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Microelectronics Today Problems and Solutions

Frank Sill Torres


OptMAlab / ART Universidade Federal de Minas Gerais (UFMG), Brazil

Sill Torres: Microelectronics

About Me
Im German (from the NorthEast)

Master / PhD. in Electrical Engenering / Microelectronics (Universitt Rostock, Germany) Research areas:
Low Power Integrated Circuit (IC) Design IC Design for Reliability (analog / digital) Nanoelectronics ...
Sill Torres: Microelectronics

Outline 1. Areas of Microelectronics 2. Chip Design 3. State of the Art 4. Problems 5. Solutions 6. Microelectronics at UFMG and in Brazil

Sill Torres: Microelectronics

Areas of Microelectronics
Process/Devices

All activities related to chip fabrication (Lithography, Etching, Ion Implantation,) Design of new transistor devices (Bulk-CMOS, SOI, FinFet,) Work on materials for semiconductors MicroElectroMechanical Systems (MEMS), e.g. Microphone of the iPhone4 Micro-lenses Related laboratory at UFMG / EE OptMAlab
Knowles S1950 MEMS Die Clean room - UFMG

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Areas of Microelectronics
Circuits

Design of integrated analog circuits Design of logic cells Design of integrated sensors and actuators Related laboratories at UFMG / EE OptMAlab OptMAlab / ART
high-Vth/Tox Active pixel for digital camera (OptMAlab)

low-Vth/Tox Advanced low leakage cell (OptMAlab/ART)

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Areas of Microelectronics
Systems

Design of integrated systems Application Specific Integrated Systems (ASIC) Processors System on Chip (SOC) Digital / Analog / Mixed-Signal Design of Intellectual Property (IP) blocks FPGA design Related laboratories at UFMG / EE OptMAlab / ART LSI LabSCI
Sill Torres: Microelectronics
Copyright: ELV.de

Chip Design

Sill Torres: Microelectronics

Chip Design
Standard Designflow

VHDL, SystemC Synthesis Floorplanning Placement Routing

Textual description of the design Mapping of the design onto logic cells Planing of basic structure of the chip (Size, I/O, power supply, blocks, ) Placement of logic cell on chip

Wiring of logic cells

Production
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ASIC Design
Task Description

Up to 25 years ago: chips developed on drawing board End of 80s: Hardware Description Languages (HDL) Verilog - 1985 VHDL - 1987 Newest developments Object orientated approach SystemC
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ASIC Design
Representation with logic cells

Called: Synthesis Conversion of high-level description into logic cells Happens automatic by special tools

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Chip Design
Synthesis Tool (Synopsys DesignVision)

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Chip Design
Determination of Chip Sizes

Called: Floorplanning Planning of basic structure of the chip (Size, Inputs/Outputs, power supply, blocks) What decides the chip size?
PAD-limited CORE-limited BLOCK-limited

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Chip Design
Floorplanning Tool (Cadence Second Encounter) Menu Layer selection

Tools

Coordinates Overview window Control output

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Chip Design
Placement

Placement of logic cells Usually: Standard cells Uniform cell height Different widths Tool support
Copyright: Weste, 2011

Copyright: Yu, UC Davies

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Chip Design
Placement - Example

Copyright: Yu, UC Davies

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Chip Design
Routing

Placing of wires that connect logic cells Two Phases: Global Routing Detailed Routing Tool support

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Chip Design
Routing - Examples

Ref.: Wikipedia

Copyright: Yu, UC Davies

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Chip Design
Fabrication

Design project saved as file (e.g. GDS2) sent to fab Fab: Fabrication, packing, and testing Very expensive (e.g. Intel 14 nm - USD 5 Billion, GlobalFoundries 28 nm USD 4.6 Billion, source: Wikipedia)

CEITEC S.A., Rio Grande do Sul (Work in Progress, 0.6 um)


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Chip Design
Design Houses

In the past
Chip designer and factories together Intellectual Property belongs to factory

Today
Chip designers and factories separate Intellectual Property stays with designer
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State of the Art

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State of the Art


Overview

Technology sizes: starting from 22 nm Processors with 64 bit Multi-cores Processors for Servers (Opteron, Xeon, ) PCs (Core i3/i5/i7, Fusion, ) Smartphones / Pads (ARM, Atom, ...) High integration of functionalities Memory controller Graphic card

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State of the Art


Processors

500 500

Transistors [Mill.] [Mill.] Transistors

130 nm 400 400 300 300 200 200 100 100 0 0


Northwood 55 Mill.

