D395-01-880 Issue B

Instruction Manual

Pirani 501

Description Pirani 501 mbar (230 V) Pirani 501 torr (115 V USA supply connector)

Item Number D395-01-000 D395-11-000

Manor Royal, Crawley, West Sussex, RH10 2LW, UK Telephone: +44 (0) 1293 528844 Fax: +44 (0) 1293 533453 http://www.bocedwards.com

We,

BOC Edwards, Manor Royal, Crawley, West Sussex RHlO 2LW, UK

declare under our sole responsibility that the product(s)

Pirani 501 mbar 240 V Pirani 501 Torr 11(1V PRE10K Extension Lead 5 ill Extension Lead 15 m Extension Lead 30 m
D395-01-000 D395-11-000 DO24-28-000 D368-36-005 D386-36-015 D368-36-030

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)
EN61326 (Class B Emissions)

Electrical Equipment for Measurement, Control and Laboratory Use -EMC Requirements.

following the provisions oj:

73/023/EEC 89/336/EEC

Low Voltage Directive. Electromagnetic Compatibility Directive

0 9 ~ N ... QJ j

~~~ Dr. J.D. Watson, Senior Technical Manager, VED This product has bl~enmanufactured

L.r{410\

SH~~

Date and Place

under a quality system registered to ISO900l

~ a ~

CONTENTS
Section 1 1.1 1.2 2 2.1 2.2 2.3 2.4 2.4.1 2.4.2 2.4.3 3 3.1 3.2 3.3 3.4 3.5 3.6 4 4.1 5 5.1 Title INTRODUCTION Scope of this manual General TECHNICAL DATA Operating conditions Performance Mechanical data Electrical data Electrical supply data Indicators Rear panel connections INSTALLATION Unpacking and inspection Panel mounting and free standing Operating voltage Power connections Gauge head connections Recorder output OPERATION Power on MAINTENANCE Calibration Page 1 1 2 3 3 3 3 3 3 4 4 5 5 6 6 6 7 7 8 8 9 9

Pirani 501

Section 6 6.1 6.2 7 7.1 7.2 7.2

Title STORAGE AND DISPOSAL Storage Disposal SPARES AND ACCESSORIES Introduction Spares Accessories RETURN OF EDWARDS EQUIPMENT

Page 12 12 12 13 13 13 13

ILLUSTRATIONS
Figure 1 2 Title Pirani 501 recorder output graph (mbar) Pirani 501 recorder output graph (torr) Page 10 11

ii

Pirani 501

1
1.1

INTRODUCTION
Scope of this manual
This manual provides installation, operation and routine maintenance instructions for the Edwards Pirani 501. Read this manual before attempting to install and operate the unit. This manual contains essential safety information which supplements the safety features of the unit. Safety procedures are highlighted as WARNING and CAUTION instructions. You must obey these instructions. The use of WARNINGS and CAUTIONS is defined below. WARNING Warnings are given when failure to observe the instruction could result in injury or death to persons.

CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

The safety markings used on the equipment are: A.C. Supply Refer to Manual Electrical hazard

Pirani 501

1.2

General
The Pirani 501 is for use with the Edwards Pirani PRE10K gauge head. It has a wide easy to read analogue meter scale with continuous pressure reading from 10-3 to 5 mbar (or torr). Range switching is therefore not necessary. A recorder output is provided on the rear panel of the Pirani 501 giving an output of 0 to l00 mV. A graph of voltage/pressure is provided in Section 5 of these instructions. The unit may be left free standing on the folding legs supplied or panel mounted with a mounting kit also supplied.

Pirani 501

2
2.1

TECHNICAL DATA
Operating conditions
Temperature range (operating) Temperature range (storage) Relative humidity Maximum operating altitude 0 to 50 C -10 C to +70 C 10 - 90 % 2000 m

2.2

Performance
Pressure measuring range (mbar or torr) Recorder output Output impedance (negative output connected to electrical safety ground) Minimum load resistance (continuous output) 10 -3 to 5 0 - 100 mV 100

10 k

2.3

Mechanical data
Fixing hole dimensions mm (panel mounting) Dimensions mm (w x h x d) Meter scale (analog) Mounting 92 (+ 0.8) x 92 (+0.8) 96 x 96 x 155 (DIN 43700) 230 display wide angle Bench or panel (removable tilting feet and panel clamp supplied) 650 g

Weight

2.4 2.4.1

Electrical data Electrical supply data

Operating voltages Operating frequency 115 V or 230 V + 10 % - 20 % (Selected by fuse position) 50/60 Hz

Pirani 501

Fuse 230 V Fuse 115 V Power consumption Power switching

63 mA (F) 100 mA (F) 2W On when power supply applied

2.4.2

Indicators
LED (Light Emitting Diode) indication Green LED for power on

2.4.3

Rear panel connections

Recorder output Gauge connector socket Gauge type Power lead length 1 x 3.5 mm DIN monojack socket 1 x 5 pin DIN 180 Edwards Pirani PRE10K 2m

Pirani 501

INSTALLATION
