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Increased demand for MEMs and other microproducts has led to rapid development of technologies for micro-manufacturing individual parts and systems, including the development of new manufacturing processes, tools and machinery. This book is a collection of micro-manufacturing knowledge acquired by leading experts over the past decade that will not only inform on the subject of micro-manufacturing technologies and their industrial uses, but also will likely inspire new interest in a field which is attracting huge investments. Unlike other books, some which are largely focused on the micro-manufacturing processes only, this book also covers manufacturing chains and manufacturing system issues, such as handling, testing, robotics and automation. Manufacturing practicians often have difficulty choosing the optimum technology for a particular product. Therefore, this book also focuses on practical technology, suitable tools, equipment and utilization. Readers with a basic understanding of or experience in mechanical, manufacturing, material, or product engineering will feel very comfortable with this material. Areas of miniature- and micro-product manufacturing that are covered in this book include: micro-machining, micro-forming, micro-replication, lithography, thin film technology, surface engineering, laser-processing, micro-/nano-fibers, micro-tooling, micro-joining/assembly, as well as micro-handling, micro-robotics, inspection, testing and diagnosis, and manufacturing execution

systems. Micro-mechanics analysis and sustainability of micro-manufacturing technologies are also included. Each chapter was written either by a group of leading educator(s) or by experienced, notable engineer(s) or researcher(s), in a field related to micro-manufacturing. Most contributors were selected from leading partners of the recent/current EU-funded projects, including the MASMICRO project, which was one of the largest micro/nano-manufacturing projects funded through the EU fp6. On behalf of all the authors, I would like to express my special gratitude to Professor Frank Travis for his precious comments on all draft chapters and careful checking of the final manuscripts. I would also like to thank Mr Quanren Zeng for re-preparing some illustrations/drawings for some chapters and Dr Pascal Meyer for providing the artwork for the book cover. Finally, thanks are expressed to all authors for their hard work in preparing the book chapters. Without their support, this book would not be possible. Professor Yi Qin (BEng, MEng, PhD, CEng, MIMechE, FHeA, FIoN) Department of Design, Manufacture and Engineering Management The University of Strathclyde Glasgow G1 1XJ, United Kingdom Tel: 0044 141 548 3130 Fax: 0044 141 552 7986 Email: