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Helvetica 26
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Helvetica 20 III. MEMS Projection Displays

Micro Mirror Projection - Texas Instruments DMD - Daewoo Elec. AMA Grating Light Valve - Silicon Light Machines Image Projection Color Synthesis Pixel Addressing

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Helvetica 26 History of Micromechanical Projection Display (1)

Helvetica 22 Westinghouse Mirror-Matrix Device
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Surface micromachined Built on SOS (Sapphire) Addressed by electron beam Deflect up to 4 Contrast ratio: 10 to 1 Difficulty in HNA release etch Limited resolution in electron beam

R. N. Thomas, "The mirror matrix tube: A novel light valve for projection display," IEEE T-ED, 22, 765 (1975)

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Helvetica 26 History of Micromechanical Projection Display (2)

IBM Cantilever Helvetica Light Modulator 22 Array
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~ +/- 1 deg.

K. E. Petersen, "Micromechanical Light Modulator Array Fabricated on Silicon," Appl. Phys. Lett. vol. 31, 521 (1977). 48
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Helvetica 26 History of Micromechanical Projection Display (3)

Helvetica 22 Mirror Device (DMD) Texas Instruments, Deformable
Helvetica 20 128 x 128 Deformable Mirrors Mirror Size 51 m x 51 m DRAM like operation (hold & refresh) response 25 s hold 200 ms Addressed by embedded MOS Transistors Air gap 620 nm Mirror fill factor 32 %

L. J. Hornbeck, "128 x 128 Deformable Mirror Device," IEEE Trans. ED (1983).

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Helvetica 26 Prototypes of TI DMD

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L. J. Hornbeck,"Deformable Mirror Spatial Light Modulator, " Proc. SPIE vol. 1150 (1989)
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Helvetica 26 MEMS Projection Display (1)

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Helvetica 20 Digital Micromirror Device

Texas Instruments

References
[1] Graphic Images --> http://www.ti.com/dlp/resources/library/ [2] Up-to-date --> P. F. Van Kessel, L.J. Hornbeck, R. E. Meier,M. R. Douglass, "A MEMS-based projection display," Proc. IEEE, vol.86, 1687-704 (1998) http://ielimg.ihs.com/iel4/5/15216/00704274.pdf [3] Up-to-date --> L. J. Hornbeck, "Digital Light Processing for High Brightness, High Resolution Applications," Proc. SPIE vol. 3013 (Electronic Imaging EI'97, Feb. 10-12, 1997, San Jose, CA). [4] MEMS & DMD ---> Gregory A. Magel, "Micromachining in Optics," http://www.ti. com/dlp/resources/whitepapers/pdf/micro.pdf [5] History overview ---> L. J. Hornbeck,"From cathode rays to digital micromirrors: A history of electronic projection display technology ,"http://www.ti.com/dlp/resources/ whitepapers/pdf/titj03.pdf

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26 Changes Quality" Good Example Helvetica of "Quantity

Texas Instruments Helvetica 22 Digital Mirror Device (DMD) for Digital Light Processing (DLP)
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Helvetica Principle of Image 26 Projection

Helvetica 22 of Mirror Array Electrostatic On-Off Control
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Helvetica 26 Advantage of MEMS Projection Display

Helvetica 22 Compared with Liquid Crystal Display
Helvetica 20 + High Contrast and High Brightness due to Fill Factor ~ 1 + Controlled both in digital mode (PWM) and analog mode (SLM) + Small size + New market for Portable Projector and Large Screen TV Monitors

LCD Image

DLP Image

PWM: Pulse Width Modulation SLM: Spatial Light Modulation

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Helvetica 26 Structure of DMD

Helvetica 22 Aluminum Mirror on Addressing CMOS SRAM
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Helvetica 26 of DMD Fabrication Process

Al mirror ---- CMOS Process compatible Helvetica 22 Photoresist sacrificial layer --- removed by plasma etching Helvetica 20 DMD on CMOS SRAM by 6 mask process

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Helvetica 26 Electrostatic Operation

Helvetica 22 Mechanical Restoring Torque
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Landing Electrode Driving Electrodes

GND

Electrostatic Torque

Angle

Angle

Angle

Angle
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Angle

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Helvetica 26 Mechanical Characteristics of DMD

Helvetica 22 Temporal Response to Step Voltage
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Step Response ~ 12 s CMOS 5 V Drive 450 Billion Contacts Resonant Frequency ~ 50 kHz 58
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Helvetica 26 Number of Pixels

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SVGA 848 x 600 508,800

XGA 1024 x 768 786,432

Typical Notebook PC LCD

SXGA 1280 x 1024 1,310,720

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Helvetica 26 Addressing Architecture

22 CMOS SRAM Helvetica for Electrostatic Operation
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CMOS 5 V Drive

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Helvetica 26 Brightness Control

Helveticafor 22 Gray Scale Image Pulse Width Modulation
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ON OFF

Dark

Similar to the principle of LCD display

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Bright
Time

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Helvetica 26 DMD Chip Color Synthesis by One

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Helvetica 26 DMD Chips Color Synthesis by Two

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Helvetica 26 DMD Chips Color Synthesis by Three

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Helvetica 26 Projector Schematic of Three-DMD

Helvetica 22 Can you figure out how it works ? ...
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