CAUTION Ensure that the instrument is set for the correct voltage before connecting to the electrical supply.

3.1

Unpacking and inspection

Remove all packing materials and protective covers and check the instrument for damage. If the instrument is damaged, notify your supplier and the carrier in writing within three days; state the Item Number of the unit together with your order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the instrument. Check that your package contains the following items:

Qty 1 1 1 2 1

Description Controller Mains lead (240 V or 115 V) Chart recorder jack plug 3.5 mm Mounting brackets Mains fuse: 100 mA supplied with D395-01-000 OR 63 mA supplied with D395-11-000 Electrical supply lead Foot tilting Buffer 19 mm (self adhesive) Screw M3 x 8 (self tapping) Screw M3 x 40

Check

1 2 2 2 2

If any of these items are missing, notify your supplier in writing within 3 days.

Pirani 501

3.2

Panel mounting and free standing

The unit may be mounted into a fixing hole in a panel if required. The dimensions for a fixing hole are given in Section 2.3. Slide the unit into the fixing hole in the front of the panel, then clip on the two mounting brackets and screw the two M3 x 40 retaining screws through the clamps until the unit is held against the panel. Alternatively, screw the tilting feet to the front underside of the unit using the self tapping screws provided for a free standing unit. Two self-adhesive buffers are also provided to ensure better surface grip.

3.3

Operating voltage
WARNING High voltages exist within the unit. Switch off electrical supply before removing covers. Covers should not be removed except by a qualified service engineer.

3.3.1

Pirani 501
The operating voltage on this instrument is changed by reversing the fuse holder. A small arrow on the mains inlet connector points to the required voltage setting. When changing the input voltage, the input fuse must also be changed, 100 mA for 115 V operation and 63 mA for 230 V operation. Pull out the holder marked beneath the input plug connection and check the fuse furthest into the holder. Change if necessary.

3.4

Power connections
Instruments ordered to read mbar (D395-01-000) will be set for 230 V operation and will require a 3-pin electrical supply connector to be connected. Connect the three cored lead as follows: BROWN lead to LIVE (L) BLUE lead to the NEUTRAL (N) GREEN/YELLOW lead to EARTH (E)

Pirani 501

Instruments ordered to read torr (D395-11-000) will be set for 115 V operation and will have been provided with a moulded plug. The wire colour coding is as follows: BLACK - LIVE WHITE - NEUTRAL GREEN - EARTH

3.5

Gauge head connections

CAUTION Do not connect or disconnect a gauge head with the power on. Damage to the gauge head may result if this caution is ignored.

Connect the PRE10K gauge head to the vacuum system as detailed in the instructions supplied with the head. Connect the extension cable, if ordered, to the gauge head lead socket and plug the lead into the instrument rear panel socket (5 pin DIN).

3.6

Recorder output
The recorder output socket is on the rear panel of the instrument, marked REC. The recorder output provides a pressure/voltage output of 0 to 100 mV according to Figures 1 and 2. A 3.5 mm DIN mono jack plug is supplied for the recorder output. Connection is earth (ground) to the outer cable and the signal path (negative) to the centre pin.

Pirani 501

4
4.1

OPERATION
Power on
Power to the Pirani 501 is on when the electrical supply is connected and switched on.

Pirani 501

MAINTENANCE
The Pirani 501 requires no routine maintenance.

5.1

Calibration
For calibration of gauge heads refer to the working instructions for the PRE10K (D024-28-880).

Pirani 501

Figure 1 - Pirani 501 recorder output graph (mbar)

10

Pirani 501

Figure 2 - Pirani 501 recorder output graph (torr)

Pirani 501

11

6
6.1

STORAGE AND DISPOSAL

Storage
Store the instrument in a cool dry place. Do not exceed the specified conditions.

6.2

Disposal
Dispose of the instrument in accordance with local and national safety requirements. WARNING Do not incinerate the instrument. Incineration may cause emission of noxious fumes and metal cased capacitors may explode due to build up of internal pressure.

12

Pirani 501

7
7.1

SPARES AND ACCESSORIES

Introduction
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, France, Germany, Great Britain, Hong Kong, Italy, Korea, Japan, Switzerland, U.S.A., and a world wide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses.

7.2

Spares
