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This paper concentrates on polysilicon surface microstructures integrated with CMOS and Bipolar / MOS technologies. It discusses the fundamental mechanical as well as the electronic noise floors for representative capacitive position-sensing interface circuits. Operation in vacuum lowers the Brownian noise of a polysiticon for improved sensor perforaccelerometer to below 1 pg / &. Mance, the position of the microstructure should be controlled using electrostatic force-
This paper concentrates on polysilicon surface microstructures integrated with CMOS and Bipolar / MOS technologies. It discusses the fundamental mechanical as well as the electronic noise fl…