neeting sot., Columbus, Ohio, 1983 Am. Gram.
8.a W.D. Kingery, H.K. Bowen and D.R. Uhlmann, "Introduction to Ceramics", 2nd edition, Wiley, 1976. b. A.R. Cooper, Jr and W.D. Kingery, "Dissolution in Ceramic Systems: I Molecular diffusion. Natural Convection and Forced Convection Studies of Sapphire Dissolution in Calcium Aluminum Silicate", J. Am. Ceram. Sot. 41 (1) 37-43 (1964)
56
High Temperature
Corrosion
of Ceramics
c.
M. Millard. H. Wuttig and H.U. Anderson, "Influence of Grain Boundaries on Liquid Corrosion of Al203 and N&l" sot. May 1982 paper No. 76-SII-82, An. Gram.
10. K.K. Kappmeier, ItThe Importance of Microstructural Considerations in the Performance of Steel Plant Refractories" in Ceramic Microstructures, R.M. Fulrath and J.A. Pask eds. Wiley, 1968, p.22 lla..D. Cubicciotti and K.H. Lau "Kinetics of Oxidation of Hot-Pressed Silicon Nitride Containing Magnesia", J. Am. Gram. 512-17 (1978) b. S.C. Singhal "Oxidation Kinetics of Hot Pressed SIC". J. Mat. Sci l_l, 1246-53 (1976) 12. R.A. Gardner, "The Kinetics of Silica Reduction in Hydrogen" J. Solid State Cliem9 336-44 (1974) 13. M.S. Crowley, "Hydrogen-Silica Reactions in Refractories" Bull. 14. Am. Ceram. Sot. 46 (7) 679-82 (1967) Sot. 61 (11-12)
L.J. Trostel, Jr, "Stability of Alumina and girconia in Hydrogen", Am. Ceram. Sot. Bull 46 (12) 950-52 (1965).
15.
D.E. Day and F.S. Gac. "Stability of Refractory Castables in SteamN2 and Steam-CO Atmospheres at 199OC, "Bull Amer. Ceram. Sot. 5f! (7 1 644-48 (1977)
16. 17.
A. Negelberg, private communication. I.K. Lloyd and H.K. Bowen "Iron Tracer Diffusion in Aluminum Oxide" J. Amer. Ceram. Sot. 64 (12) 744-47 (1981)
Appendix
A-Gaseous
Corrosion
57
18s. W.C. Johnson "Magnesium Distributions at Grain Boundaries in Sintered A1203 Containing Mg A1204 Precipitates," J. Am. Gram. 234-237 (1978). b. P.E.C. Franken and A.P. Cehring 'Grain Boundaries Analysis of ?!gO-Doped A1203", J. Sot. 61 (5-6)
19. N.G. Krlshnan and R.W. Bartlett "Kinetics of Sulfation of Reduced Alunite" Environ. Sci. Tech, ,1,923-929 (1973)
Appendix
M.G. Lawson,
INTRODUCTION There is a great emphasis which is dependent science parts, on advanced on higher working temperatures materials. As progress for heat engines
of ceramics
leading to greater
to be incorporated device&).
in car engines
temperature-high candidates
are becoming
their corrosion
environmental ceramic
important.
compounds,
in particular
at high temperatures
of ceramics
in a heat engine,
in presence
by reaction
with gases is called gaseous corrosion. such as NagC03, Nags04 may be these in a
in addition condense
process
is well known in
superalloys
in detail
in clean oxidizing
it is continuous
with some ability to self heal at higher temperatures. it is less protective in properties as it begins to crystallize@). from the same materials Ceramic Society
may differ
in bulk, it was
58
Appendix
B-Hot
Corrosion
of Silica
59
that valuable
information
could be obtained
investigation
(4). This paper covers the study performed with deposits of sodium sulfates.
under conditions
gas turbines,
HOT CORROSION Hot corrosion they affect materials. applies: is dependent upon temperature and the gas atmosphere since
of the deposit
is in equilibrium
(1)
of SO3 in the melt are fixed by the by Kl. For pure Na2S04, and (1) for the for its
as defined
can be taken as unity, and as a(Na20) increases, An Na20 activity between of 2~1O-l~ was calculated
atmosphere
selected
experiments
activity
at 7OOoC is
defined by reaction
to 10s4 since SO3 and SO2 are evolved from the Na2S04 to the gas. These values are high and such Na2S04 melts are considered equilibrium of the deposit with the atmosphere basic. However only at the
may be established
process and acid or basic behavior depends on the the sulfate and the ceramics.
60
High Temperature
Corrosion
of Ceramics
EXPERIMENTAL
PROCEDURE
Materials The experiments reported here were all performed on a high purity fused
silica (Corning 7940). The major impurities ppm of chlorine. samples All other impurities
Gaseous Corrosion The samples mixtures were exposed in tube furnaces catalyst at 700 and 1000C. SO3-03 gas
in the furnace
the samples.
of the gas were usually 1, 0.1 or O.Ol%, The corresponding equilibrium The exposure Weight changes
of 1 atmosphere.
PS03 and PSO3 are given in table I. The gas flow rate was 1 cm3/s. time was usually one week but varied from one day to one month. were checked on an analytical balance.
The major tool was an SEM equipped EDS and crystal spectrometers by
(Energy Dispersive,
microanalysis.
These experiments
were supplemented
spectroscopy).
Hot Corrosion The polished specimens aqueous solution were placed on a hot plate and sprayed layer of sulfate with an
loading of 5mg/cm2.
and of
The extreme
Appendix
B-Hot
Corrosion
of Silica
61
Experiments S03(atm.) 7x10-3 (2) 7x10-4 7x10-5 1.5x10-3 (2) 1.5x10-4 1.5x10-5 (1)
1000
(1) (2)
96 S02-Balance Environments
1 atm.
experiments.
62
High Temperature
Corrosion
of Ceramics
table
I were selected
to relatively
conditions.
the salt usually on a 45 hours cycle. The weight of the coupons was checked sensitivity of 0.1 mg before salt application on an analytical and after balance with a
washed off in 10 cm3 of high purity water per cm2 of exposed area. lasted 20 minutes samples in an ultra sonic cleaner. The washwater
was analyzed
processed
semi-quantitatively*
of a water spectrum
The specimens of
and the SEM before and after removal for microanalysis crystalline products
were were
was measured
previously
thicknesses
on SEM
of cross sections
of the coupons.
* SSQ software
by Tracer-Northern
Appendix
B-Hot
Corrosion
of Silica
63
RESULTS AND DISCUSSION Gaseous corrosion The gaseous corrosion(*) corrosion(g). was studied for comparison were detected, with the hot were visible in the of the specimens
No weight changes
no products
(0.1mg/cm2)
uniform deposit
and
of the detection
limits of discrete
10m7 to lo-* g/cm2. SEM could be detected microanalysis 10mg g/cm2. No evidence
seen in the
technique,
of degradation
or formation
of solid products
containing
sulfur
of a silicon sulfate,
and no silicon sulfide was since the oxygen pressure of silicon sulfide has been above 1000C because No at 700 and
conditions
The formation
were performed
deposition
becomes
at higher temperatures.
devitrification
Others have
* A 1% coverage with islands 20nm thick containing 20% sulfur was assumed for the calculation of the limits of detection using SEM and EDS. In ESCA, 0.1% of a sampling depth of 5nm was assumed.
64
High Temperature
Corrosion
of Ceramics
Wetting by sulfates The wetting angles of the salts used in the hot corrosion They are given in table II. The general experiments wetting varied morphology
in a few minutes at the temperature with time with the wetting wetted the silica better small droplets increasing
of the experiments.
the sulfate
at 1OOOoCthe wetting
large drop about 0.02cm across. most of the coupon after 24 hours the wetting
angle of 2O was
after
In some cases, the salt formed drops of several sizes and different angles were observed measurements for different size-range (table II). The wetting
angle
may imply that equilibrium with time and the influence occuring between the sulfate
tends to increase
between
surface reflects
of the basic salt for the acidic silica. of the same areas of samples between sites. cycles, This
microscopy
with washing off the salt and reapplication preferentially local attack
on previous droplet
that no preferential
This conclusion
was substantiated
Appendix
B-Hot
Corrosion
of Silica
65
lhr. Acidic 52
lhr.
Basic
26 t4)
(Nag Co) SO4 Na2 SO4 Range of angles with drop sizes - smaller angles for larger drops. Salt phase separated.
66
High Temperature
Corrosion
of Ceramics
Hot Corrosion Under acidic conditions, droplets. the deposit mg/cm2 localized suggested in water. losses. At 700C the weight by washing there 24 hours. the salt did not wet well the silica and it formed changes were small, for example, after after removing
after
No evidence
was apparent.
corrosion
occurred
that this wormy void texture This corrosion The attack was very limited preferentially
as indicated
occurred an interaction
under the salt at the perimeter No spalling occurred was washed and salt had a strong texture This attack observation
drops suggesting
495 hours of cyclic exposure reapplied exposure surface droplets (5 mg/cm2) between
after
and a region 33 urn thick contained of the coupons is consistent did not reform
over the whole that the of the salt. and the silica
Under acidic conditions, was devitrifying characteristic Devitrification was detected than at 700C. compared silicate probably established spherulate
formed
between
also under very small drops and no evidence The weight loss of 0.3 mg/cm2, by the greater stability
the drops.
was smaller
silica which will result in the formation The cristobalite protection occured
layer which did not spall silica but it was not between the
to the vitreous
if preferential
attack
at the boundaries
fibrils as reported
Appendix
B-Hot
Corrosion of Silica
67
Figure I.
Hot corrosion of fused silica under acidic conditions, 24 hoursat 700oC. SEM of sulfate drop area after washing off sulfate showing wormy voids formed preferentially at edge of drop.
68
High Temperature
Corrosion of Ceramics
Figure
2.
Fused silica exposed for 24 hours under acidic conditions showing coarsened spherulites under sulfate drops (after washing).
Appendix
B-Hot
Corrosion
of Silica
69
Under basic conditions at 7OOoCthe salt tended to decompose with extensive formation of cobalt oxide which complicated
the interpretation
of the
data, particularly weight change. Under the salt drops there was limited formation of cristobalite spherulites mixed with some random globules after 24 hour exposure and some localized cracking (figure 3) but there was no evidence of spalling or extensive attack of the substrate. The most extensive degradation of vitreous silica occurred under basic conditions at 1OOOoC. After 1 hour the salt wetted the coupon almost completely and a layer of cristobalite spherulites had formed under the salt. As shown in figure 4, the fibrils of the spherulites had already broken down significantly into arrays of globules. The spherulites had grown to impingement with radii of the order of 30 pm, underlining the high velocity of the surface crystallization. After 24 hours nothing was left of the spherulitic surface Cristobalite
morphology as tridymite had formed at the silica-salt interface. separates the tridymite from the vitreous silica.
near the surface had coarsened into laths about 15 pm wide and over 60 pm long. The crystalline layer spalled extensively. The washwater analysis indicated that significant silicon was water soluble with the sulfate after 1 hour, however this was no longer found after 10 or 100 hours. The sulfur was never depleted as the Na/S ratios in the water remained of the order of 2 (t 0.4). This suggests that less reaction occurred after a continuous crystalline layer was formed and that at the longer times sodium silicates with low solubility in the sulfate at 1OOOoC formed between the crystalline silica and the sulfate. It became clear, as the previous results were obtained, that the major mode of degradation of vitreous silica under hot corrosion conditions was due to the crystallization and associated spailing. Qualitatively the extent of the degradation at constant time increased in the order:
70
High
Temperature
Corrosion
of Ceramics
Figure 3.
Fused silica exposed under basic conditions at 700oC for 24 hours. Limited nucleation occured in small portions of drop areas.
Appendix
S-Hot
Corrosion of Silica
71
Figure
4.
Fused silica exposed to basic conditions at lOOOoC for 1 hour. The fibrils of the spherulites have broken up into globular arrays.
72
High Temperature
Corrosion
of Ceramics
Acidic 7000 < Basic 700 < Acidic 1000 < Basic 1000C The degradation equilibrium emphasized increases with increasing Nag0 activity in the salt and decreasing results quantitative
on the crystallization.
Kinetics
of Crystallization of crystallized conditions silica was measured on fused silica under The The of the
specimens.
kinetics
are shown in figure 5. They are for the propagation interface. The plot is parabolic and the incubation with exposure
time is cycles of
was performed
the salt was washed off and new salt was reapplied the samples and had
Since this was done at room temperature, Extensive spalling of the crystalline
layer occured
for 6 cycles
of parabolic
(about 1000 urn) is over twice that without of 100 hours total duration,
cycling.
of salt by cooling to room temperature had the same layered cycled or uncycled, tridymite structure
1 hour and 10 hours of exposure. after the long exposures, layer, a layer
had a thickness
of the order of 400 urn which is also about twice the thickness
Appendix
B-Hot
Corrosion
of Silica
73
l/2
Figure
5.
Kinetics corrosion
glau
during
basic
hot
74
High Temperature
Corrosion
of Ceramics
900
800
600
500 400
300 200
IOC
Figure 6.
Kinetics of crystallization of silica glass exposed to basic hot corrosion at 1OOOoC in Oxygen, with 45 hours cycles and reapplication of sulfate. Note linear kinetics.
Appendix
B-Hot
Corrosion of Silica
75
+"..'0 01 ~ C
1n~0I C tI ~
.-~ +" '0>.>. Col'O .0tI In 01 ... tI .-~ In~~oIC+"ba .a .-~ .. -tI C tI .-.c .->.+" '0 tI .;n .c ~In 0 01 e +" .-
0 .-In -
M-ln
0.