Wolfdale 410 Mill.

150 nm

90 nm
Yonah 65 nm 151 Mill. Prescott 125 Mill. Yonah, 151 Mill.

100 nm

45 nm

50 nm

0 nm

2002 2002

2004 2004

Year Year

2006 2006

2008 2008

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Technology

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State of the Art


Dimensions

1 m 10 cm 100 nm 10 1 1 mm cm m m

Source: Spektrum der Wissenschaften

22 nm-Transistor
Source: Intel

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Problems

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Problems
Power Dissipation

SoC Consumer Portable Power Trend [Source: ITRS, 2010 Update]


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Problems
Power Density

Nuclear Reactor

Hot Plate

Source: http://cpudb.stanford.edu/

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Problems
Leakage

MOS-Transistor: Basic Element

Conducting:
Current flow Dynamic power dissipation Until early 2000s dominating
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Closed (ideal):
No Current No power dissipation

Closed (real):
Still current flow (Leakage) Power dissipation

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Problems
Subthreshold Leakage Isub

Threshold Voltage Vth


Transistor characteristic If: Gate-Source-Voltage Vgs higher than Vth Current between Drain and Source If: Vgs lower than Vth (ideal) No current Source
Source

Vgs > Vth


Gate

Gate
Drain

Isub

Drain

Subthreshold leakage Isub


Leakage between Drain and Source when Vgs < Vth Based on: Short Channels Diffusion Thermionic Emission
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high Concentration Diffusion

Low concentration

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Problems
Gate Leakage Igate

Tunneling effect Electromagnetic wave strikes at barrier: Reflection + Intrusion into barrier If thickness is small enough: Wave interfuses barrier partially: (Electrons tunnel through barrier) Gate oxide leakage Igate At transistors with Tox< 2 nm Electrons tunnel through gate oxide Leakage current
Igate

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Problems
Process Failures

Occur at production phase Based on Process Variations Particles

Source: Mak

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Problems
Electromigration

Transport of material caused by the gradual movement of ions in a conductor Major failure mechanisms in interconnects Proportional to width and thickness of metal lines Inversely proportional to current density

Top View

Void Metal 1

Metal 1

Whisker, Hillock Cross Section View Metal 1 Metal 2


Source: Plusquellic, UMBC

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Problems
Electromigration contd Void in 0.45mm Al-0.5%Cu line
Source: IMM-Bologna

Whiskers in Sn
Source: EPA Centre

Hillocks in ZnSn
Source: Ku&Lin,2007

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Problems
Gate Oxide Breakdown

Tunneling currents Wear out of gate oxide Creation of conducting path between Gate and Substrate, Drain, Source Depending on electrical field over gate oxide, temperature (exp.), and gate oxide thickness (exp.) Also: abrupt damage due to extreme overvoltage
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Source: Pey&Tung Source: Pey&Tung

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Problems
Soft Errors
Source: Automotive 7-8, 2004

In 70s observed: DRAMs occasionally flip bits for no apparent reason Ultimately linked to alpha particles and cosmic rays Collisions with particles create electron-hole pairs in substrate These carriers are collected on dynamic nodes, disturbing the voltage
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Problems
Soft Errors contd

Internal state of node flips shortly If error isnt masked by


Logic: Wrong input doesnt lead to wrong output Electrical: Pulse is attenuated by following gates Timing: Data based on pulse reach flipflop after clock transistion

wrong data

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Problems
Temperature Variations

Drain current IDS [pA]

Temperature [C]

Threshold voltage Vth changes with temperature drain-source current changes delay changes Source: Burleson, UMASS, 2007
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Delay [s]
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Problems
Failures due to Increasing Delay Data are processed before clock phase is over

Clk

Clock (Clk)

Logic too slow!

