DESIGN & SIMULATION TECHNOLOGY

SUPER COMPUTER
Thermal conductivity analysis Stress analysis Fluid thermal analysis Shock analysis

Electro magnetic field analysis

Piezo electric device vibration analysis

Electrical analysis

ANALYSIS TECHNOLOGY
TEM XRD EPMA AFM

EVALUATION TECHNOLOGY
Electrical evaluation Durability evaluation

Mechanical evaluation

Thermal friction evaluation

Item Kyocera No. Color

Material

Unit

Measuring Method A-479 99% White 3.8 0 15.2 310 360 0.23 34 7.2

Alumina
(Al2O3)

Sapphire A-601D A-601L 99.9% Ivory 3.9 0 17.5 400 380 0.23 56 7.2 8.0 34 0.78 15 >1014 1013 1010 9.9 1 10 0.03 0.19 0.03 SA-100 99.9% Transparent 3.97 0 22.5 690 470 Parallel to C-axis 7.7 Vertical to C-axis 7.0 41 0.75 48 >1014 1011 Parallel to C-axis 11.5 Vertical to C-axis 9.3 <1 0.00 0.00 0.00

A-479M A-479SS A-480S A-479G 99.5% Ivory 3.9 0 16.0 360 370 0.23 4 7.2 8.0 32 0.78 250 15 >1014 1013 1010 9.9 1 10 0.07 0.25 0.05 99.5% Ivory 3.9 0 15.7 370 370 0.23 7.2 8.0 32 0.78 15 >1014 1013 1010 9.9 1 10 99.7% Ivory 3.9 0 17.2 380 380 0.23 7.2 8.0 32 0.79 15 >1014 1013 1010 9.9 1 10 0.05 0.22 0.04

Bulk Density g/cm Water Absorption % Vickers Hardness HV1 (Load=9.807N) (GPa) Flexural Strength (3PB) R.T. MPa GPa Young's Modulus of Elasticity Poisson's Ratio Fracture Toughness (SEPB) MPam1/2 Coefcient of Linear Thermal Expansion 40 400 40 800

JIS R1634 JIS R1634 JIS R1610 JIS R1601 JIS R1602 JIS R1607

x10-6/ JIS R1618 8.0 W/(m.k) JIS R1611 J/(g.k) JIS R1611 JIS R1648 KV/mm
.cm

Thermal Conductivity 20 Specic Heat Heat Shock Resistance Dielectric Strength Volume Resistivity 20 300 500

JIS (X104) (X104) WT Loss mg/cm2 JIS R1614 Measuring Method C2141

29 0.79 200 15 >1014 1010 108 9.9 2 20 0.10 0.33 0.26

Dielectric Constant (1MHz) Dielectric Loss Angle (1MHz) Loss Factor Nitric Acid(60%)90 Sulphuric Acid(95%)95 Caustic Soda(30%)80 Material

Item Kyocera No. Color

Unit

Silicon Nitride
(Si3N4)

Silicon Carbide Aluminum Nitride

(SiC) (AIN)

(2MgO2AL2O35SiO2)

Cordierite

Yttria Zirconia
(Y2O2) (ZrO2)

SN-201B SN-260 SN-240 SN-241 SC-211 SC1000 AN216A AN2000 Black JIS R1634 JIS R1634 JIS R1610 JIS R1601 JIS R1602 JIS R1607 3.2 0 13.9 580 290 0.28 45 2.4 3.2 W/(m.k) JIS R1611 J/(g.k) JIS R1611 JIS R1648 KV/mm
.cm

CO-220 Gray 2.5 0 8 190 140 0.31 1 1.5 1.5(40 400 ) 2.1(40 800 ) <|0.05|(23 ) <|0.02|(22 ) 4 0.71 19.1 >1014 1012 1010 4.9 9 -

CO-720 Gray 2.5 0 8.5 200 145 0.31 1 1.5 1.5(40 400 ) 2.1(40 800 ) <|0.05|(23 ) <|0.02|(22 ) 4 400 19.3 >1014 1012 1010 4.9 8.5 -

Y0100A Z-201N White 4.9 0 6.0 130 160 1.1 7.2 7.6 14 0.45 11 >1013 1010 107 11.0 5 55 Ivory 6.0 0 12.3 1,000 200 0.31 45 10.5 11.0 3 0.46 300 11 1013 106 103 33.0 16 520 0.00 0.04 0.08

Black 3.1 0 12.7 900 270 0.28 67 2.8 3.4 23 0.66 800 12 >1014 1013 1011 8.3 5 1.02 0.01 0.49

Black 3.3 0 14.0 1,020 300 0.28 7 2.8 3.3 27 0.65 800 13 >1014 1012 1010 9.6 19 1.11 0 0.22

