2
, of the VCMR in Fig. 1 is
calculated, where is the eld transmission coefcient at the
vertical coupling section the eld amplitude of the guided
beam in the waveguide after the vertical coupling section for
normalized input, is the loss factor for the microring
=1, lossless cavity, and is the buildup phase shift per
roundtrip of the circulating beam in the microring. In this
calculation, the dispersion characteristics of the buildup
phase shift for the fundamental mode in the microring were
included using the conformal mapping method.
15
As shown
in Fig. 2, the measured spectral photoresponse of the imple-
mented spectral analysis system is in good agreement with
the calculated throughput power of the fabricated microring
resonator.
From the measured photoresponse of the fabricated
wavelength selective photodetection system, the measured
full width half maximum FWHM around the resonant
wavelength of 1546.6 nm was 0.5 nm, which is an excellent
wavelength selectivity. This is compared to, for example, a
wavelength selective photodetector using a tapered vertical
cavity approach, which resulted in a FWHM of 0.8 nm.
6
The
calculated coupling efciency between the waveguide and
the embedded thin lm PD for the fabricated structure using
a commercial two-dimensional bidirectional beam propaga-
tion solver BEAMPROP from Rsoft Inc. was 98%. The esti-
mated Q factor of the VCMR based on the measured spectral
photoresponse of the fabricated spectral analysis system
shown in Fig. 2 circles was 4549 with 37% of calculated
input coupling efciency between the excitation optical ber
mode eld diameter: 9.5 m and the fabricated SU8 wave-
guide 2 m thick and 4 m wide.
Figure 3 shows the measured dark current and photocur-
FIG. 1. Schematic diagram of the fabricated VCMR integrated with a thin
lm MSM PD inset: fabricated vertically coupled microring resonator.
FIG. 2. Calculated throughput power of the fabricated microring resonator
solid line and measured spectral photoresponse of the integrated MSM PD
circles.
FIG. 3. Measured dark current and photocurrent for two different input
wavelengths
1
=1551.3 nm and
2
=1550.6 nm as a function of bias volt-
age to the MSM PD.
101105-2 S.-Y. Cho and N. M. Jokerst Appl. Phys. Lett. 90, 101105 2007
Downloaded 09 Oct 2013 to 152.3.102.242. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://apl.aip.org/about/rights_and_permissions
rent for two different input wavelengths
1
=1551.3 nm and
2
=1550.6 nm as a function of bias voltage to the MSM
PD. The measured current-voltage characteristics of this in-
tegrated spectral analysis system exhibit excellent selectivity
for these different spectral inputs. The difference between the
maximum photocurrent and the measured dark current was
23.4 dB. The measured dark current at 5 V was 3.2 nA for
the integrated MSM PD. These experimental results suggest
that the spectral response of wavelength nonselective PDs
InGaAs MSM PDs integrated with VCMRs can be engi-
neered and optimized for specic applications without sacri-
cing the spectral performance of the microring resonator.
In conclusion, an integrated spectral analysis system us-
ing a thin lm MSM PD integrated with a polymer VCMR
was demonstrated. The measured difference between the
maximum photocurrent and the dark current was 23.4 dB.
The measured FWHM of the output spectrum was 0.5 nm.
The demonstrated integrated spectral analysis system shows
excellent wavelength selectivity compared to other ap-
proaches and can be applied to various applications such as
highly integrated chip scale optical sensing systems and in-
tegrated optical signal processing systems.
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Downloaded 09 Oct 2013 to 152.3.102.242. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://apl.aip.org/about/rights_and_permissions