Data processing

Clk
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longer than clock phase Wrong Data in next clock phase! 37

Solutions

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Solutions
New Technologies

For example: Intel

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Solutions
Basics: Delay and Power versus VDD
6 Relative Delay td 5 4 3 2 1 0 0.8 1 1.2 1.4 1.6 1.8 2 2.2 2.4 Supply voltage (VDD) 10

td

6 4 2 0

Dynamic Power can be traded by delay


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Relative Pdyn

Pdyn

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Solutions
Adaptive Dynamic Voltage/Frequency Scaling (DVS/DFS)

Slow down processor to fill idle time More Delay lower operational voltage

Active

Idle

Active

Idle

3.3 V 2.4 V

Active

Runtime Scheduler determines processor speed and selects appropriate voltage Transitions delay for frequencies <150s Potential to realize 10x energy savings E.g.: Intel SpeedStep, AMD PowerNow, Transmeta Longrun

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Solutions
DVS/DFS with Transmeta LongRun
100 % of max powerl consumption 90 80 70 60 50 40 30 20 10 0 300
300 Mhz 0.80 V

Typical operating region

Peak performance region

400
433 Mhz 0.87 V

500
533 Mhz 0.95 V

600

700
667 Mhz 1.05 V

800
800 Mhz 1.15 V

900
900 Mhz 1.25 V

1000
1000 Mhz 1.30 V

Frequency (MHz)
Source: Transmeta

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Solutions
Clock Gating

Most popular method for power reduction of clock signals and functional units Gate off clock to idle functional units Logic for generation of disable signal necessary Strong reduction of dynamic power dissipation

clock disable

R Functional e unit g

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Solutions
Clock Gating: Example Without clock gating

30.6mW
With clock gating

8.5mW

VDE

DEU

10

15

Power [mW]

20

25

MIF 896Kb SRAM

DSP/ HIF

90% of FlipFlops clock-gated 70% power reduction by clock-gating

MPEG4 decoder
Source: M. Ohashi, Matsushita, 2002

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Solutions
Power-orientated Programming
14000

Switched Capacitance (nF)

12000 10000 8000 6000 4000 2000 0 bubble.c heap.c quick.c


Source: Irwin, 2000

Others Functional Unit Pipeline Registers Register File

Algorithms can differ in power dissipation


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Solutions
Basics: Stack Effect

Transistor stack: at least two transistors in a row Based on behavior of internal nodes: The more transistors are non-conducting (off) the lower the leakage

Source: Roy, Lecture

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Solutions
Sleep Transistors

Idea: Insertion of additional transistors between logic block and supply lines These transistors: connected with SLEEP-signal

sleep

Vdd Virtual Vdd

If circuit has nothing to do: SLEEP signal is active: Stack effect (additional off transistor in row to other)
Circuit sleep Virtual Vss Vss

Mostly insertion only of 1 transistor

Source: Kaijian Shi, Synopsys

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Solutions
Basics: Relation of Vth, Delay and Leakage

Threshold Voltage Vth:


Influence on sub-threshold leakage Isub Influence on delay of logic gates

Isub

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Solutions
Dual-Vth

LVT- Cells
Cells consist of transistors with low Vth Low delay High leakage For critical paths

HVT- Cells
Cells consist of transistors with high Vth Longer delay Low leakage For uncritical paths

Leakage reduction at constant performance


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Solutions
Dual-Vth Example

LVT- Cells HVT- Cells

Critical Path

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Solutions
Triple Module Redundancy (TMR)

Input

Logic L
A

Copy of Logic L Copy of Logic L

B C

Voter

Output

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Solutions
Self Adaptive Design

Extend idea of clock domains to Adaptive Power Domains Tackle static process and slowly varying timing variations Control VDD, Vth (indirectly by body bias), fclk by calibration at Power On
Test inputs and responses

VDD

fclk

Test Module VBB

Module

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Solutions
Reliability Enhancement via Sleep Transistors

Basic idea: Reduction of degradation via module deactivation Problem: What to do at run-time? Module 1 Instance 1 Module 2
SLEEP

Module 1 Instance 2

MUX

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Opportunities in Brazil and Activities at UFMG

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Opportunities in Brazil
CEITEC S.A. Design House and Chip factory (Rio Grande do Sul) Over 22 Design Houses DHBH in Belo Horizonte MINASIC in Itajub CTI, Eldorado, LSI-TEC, von Braun, Many other companies, e.g.: AEGIS / SEMIKRON: Power devices SMART / HT Micron: Back-end for memories FREESCALE: Design center

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Opportunities in Brazil contd


Minas Gerais InventVision - Optical Systems, FPGA Jasper - Verification CBS (wafer production) - planned CMinas (MEMS) - planned Foxconn (Displays) - planned

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Activities at UFMG / EE
OptMAlab

Laboratory for Optronics and Microtechnologies (OptMAlab) Located at PPGEE / UFMG Coordinator: Dr. Davies William de Lima Monteiro Adaptive Optics: wavefront aberration, components and systems Microelectronics: Analog Integrated-Circuit design custom pixels, image sensors and optical position-sensitive devices (PSDs) Micromachining: silicon wet processing micro-optics Ophthalmic Optics: technology and characterization of intraocular lenses Photovoltaics: alternative self-configurable cells

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Activities at UFMG / EE
OptMAlab - IC for read-out for infrared sensor CMOS AMS 0.35m Chip area: 12 mm2 3.3V e 5.0V > 90 pins > 60 structures Digital circuits Analog circuits Mixed-Signal Circuits Photo-diodes Photo-resistors

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Activities at UFMG / EE
OptMA - ART

Asic-ReliabiTiy (OptMAlab / ART) Extension of OptMAlab at PPGEE/UFMG Coordinator: Frank Sill Torres Dedicated to reliability in micro- and nanoelectronics applications Activities in the field of Design for Reliability Low Leakage / Low Power Chip Design Development of CAD tools extensions Robust Nanoelectronics More information: www.asic-reliabity.com

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Activities at UFMG / EE
OptMA ART / Reliable Adder CMOS AMS 0.35m Chip area: 1 mm2 3.3V > 10 pins Test structures Modified logic cells Sleep Transistors Prepared for Controlled Destruction

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LSI Laboratrio de Sistemas Inteligentes


Projeto: Desenvolvimento de um Sistema de Determinao de Atitude com Tolerncia a Falhas para Satlites de Baixa rbita. Projeto Financiado pela AEB Programa UNIESPAO
Colaboradores: INPE, UFABC, OptMa

Sntese do Projeto:
O que Atitude Satlites que operam em Baixa rbita Terrestre O ambiente hostil a que os CIs so colocados em funcionamento. Condies limitadoras: alta preciso de apontamento, baixa potncia, baixo peso, baixo custo e confiabilidade 99,99999% durante a misso.
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LSI Laboratrio de Sistemas Inteligentes

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LSI Laboratrio de Sistemas Inteligentes


reas de atuao da Microeletrnica: Entender e modelar o efeito de falhas em CIs. Diversidade de Dispositivos Diversidade de Arquiteturas Diversidade de Ambientes e Situaes Emular o efeito de falhas em CIs. Mitigar o efeito das falhas dos CIs nos Sistemas que os compreendem Tcnicas de Tolerncia a Falhas

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LSI Laboratrio de Sistemas Inteligentes


Equipe atual: Fernando Esqurio Torres (bolsista de mestrado CPDEE) Thalles Hermes R. Gomes (bolsista PET-EE) Wagno Alves Bragana J. (bolsista PET-EE) Bruno Henrique S. Guimares (voluntrio IC-EE) ... ???? Contato: Prof. Ricardo de Oliveira Duarte Email: ricardoduarte@ufmg.br Sala pessoal: 2521 Sala do LSI: 2515

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LSI Laboratrio de Sistemas Inteligentes

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Thank you!
franksill@ufmg.br
OptMAlab / ART www.asic-reliability.com

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Solutions
Network on Chip

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