~ .-
tI .-.c -+"w
tI
C 0
U .C..
tI
~
GI .. ~ ~
76
High Temperature
Corrosion
of Ceramics
crystallized
conditions.
of
the cycling
experiments
General
Discussion was greater under basic than under acidic conditions. The
angle decreased
in the sequence:
Acidic 700 > Basic 700 > Acidic 1000 > Basic 1000C The increased wetting at higher temperature (lOOOC) under acidic conditions as predicted a substrate from and a is
acidity
of the salt at higher temperature free energy of a reaction energy balance between
I(2 = a&/
(aSiO2)x. (aNa2O)y activity asil=l, y=l and x=2, the equilibrium 11. Therefore reaction 2 should proceed conditions
Assuming constant
The experimental
with 1.5x lo-5 atm So2 which correspond not be .sufficient to form the silicate.
by Jacobson
of silicon carbide(13).
However
Appendix
B-Hot
Corrosion
of Silica
77
the wetting
behavior,
the crystallization
of the sulfate
with the so
silica indicate
is shifted
that at least locally all conditions basic to permit least partially for reaction
for this work might have been sufficiently to the right. This can be explained phase and the phase was observed to form under at
2 to proceed
by aSiO2 > 1 since the glass is not an equilibrium decrease its stability. at 1000C. A discrete silicate
OH and Cl impurities
much less than 1. the fused silica and the sodium sulfate,
Some limited
reaction
occurs between
even under the less basic conditions these conditions, accumulated hot corrosion
at 700C (acidic 700C in table I.) Under of the salt, significant The quantitative (2) was limited effect hot corrosion of the of cobalt under all in
interpretation
by the presence
of the crystallization
these complications,
the major interactions They are the dissolution salt and diffusion basic conditions, exposure
the salt and the silica occur at their interface. formed via reaction (2) in the
silica.
Accordingly,
of the washwater
increases
but decreases
layer is detected
Under the less basic condition, wormy texture. in the fused silica. It is proposed
is localized
are connected
78
High Temperature
Corrosion
of Ceramics
microregions
more (acidic
under reaction
(2). Since for the less basic condition is small, the influence
7OOoC), the driving force for the reaction is emphasized products and it will be suppressed As a result
by increases
in concentration
in the salt.
it occurs
drops (figure
may play a role, but it is not as obvious corrosion. Others have reported no
of Na2SOq with fused silica under acidic conditions(14). experiments which included
the case in any of the present Some of that difference impurities expected expected discussed to contain
in behavior
above.
OH impurities,
the OHs may slow down the out that impurity and structure
through
= 2Si-O- + 2Na+
(3)
(CSiO)2. (CNa)2 g3 =_________________ Cst. aNa in which an oxygen bridge (Si-0-Si) oxygens to incorporate network modifiers, has been broken into two single bonded The sodium ions, as near the single bonded
are located
Appendix
B-Hot
Corrosion
of Silica
79
oxygens.
in
in the oxidation
of a vacancy
controlling.
in the glass and sodium might play a role. of the silica glass.
However, of
is modified
Diffusion the
cristobalite
of vitreous
silica or quartz.
Diffusion
boundaries. Since it breaks up the network, crystallization member rings. reaction 3 is expected to promote the to 6-
rearrangement
of the network
700C) but it did at the same temperature the extent of the crystallization discussion
Qualitatively, as expected
and reaction
3, the concentration
is proportional
of silica is well
here it has been shown that under basic hot corrosion proceeds at a rate of the same order as in oxygen or an enhancement
that observed
80
High Temperature
Corrosion
of Ceramics
at 1000C in
this is short lived because of the onset of devitrification. and the resulting spalling as the specimens inversions
the
as well as the differential for most of the degradation scale and little
of the crystalline
basic condition
at 7OOoC (acidic 7OOoC) for which the silica did not crystallize. for most of the observed conditions degradation the crystallization
of silica under hot corrosion The crystalline instead similarity cristobalite conditions spherulitic nucleate of tridymite between
will be discussed
since a lower energy path is available the structures of high cristobalite (figure 2-4).
and vitreous
in morphology
globules were aligned in radial arrays related Under less basic conditions the spherulites
under all the salt drops or over the whole areas covered
Appendix B-Hot
Corrosion of Silica
81
and for less basic conditions even after globules between different reacts nearly 500 hours. randomly
formed
spherulites. mechanisms
was initiated
In both cases the sulfate and shown in reaction reactions (1) and
with the silica by basic fluxing as discussed with SO3 pressure Na20 activities spherulites, is obtained
earlier
2. The relationship
by combining nucleated
the cristobalite
at the sulfateof
the previous
results
that a threshold
of the spherulites
at the interface.
instability
promote
the crystallization
of silica by breaking
rapidly through the liquid phase. basic conditions, the surface ions dissolved
the silicate
on which no of
is initiated. as silicate,
At the same time it is likely that the solubility in the sulfate decreases as the activity
probably
as reported proceeds
at the interface,
are set up across the salt. away from the interface precipitation cristobalite
The solubility
of the silicate
decreases
leading to supersaturation
82
High Temperature
Corrosion
of Ceramics
Discussion of Crystallization Kinetics The crystallization of silica which has rapid parabolic kinetics under the more basic isothermal conditions is not controlled by the transport of reactants or products through the crystalline layer, since the crystal has the same composition as the glass. As already discussed qualitatively, the very large rates of crystallization are associated with high Na30 activities. The sodium breaks
oxygen bridges according to reaction (3). It is proposed that the crystallization begins when a threshold Na30 activity is present at the silica glass-sulfate interface generating sufficient concentrations of oxygen bridges to allow the local rearrangement of the network to the crystalline form. This could occur by a mechanism similar to that proposed by Fratello et. a&18) for the high pressure transformation of fused silica to quartz. The sodium in Si-0-Na groups would play a role similar to that of hydrogen in SiOH bonds, although the ONa bonds are more ionic than the OH bonds and as a result they were considered ionized in reaction (3). Since it is less tightly bound to the oxygen and because of size considerations, the Na+ is more mobile than the protons(24). The active defects sre still the non-bridging oxygens which are very mobile in combination with either thermally created single bonded oxygens, SiOH or other SiO- Na+ groups. The single bonded oxygens can attack oxygen bridges by simultaneous bond formation and breaking, and reshape the network into six member rings. After nucleation the crystallization front propagates at rates many orders of magnitude greater than in the pure system. From the present results this is due to the sodium which catalyses the crystallization. It has to be present at the
cristobalite-glass interface, although it could not be detected with the electron microprobe, except in special cases. Only very small quantities of sodium are required for the previous mechanism which can rapidly propagate a crystal ledge into the glass.
Appendix
B-Hot
Corrosion
of Silica
83
reaction
stoichiometry
proportional
sodium which take the place of the hydroxyls mobility previously sessile(z51. 3 to 4 orders of magnitude that most hydroxyls smaller
in the model.
than Nalz41. It has been suggested silicas are strongly bound and nearly
in synthetic
of sodium ions is not constant period some sodium diffuses stopped by the formation
earlier. interface
In the proposed
trapped
once a significant
any diffusion
the concentration
as a spike of constant
sodium injected
of time
(figure 8). This spread which is due to the sodium diffusion slowed by the rejection
of the sodium ahead of the crystallization of sodium CNa at the interface decrease
is expected
of the rate of
crystallization. as:
cNa.(Dt)+ = s
84
High Temperature
Corrosion
of Ceramics
idym.
%I,0
Figure 8.
Proposed mechanism of crystallization of silica during basic hot corrosion. (1) Diffusion of Na into glass, nucleation of cristobalite; (2) A continuous layer of cristobalite forms rejecting Na; (3) with cristobalite growth the Na concentration at the cristobalite-glass interface decreases by diffusion into the glass.
Appendix
B-Hot
Corrosion
of Silica
85
coefficient u is
to x = B tt / Dt and if D is
the observed
parabolic
behavior.
In the previous
discussion, at
x is
of the crystallized
One could still assume that the sodium at the interface be diffusion through the crystalline changes
however
departures
behavior.
Na is not consumed
it is rejected catalyzes
Therefore
above provides
a better
explanation.
Hot Corrosion
of Silica Pormers results are in general agreement with the protective properties on
The present
(silicon carbide
and coatings
environments conditions.
86
High Temperature
Corrosion
of Ceramics
to react
with Na2S04 by basic fluxing, it is very sensitive cycling. to Under not will
these conditions
depend on the purity of the silica formed, with the sealest sensitive
of the impurities
and the rate of growth of the scale since thick scales It is likely that OH impurities Although only indirect promote
to spalling.
indications
are presented
from the role of OH in glasses( 18p2@. This is important structural applications since water is a major product
for high of
temperature combustion.
suggest
scales
CONCLUSIONS - No evidence of gaseous corrosion was obtained in atmospheres containing initially up to 1% SO2 and balance oxygen at 700 and 1000C for times up to 720 hours. - No devitrification was observed experiments in pure oxygen. under these conditions and similar
- The wetting of the silica by the sulfate varied significantly with the PSO3 and the Nap0 activity. It increased with aNa20. It was greater under basic than under acidic conditions at both temperatures. Under basic conditions at 1000C the wetting was complete. - In all cases there was a tendency with the activity of Na20. towards basic fluxing which increased
- Some limited corrosion was observed under acidic conditions at 7000C. At 1000C under the same conditions, the silica devitrified and little reaction was observed between the salt and the silica.
Appendix
B-Hot
Corrosion
of Silica
87
- The most extensive degradation of vitreous silica occurs by crystallization and the associated spalling during temperature cycling. In general it increased with the activity of Na20 and was very severe under basic conditions (pure oxygen atmosphere) at 1000C. - The sodium accelerates (catalyzes) dramatically the devitrification of silica and the rate of crystallization at 1000C under basic conditions is of the same order as that observed by others at 1400C in air (without sodium). - The kinetics of crystallization at 1OOOoC under basic conditions were parabolic with a short incubation time. Cycling increased the damage and changed the kinetics to linear. The extra damage was associated with the strains due to cycling not with additional salt applications. - The parabolic behavior observed under isothermal conditions can be explained with a model in which the crystallization is controlled by the sodium at the crystal-glass interface which diffuses into the glass prior to crystallization. - The need for the development of vitreous ceramics and metallic alloys is stressed. coatings for the protection of
Acknowledgements The authors gratefully of the Department acknowledge the support of Basic Energy Science Division
support.
REFERENCES M. Taguchi, Adv. Ceram. Heat Engine Ceramics, Mat. 2 [4] 754-762 (1987). Bull. Am. Ceram. Sec. 64 [Z] 268-294 (1985). Oxidation of
1.
a. b.
2.
N. Birks and G.H. Meier, Introduction Metals, Arnold 1984, Chap. 8. P.J. Jorgensen et. al, J. Am. Ceram.
to High Temperature
3. 4. 5. 6. 7. 8.
J.R. Blachere and F.S. Pettit, High Temperature Corrosion DOE Basic Energy Sciences DEFG OZ-84-ER45117. B. Draskovich, Hot Corrosion of Silicon Mitride Thesis, University of Pittsburgh (1984). J.I. Goldstein et. al, Scanning Electron Plenum, (1981), p. 378. L.E. Murr, Interfacial (1975), p. 69. Phenomena
Microscopy
of Oxide Ceramics
88
High Temperature
Corrosion
of Ceramics
9.
M.S. Thesis,
University
10. 11. 12. 13. 14. 15. 16. 17. 16. 19 20. 21. 22. 23. 24. 25. 26.
I.A. Aksay et. ai, J. Phys. Chem. 78 [12] 1178-1183 (1978). J.R. Blachere et. al, Paper #77-BEG-86P, Sot., New Orleans (1986). N.S. Jacobson, N.S. Jacobson 1987. G.H. Prischat, G.H. Prischat Workshop on Corrosion Basic Science Div. Am. Ceram. Nov. 1987. Nov.
in Ceramics,
Pennstate,
in Ceramics,
Pennstate,
Sot 5_1[9] 528-530 (1968). Solids 7l, 77-85 (1985). Wiley (1976) p. 103.
et. al, J. Appl. Phys. 51 [12] 6160-64 (1980). J. of Non-Crystalline Solids, 38 and 39 (1980), 545-550.
H.A. Schaeffer,
Z. Boksay: Mass Transport in Non-Crystalline Solids, in The Physics of Non-Crystalline Solids, G.H. Frischat, Ed. Trans. Tech., (1977) p. 428. H. Rawson, Inorganic Reference 17, p. 314. University of Pittsburgh, (198-). Glass-Forming Systems, Academic Press (1967), p. 53.
Glass Science,
p. 168. 3 19 (1966).
R.W. Lee and D.L. Fry, Phys. Chem. Glasses, Reference 24, p. 229.
Appendix
M.G.
C-Hot
Lawson,
Corrosion of Alumina
F.S. Pettit, and J.R. Blachere
INTRODUCTION Failures due to corrosion limit the selection of materials in countless operations. The corrosion of ceramic materials is a significant factor limiting the design of new systems for coal gasification, coal liquification, energy conversion, thermal storage, and the battery storage of power. (l) Advances in the science and technology of processing, fabricating, and testing of brittle materials have resulted in ceramic parts with mechanical properties acceptable in a broad range of energy related applications. Severe material degradation is common in environments where the combustion of fuel occurs. As superalloys and complex cooling systems have been developed the operating temperatures of turbine engines has been raised to increase their efficiency. Many of the raw materials used in superalloys are expensive and can Low heat rejection diesel
and gas turbine engines are in development which allow a substantial decrease in the size of power source, primarily due to the elimination of bulky cooling systems.(2T3) The continuing development of more efficient and compact engines as well as the reduction of cost and dependence on strategic materials is dependent on advances in materials technology. In addition to being inherently refractory
and resistant to corrosion, most ceramic materials are available from domestic sources and are much less expensive than the elements used in superalloys. Although ceramics tend to be refractory, the corrosion of ceramics occurs at an appreciable rate in many systems. This is reflected in cost of refractoris used by the steel and glass industries. The research resulting from the
89
90
High Temperature
Corrosion
of Ceramics
widespread
use of ceramics
as vessels
metal
and glass has led to an understanding of a melt. Alumina pure forms. superalloys. of deposits corrosion is an excellent It is also generated Its corrosion
of ceramics
in the presence
bulk refractory
resistance
in presence Gaseous
in this research.
A. The conditions
of this study
applications
mixtures
In a turbine greater
engine at 1000C, gases have oxygen pressures of about 10e4 to lo- 5. f4) Deposits
results
condensation
when burning fuels with sodium and sulfur impurities of condensed Na2S04 at equilibrium reaction: (11
The composition
will be governed
by the decomposition
melt are the basic and acidic species, During hot corrosion deposit deposit substrate determine the activity
The composition
a basic solubilityin
Appendix
C-Hot
Corrosion
of Alumina
91
an acidic solubility
in the melt as in the reaction: MO = M2+ + 02(4) of SO3 in the deposit solubility are within an is observed. with a
of Na20 (i.e. 02-) and pressure range then the oxide is stable the degradation
and negligible
More specifically,
of an Al203 substrate
by reaction
3 Na2SO4(1) + Al203 = Al2(SO4)3 + Na20 Na2S04(1) + Al203 = s NaA102 + SO3(g) of Al203 occurs by either
The regions where the hot corrosion shown on the stability The solubilities have been measured Figure 2.(7-g) diagrams
for Al203 and SiO2 are shown in oxides are displaced acidity or basicity to the of those
of different
left and right of each other depending oxides. Alloys resistant by the formation transport to degradation
on the relative
at elevated
temperatures
are characterized
of continuous or oxidant
compact species.
solid oxide scales with a low rate of In addition, The extent the volatilization of degradation rate of by hot
of metallic
by the solubility
molten salt. Where the solubility a function of the acidity of the oxide in the molten salt deposit or basicity of the melt, corrosion is low or is not at a
may proceed
stops the
92
High Temperature
Corrosion
of Ceramics
LOG
P
O2 -10
BASIC FLUXING
AIO;
-20 LOG
-10 &03
Figure
l(a).
:Stability diagram showing phases of alumina that can be stable in Na2SO4 at 700C, and defining regions where acidic or basic fluxing are possible. Dashed lines are SO4 isobars (atm).
Appendix
C-Hot
Corrosion
of Alumina
93
BASIC LOG P
02
FLUXING
AIO;
-a
1 -8
I / / / / / /
-16 IO / /
-10.6, IO / / 1 /
t 1
ACIDIC
FLUXING
-s IO / / t / I
A13+
A203
AG3
0
Y
-Y
LOG
Ps,
Figure l(b).
Stability diagram showing phases of alumina that can be stable in NaZSO4 at 1000C, and defining regions where acidic or basic fluxing are possible. Dashed lines are sulfur isobars. Very high SO3 pressures are required for acidic fluxing. Refractory metal oxides are believed to make acidic fluxing favorable at lower SO3 pressures as indicated by the displaced boundary (arrows).(ll)
94
High Temperature
Corrosion
of Ceramics
Figure
2.
Solubilities
of alumina
in fused Na2S04
at 927OC.
Appendix
C-Hot
Corrosion
of Alumina
95
sustained
attack
results
if solution
of the oxide in the salt away from the oxide-salt of the solubility
interface
of the oxide across the salt film.(lO-lll by the local variation solution and
The resultant
a porous scale.
engine component
sustained
attack
acidic component the deposit. fluxing results in Na$304. molybdates manner, promote
This causes the melt to become from the solution of refractory the formation
of superalloys and
vanadates,
in the melt.(121
In a similar
which is contained
EXPERIMENTAL
PROCEDURE
Materials The materials aluminas containing chosen are single crystal different alumina and three poiycrystalline They have
and microstructures.
been discussed
in previous
reports.
is 99.99% pure.
of the polycrystalline
is given in Table I.
96
High Temperature
Corrosion
of Ceramics
TABLE I Chemical Analysis of Polycrystalline (units: wt%) Low PP 0.02 0.07 0.75 0.02 1.65 O.OOl^ 0.09 Alumina Alumina
MgO
Ti02 SiO2 K20 Na20 ** High PP = Med PP Low PP = =
Alumina
Undetected,
Limits of detection
Appendix
C-Hot
Corrosion
of Alumina
97
Hot Corrosion
Experiments had areas about 1 x 1 cm which were polished they were usually coated with 5 mg/cm2 Some samples for cycle, down to 1 urn of Na2S04 were also
cleaning,
for various times from 1 to 100 hours. exposures with 45 hours exposure cycles.
to cyclic
reapplication
of Na2SO4 between
basic conditions
atmospheres
with pSO3 = 1.5 x 10e3 atm at 1000C and pSO3 = 7 x 10N3 atm after the initial mixture over a platinized catalyst at 700C. Since Na2S04
melts at
mixture
which was molten at that temperature. The changes characterized in morphology and products focused on the samples were (EDS
mostly with the SEM, and its X-ray spectroscopy After exposures and observations
attachment
of the samples,
they were washed and the weight changes water was analysed When sufficient These procedures as required
were measured
using a semiquantitative
products
were formed,
by X-ray diffraction.
were described
in detail
Wetting The wetting measured angles for the 1 hour and 24 hours isothermal exposures were
and are given in Tables II, and III. In most cases the wetting
morphology
98
High Temperature
Corrosion
of Ceramics
TABLE II WETTING DATA Al203 1 & 24 Hour Isothermal 1 HR Low PP MS04 BM(S) LD18O SD 40 MS04 300 7oooc ACIDIC 24 HR MS04 140 RP=50 MS04 220 RP=48O MS04 200 MS04 220 KEY: MS04 Exposures 1000/24
Na2S04 190
Med PP
High PP sxtaI
180
(Na2,CO)S04 CWContinuous Wetting NCNearly Continuous Wetting PSPhase Separated Drop Wetting Angle (Cobalt Oxide+SaIt) BMBimodal (Two Wetting Angles) BM(S)Angles f(Drop Size) LDLarger Drop Wetting Angle SDSmaller Drop Wetting Angle BM(H)Angles = f(Drop Habit) RFReaction Product Angle
Appendix
C-Hot
Corrosion
of Alumina
99
TABLE III WETTING DATA Al203 1 & 24 Hour Isothermal 1 HR Low PP 1ooooc
Exposures
BASIC 24 HR
Na2SO4 30 NC Na2SO4 cw
Med PP
High PP
;$2s04
sxtsl
~o~so4
WwWSO4
Continuous Wetting Nearly Continuous Wetting Phase Separated Drop Wetting Angle (Cobalt Oxide+Salt) BM Bimodal (Two Wetting Angles) BM(S1 Angles - f(Drop Size) LD Larger Drop Wetting Angle Smaller Drop Wetting Angle SD BM(H1 Angles = f(Drop Habit) Reaction Product Angle RP
100
High Temperature
Corrosion
of Ceramics
conditions,
atmosphere,
the furnace
in a few eases. The phase separation of the (Na2,Co)SO4 deposit used in the 700C exposures by thermodynamics. After cobalt
as predicted
the deposits
was prevented
the alumina substrate. wetting angles were measured resulted product on some of the of
morphologies a reaction
the salt or from the formation the difference II and III. The wetting In acidic conditions in contact
exposed
in acidic conditions
was limited.
increased
(LowPP No trend in
with composition
the wetting
in acidic conditions
is lower at 1OOOoC than at 700C. with the molten salt results of the droplets.
of multiple reaction
decreases
angle of contact
Appendix
C-Hot
Corrosion
of Alumina
101
is lower at
the crystallization
in the contact
at 1000C. content
were wetted
by the molten salt than were the higher to the fact that the wetting behavior is
by the reaction
of the
melt, sodium oxide, which is promoted Photographs coupons occurred specific important
taken during long term exposures did not provide substantial evidence
wetting
of the of
wetting This is
before
could be very damaging. was poor and the resultant When the deposit of the salt, especially contact is in
In those experiments angle was high, relatively thick the effect the vicinity
were observed.
of the atmosphere
on the composition
of the substrate,
less than when the salt wet the angle is observed, is increased
coupon in a thin continuous the area for reaction and the distance salt-gas interface
must be transported
that an increase
in a decrease
solubility
102
High Temperature
Corrosion
of Ceramics
Hot Corrosion
of Al203 long term exposure with thermal measured cycling and the reapplication
Even after
405, and 495 hour experiments A globular silica reaction coupons from the exposures crystalline silicate reaction
are listed in Tables IV,V, and VI. product was observed atmosphere on the washed polycrystalline at 700C. Well defined
were observed
in either
atmosphere
at 1000C.
products
from some of the coupons using are listed in Table VII. that these reaction in significant content
hydrofluoric
The weight losses due to the etching products quantities were present
large compared
to the impurity
of the samples. The weight changes the coupon surface at both temperatures oxide on the surfaces must be affected completely by the smaller by the melt. area of reaction when
lost weight.
The formation
of the polycrystalline
are probably the result of two or Also, a combination of both gaseous during exposure. in the same
were exposed
were detected
with a sensitivity
Appendix
C-Hot
Corrosion
of Alumina
103
TABLE
IV
BASIC 1OoOoC LOWPP MedPP HighPP sxtal BASIC 7OOoC LOWPP MedPP HighPP sxtal ACIDIC LOWPP MedPP HighPP sxtal ACIDIC LOWPP MedPP HighPP sxtel 1OOOoC 7OOoC
1 HR 0 0 - 0.5 - 0.1
+ 0.4 + 0.1 0 + 0.1 1HR 0.1 0.8 0.5 0.1 24 HR - 0.2 - 0.4 - 0.2 0 24HR - 0.3 -0.3 - 1.1 - 0.3 LowPP MedPP HighPP sxtal = = = =
104
High Temperature
Corrosion
of Ceramics
Material Cycle LOWPP -0.2 2 3 4 5 6 7 a 9 10 11 -0.1 0 0 0 -0.1 0 0 -0.1 -0.1 0 MedPP -0.3 -0.1 0 0 -0.1 -0.1 0 +0.1 -0.1 0 0 -0.1 0 0 0 0 0 0 HighPP -0.3 -0.1 0 0 SXtal 0 0 0 0 0 -0.1 0 0 0 -0.1 0
-0.6
-0.6
-0.5
-0.2
Appendix
C-Hot
Corrosion
of Alumina
105
Material
Cycle 1 2
HighPP 0 0 0 0 0 0 0 0 0
SXtal 0 0 0 0 0 0 -0.1 0 0
3 4 5 6 7 8 9
+0.1
-0.1
-0.1
106
High Temperature
Corrosion
of Ceramics
TABLE VII
RESULTS HP ETCH WT CHANGE ALUMINA [mg/cm2] Exposed Samples Etched in HP BASIC 1000C LOWPP MedPP HighPP ACIDIC 700C 24 HR 0 - 0.7 405 HR - 0.6 - 0.3 0 495 HR - 0.3 - 0.1 - 0.1 24 HR 0 - 1.0
LOWPP MedPP
Appendix
C-Hot
Corrosion
of Alumina
107
The data given in Table VIII were obtained processing performed of the EDS spectra
in acidic conditions
Results,
Acidic
Single Crystal
At 700C limited The wetting of exposure 100 microns Negligible exposure. 100 hours.
was spotty and a wetting the wetting in diameter reaction Aluminum A limited
was detected
in the wash water at 1, 10, 10 and 100 hours of exposure. it is assumed that
contamination
for the single crystal which the samples cyclic exposure, the coupon.
may have been a source of Si. After 495 hours of were observed over portions of
of shallow depressions
a faint etching
at the
was wetted
108
High Temperature
Corrosion
of Ceramics
TABLE VIII Wash Water Analysis, Al203 Exposures 700C Acidic Conditions
Material LOWPP
Element
1 Hour
10 Hour
100 Hour
Na S Si Al Mg Ca co 0** MedPP Na S Si
Al
Ci 0 HighPP
Mb?
co
Na S Si Al ME Ca co 0
sxtal
Na S Si Al I% Ca co 0 19.0 15.0 0.00 0.60 0.81 0.00 3.9 61.0 18.0 15.0 0.46 1.3 1.6 0.00 3.7 61.0 16.0 16.0 0.56 0.16 0.00 0.00 4.4 63.0
**
by stoichiometry
Appendix
C-Hot
Corrosion
of Alumina
109
reaction
A wetting After
angle of 8Owas measured. the wetting angle was approximately 20. The
The solution
of Al These
of significant solution
of cobalt sulfate
amount of Si were observed. of alumina grains throughout A thin discontinuous the drop areas was evident after
The etching
in a drop area is shown in Figure 3 (top). present in the wash water after After portions
1, 10, and 100 hour exposures. small thin patches of individual solution of silica covered In
of the substrate
at 1000C for 24 hours was wetted across with a 12O wetting angle.
Traces of Al and Si
in EDS spectra
the presence
silica-containing
This discontinuous
110
High Temperature
Corrosion
of Ceramics
Figure 3.
High purity polycrstalline alumina exposed in acidic conditions at 700oC or 100 hours {top) and 495 hours {bottom). Etched grains in drop areas and thin patches of silica are shown on washed substrates.
Appendix
C-Hot
Corrosion of Alumina
111
Figure 4.
High, medium, and low purity polycrystalline aluminas (top, middle, and bottom, respectively) exposed in acidic conditions at lOOOoCfor 24 hours. Silicate reaction products on washed substrates are shown.
