EISS

Rev 01/01-06
www.suss.com
Enhanced Image Storage
System
USER MANUAL
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Table of Contents :
1.0 Introduction
2.0 Basic EISS Operation
2.1 Features and Benefit of EISS
2.2 Technical Specification of EISS System
2.3 Power Up
3.0 Visualization
3.1 Image Control Status, Display Modes of
Camera Images
3.2 Toolbar
3.3 Image Settings dialog
3.4 Enhanced Imaging
3.5 Open / Save an Image
4.0 Method of Operation with EISS
5.0 Error Handling ( Common Error )
6.0 Service Functions
6.1 Block diagram EISS
7.0 Appendix
7.1 Init File for EISS
7.2 Spare Parts
7.3 Circuit Diagram
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Chapter Page
illustration 1 : EISS Functions
illustration 2 : EISS Start Screen
illustration 3 : Menu Bar
illustration 4 : Live Image
illustration 5 : Image Control Bar
illustration 6 : Views
illustration 7 : Image Settings
illustration 8 : Open Dialog
illustration 9 : Save Dialog
illustration 10: Remarks
illustration 11: Overview EISS, Cable Wiring
Illustration Contents

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1.0 Introduction
The Enhanced Image Storage System (EISS) is an electronic visuali-
zation unit used for comfortable, reliable and precise aligning of mask
and wafer. With its help, the microscope images can be displayed on
the monitor.
The EISS system is the result of the uncompromising development
and years of experience using the digital video control unit (DVCU).
With the EISS system all images can be stored and loaded onto and
from the hard or floppy disks. For precise wafer aligning the mask
pattern is stored as the background image (grab image function).
Next, the automatically focused live image of the wafer can be alig-
ned to the stored mask image.
To keep the system maintenance-free, it is not planned or recommen-
ded to install other programs on the PC.
A network card is included for network integration.
2.0 Basic EISS Operation
The operation refers to the Microsoft Windows rules.
The program is for the most part self explaining. The operation is con-
trolled by trackball and PC keyboard. The PC keyboard is necessary
for image storage only. All functions can be enabled with the trackball (
integrated into the machine keyboard ) and the menu bar. A double-
click on the live image automatically opens the image settings dialog.
illustration 1 : EISS Functions
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2.1 Features and Benefit of EISS
SXGA resolution (1280x1024)
no flickering
electronic contrast and brightness adjustment
adjustment of brightness ratio between stored and live image
from 0% to 100% either way (improves visibility of
superimposed images)
contrast enhancement integration function to increase black
and white ratio especially for pattern with very pure contrast
image storage on hard or floppy disk
fileserver Data transfer via network
electronic magnification 1x, 2x, 4x additional to the optical
magnification
trackball control integrated into aligner keyboard
(no Windows 2000 knowledge required)
17 CRT monitor on MA6, 16 TFT-flatscreen on MA8
PC with operating system Windows 2000
2.2 Technical Specification of EISS System
EISS System :
Size : Height : 216 mm (8.5")
: Width : 575 mm (23.6")
: Depth : 650 mm (25.6")
Weight : 22kg (48.5 lbs)
Operating System : Windows 2000 Multilanguage version
Screen Resolution : 1280x1024 pixel
Mains Input : 230V +/- 10% 50/60Hz,
Plug located at machine back panel
Please be advised not to inst all other sof tware
nor programs!
2.3 Power Up
The EISS system (PC and the monitor) is connected with a threefold
extension shock proof plug (behind main switch) coming from the
MA6/BA6 back panel. Do not connect the PC to another power
source.
On power up of the PC the EISS program starts automatically.
The startup dialog (ill. 2) enables an optional software update from flop-
py disk. Typically this function will be skipped, the EISS application
starts automatically without clicking ok after a 3 second pause.
The last image settings of contrast and illumination will be reloaded.
illustration 2 : EISS Start Screen
Never switch off PC while booting !!!
Do not plug or unplug connecting cables during operation !!!
The EISS PC should be switched off with the shutdown
command under File in the menu bar.
A power down with main switch starts an automatic shutdown sequen-
ce by the internal uninteruptible power supply (UPS).
The UPS gives an acoustic signal (permanent beeping). After a save
the message "now it is safe to turn off your PC" is displayed on the
monitor. The PC can be switched off now. Please find the On/Off
switch behind the PC door. If not, the UPS will deactivate the PC and
Monitor after 2-3 min automatically.
The UPS is not considered nor designed to run a auto shutdown
sequence whenever the aligner is switched off. It is designed to main-
tain a constant power to the PC or cover sudden power fluctuation in
range of seconds.
The UPS is active when power supply < 180V
The complete UPS battery recharge needs about 8 hours time.
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8 3.0 Visualization
The EISS application is programmed in a multi-language version.
Available languages are English, German and France. The preselec-
tion is factory set and can be changed by Suss MicroTec service per-
sonnel only.
The default screen resolution is 1280x1024 pixel on 17 CRT moni-
tor or 16 TFT flatscreen.
The setting of time zone, time and date is only possible over the
accessible operation system (BIOS password : EISS).
The EISS screen is divided in several sections
Title- and menu bar, tool- or symbol bar (icon's),
illustration 3 : Menu Bar
Live-/overlay image
illustration 4 : Live Image
Image control bar of the machine and the
help status bar
illustration 5 : Image Control Bar
The tool-, status- and image control bar can be hidden and
fade in and out
illustration 6 : View
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3.1 Image Control Status, Display Modes of
Camera Images
The image control status characterizes the machine condition repres-
ented by icons.