Black 3.2 0 13.8 790 290 0.28 67 2.9 3.5 54 0.66 900 12 >1014 1012 1010 9.6 18 0.18 0 0.07

Black 3.2 103 0 22.0 540 430 0.16 45 3.7 4.4 60 0.67 400 105 104 103 0.04 0.01 0.00

Black 3.16 0 23.0 450 440 0.17 23 3.7 4.4 200 0.67 108 104 103 0.00 0.00 0.00

Gray 3.4 0 10.4 310 320 0.24 4.6 5.3 150 0.71 14 >1014 1010 108 8.6 3 26 -

Ivory 3.2 0 11.2 220 310 0.24 4.6 5.2 67 0.72 16 >1014 1010 109 8.5 2 17 -

Bulk Density g/cm3 Water Absorption % Vickers Hardness HV1 (Load=9.807N) (GPa) Flexural Strength (3PB) R.T. MPa Young's Modulus of Elasticity GPa Poisson's Ratio Fracture Toughness (SEPB) MPam1/2 Coefcient of Linear Thermal Expansion 40 400 40 800

x10-6/ JIS R1618

Thermal Conductivity 20 Specic Heat Heat Shock Resistance Dielectric Strength Volume Resistivity 20 300 500

JIS (X10 ) (X104) WT Loss mg/cm2 JIS R1614

4

25 0.64 550 >1014 1012 1010 -

Dielectric Constant (1MHz) Dielectric Loss Angle (1MHz) Loss Factor Nitric Acid(60%)90 ,24H Sulphuric Acid(95%)95 ,24H Caustic Soda(30%)80 ,24H

C2141

Unit Conversion Table

Stress
Mpa Kgf/mm Kgf/cm 1 1.0197 10-1 1.0197 10 9.807 1 1 102 9.807 10-2 1 10-2 1
2 2

Notes
Thermal Conductivity
W/(mk) 1 1.163 418.7 Cal/cmSec 2.39 10-3 2.78 10-3 1
These values are only for reference, showing the measurement results of test pieces specified. The values may change dependent on the using conditions and the shape of products. For more details, please feel free to contact us.

Alumina Wafer Polishing Plate / Turn Table

Material : Al2O3 Size : Up to 39" in diameter Features : High rigidity High chemical durability Surface shape & roughness control

Silicon Carbide Wafer Polishing Plate

Material : SiC Size : Up to 30" in diameter Features : High thermal conductivity Low thermal expansion High rigidity

Pad Dresser
Material : Al2O3, SiC, Si3N4 Features : High wear resistance Square bumps / pyramid bumps

Sapphire Carrier Plate

Material : Sapphire Size : Up to 8" in diameter Features : High purity High chemical durability No grain boundary Transparent

Plasma Proof Dome

Material : Al2O3 Size : For 200mm / 300mm equipment Features : High purity High plasma durability

Plasma Proof Ring

Material : Al2O3, Y2O3 Size : For 200mm / 300mm equipment Features : High purity High plasma durability

Electro-Static Chuck
Material : Al2O3, AlN, Sapphire Size : For 200mm / 300mm equipment Features : High purity High plasma durability Good chucking / de-chucking response High temp. and low temp. application

Heater
Material : AlN Size : For 200mm / 300mm equipment Features : High purity High plasma durability Uniform thermal distribution

Vacuum Chuck
Material : Al2O3, Porous Al2O3, SiC Size : For 200mm / 300mm equipment Features : High purity High chemical durability Vacuum channel inside Variety surface shape

Nozzle
Material : Al2O3 Size : Nozzle diameter +/-5m Features : High plasma durability Gas flow rate control

End Effector
Material : Al2O3, SiC, Sapphire Size : For 200mm / 300mm equipment Features : High purity Vacuum channel inside SiC coating Mirror polished surface

Chamber Window & Tube

Material : Sapphire Features : High purity High plasma durability Transparent High transmission factor

USM Stage - Assembly Technology

: Al2O3, AI Non Magnetic Metal, etc. Features : Ultrasonic Motor drive High positioning accuracy Compact design Material

Metalized Products - Metal Assembly Technology

Material : Al2O3, AI, Stainless steel, etc. Application : IC Packages High vacuum component High voltage terminal, etc.