112
High Temperature
Corrosion
of Ceramics
Medium Purity Polycrystalline Alumina At 700C after 1 hour of exposure a significant amount of Al and a limited amount of Si were indicated by the EDS spectra of drops. Wetting was spotty except for a single large patch of salt covering about a fifth of the coupon area. The droplets were typically 10 to 200 microns across. A wetting angle of 30 was measured. A few isolated patches of cobalt sulfate 10 to 20 microns across and containing Na and a significant amount of Si were observed. After 24 hours exposure the wetting was spotty with some small patches. Substantial solution of Al was indicated by the EDS spectra of salt in drops with a measured wetting angle of 22O, and in droplets containing larger well defined crystals richer in Al with a wetting angle of about 48O. Washing the substrate revealed that fine poorly defined bands a few microns wide, containing Co, Si, and traces of Mg and Ca, skirted large fractions of the perimeters of the large drop areas. In the drop areas, some of the grain boundaries had been etched. The etching of grains throughout the drop areas is evident after 100 hours of exposure. Small globules rich in Si scattered on raised blocky areas 20 to 30 microns across were observed. Aluminum and Mg ions were consistenly present
in the wash water at 1, 10, and 100 hours in much greater concentrations than for the single crystal or the high purity polycrystalline material. The concentration of Mg detected after 10 hours of exposure was relatively large. The concentration of Si ions in the wash water was also much greater, and increased drastically between 10 and 100 hours. After 495 hours of cyclic exposure patches of a continuous layer of well defined globular silica covered portions of the substrate. The etching of grains was apparent.
Appendix
C-Hot
Corrosion
of Alumina
113
The coupon exposed at 1000C for 24 hours was wetted nearly continuously over some portions of the surface and by discrete droplets with a 13O wetting angle in other areas. In both areas, substantial amounts of Ca, Mg, Si, Al, a limited amount of Ba, and traces of K were present in EDS spectra of the salt. Washing the substrate revealed the presence of numerous well defined sodium aluminum silicate and sodium magnesium aluminum silicate crystals scattered across the substrate (Figure 4, middle). Also, smaller sodium magnesium aluminum silicate crystals had formed as platelets aligned in parcels on the substrate. Some crystals were present in groups but in most cases they protruded from grain boundaries where discontinuous etching had occurred.
Low Purity Polycrystalline Alumina At 700C after 1 hour of exposure the wetting was spotty with some larger patches of salt over 500 microns across. Wetting angles of la0 for the larger drops and 40 for the droplets were measured. A significant amount of Al and a limited amount of Si were indicated by the EDS spectra of drops. Blocky crystals about 20 microns across were visible below the salt in several droplets. After 24 hours of exposure patches of salt nearly as large as 2000 microns across wetted the substrate. Substantial solution of Al was indicated by the EDS spectra of salt in drops with a measured wetting angle of 14O. Sulfate drops with a wetting angle of about 500 contained well defined sulfate crystals rich in Al. Some of the crystals contained Al and Mg as well as Si (Figure 5). Washing the substrate revealed that a thin poorly defined layer as large as 100 microns wide containing Co, Si, a significant amount of Mg, and traces of Ca skirted the perimeters of the larger drop areas. In the drop areas a relatively even etching between the grains had occurred. A few isolated patches of cobalt sulfate 10 to
114
High Temperature
Corrosion of Ceramics
Figure 5.
Low purity polycrystalline alumina exposed in acidic conditions at 700oC for 24 hours. Salt crystals containing Al and Mg are shown (top and bottom).
Appendix
C-Hot
Corrosion
of Alumina
115
after
10 hours of
exposure.
of silica globules about 1 or 2 microns across After 100 hours of exposure present many of in the
on fractions coalesced.
wash water at 1, 10, and 100 hours in much greater single crystal or high purity polycrystalline materials.
10 and 100 hours was not as great as that observed material. exposure a thin discontinuous
layer of silica
portions
The etching
of Ca, Mg, Si, Al, and traces Washing the substrate Well defined
of the salt.
revealed
aluminum silicate
quantities
(Figure 4, bottom).
Minor amounts
of Mg
when preliminary
term exposures
the exposure
of cobalt oxide.
116
High Temperature
Corrosion
of Ceramics
Single Crystal At 700C phase separation of the salt occurred within 24 hours of exposure. The wetting was patchy and irregular. A wetting angle of about 20 was measured. The concentration of Al ions was limited to the EDS spectra of a few small drops, where the molten salt had remained in contact with the substrate. Cobalt oxide separated the sulfate from the substrate over most of the area of the larger drops. No reaction was detected after 1 hour of exposure at 1000C. A wetting angle of loo was measured and broad patchy wetting covered large areas of the coupon. After 24 hours of exposure an So wetting angle was measured. Some sodium aluminum silicate was observed after 405 hours of cyclic testing at 1000C. Negligible quantities of Si are present in the as-received
substrate material. The alumina furnace tube is a likely source of the Si.
High Purity Polycrystalline Alumina At 700C phase separation of the salt occurred within 24 hours of exposure. The wetting was patchy and irregular. A wetting angle of about 14O was measured. Traces of Si and limited concentrations of Al ions were indicated by the EDS spectra of small drops where the molten salt had remained in contact with the substrate. A network of globular silica associated with Co formed on the substrate in the perimeter of the larger drop areas. From the morphology of the washed substrate it appeared that preferential solution of grains and growth of Si rich needles had occurred in the drop areas. The growth direction of the needles was constant across the surface of each grain (Figure 6, top). A few larger needles were observed at or near the triple points between grains and contained significant amounts of Ca.
Appendix
C-Hot
Corrosion of Alumina
117
Figure 6.
High purity polycrystalline alumina exposed in basic conditions at 700oC for 24 hours (top) and 1000oC for 405 houl'S (bottom). Oriented silica rich needles (top) and silicate reaction products at grain boundaries (bottom) are shown on washed substrates.
118
High Temperature
Corrosion
of Ceramics
surface
of sodium aluminum
from beneath
of globular silicate
and sodium on
The
of the surfaces
grains is apparent.
Medium Purity Polycrystalline At 700C, phase separation exposure. The wetting was patchy
Alumina of the salt occurred A wetting within 24 hours of angle of about 14O
and irregular.
of small drops where the molten salt had indicated that significant amounts revealed of Ca,
in contact
the of silica
discontinuous
with Co formed
on the substrate
1 hour of exposure
Substantial
of Ca, Mg, Si, and Al were present revealed crystals the presence scattered of across where
well defined
magnesium
aluminum silicate
the substrate
Appendix
C-Hot
Corrosion
of Alumina
119
solution wetting
of the substrate
occurred.
the
in a substrate
covered
crystals. amounts
particularly of
substantial
on the substrate.
sample large peaks for Ca, Ba, Mg, Al, Si and traces EDS spectra of the salt. Rosettes
of K were present
about 10 to 15 microns across were present of Be were present after in the salt (Figure 405 hours of cyclic 7,
in
amounts
exposure.
crystals
were scattered
Alumina of the salt occurred A wetting within 24 hours of angle of about 16O
of small drops where the molten salt had indicated that significant amounts of Ca, revealed over in many of
in contact
in the salt (Figure 8). Washing the substrate with Co on the substrate
1 hour of exposure
a nearly continuous
the salt, both in the salt film and in small groups of well defined rich in impurity ions. Washing the substrate revealed
120
High Temperature
Corrosion of Ceramics
Figure
7.
Medium purity polycrystalline alumina exposed in basic conditions at lOOOoCfor 24 hours. A multi-phase deposit with rosettes containing Ca, Ba, Al, Si, Mg, and K (top) and a typical multi-phase deposit containing Ca, Al, Si, Mg and K (bottom) are shown.
Appendix
C-Hot
Corrosion of Alumina
121
Figure 8.
Low purity polycrystalline alumina exposed in basic conditions at 700oC for 24 hours. Salt crystals containing Ca, Mg, Al, and Si are shown (top and bottom).
122
High Temperature
Corrosion
of Ceramics
containing
a significant
distribution
of larger
globules up to over 2 microns across contained Ca. A random distribution of vugs typically had
a bimodal wetting
morphology
thin discontinuous
was left
behind by the dewetting on the edges of the film. Al ions and traces salt.
sample a substantial
crystals
(Figure 9, top). of poorly defined grains was apparent silicate after 405 hours of cyclic free
Blocky crystals
of sodium magnesium
were predominantly
than after
magnesium
aluminas
by the at the
This effect
is enhanced
by their pronounced
segregation, second
grains in impurity
polycrystalline
Appendix
C-Hot
Corrosion of Alumina
123
Figure 9.
Low purity polycrystalline alumina exposed in basic conditions at 1000oC for 24 hours (top) and 405 hours (bottom). Aluminum silicate crystals containing Ca left and Na right (top) and Mg and Na (bottom) are shown on washed substrates.
124
High Temperature
Corrosion
of Ceramics
on the solubility
of of
by thermodynamic work on
diagrams
as in the previous
(Appendix A). of Na20 in the salt as great as 10-6 to 10e4 at temperatures have been reported. during the exposures is not known. Impurities of of a for the and In
7OOoC and 1000C in an oxygen atmosphere the actual activity of Na20 in the deposits
of the deposits
droplets. increase
the extent
and promoting
in the introduction.
polycrystalline
from the analysis of the wash water below 2.0 for Since no
that the atomic sodium to sulfur ratios were significantly (Table VIII). This is true for all four aluminas.
it is likely that SO3 from the of the melt shifted formed toward in solution
enriched
as the composition
being less acidic because in the melt. The presence all exposures
aluminum sulfate
for
in these conditions
COnSiStent
A12(S0.+)3.
as a soluble reaction
product
in
of SO3 than
Appendix
C-Hot
Corrosion
of Alumina
125
Al3(SO4)3.
sulfate
crystals
in Figure 5, contain
substantial
of these crystals
on the two least pure aluminas. silica was present on portions of all of the
After 495 hour cyclic exposures substrates but the single crystal
At 700C in acidic conditions of alumina is the formation (Appendix A). A mechanism term exposures is proposed substrate-salt negative
the principal
reaction
which occurred
that the acidic solution of alumina lowers the pressure interface below that at the salt-gas interface,
of SO3 at the in a
resulting
solubility
gradient
for silica across the molten salt layer and satisfying silicates are dissolved from the toward
the Rapp-Gotto
criteria
grain boundary areas on the substrate. the salt-gas precipitation interface they advance
solubility
and the
The coalesence,
growth,
and coarsening of
of the SiO3 which is precipitating globular silica patches precipitation salt interface on fractions
surface.
of SiO3 in the melt occurs some distance the size and shape of the patches of the substrate. of the reaction of silicates products present
in
126
High Temperature
Corrosion
of Ceramics
Figure 10.
Medium purity polycrystalline alumina exposed in acidic conditions at 700C for 495 hours. Globular silica (top) and etched grains (bottom) are shown on washed substrates.
Appendix
C-Hot
Corrosion
of Alumina
127
S/G
Distance
O/S
S/G
Q = Impurity Silicate Phases R = Globular Silica Reaction Product S = Sulfate Deposit Containing (Al, Mg, Si) A = Alumina Grains at Substrate Surface Solution Reaction at A: 3NagSO4 + Al303 = Al3(SO4)3 + 3Na30 B = Intergranular Attack Solution Reaction at B: Silicate + Nag0 = Na3O*xSiOg (in sulfate) C = Away from Oxide-Salt Interface where Melt is More Acidic Precipitation Reaction at C: Na3O.xSiOg (in sulfate) = xSiO3 + Nag0 (in sulfate) (Between grains and impurity phases at substrate surface Reaction A + Reaction B: 3NagSOq + Al303 + xSilicate = Al3(SO4)3 + 3NagO-xSi0g) Figure 11.
Schematic diagram of the morphology of reaction products on polycrystalline aluminas exposed in acidic conditions at 7OOoC.
128
High Temperature
Corrosion
of Ceramics
of refractory
oxides in molten
during the alloy induced fluxing of of Al3(SO4)3 and MgSO4 occurs solution of silicates, impurities raising in the
concomitant
of the substrate
results
in a substantial
in the connectivity
model it is likely that the rate of reaction of reactive species (i.e. SO3) from the salt-gas
This assumes
more slowly than the dissolution at the substrate however, surface. there
alumina grains or of impurity could not be measured that it is correct. detected exposed effect
The kinetics is some evidence of Al were of the samples has greater for
As mentioned
in the drop edges than in the bulk of the salt on several in low temperature on the chemistry acidic conditions. The SO3 atmosphere
the distance
transport
of SO3 to interface
were wetted
by
polycrystalline
exposure, on
were observed
Appendix
C-Hot
Corrosion
of Alumina
129
The silicates
of the polycrystalline
materials silicate
were shown in Figure 4. A fine poorly defined of the drop areas on the high impurity crystals containing substantial
amounts silicate
of
Sodium aluminum
of Ca cover portions
In the drop areas on the washed substrates in substantial quantities, the substrates
are etched
similar exposed at 700C in acidic conditions. intergranular corrosion which had been observed
700C was absent (Figure 12). The salt deposits on the two least pure materials exposure. contained significant of most of the in
amounts of Al, Si, Mg, and Ca after smaller salt droplets the salt as sulfates atmosphere do not contain (Figure 13, top).
Al or Si, so the Ca and Mg are in solution Since the partial pressure of SO3 in the
at 1000C was less than at 7OOoC, the formation by thermodynamics, but was observed the formation
This is believed
of Al2(SO4)3, could result from local decreases interface in areas of copious silicate on the unwashed
growth.
salt deposit
is characteristic
130
Figure 12.
Medium purity polycrystalline alumina exposed in acidic conditions at 1OOOoC for 24 hours. Sodium aluminum silicate reaction products and etching of drop area are shown on washed substrates.
Appendix C-Hot
Corrosion of Alumina
131
Figure
13.
Low and medium purity polycrystalline aluminas (top and bottom, respectively) exposed in acidic conditions at 1000C for 24 hours. Sulfate crystals containing Ca, Si, Al, and Mg (bottom) are shown.