The Pirani 501 has no serviceable parts.

7.3

Accessories
Pirani gauge PRE10K Gauge head extension lead 5m Gauge head extension lead l5 m Gauge head extension lead 30m D024-28-000 D368-36-005 D368-36-015 D368-36-030

Pirani 501

13

14

Pirani 501

Return of BOC Edwards Equipment - Procedure

Introduction

(Form HS1)

Before you return your equipment you must warn your supplier if the substances you used (and produced) in the equipment can be dangerous. You must do this to comply with health and safety at work laws. You must complete the Declaration (HS2) on the next page and send it to your supplier before you dispatch the equipment. If you do not, your supplier will assume that the equipment is dangerous and he will refuse to accept it. If the Declaration is not completed correctly, there may be a delay in processing your equipment.

Guidelines
Take note of the following guidelines:

Your equipment is 'uncontaminated' if it has not been used or if it has only been used with substances that are not dangerous. Your equipment is 'contaminated' if it has been used with any dangerous substances. If your equipment has been used with radioactive substances, you must decontaminate it before you return it to your supplier. You must send independent proof of decontamination (for example a certificate of analysis) to your supplier with the Declaration (HS2). Phone your supplier for advice. We recommend that contaminated equipment is transported in vehicles where the driver does not share the same air space as the equipment.

PROCEDURE
Use the following procedure: 1. 2. 3. Contact your supplier and obtain a Return Authorisation Number for your equipment. Turn to the next page(s), photocopy and then complete the Declaration (HS2). Remove all traces of dangerous gases: pass an inert gas through the equipment and any accessories which will be returned to your supplier. Drain all fluids and lubricants from the equipment and its accessories. Disconnect all accessories from the equipment. Safely dispose of the filter elements from any oil mist filters. Seal up all of the equipment's inlets and outlets (including those where accessories were attached). You may seal the inlets and outlets with blanking flanges or heavy gauge PVC tape. Seal contaminated equipment in a thick polythene bag. If you do not have a polythene bag large enough to contain the equipment, you can use a thick polythene sheet. If the equipment is large, strap the equipment and its accessories to a wooden pallet. Preferably, the pallet should be no larger than 510mm x 915mm (20" x 35"); contact your supplier if you cannot meet this requirement. If the equipment is too small to be strapped to a pallet, pack it in a suitable strong box. If the equipment is contaminated, label the pallet (or box) in accordance with laws covering the transport of dangerous substances.

4. 5. 6. 7.

8. 9.

10. Fax or post a copy of the Declaration (HS2) to your supplier. The Declaration must arrive before the equipment. 11. Give a copy of the Declaration to the carrier. contaminated. You must tell the carrier if the equipment is

12. Seal the original Declaration in a suitable envelope; attach the envelope securely to the outside of the equipment package. WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.

P900-71-100

Issue F

Page 1 of 2

3A05-010

Return of BOC Edwards Equipment - Declaration (Form HS2)

Return Authorisation Number:

You must: Know about all of the substances which have been used and produced in the equipment before you complete this Declaration Read the Procedure (HS1) on the previous page before you attempt to complete this Declaration Contact your supplier to obtain a Return Authorisation Number and to obtain advice if you have any questions Send this form to your supplier before you return your equipment

SECTION 1 : EQUIPMENT
FOR SEMICONDUCTOR APPLICATIONS ONLY : a. b. c. Equipment model _____________________________________________________________ Serial Number ________________________________________________________________ Has the equipment been used, tested or operated? Yes o Go to Section 2 no o Go to Section 4 Tool Reference Number ________________________ Process ______________________________________ Failure Date ________________________________ Serial Number of Replacement Equipment ________________________

Are any of the substances used or produced the equipment SECTION 2 in : SUBSTANCES a. b. c. Radioactive Biologically active Dangerous to human health and safety? yes yes yes

IN CONTACT WITH THE EQUIPMENT

o
Your supplier will not accept delivery of any equipment that is contaminated with radioactive substances, unless you:

o no

o no o o no o

If you have answered 'no' to all of these questions, go to Section 4.

(Continued)

Decontaminate the equipment Provide proof of decontamination

YOU MUST CONTACT YOUR SUPPLIER FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT

SECTION 3 : LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT

Substance name 1 2 3 4 5 6 Chemical symbol Precautions required (for example, use protective gloves, etc.) Action required after spillage or human contact

SECTION 4 : RETURN INFORMATION

Reason for return and symptoms of malfunction: If you have a warranty claim: who did you buy the equipment from ? ___________________________________________________________________________________________________ give the supplier's invoice number ______________________________________________________________________________________________________ ______________________________________________________________________________________________ __________________________________________________________________________________________________________________________________________

SECTION 5 : DECLARATION
Print your name: Print your organisation: Print your address: ______________________________________ Print your job title: ______________________________________________________ _________________________________________________________________________________________________________________ _________________________________________________________________________________________________________________ _________________________________________________________________________________________________________________ Telephone number: _______________________________________ Date of equipment delivery: ______________________________________________

I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any information. I have followed the Return of BOC Edwards Equipment Procedure (HS1). Signed: _________________________________________________________________ Date: _________________________________________________________

P900-71-100

Issue F

Page 2 of 2

3A05-010

Addresses
EUROPE HEADQUARTERS BOC EDWARDS Manor Royal CRAWLEY West Sussex RH10 2LW UNITED KINGDOM Tel: +(44) 1293 528844 Fax: +(44) 1293 533453 GUILDFORD, ENGLAND Tel: +(44) 1483 579857 Fax: +(44) 1483 505211 CUMBERNAULD, SCOTLAND Tel: +(44) 1236 730575 BELGIUM BRUSSELS Tel: +(32) 2 363 0030 FRANCE PARIS Tel: +(33) 1 47 98 24 01 GERMANY MUNICH Tel: +(49) 89 9919180 MARBURG Tel: +(49) 6420 82 41 0 ITALY MILAN Tel: +(39) 2 48 4471 SWITZERLAND OBERWIL-BASEL Tel: +(41) 61 401 4344 Fax: +(41) 61 401 4352 ISRAEL TEL AVIV Tel: +(972) 3 649 1262 Fax: +(972) 3 6475112 JERUSALEM Tel: +(972) 2 321122 ASIA HEADQUARTERS BOC EDWARDS (ASIA) Suite 1308 Tower 2 World Trade Square 123 Hoi Bun Road Kwun Tong, Kowloon HONG KONG Tel: +(852) 2 796 9111 Fax: +(852) 2 796 9095 CHINA BOC GASES (SHANGHAI) Tel: +(86) 21 5899 0272 TIANJIN BOC INDUSTRIAL GASES Tel: +(86) 22 2834 1981 TAIWAN, R.O.C. HSIN CHU CITY Tel: +(886) 35 280 354 SOUTH EAST ASIA BOC EDWARDS 26 Changi South Street I Changi South Industrial Estate SINGAPORE 486773 Tel: +(65) 546 8408 Fax: +(65) 546 8407 KOREA HEADQUARTERS SONGWON EDWARDS LTD 625-7 Upsong-dong CHUNAN CITY Chungchong Nam-do KOREA Tel: +(82) (0) 417 554 7070 Fax: +(82) (0) 417 554 7300 SEOUL Tel: +(82) (0) 2 501 7070 AMERICAS HEADQUARTERS BOC EDWARDS 301 Ballardvale Street WILMINGTON, MA 01887 USA Tel: +(1) 978 658 5410 Toll free (USA only): 800 848 9800 Fax: +(1) 978 658 7969 MILPITAS, CA Tel: +(1) 408 428 1037 TEMPE, AZ Tel: +(1) 602 777 7007 AUSTIN, TX Tel: +(1) 512 491 6622 CANADA MISSISSAUGA, ONTARIO Tel: +(1) 905 336 9119 Toll free (Canada only): 800 387 4076 Fax: +(1) 905 845 4924 BRAZIL SAO PAULO Tel: +(55) 11 8580377 Fax: +(55) 11 2652766 JAPAN HEADQUARTERS Shuwa Shiba Park Building A-3F 2-4-1 Shibakoen, Minato-ku TOKYO 105-0011 (Vacuum/Abatement) NIPPON EDWARDS KK Tel: +(81) 3 5470 6530 Fax: +(81) 3 5470 6521 (Electronic Gases) OSAKA SANSO KOGYO KK Tel: +(81) 3 3434 6789 Fax: +(81) 3 5472 8728 OSAKA Tel: +(81) 6 384 7052 KYUSHU Tel: +(81) 96 326 7300 SENDAI Tel: +(81) 22 373 8525 CORPORATE HEADQUARTERS BOC EDWARDS Manor Royal CRAWLEY West Sussex, RH10 2LW UNITED KINGDOM
BOC Edwards is a trading name used by affiliate companies of The BOC Group plc. BOC Edwards and the stripe symbol are trademarks of The BOC Group plc.