Coating Technology
Material : SiC, DLC, etc. Features : Discharge of static electricity Soft contact

Large Size Product Manufacturing Technology

Material : Al2O3, Y2O3, SiC, Si3N4 Application : LCD manufacturing equipment Lithography equipment

Material Development Technology

example

Material : Low thermal expansion materials Application : Lithography equipment Wafer Inspection equipment

<JAPAN : Headquaters>

KYOCERA Corporation

Corporate Fine Ceramics Group 6 Takeda Tobadono-cho, Fushimi-ku, Kyoto 612-8501, Japan Tel: +81-(0)75-604-3441Fax: +81-(0)75-604-3438

<U.S.A>

KYOCERA Industrial Ceramics Corporation TX 11044 Research Blvd., SuiteA-430, Austin, TX 78759 Tel: +1-512-336-1725 Fax: +1-512-336-8189 MA 24 Prime Parkway Natick MA 01760 Tel: +1-508-651-3922 Fax: +1-508-650-0625 IL 25 NW Point Blvd., #660 Elk Grove Village lL 60007 Tel: +1-847-981-9494 Fax: +1-847-981-9495 NC 100 Industrial Park Rd, Hendersonville, NC 28792 Tel: +1-828-693-8244 Fax: +1-828-692-1340 NJ 220 Davidson Avenue, Suite 104, Somerset, NJ 08873 Tel: +1-732-563-4336 Fax: +1-732-627-9594 CA 8611 Balboa Avenue, San Diego, CA 92123 Tel: +1-858-614-2520 Fax: +1-858-715-0871 CA 472 Kato Terrace, Fremont, CA 94539 Tel: +1-510-257-0200 Fax: +1-510-257-0125 WA 5713 East Fourth Plain Blvd., Vancouver WA 98661 Tel: +1-360-696-8950 Fax: +1-360-696-9804

Thailand 159 Serm-MIT Tower, 19th Floor, Sukhumvit 21 Road, Wattana, Bangkok 10110 Thailand. Tel: +66-(0)2 661-6400 Fax: +66-(0)2 661-6413 KYOCERA Asia Pacic India Pvt.Ltd. India PLOT NO.51, Phase-I, Udyog Vihar Gurgaon 122016 Haryana, India Tel: +91-124-4025000 Fax: +91-124-4025001 KYOCERA Asia Pacic Pte. Ltd. Manila Branch 11B Kingston Tower, Block 2 Lot 1 Acacia Avenue, Madrigal Business Park Alabang, Muninlupa City 1780, Phillipines Tel: +63(2)771-0618 Fax: +63(2)775-0532 KYOCERA (Malaysia) Sdn.Bhd. Malaysia Lot 4A, Lower Level 3 Hotel Equatrial, Penang No.1, Jalan Bukit Jambul 11900 Penang, Malaysia Tel:+60(4)641-4190 Fax: +60(4)641-4209

<EUROPE>

KYOCERA Fineceramics GmbH Hammfelddamm 6 41460 Neuss, Germany Tel: +49-(0)2131-16370 Fax: +49-(0)2131-1637150 KYOCERA Fineceramics Ltd. Prospect House Archipelago Lyon Way Frimley Surrey GU16 7ER U.K. Tel: +44-(0)1276-693450 Fax: +44-(0)1276-693460 KYOCERA Fineceramics S.A.S. Parc Tertiaire Silic 21 Rue De Villeneuve BP 90439 94583 Rungis Cedex, France Tel: +33-(0)1-41737330 Fax: +33-(0)1-41737359

<CHINA>

KYOCERA (China) Sales&Trading Corporation Shanghai Branch FineCeramic Sales Dept Unit 601 oor of Ocean Towers, No.550 Yan an East Road, Huangpu District, Shanghai, 200001 P.R. China Tel: +86-(0)21-5877-5366 Fax: +86-(0)21-5888-5082 KYOCERA (China) Sales&Trading Corporation Shenzen Ofce Fine Ceramic Sales Dept Room 1809, Hailrun Complex, No.6021 Shennan Blvd., Shenzhen, 518040 P.R.China Tel: +86-(0)755-82873625 Fax: +86-(0)755-82873640

<ASIA>

KYOCERA Asia Pacic, Ltd. Hong Kong Room 801-802, Tower 1, South Seas Centre, 75 Mody Road, Tsimshatsui East, Kowloon, Hong Kong Tel: +852-(0)2723-7183 Fax: +852-(0)2724-4501 Singapore 298 Tiong Bahru Road, #13-03/05 Central Plaza, Singapore 168730 Tel: +65-6271-0500 Fax: +65-6271-0600 Taiwan 10FL.,No.66, Nanking West Road, Taipei, Taiwan, Tel: +886-(0)2-2555-3609 Fax: +886-(0)2-2559-4131/4123
http://www.kyocera.co.jp

<KOREA>

KYOCERA Korea Co., Ltd. Diplomatic Center Room No. 406, 1376-1, Seocho-2Dong, Seocho-Gu, Seoul, 137-072, Korea Tel: +82-2-3463-3538 Fax: +82-2-3463-3539
The contents of this catalog are subject to change without prior notice for further improvement. Application and the using conditions are required to be consulted on when to consider purchase.
C 2014 KYOCERA CORPORATION
013/011/1401 January,2014 Printed in Japan 022391