132
High Temperature
Corrosion
of Ceramics
reaction
product
morphology
must in the
at surface
heterogenieties
microstructure
over different
of a network
occurred
triple points of the microstructure. products as follows. pressure grains. described earlier
As the alumina grains are dissolved and the Nag0 activity Nap0 activity
decreases
increases
The increased
promotes
the transport
phases in the low purity aluminas, sodium silicates sulfates. and alumina the acidity As the and a
as well as calcium
and magnesium
This maintains
the dissolution
is quite uniform
than at iOOC. At lower temperatures, mechanism cooperate attack operates but the transport
700C under acidic conditions, is slower and the acid and basic leading to strong
mostly near the grain boundaries (Figure 11). in basic conditions formation
inter-granular
of the exposures
amounts
from
The formation
Appendix
C-Hot
Corrosion
of Alumina
133
r I0
I I
_ _----
,s 00 i
I I
L-_-_-_-I
+ -+
Transport Na20
of
Transport
so;
of
Q = Silicate Reaction Products 0 = Original Substrate Surface Multi-phase Deposit R = Bulk of Deposit Sulfate Containing (Al, Mg, Ca, Si) S = Other Phases Complex Reaction Products Containing
Silica
A = Alumina Grains at Substrate Surface Solution Reaction at A: 3Na3SO4 + Al303 = Al3(SO4)3 + 3Na30 B = Intergranular Areas at Substrate Surface Reaction at B: Na3SO4 + Mg-, Ca-, Al- silicate = NaSO*silicate + MgSO4 + CaSO4 + Al3604)3
Figure 14.
Schematic diagram of the morphology of reaction products on polycrystalline aluminas exposed in acidic conditions at 1000C.
134
High Temperature
Corrosion
of Ceramics
of CaS04 in the salt on the two lower purity aiuminas, on samples exposed in acidic conditions attack at the same of the impurity
which
(700C),
are
Because of the depletion formation generated sulfate. In basic conditions aluminas occurred. emphasizing
of cobalt oxide, it is likely that the initial dissolution at the aluminum oxide-salt interface
wetting
the influence
triple points between Even after the single crystal polycrystalline boundaries
of the two least pure substrates. negligible formed reaction was detected on
silicates
of the
materials.
at triple points on the high and sodium magnesium A variety of multiafter of sulfate
morphologies
These deposits
as impurities
Appendix
C-Hot
Corrosion
of Alumina
135
reaction
product
in the deposits
While this may be the case for the single crystal polycrystalline formation materials cannot silicates be analyzed
without
consideration
of aluminum
which occurred
This is obvious when one considers on the two least pure materials.
phase morphology
Relatively
small weight gains and losses were recorded Intergranular corrosion resulted
at
in the
grains of the two lower purity substrates. indicate that the formation
and photomicrographs
of alumina
and the solution of alumina were not as extensive in acidic conditions impurities at the same temperature. in the melt towards promoted
It is proposed
by the atmosphere,
at 1000C under both atmospheres of the melt under acidic conditions the cooperative
reactions forming
initiate various
of the silicates
formation
acidic conditions,
leading
mostly to intergranular
136
High Temperature
Corrosion
of Ceramics
REFERENCES 1. Wachtman, John B., et. al., An Evaluation of Needs and Opportunities for Fruitful Fundamental Research in Ceramics, Ceramic Bulletin, Vol. 57, No. 1 (1978), pp. 19-24. Johnson, Project, D.R., et.al., Ceramic Technology for Advanced Heat Engines Ceramic Bulletin, Vol. 64, No. 2 (1985), pp. 276-280. Cummins Engine Company, Private Communication.
2. 3. 4.
T. Yonushonis,
Goebel, J.A. and F.S. Pettit, Na2SO4 - Induced Accelerated Oxidation (Hot Corrosion) of Nickel, Metallurgical Transactions, Vol. 1 (1970), pp. 1943-1954. Giggins, C.S. and F.S. Pettit, Hot Corrosion Degradation of Metals and Alloys - A Unified Theory, Pratt and Whitney Aircraft, Report No. FR11545 (1979). Goebel, J.A., P.S. Pettit and G.W. Goward, Mechanisms for the Hot Corrosion of Nickel-Base Alloys, Metallurgical Transactions, Vol. 4 (1973), pp. 261-278. Jose, P.D., D.K. Gupta and R.A. Rapp, Solubility of Alpha - Al203 in Fused Na2S04 at lOOoK, J. Electrochem. Sot., Vol. 132, No. 3 (1985), pp. 735-737. Shi, D.Z. and R.A. Rapp, The Solubility of SiO2 in Fused Na2S04 at 900C, J. Electrochem Sot., Vol. 133, No. 4 (1986), pp. 849-850. Kim, G.M., The Effect of Contaminants and Solubilities of SiO2 In Fused at 1200K, Masters Thesis, University of Pittsburgh, 1982.
5.
6.
7.
8. 9.
Na2S04
10.
Rapp, R.A. and K.S. Goto, The Hot Corrosion of Metals by Molten Salts, Symposium Fused Salts, Electrochemical Society Meeting (Pittsburgh, 1979). Rapp, R.A. and K.S. Goto, Fused Salts, (J. Braunstein eds.), Electrochemical Society, 1978. and J.R. Selman,
11.
12.
Birks, N. and G.H. Meier, Introduction to High Temperature Metals (London: Edward Arnold, 1983), pp. 146-158.
Oxidation
of
13.
Shores, D.A., New Perspectives on Hot Corrosion Mechanisms, H&$ Temperature Rapp, R.A. (ed.), (Houston: National Association of Corrosion Eng., 1983), pp. 493-501. John, R.C., Corrosion of Metals by Liquid Na2C03, State University, 1979. Doctoral Thesis, Ohio
14.
Appendix
D-Hot
J.R. Blachere,
INTRODUCTION Silicon nitride and silicon carbide are two ceramics materials considered seriously for structural applications at high temperatures. They form a protective In
silica scale in oxidizing atmosphere which is quite stable thermodynamically. highly corrosive environments such as those prevailing in incinerators or gas turbines burning low grade fuels, SiOz may be attacked due to the pressure of SOS, CO2 as well as oxides of metallic impurities (e.g. NagO, Na$O& It has
been shown in this program that Nap0 is the corrosive agent in the hot corrosion of silica in contact with NagSO4 deposits (Appendix B). In particular the sodium oxide promote devitrification and the crystalline layer formed tends to spa11 under temperature cycling. Using the results for silica as foundation, the
mechanisms and the extent of the hot corrosion of silicon nitride and silicon carbide must be established.
EXPERIMENTAL PROCEDURE The general procedures have been discussed in previous report&) and in
previous parts of this report. The materials are shown in Table I of the main report. High purity materials (single crystal silicon carbide and CVD silicon nitride) were studied in detail. Morphological studies of the corrosion were performed on these materials and representative engineering materials usually characterized by a significant level of impurities added during processing particularly as sintering aids. The two atmospheres used throughout the experiments were SOg-02 mixtures with a total pressure of 1 atmosphere. One contained 1% SO2 initially, which generated a pressure of 1.5 x 1W3 atm of SO3 at 1000C. The other was pure oxygen. The gases flowed at the rate of 1 cm5/s.
137
138
High Temperature
Corrosion
of Ceramics
sulfate
loading of 5 mg/cmz
on polished
substrates. on the
The surface
were varied
in the studies
varied from 1 hour to 168 hours, with The usual characterization strongly on the features by
times of 24 and 168 hours for all materials. were used as described electron microscope earlier.
They depended
of salient
based on X-ray spectroscopy, where used for scale of thicknesses on cross sections in the SEM. in
under 1 pm. Above 1 urn they were measured These experiments particular surface were supplemented
X-ray diffraction,
weight change
Analysis
RESULTS AND DISCUSSION The results morphologies, carbides(1~3~4). conditions of 24 and 168 hours exposures, earlier after in particular the product and silicon
are compared
in Fig. 1 and table I. For the purer materials of oxide formed oxidation, increased
the thickness
trend is no longer clear for the more impure specimens dominated the sulfate by the impurities. was not depleted Under basic conditions on any samples
it must be emphasized
that
before
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
139
168 hour:
sic-c
Sic-Si
Si3
IV,
Figure
1.
Thickness of layers formed for the oxidation, corrosion of C-side and S-side single crystal CVD silicon nitride after 168 hours at 1000C sulfate drops for acidic corrosion). Note that increase as OxA&.
acidic and basic hot silicon carbide and (measured between oxide thicknesses
140
High Temperature
Corrosion
of Ceramics
Table I Thickness
Gaseous SC SC -
(urn)
si
c
0.11
12-25
SC SC -
1.1 1.2 (1.8)* 0.61 0.3 (1.41) 4.3 - 7.1 1.3 (2.1) 7.7 -- 1.4 (24 hrs) -6 1.5 - 2.1 2.4 - 3.2
Values in parenthesis are for spherulites under sulfate drops. For acidic corrosion the values not parethesis were measured between the droplets. 0.045 by WDS, 0.06 by ellipsometry, 0.09 SEM
**
SC SC -Si
= = = = = = =
silicon nitride
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
141
exposure
to the corrosion.
Experiments
on preoxidized
specimens
scales (>lO um)(3) and on bulk fused silica(s) consumption before of the sulfate on these materials
for the reaction + SO3 (1) and the silicate indicative with Impurities on of a
+ SiOq = Na silicate
could be detected
as the silicates
in equilibrium composition.
are richer
(Mg silicates,
For the purer materials while reaction which controls silicate Therefore samples oxidized materials
not preoxidized
that
(1) occurs under basic hot corrosion, the amount of silicate layers decreases formed
and sulfate
the scale is protective. not only formed more as indicated not preoxidized.
which was water soluble but they weight gains (after scales washing) than the same were formed at 14OOoC,
and cracked
application
of the salt and were not protective Under basic conditions reacts
during the hot corosion. wets completely the sample surface and
the sulfate
with the scale as it forms leading to very thick silicate (table I). This has been documented acceleration of oxidation
a transient
with injection
142
High Temperature
Corrosion
of Ceramics
Table II Wash Water Analysis From Basic Hot Corrosion Material Si02 At% (PO)(l) 25 52 22 50 0 53 -_ (PO) 59 SO3 At% 33 0 27 2 62 12 -_ 13 (168 Hours, 1000C) Na20 At% 42 47
SC SC
SC SC
48
52
38 35 -27
SC SC
= Silicon Carbide
single crystal
= CVD silicon carbide = CVD silicon nitride = Sintered silicon nitride in 02 for 10 hours at 1400C
= Preoxidized
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
143
With Na2S04 the reaction hours. Also the extent formed thicker
in 168
by impurities
materials carbide
on oxidation
to stabilize
in a previous
magnesium
and yttrium
forms magnesium
In general silicate
layers,
layers and
were quite thick for hot pressed were similar in morphology Early in the research under acidic conditions conditions. understand and establish crystal
silicon nitride
and sintered
silicon nitride
under basic conditions. that some hot corrosion corrosion under basic in order to occured
in addition
times
were needed
mechanisms
silicon carbide
were exposed
acidic conditions
and Na2S04 loading were varied as necessary. the sodium sulfate The wetting does not wet the siliconnitride
Under acidic conditions and silicon carbide both materials. variation completely.
angle was of the order of 40 for was bimodal (fig. 2). There was a but it was not consistent However the values
144
High Temperature
Corrosion
of Ceramics
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
145
observed
were greater
than measured
on fused silica under similar conditions. of time is shown in figure 2 for single as a layer around 120C to those in fig. 2 were As shown in the figure the as a result of a coarsening and they are usually (fig. 2). and CVD
of the deposit
as a function
silicon carbide.
The deposit
at 1000C.
10 to 24 hours by bands free of small droplets of acidic corrosion for single crystal
silicon carbide
3-5 for times from 1 to 24 hours at 1000C. of vitreous droplets. oxide measured in in The
and generally
lines as function
a parabolic
of the square root of time in figure 3b. The lines for oxidation workers and interpolated from previous experiments
indicate
the salt droplets. applied per unit area of surface surface loading. was varied
The amount of sodium sulfate from 0, 0.1 and 5 mg/cm2, for oxidation, independent
the standard
scale between
146
High Temperature
Corrosion
of Ceramics
1000-
CVDSN /
/ /
-0
2 J;
v)
5 i
/ /
/
Hot
Corrosion
500.
/
/ / /
---Q
Oxidation
168 TIME(HR)
Figure 3.
Thickness of scale formed in the acidic hot corrosion silicon nitride at 1000C (5mg/cm2 of NaZSOq). (a) linear plot
of CVD
Appendix
D-Hot
Corrosion
of Silicon
Nitride
147
/ / / / / //
/O
01
I--_-_-l
d
I
I
I.0
5.0
VT
9.0
(h OUTS ) L
13.0
Fimre
3.
the drops of
148
High Temperature
Corrosion
of Ceramics
C-side
1.0
5.0
7rme
12 (/+%)
Figure
4.
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
149
H(t) -0
---
--
--
--
A--I
5.0 TIME *H *I
Figure
4.
(b)
Parabolic plots comparing of the data of figure 4(a) for single crystal silicon carbide (solid lines) with the oxidation of silicon (D + G )8 and single crystal silicon carbide (for carbon side () and silicon side (A) (Harris) 22 at IOOOoC.
150
High Temperature
Corrosion
of Ceramics
O-SC(C) ASC(Si) /
____I_
0
O-CVDSN
0 0
A i-.---. I3
l:o
l/2 I/2
510
TIME
(HR
Figwe
5.
Thickness of spherulites (oxides) formed under the sulfate droplets for the C-side and Si-side of single crystal silicon carbide and CVD silicon nitride (Acidic hot corrosion at 1000C). The solid line corresponds to the data of figure 4 for the acidic hot corrosion of C-side silicon carbide.
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
151
surface samples
loadings
on the
with 0 mg/cm2 loading but they were exposed with the other samples, through vapor transport. The independence salt activity a of
and they picked salt apparently the data on the surface maintained constant through aNa
loading is consistent
with a constant
the vapor phase and a fixed pSOS (1.5 x 10e3 atm) setting at 1000C according to the reaction
Na2S04 = Na20 + SO3 Kg = aNa20.pS03/aNa$304 No sulfate could be detected on the vitreous scale by SIMS and ISS, but sodium the formation This conclusion in detail of a and
the role of sodium in the acidic hot corrosion but it underlines in basic corrosion.
will be discussed
in acidic corrosion
The rate of oxide build up under the sulfate corrosion on the purer silicon nitride except
droplets
formed
is much greater
for C-side SIC as shown in fig. 5. The silica cristobalite material spherulites. at the center parabolic The evolution of the behavior which
measured
after washing,
follows approximate
of silicon
material
152
High Temperature
Corrosion
of Ceramics
The data of figure 3a, is fairly linear with an intercept axis at about 80 A. This suggests with the present corrosion although electronic experiments.
an initial oxide layer which is not consistent were cleaned in HF prior to the hot
The samples
experiments
so that an oxide layer close to 100 A is not expected as established in the like the
some oxygen and water are always readsorbed, industry. The silicon carbide samples y-intercept
by X-ray spectroscopy
is also pushed to its limit with the very error in the measurements explanation does not is
but a systematic
Another
is that oxynitride
measurements
thicknesses
is much higher than 1.46, are larger than those of were not
The corresponding
by X-ray spectrometry
(Oku). IR measurements
could not reach the major peak for the silicon did not appear sensitive Tressler reflection to the presence of
silicon oxynitride
et al. recently
reached
The thickness
were generally
by X-ray
than measured
on cross sections
the thicknesses
measured
Appendix
D-Hot
Corrosion
of Silicon
Nitride
153
X-ray (4) A CVD SN (1) CVD SN (2) CVD SN (3) 450 120 130
(1)
(21
CVD silicon nitride exposed to gaseous corrosion balance 02 for 168 hours at 1000C. CVD silicon nitride at 91OOC. CVD silicon nitride at 955OC. X-ray spectrometry exposed exposed [2] courtesy Terry OKeefe to acidic hot corrosion to acidic hot corrosion
Westinghouse
154
High Temperature
Corrosion
of Ceramics
in the SEM on very thin layers such as those formed and subject to errors but the trend in the layer formed on the by
are difficult
is consistent
obtained
without overlayer
Si3N4 + 3 02 = 3 Si02 + 2 N2 giving very steep linear kinetics reaction 3, the pressure favoring
(3)
for short times in figure 3. As a result of rises and the oxygen potential of oxynitride decreases the at
kinetics(l3). thickness
The sequence
of oxynitride
instead
the thickness
are responsible
shape of the plot of figure 3a. The scale grows more slowly after thickness after 168 hours was measured
The
as 1 pm by X-ray spectroscopy
and 1.2
urn by imaging of cross section would be required became parabolic to establish after
in the SEM. However data for longer times yet if the growth had reached steady state and at lower
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
155
temperatures
to determinethe because
activation
energy of the
of the linear process early kinetics. The formation has been proposed
of the complexity
workers but often not demonstrated which could not be interpreted (141, others
a combination
of ESCA
that an oxynitride
was formed
of silicon nitride.
Others report
oxidation(l@.
by thermal
oxidation
of silicon nitride
by thermal
et a1.(gy13) performed
on oxidation
of silicon and silicon nitride SIMS, FTIR, ellipsometry under the silica. for a layered
formed
kinetics
layers of oxide scale to oxidize at the gas-scale oxygen must diffuse through two layers,
interface.
interface. for
It
as generally
accepted
156
High Temperature
Corrosion
of Ceramics
of silicont lg).
Since diffusion
through
in which y, x, Kpoxy, Kpsil are the thicknesses formation respectively. on silicon nitride of individual
for the
and if y is small Kp* = Kpsil. Then the overall of a silica layer forming distinct oxide layers. oxynitride directly
on silicon nitride.
This discussion
assumes layer
To a first approximation
of a graded
of vitreous
composition.
of oxygen decreases.
is expected
content
of the diffusion
coefficient
with the graded layer found by ellipsometry of the scale found by X-rays.
and the of
graded structure
this may
be due to the fact that steady state was not achieved samples. The conclusions
yet in the ellipsometry with the extensive except that they conditions. constants of
work of Tressler
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
157
between
of oxygen
through the silicon oxynitride kcal/mole between for the parabolic oxygen molecular
The 110-120
energy seem to rule out the rate control through vitreous silica. While to
oxygen transport,
particularly
is expected
be slower and with a higher activation analysis based on the formation controlling.
energy than for fused silica the previous scale suggests that it cannot be rate
of layered
Discussion
of Silicon Nitride is very slow. The larger oxidation added for sintering rates(20) as shown and
in this research
high purity silicon nitride (CVD) were thinner single crystal conditions. or CVD silicon carbide This may not establish in this respect
is intrinsically as stated
but it is certainly
not inferior
The oxidation
of silicon nitride
is much slower than that of silicon although and it appears oxygen range but for silicon are similar
in both cases in that temperature different and not established already discussed
mechanisms
are apparently
The general
features
of acidic corrosion
158
High Temperature
Corrosion
of Ceramics
increased
modifies
this oxidation.
of the Na20 depends on its activity 2. From the equilibrium by the SO3 pressure constant
in the sulfate
by reaction
as described
(here at 1000C, a pSO3 of 1.5~10~~ atm was selected) reacts little with the silica formed
oxidation
or silicon carbide
as indicated formed
angles on bulk silica(5) and on the scales above. Some penetration by the reaction = 2 -Si-O- + 2 Naf aNa20.Csiosi
as reported loosening
the network
Na20 + -Si-O-Si-
(6)
also to the oxygen bridges of the oxynitride. molecular scales, diffusion of oxygen and a higher rate of interface
As a result of this opening of the network nitrogen oxidation. is increased through the vitreous
It is likely that the sodium ion diffuses as proposed for silicon, transition
where it is reduced
it was proposed
structural
of the oxynitride
in the scale with the electron Only very small amounts to reaction
is not conclusive.
6 in order to increase
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
159
rate of oxidation
is increased
between
the droplets
above.
A very thin (slOA) layer rich in the droplets, by surface it did not contain diffusion or vapor any
sodium was found by ISS on the scale between sulfur. transport This adsorbed layer fed by the droplets
would supply the sodium into the glass. under the sulfate starts droplets oxidizes more rapidly After than
The silicon nitride outside and crystallization exposure out(l). droplets. the surface
24 hours of stood
and washing off the salt the region which were under the droplets The corresponding The crystal-glass of the sample. thicknesses interfaces in Table I were measured provide high diffusivity outside the
in the intercrystalline
in which sodium and other impurities Thus the crystallization thicker provides
regions of the
shown in figure 6. for pure materials, vitreous scales are formed occurs
the droplets
judged by a few very small spherulites exposure. nucleation The difference started
in growth rates
is illustrated drop.
in figure 6 where The growth away from the in detail in appendix (or
drops appear slower yet than in this example. A, the crystallization aNa20) in the structure, oxide reaction of vitreous silica depends
As discussed
of defects 6) provides
160
High Temperature
Corrosion of Ceramics
~6.
Acidic hot corrosion of CVD silicon nitride at lOOOoC. Under the sulfate drops (washed off in micrographs) the oxide crystallizes as spherulites. After 24 hours the spherulites coarsen to globular arrays.
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
161
occur preferentially at the interface between the salt and the sulfate where aNa is highest. Under acidic conditions, in close proximity to the atmosphere
(outside the sulfate droplets) the gaseous potentials remain close to pSO3~1.5 x 1V3 atm and ~02~1 atm and the aNa is low. Under the sulfate droplets, the
oxygen and SO3 are more difficult to replenish as they are depleted by the oxidation reaction at the silicon nitride-oxide or sulfate interfaces. equation (2) and so3 = so2 + l/202 K7 = (p02)li2 .pSO2/pSO3 (7) Based on
The activity of Na20 is raised under the sulfate droplets (it is higher than outside) and the crystallization is promoted under the droplets.
Acidic Hot Corrosion Of Silicon Carbide The morphologies of the samples of single crystal silicon carbide after exposures were described previously (lp3) and for short times are generally similar to those described above for the silicon nitrides (see fig. 2). They are characterized by the formation of sulfate droplets separated by smooth vitreous regions. The spherulitic growth of cristobalite occurs rapidly under the drops and it is generally similar to the behavior observed on the silicon nitride (fig.6). Preferential attack occurs also under regions between the cristobalite crystals as shown in Figure 7 in which the silicon oxide has been etched away. The kinetics of acidic hot corrosion for single crystal silicon carbide at 1OOOoC are plotted as a function of the square root of time in figure 4 and they fall on two distinct lines both higher than the oxidation data of Harris(22) sketched on the figure. The two lines have been associated with the carbon side and the silicon side of the single crystal. In agreement with the oxidation results
162
High Temperature
Corrosion
of Ceramics
of Harris and Tressler et al.(g) the carbon-side is the fast or thick side and the silicon-side is the thin or slow side. Hot corrosion data was obtained also at 955OC and 910 oC. The data at 910C are plotted in figures 8 and 9 and both sides still show parabolic behavior at that temperature. Activation energies for
the growth of oxide scale in the temperature range 910-1000C were determined from the parabolic constants B* calculated from x2 = Bt in which x is the scale thickness at time t. The thickness measurements were all performed by one method (X-ray spectroscopy) in order to minimize the influence of systematic errors. The plots of figures 10 and 11 give activation energies of 34 and 118 kcai/mole for the carbon-side and the silicon-side, respectively. Silicon carbide is a polar crystal and has different basal surfaces (0001) and (0001)(23) which can be differentiated by a number of methods based on different surface morphologies after high temperature wet oxidation or attack by fused salts(24). The present hot corrosion experiments resulted in milder attack but it was clear after extensive experience that slight differences in morphologies existed between the two surfaces which allowed their identification. Namely
after hot corrosion for long times, the silicon side between the droplets appeared as-polished except for some interference colors on the thicker scales and the carbon-side was rougher, duller in texture. Different oxidation behaviors have
been reported(g*22) for the two sides. This difference in behavior was no longer apparent at high temperatures (1400-15OOoC). Similar basic hot corrosion behaviors were found for the two sides in this research at 10000C(1~3~4(. Under acidic hot corrosion, the vitreous scale between the droplets grows faster on the
*B was determined also by the Deal Grove formulation but it gave the same results since the data plotted as functions of t1/2 falls on good straight lines extrapolating through the origin (fig. 3,7,8).
Appendix
D-Hot
163
~7.
Acidic Hot CorroSion 0( silicon carbide single crystal (lOOOOC). The substrate was attacked under the spherulites as shown after disSOlution 0( oxide in HF.
164
High Temperature
Corrosion
of Ceramics
31OC KINfllCS
5000
4000
3000 3 x I? 5 0 5
2000
000
0 0.00
2.00 4.00 6.00 a.00
SQRT(TIME(HR))
Figure 8.
Kinetics of acidic hot corrosion of C-side single crystal carbide at 910C (parabolic plot). Note reproducibility
silicon of data.
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
I65
91OC KINETICS
600
SI
500
4oc
z x Y $ I! F
300
200
100
0
0 2.00 4.00 SQRT(TIME(HR)) 6.00 8.00
Figure 9.
Kinetics of acidic hot corrosion of Si-side single crystal carbide at 91OoC (parabolic plot).
silicon
166
High Temperature
Corrosion
of Ceramics
i 3.80
13.60
13.40 G 5 1320
13.00
i 2.80
0.82
0.84
Figure 10.
of C-side
single crystal
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
167
ACTIVATION 13.0
ENERGY
St
12.0
1 1 .O
10.0
8.0
3.78
0.80 1000/-T
0.82
0.84
Figure
1.
168
High Temperature
Corrosion
of Ceramics
carbon side than on the silicon side as reported on figure 4 both sides show well defined results the carbon-side was parabolic
However
parabolic
and the silicon side had linear kinetics For the hot corrosion the apparent
of the slow side (Si) is much larger than that of the fast
of Silicon Carbide
under Acidic
In order to discuss the hot corrosion conditions oxidation. dependent in between the sulfate
of silicon carbide
drops, it is important
to understand
of silica scales
of oxygen through
in the oxidation is
of silicon carbide
and since the size of the two molecules Considering recent the
of oxygen is controlling
of silicon carbide
at low temperatures
of C-products
in the oxidation
energy (123kJ/mole)
However
associated
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
169
The kinetics
oxidation that
assuming
processes
diffusion
diffusion diffusion
specifically
at low temperatures
dominates
1350-1500C.
experiments slower
to that of silicon,
linear dependence
of B on the oxygen pressure (gl. The molecular the kinetics. At low oxygen pressure through the scale. for the complete
a vacancy
mechanism
in terms
then mechanisms
will be proposed
Proposed
It addresses: the different rates of oxidation and C-side silicon carbide the enhancement role of Na20) the activation of oxidation energies and hot corrosion for Si-side (the
170
High Temperature
Corrosion
of Ceramics
It is based on:
the variation in stoichiometry of vitreous silica with its formation under different ~02 at the reaction interfaces. This variation in stoichiometry and the associated defect structure modify the transport of oxygen through the scale the oxidation results of others summarized above the oxygen transport model of Tressler and Speartg) applied to lower temperatures the surface analysis results of Muehloff et a1.(26) our acidic hot corrosion results.
Defect Structure and Stoichiometry of Silica Vitreous silica is not often considered non-stoichiometric in the glass
literature although glassy structures which are great solvents allow greater variation in composition than the corresponding crystals. It is known that the
silica formed under oxygen deficient environments crystallizes more slowly than similar silica formed under more oxidizing conditions(27). Silicon rich silica has
been prepared in the electronic industry. Fratello et a1.(28) discussed the influence of OH impurities on the crystallization of silica on the basis of the defects and stoichiometry of vitreous silica. While the defect structure of
vitreous materials is relatively controversial for strpctural defects and mass transport, the electronic defects have been studied in great detai1(2gy30). In general it is accepted that the SiOg glass structure is built with SiO4 tetrahedra connected through oxygen bridges to form a continuous random network. Thus structural defects may extend to any kind of orderin$31). The major defects in
silica have been reviewed by Motttao); they are dangling bonds in particular the well known single bonded oxygen, but also 3 bonded silicon. They include also oxygen vacancies in oxygen bridges as well as Si-Si bonds. The single bonded
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
171
glasses
to accommodate
modifying
conditions. thermally.
8 generates
2 Si-0-Si = Si- -Si + ZSi-0 nil = Vo + 2SiO K8 = [Vo] [SiO12 = Cv [SiO12 in which [V,] = C, is the concentration network. equation Under low oxygen pressure so familiar for crystalline of oxygen vacancies oxygen vacancies oxides
(8)
00 = Vo + I/2 02 + 2e K = [e12 [Vo] [~02]~/~ = 4Cv3 [~02]l/~ where the vacancies supplied directly assumed are formed at the oxide-gas interface and the oxygen is [e] is
by the atmosphere
concentration
to be supplied
so that [e] = 2 Cv. It is more molecules are dissolved of dissolved Reaction into the oxygen 9 occurs oxygen
appropriate
here to consider
interface
Henrys law.
inside the scale under pO2 lower than at the interface is that dissolved in that environment Si-0-Si (concentration
Kg = 4Cv3 Cm112 in which the electronic includes the dissolution equation charges are associated with silicon dangling The formation bonds and Kg in
of electrons
However, bonds on
silica in trapped
172
High Temperature
Corrosion
of Ceramics
and negative
during anodization(32). structure is built up on 5 and 6 member These rings provide network-modifying over 3A(33). rings which are tortuous paths for the than the of a
of gas molecules
size of the windows in the structure, scale the growth formation flux may introduce channel
a little
anisotropy
to this structure
of more aligned
less
from observations
in the TEM(35).
Oxidation
of Silicon Carbide of silicon carbide at the reaction interface except generates in presence of this
The oxidation very low oxygen pressures of free carbon, calculation considered carbon. interface defects:
which cannot
be calculated Sic-SiO2-C.
exactly
equilibrium
The results
which gives pO2 of the order of 10m30 atm at 1000C can be a lower bound for the oxidation of materials not containing excess
If active
oxidation
is expected vacancies,
Thermal
8 will suppress
of single bonded
CJoxid = mNB/2x in which CJoxid is the sum of the oxidant oxidation and N, B, x are the number fluxes which contribute
of oxygen molecules
incorporated
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
173
of scale, constant
constant
respectively. oxidants
The
Two types of contribution which molecules silica and network defects. mechanism Assuming equation of oxygens
of oxygen, channels,
in the vitreous
contribution
transport
(11) the vacancy Therefore and molecular the kinetics contribution of of the two
in which Dv, Dm, Cv and Cm are respectively diffusivities oxidation transport and concentrations, of silica formers respectively.
equations
pressure
the quantity
9 the concentration
to favor transport
by a vacancy
at low pressures
oxidation
the oxidation
is assumed
to be rate controlling. of silicon in 1 atm of dry oxygen, and equation 11 becomes to pO2 and it has for the
the oxidation
is dominating
The parabolic
B is proportional
Q = 28 kcal/mole
which is similar
to that measured
174
High Temperature
Corrosion
of Ceramics
permeability
of molecular
silica(331.
As discussed is
later, slightly
if one assumes
that the silica scale formed because it was formed Although than DvCv.
oxygen deficient
under a low pO2 (Cm decreased), than for the oxidation transport of oxygen
9, Cv increased.
it is smaller Molecular
11, B is smaller
has activation
energy (27kcaVmole)
oxygen pressure
to that measured
the other hand if the scale on the silicon-side under very low oxygen pressure, and Cv increased network diffusion activation
of silicon carbide
Cm is greatly
conditions
of formation
and carbon-side
silicon carbide
silicon carbide
oxidize
for long periods of time at lower temperature the two sides maintain their separate
as they oxidize.
experiments
and after
(sputtering)
stabilities
Under ultra high vacuum the carbon side was observed to graphitize
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
175
that temperature
was extensive.
The two
their relative
during the early oxidation mixing due to sputtering. explained the evolution
for thicknesses
This carbonization
of the reaction Sic + l/2 02 = CO + Si Under 1 atm of oxygen, sides is maintained however it is assumed that this difference (12) in stability of the two
In the pO2 range (s~O-~O atm) which is expected the prominant possible vapor specie in the Si-0 system(36).
As shown in figure
12, it is
by this reaction
to always maintain
the order of the Si and carbon atoms of the The SiO is but not at
thus maintaining
and the silica forms as a rough porous scale and a rough interface oxidation reaction. As the oxidation is filled. proceeds the SiO
under higher pO2 than is found at the interface stoichiometric. On the Si-side, oxygen is adsorbed penetration between the silicons
and it is proposed
that by
first on the silicon (figure 13) and the carbon is oxidized this oxide layer always maintaining silicon
of oxygen through
of that side.
This in
176
High Temperature
Corrosion
of Ceramics
1)
SiC
Figure 12.
Model for oxidation of C-side silicon carbide. A rough interface is formed and the C-side is maintained at the interface during oxidation. The SO2 is formed away from the interface.
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
177
Sic
Sic
3)
Atmosphere
I02
01 Sib
sic
Figure 13.
Model for oxidation of Si-side silicon carbide. nature of the interface is maintained.
178
High Temperature
Corrosion of Ceramics
line with the results of Harris (linear kinetics of oxidation) as the CO would form under the silica layer and desorption of CO from that position could control the oxidation. At higher temperatures or in presence of sodium this desorption is no and parabolic kinetics are observed. The scale is formed as
under very low oxygen pressure and it is expected to be very oxygen deficient discussed earlier. oxygen deficient The scale formed under these conditions would be more than that formed on the C-side. In the oxidation of SiC the
network transport and the molecular transport add to supply the oxygen. This interplay between the two types of transport processes is underlined as the temperature of oxidation is increased and their relative contributions change for
vacancy and other network mechanisms with high activation rapidly and becomes a major contributor
oxidation of the silicon-side has been increasing also since it was dominated by the network transport processes. As the temperature is increased the mobility increases also in the SiC interfaces and they can no longer be differentiated the mechanisms of fig. 12 and 13 and around 1350oC the two sides oxidize at about the same rate with the same activation Therefore the proposed model is qualitatively energy as reported by Tressler(9). consistent with the data on the by
oxidation of silicon and silicon carbide, now we shall apply it to our acidic hot corrosion results.
Acidic Hot Corrosion As discussed earlier acidic hot corrosion is oxidation enhanced by the presence Na2Q at a low activity. Na2Q enters into the silica structure by
reaction 6 and generates single bonded oxygens thus modifying the defect
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
179
concentrations
in the vitreous
silica.
Single bonded oxygens are oxygen excess of oxygen deficient defects through
defects reactions
2 Si-0-Si = Si- -Si + 2 Si-OK14 = [Vo] [Si-O12 = Cv [Si-012 Therefore as Na20 is introduced into the scale,
as a single equation
Na20 = 2 Na+ + l/2 02 gas + 2eKl6 = [Na+][02]1/2 showing the Cm is proportional such as those formed transport and increase [e12/aNa20 Therefore
(15)
to aNa20*.
scales
transport
more
stoichiometric
compositions. oxidation model will now be applied According to the previous to the discussion,
This result and the previous acidic corrosion the oxidation controlled paragraph, molecular corrosion
dry oxygen at low temperatures as DmCm >> DvCv. Na20 increases giving greater compared
(1OOOoC) is
by molecular
*Equation 15 may be considered as the dissolution of sodium oxide in the glass in an interstitial position (network modifier). Interpretation beyond the relationship between aNa and [02dis] could be misleading since defects in the glass structure are required to accommodate the Na+ ions and the electrons. Therefore equations 6, 9 and 14 appear more representative of the reactions occuring in the glass.
180
High Temperature
Corrosion
of Ceramics
conditions.
In our experiments
the parabolic
constant
by a factor
of about 4 at 1000C.
being more
stoichiometric
and with lower oxygen pressures of silicon carbidethan activation permation oxidation energy
expected
in the formation
in the oxidation
of silicon.
is expected
to be that of the
of molecular
silica, the same as for the it should be 26-28 kcal/mole. higher because plotted in figures of the 11 and 12
The 34 kcal/mole
nature of the experiment. were determined Na20 activity. total pressure catalyst at constant The initial
in the atmosphere
of 1% S02-balance
it generated
relation
of Na20 increases
with increasing
Since B increases
activation
energy greater
of silicon and C-side SIC will be measured. by reaction 15 will be dominating the to
for diffusion
will be increased
will depend on temperature. in which both K and aNa and n is a fractional considered
It can be seen from reaction have exponential such as 2/9 obtained the enthalpy of
exponent
equations
However
15 and in general
the operating
equations
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
181
it is doubtful
dependence
can be derived.
that the activation that for oxidation. energy (34 kcal/mole) representative dominate
(27 kcal/mole)
because
of sodium may be too low to completely suggest that the two mechanisms
the transport.
of generation magnitude
of the diffusing
experimental
conditions.
Na30 activities
oxygen would answer this question. For the acidic hot corrosion reasoning dominated constant decreases contribution reactions equation in defect transport temperature as observed B extrapolated activation activity is applicable, by network however transport of Si-side silicon carbide, the parabolic (vacancy oxidation the same general to be
was expected
mechanism)
contribution
6, 9, and 14 or 15. In the since Cm = k/Cv6 in Therefore contributions if and at what dramatically to the change to the
rapidly as Cv decreases
9 and Dm >> Dv by about 4 orders of magnitude. concentration affect dramatically the relative to state
dominant.
B is increased
It is increased
by a factor
of about 16 compared
data of Tressler
et al.tgl.
as discussed
A quantitative is
correlation
being considered.
182
High Temperature
Corrosion
of Ceramics
REFERENCES 1. J.R. Blachere and P.S. Pettit High Temperature (a) DOE Report ER45117-2, March 1986 (b) DOE Report ER45117-1, June 1985 (c) DOE Report ER10915-4, June 1984 J.R. Blachere and D.F. Klimovich, *J. Am. Ceram. (1987) paper appended in Appendix E. B.S. Draskovich, D.F. Klimovich, MA thesis, University University Corrosion of Ceramics
2. 3. 4, 5. 6. 7.
of Pittsburgh, of Pittsburgh,
M.S. thesis,
University
of Pittsburgh,
M.I. Mayer and F.L. Riley, J. Mat. Sci., 13, (1978) p. 1319-1328. (a) (b) N.S. Jacobson, J. Am. Ceram. Sot., e, [l] 74-82 (1986). N.S. Jacobson and J.L. Smailek, J. Am. Ceram. Sot., a [8] (1985), p_ 432-39.
8. 9. 10. 11. 12. 13. 14. 16. 17. 18. 19. 20.
91
B.E. Deal and A.S. Grove, J. Appl. Phys., 36 (1965), p. 3770. R.E. Tressler and K.E. Spear, GRI Report GRI-87-0088, 1987.
S.I. Raider et. al., J. Electrochem. S.C. Singhal, Ceramurgia R.H. Doremus, R.E. Tressler
International,
Glass Science,
G.J. Yurek et. al, Oxid. Metals, 4 265 (1974). J.A. Costello F.P. Fehlner, and R.E. Tressler, Low Temperature J. Am. Ceram. Oxidation, Sot., 64, (1981) p. 327-331 .
Materials
for Advanced
-*.
Appendix
D-Hot
Corrosion
of Silicon
Nitride
and Silicon
Carbide
183
22.
(a) (b)
R.C.A. Harris and R.L. Call, in Silicon Carbide 1973, R.C. Marshall et. al., eds., University of South Carolina Press, 1974, p. 329. R.C.A. Harris, J. Amer. Ceram. Sot., 68, 1975, p. 7-9. Semiconductor,
23. 24. 25. 26. 27. 26.. 29. 30. 31. 32. 33. 34. 35. 36.
J.W. Faust Jr., in Silicon Carbide, A High Temperature J.R. OConnor and J. Smiltens, (Pergamon, 1960). Ibid, pv 403. D.M. Mieskowski (a) (b) et. al., J. Am. Ceram.
L. Muehloff et.al., J. Appl. Phys., fl [7] (1986), p. 2558-2563. Ibid, fl [8] (1986), p. 2842-2853. Glass Forming Systems, Academic Press (1967), p. 53.
et. al., J. Appl. Phys., 51 [12] (1980), p. 6160-6164. MRS Bulletin, June 16/ August 15, 1987.
1977, p. 363.
J. Electrochem.
U.S. Department of Energy, Thermochemical Stability Diagrams for Condensed Phases and Volatility Diagrams - DOE/FE/13547-01, May 1980.
Appendix
E-Publications
ones
- Hot Corrosion
- High Temperature
of Silicon Nitride
The research
is being written
up for publication.
These publications
are: [3]
Measurements
Probe Microanalyzer
of Silica (Appendix
[6] [7]
of Ceramics
Appendix
E-Publications
185
REFERENCES
1.
J.R. Blachere, D.F. Klimovich and F.S. Pettit, Hot Corrosion of Non Oxide Ceramics, paper # , Fail meeting, Basic Science Div. Am. Ceram. Sot., Nov. 5, 1966. J.R. Blachere, D.F. Klimovich and F.S. Pettit, High Temperature Corrosion of Silicon Nitride and Silicon Carbide, Invited paper, Workshop on Corrosion of Ceramics, Penn State, Nov. 12-13, 1967. J.R. Blachere and D.F. Klimovich, Oxide Thickness Measurement in the J. Am. Ceram., 70 [ll], C324-C326 (1967). Electron Probe Microanalyzer, M.G. Lawson et al., Hot Corrosion Am. Ceram. Sot. M.G. Lawson et al., Hot Corrosion Ceram Sot. B.S. Draskovich in preparation. of Silica, ready for submission to J.
2.
3.
4.
5.
of Alumina,
in preparation
for J. Am.
6.
of Silicon Nitride
7.
D.F. Klimovich et al., Hot Corrosion Silicon Carbide, in preparation. F.S. Pettit and J.R. Blachere,
a.
Corrosion
186
High Temperature
Corrosion
of Ceramics
of Ihe chrraccsc + I
,cr,s,,c delccwr.
,, 15 dcfmcd
ar I,,/,,)
wh,ch s/p
AND D. E KL~MOV~CH*
f P,,,,burgh. P,,t,burph.
cepamle~ f Mawnrtr Sacncr and E.ng,nrennp. Vlw,#ty Pcnniytunlr ,526, An X-ray Thr
method/or
of the thickness
tilms on silicon
of wpporred
nrrride
rhmjilms
in
Ihe micromobr
is modified
and silicon
carbide.
L3keff angle. The ex~en~~vc. but slmplc. ealcuta,mns are dr,cr,bcd ,n dclrd ,n Ref, ? and 3. They rcpon ~4 rcwl,, tar ,mgteelemcnl tilmr For muloclemcnl lilms. It 15 powble I obtam buth Ihc tilm rhrcknos nod Ihe cmpo,mon by mcrrur,ng r( ~1,s for all co,noonems of Ihe film. In txxh CBYI, all Acrclclclrl effccr, (atomic number. rbrorpo. nnd lluoreicencct arc a\rumrd nept~glblc il, mlfhr be cxpccwd I a first ~ppruxmu,~ fur lhm f,lm,
inctvhrrirs o/rhe o.&rn Ka linrbre measured on bulk SIO- und on rhe/i/m. The derivation of the colibrarion curve giving the rhicknru of the film from rhe rario of rhesr inrensiries is ourlined. The method has been used /or srl~ca Jilnts rhwwr rhrr~~ I um wirh a lawral resolurion of a few micromrrurs.
X,DE 0. nctded thxkness for mnny Ihe rczareh mcasuremen,s arc The m~enuty-thickness rclaoonsh~p is nor
SL of uhcon node and sdxon carbblde. Many methods hzve been used LOassess the evluon of Ihe oxidaoon process; bowever. they arc often mdlrect or desuuctive. Fur ~rtimcc. wghc changes arc the nc, rewll of simuluncous rcacu~ whxh g,ve lfvxing comnbuuona. More dwcct mcahrrmcnts arc oficn dependent on etchmg or frxurc of the specimens Other methud> dppbcrble to rhm films ax very dceur.w bu! do nor have spatial re)oIulion. The ctecrron prtw microanalyzer IEPMA) otfcrr a nundcslruct~vc means of mcaurimg ttlc Thickness of suppancd films wnh a high lalcral resoluuon which we have uxd for rihca films a silicon nilnde and silicon carb,dc.
slmplc smcc the Xaya generdlcd are a function of depth I the sample. and they are abrorbed rccordmg Lo the prrh of their cx~l from rhc samolc The mrcroan~lyrir of dun tilmr has bee revxwcd by Guldslem. In order 1 calculate rhe inw&ry of the X-rays genernled in [hc aample. Yakowtz and Newbury rooaed a emomeal aooruach bdscd on ii&g Ihe X-raydepfh ~roducrion ewe +(pzt to rhe combmmoo of a parabola and an ripmrnt,~l. The mdss rhicknrss p: IS ,hc prduct f ,he d,,ww from Ihc rurfacc
oi
The menrny of characteristz X-rays, yeneraed by a ctec~ron barn for an element conlrmcd m a thin titm and not in the
bubruale. 15 related 1 the thickness of the thm film and cmpw~n of the sample.
: by the drnrlry p f Ihc sample m Ihrt lhlchne,,. Cornoared t Ihnr for a bulk a!&ard of Ihe co&wlion of Ihe tilm. the @(pi) ~rvc for the lhm tilm IS tnmcrred at [he mas, tblckncs, pz, of dw lilm and it mctudo P mo,hf~ed b;rckscattering y!eld of the cIcc~rs wh,ch accoum, fur the sub,,ra,c cnlr~bu!wn The mwn~~ty of the charnclerwc X-rays emmcd frum the film II compared to thrl en,,rled by a bulk ,tand.ud of Ihe film ma!eriA The in!may r.11, I, of these I~ncr. which can be mr~wed. IS prpon~onrt 1 tbr rat of Ihc mlcn&llcs 1 the lilm l/L) standard /,: of lhc X-raya gencrafrd 1 [hat generated I a bulk
The prcw, method was adrpled Lo meas~remcnta of the ,hxknos of s,hca films on sd,cn carb,de md s,hc mmde wng lhc oxygen Ko hnc t,, appllulu LO light elcmcms tatamlc oumbcr Z< req&cd scvcr.d mod,f,caun, ,,ncc the low-energy X-ray, p&wed ,,re wungly absortxd and Ihe ab,rprw crrec,,n 13 w_mlarge I use Ihe approruna~c/(~) rales. The mwn,mc,,~ crlsut,md for Eq d,ffercm trum Ihe mc.,rured m,c,meS 1. becau,e of ~brvp,, .lhe X-rry, SC grncrad A! var,, dcplh, I ,hr san~ptc and I calcul~!c I,. lhe,r m,cn,,,y must be mtcgraad over dw depth of prwtucuon:
tI)
xe
C I)
For
un4
ahsorou
[he ~lal
mtcn,W
Appendix
E-Publications
187
November\
#(PZ)
00
r
1987 h,k Parabolic h
IO
loo
Thickness
1000
,nm,
IXOO
kh
and 0.1425
were calcul.Acd
rer~ctwely
for
bulk SIO,. S,,N,. md SIC The>e value) were blamed for a pnmrry clec~ron barn ener~v elem;;l,al Therefore, in which simdar fic,en,. of IO keV bv m~erwlrtwn elcmcmal of the of drta of He;r,ch;nd rddmon cclf~c,en,~. .~e so cc&
mars-weighted
the prcdlcled
dxa, .I ca,a,
film thxknesse$ rouhmg I an enor es,,mr,ed I br <I% of ,bc film dnckne\ses for xhca X[-@z-t&f glass on s,bcon nitride ,ubw.oes
(p:-h++
j]
in which If 15 Ihe X-WV m,es,,v measured from Ihe f~irn md /Z ;s rhu lot& mcawed fur the bulk aodard. The mwgration for /: ,s over ,hr mas lh,ckness of [he film and Ihrl for Ihe bulk mtenwy is over Ihe uhole depth of X-ray producd p:, g,ven by Ihe X-ray praluc!, range of Hemnch. Equroon (4) ha, ken wed rucce,rfully by KelM,. Ttw mwosmc, of Eq (4) were integrated I clozd form u~,e Ihe arabolic-exThe arrumrd 4(p:c) cwve 1s sketched I Fig. I. For [he prrabohc ,eg,on
The inlegrrl for Ihe parabolic and exponenoal r.eg,on 8 a lhxkness p ,uch as
and slightly over 1% for sd~con crrbrde wbsorlo. For other subsmale-tilm comb,a,,,. when ,h,r a,aump,, 1s no, \rhd. a film b;rcksca,tenp cwflicwn, wt be calculawd as a funcoon 1 p:, d.,. I. aod h are different for lilm .md wb,trr,e. Cabbra curve, of 1, II film ihlckncss were calculr~ed u,,h a compu,er u,mg Eq. (4) and Ihe mclhod oullmcd above. S,l,ca glr,s u!,h .I den,,,y of 2 2 g/cm was ured for the lilm I ,dI ma rage. ma,, Ih,ckne,,. and ab,rp,,on COICUIIu,. The cahbrat, cunc 1, ,houn m Fig. 2 for sdx carbldc md ,dxo mmde ,ubwa,es.
pi,>p:>l.Sh
1s
x
wnh
-(pz,?+K(p-_.-I
IShI 5hl
(8)
Q=exP[P&&-X
j] 1.Shx
lip.-J=h~(~:-h)(a-k)+k
and for the rrponenwl rrg,o
(5) I;=I,
(for pi = I.Sh)
were
Ku line
elcc~
The panme,er,
exp(w
(6)
don of [he backscattering clewon yield. Using values for the bulk matenal, the Ite,,,y for lhr bulk standard I, crlculaed: ,.=I, ifor pr=pz,)
m,croscope* fmcd wlh IWO ud\slmglh disperwe spec,rmctcn equ~ptwd for hgh, eleme, .mrly~r. All wmple, uere coaled w,lb &a~, 20 m of carbon. Duphcnle mmsurcment~ were made ,,muluncously wth ,hr IWO spec,rme,ers ill a .,ccelcrdlion voltage of IO kV and a beam curre, of 20 rA. The ra,as kr tie calculaled from Ihe measured intms,l~es corrected for background. The oxide Ihicknes,es CA be read from Fig. 2: ntedd. a am~ple m,erp&on program and E.q. (4) were used LOgel them more exacdy. The meawremelS are very reproducible. and a standard error of 1% or less IP c;rlcula!ed for Le values corre,pondme 10 th,cknesxs >IW nm for a se, 01 lob-s co,m,~ on pea, md background. for film and srandsrd. I, i, ~mprowd by lhr comblnarlon of several of these measuremen,,. They were uwlly repcrIed at ,hr ,ame we and it, sevrral Icat~ons of
in which Ihe parameters 6, k. and h are cab culzued followmg Keuwr and Goldstem. The mlegral for Ihe parabolic reg,. for a dwknes, ,x<l 5h. IP
However, for thm films Ihe elrcrron backxa,,er yield mcludes a conrnbution from the subwale. Approx~ma,~na of Ihe da, of Cusslet were u,rd prev~ou,ly wed m lh,s case Some var,~,,s dnd on Ihe
(7)
electron ,rrnrm,ra~n cwffiwn, of the ,ubauele were also med. The aweme vales of Ihe backsca,ter cwfticlen, of the film ,huld be thrl of the ,ub,rrate for a film mfmwly lhm md lbsl 01 Ihe bulk film mr,er,;ll for a IhIck film. I tb,, case. bilckscaltrr cocffic~ent?, of 0.1316. 0 I37 I,
188
High Temperature
Corrosion
of Ceramics
Communicdonr
Table I. Oxide Thickness Comparison* Ilwkncncu (PI, SImplc
of rhe American
Ceramic
Societv better
November
1987
can bc measured w,th dur higher electron deep in tbe sample by hght elements such are almost completely absorbed ,lopc of the of Tb,s rc~ults m Ihe shallow rhe two curves for low film
I
: 4 2
SIC. SC
SIC. SIC, SC Sic. SC SI,N, SI,N.. CVD
Typr
curve for duckcr tilms and Ihe prormuty ducknose,. signlftcanl Imermedmte as 20 kV
mlcmuulvrir. ud sEM=lnugw
did
impmvemcn~~
similar
momholoev
a Ihe
surface
Of the
However.
tbe
The X-ray melhod ,u,r dexnbed has bee used consi~~rntly I our rebesrch for the measoremeot of StOl films wrh thicknesses from producibdtry SEM. IO m I 1.0 pm with a reThicker of a few percent.
sample. It I; esu&red
method 1s ex-
bdtty of Ihe thicknesses measured by this procedure was of Ihe order of II. REIWLTS AND Discuss& The Ihicknenes of glassy regions of xzde layers formed by oxidation and hot corrouon on GIlcon carbide and silicon nitnde al IooOC were measured bv lhls in mothal and by unagrng of cross sec& tbe SEM. The mraruremen~s by SEM Imaging
+10%
for the thicknesses of lhin films of N,. and Au on various substrates Application method I hgh! elements Ismce Ihe physical
films were imaged m cros) secuon m the a procedure whtch is earbe, and more The X-ray method I, nonand ha a lswal rraoluuon oi a II ;IllWS a correlauon of rorasureznen~ with surface fca;malyaccurare than dzscussed earher for the thanncr films. do,,uc,,ve tb~kneas
Al. Cu.
few mrcrolnel~r,;
cientb. used in Ihe caIcuIa11ons are not as well estabhshed. play, a mqor ,eng,hs. role for Lhe longer wnh Ihe SEM
[ores such a, spheruhlrs or glassy regtom. Other techniques such as chemical sir. opr~cal mwferometry. ad elhp5m-
proved difficult for films under I gm duck. The magnX~ar~n was cahbraled wilh staodud latex spheres. The samples were fractured and brhdv elched I HBF. to reveal the oxide idye;. They had been carbon coated pnor 1 fracrure to observe tie morphology of the wface. and I, was found that dos coating helped mantain Ihe surIace edge of the oxide lilm during etching. The samples were recoated to avold chargmg I Ihe electron beam and the coating dwkea,es were large compared lo some of the ride layers of Table 1. Under tbr cd#ins of Ihe measurements. il is expxred lhar Ihe resolution of the SEM did not reach 10 em. The experimenrai difficulties in the SEM imagmg of these thin Inyen resulled in large experimenlal scaLLer and poor accuracy. II is estimated that the uncexiaintv of tbe thicknesses measured dlrecrly I Ihe SEM could be as high as 40 to 50% for the dunner oxide films. As shown I Table I, rhe LW methods gwc tie same order of magmwde but their results differ
Con~parison
sure,,,en,s ruaeerts that the accuracy ,sbe,rer dun 30-g. The shape of the callbrat, curve of F,g. 2 sgge,t, Ihat thick-
euy. whrle roorc accur.~~c. do no! offer lhls lateral re,o1u~~ whtch 1s highly dewable in roatmal5 sc~cnce.
can
be measured: these values correspond ap roxlmatelv to the linear part of tbe curve. lower se1 by counring statisLies. For the thicker lilms, the sens~liwly decreass as the curve of Fig. 2 levels off. It was clamxd lhrl the ongmal method \yas reasonably accumte up 1 306 of dx bulk inter~cf~on volume, correspondmg in this car to <0.5 ,.un. However. the more extensive absorprion correction performed
ihe
iimir is
dir
surements to be extended Increasing the pnmuy electron energy should also increase Ihe film thicknesses which can be measured by generaling Xrays deeper in! the sample. This WPI shown for metal films with Eq. (I). A calibruion cuwe for 30.kV prunary elecmoos was generated wrh Eq. (4). which 16