TSA microscope active
TSA microscope active
Magnification Low, large field of view
Magnification High, small field of view
Live image
Grabbed image
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11 Representation of the active camera images
in the different display modes of the machine
Single field left
Single field right
Splitfield active
Left Mode
Right Mode
Split Mode
Trunc Mode
Camera field of view
field of view 1x
field of view 2x
field of view 4x
* Trunc Mode only with resolution 800x600
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3.2 Toolbar
Available functions of the toolbar.
open file
automatic safe
save as
trunc
magnification x1
magnification x2
magnification x4
contrast and illumination dialog
Enhanced Image processing
Help
13 3.3 Image Settings Dialog
When working with the EISS make sure all sliders are in middle posi-
tion. First use all the hardware adjustment possibilities like iris, illumi-
nation- and focusing potentiometers for best image quality. Then opti-
mize with available EISS functions if necessary.
Again, the software functions are for fine adjustment and image opti-
mizing only.
The image settings dialog contains three functions:
Illumination slider [0 (max) - 1000 (min)].
Default is middle position (500)
Contrast slider [0 (max) - 1000 (min)].
Default is middle position (500)
Alpha slider [0 (max) - 1000 (min)].
Default is middle position (500)
The histogram graph gives information about the intensity distribution
on the video input. An example is shown in illustration 7. Part of that
image is too dark (graph to far to the left) and should be set with the
illumination potentiometer to the middle of histogram graph for the
best results.
Live/Grab Alpha proportion:
Live and stored patterns can be balanced out. To hide one or
the other pattern move the slider completely to Live (1000) or
Grab (0). The slider is enabled only when an image is
stored with the grab image key on the machine keyboard.
Reset:
Resets the image setting to the last saved settings.
Close or X :
Closes the dialog window and saves the settings.
The PC shutdown saves the adjusted image settings automatically.
These will be loaded after a restart.
Depending on the machine configuration in means of TSA or BSA
microscopes, the image setting dialog window will change its appea-
rance accordingly.
illustration 7 : Image Settings
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3.4 Enhanced Imaging
With the icon Enhanced imaging a computer based illumina-
tion- and contrast optimizing is performed. Due to its large data pro-
cessing capability the image refreshing rate can be shortened.
Please be aware that this function is of use only for substrates with
poor contrast.
3.5 Open / Save an Image
A click on one of the following icons opens the dialog for loading and
saving.
To load an image click on icon open.
To save an image two icons are available:
save as
autosave
Section D:\ of the harddisk is completely dedicated to image
storage.
To create a specific directory structure the button "create folder" can
be used.
The floppy disk A:\ is available for direct Data exchange of a limited
number of images. For a larger amount of Data transfer it is recom-
mend to have a network connection.
Please contact your network administrator.
illustration 8 : Open Dialog
To work with the dialog standard Windows
functions are available:
Copy:
copies a single file or marked block
Cut:
cuts a single file or marked block
Paste:
pastes a single file or marked block
Rename:
renames a single file
Delete:
deletes a single file or directory, or marked block
Create folder:
creates a new folder
Actualize:
actualizes/refreshes dialog window
Autosave path:
sets autosave path in particular directory and set to
autosave0.bmp
Close:
closes the dialog
Open/Save:
opens / saves the selected file
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illustration 9 : Save Dialog
An example is shown in illustration 9, the autosave path is
D:\Oper_RJS\KW26\Autosave0.bmp.
The saved image is a bitmap file ( suffix .bmp, 300Kbyte).
Additionally a text file (suffix .txt ) with remark information is created
and stored under the same name.
All Data with its image and text information, the illumination-,
contrast- and alpha values, as well as the machine specific status
icons are stored in the background.
After clicking the save button, a dialog window for an image remark
appears automatically. The operator can enter specific information.
However it is not mandatory to add a remark.
illustration 10 : Remarks
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4.0 Method of Operation with EISS
The method of EISS operation strongly depends on the variety of
processes which can run on the Aligner.
After starting the aligner and the EISS application please make all
necessary adjustments with main function keys.
Select TSA or BSA
Adjust illumination
Adjust contrast
Focus the images with the focus potentiometers
Check the image settings dialog ( default values )
Optimize with the image settings dialog
Temporary image storage with the grab image key from the
MA6/BA6 to superimpose mask and wafer pattern possible
Image and data storage on HDD of floppy possible for e.g.
process flow documentation
Note :
If an image is stored temporary with the grab image key, it is not
recommended to change from TSA to BSA and vice versa. In this
case the Suss MicroTec Logo is displayed. Reset the previous
condition to return to the stored image.
18 5.0 Error Handling ( Common Error )
Item Error / trouble Possible cause / elimination
1 PC does not start Main power disconnected
After UPS was active, check power supply
condition
Main power switch turned off
Turn on On/Off switch of PC power supply
2 Dark monitor Turn on EISS PC
Turn on monitor
Check VGA connection cable
Machine is not turned on
Check all cable connections
3 Grey/white image Check illumination knobs TSA/BSA on front panel and
decrease if necessary
Check image settings for contrast and illumination and
decrease if necessary
4 Dark image Check illumination knobs TSA/BSA on front panel and
increase if necessary.
Check image settings for contrast and illumination and
increase if necessary
5 No stored image visible No image stored, check green LED with grab image
button on machine keyboard and grab image icon on
monitor
Center alpha slider at image setting dialog
6 No signal change of the Data exchange cable (PN: 181725) is missing or not
image contol bar connected (SubD-plug: MA6/BA6 real panel/video -
EISS PC: SCSI-connector)
7 PC beeps (acoustic warning) UPS supplies PC power PC shuts down
Check power supply condition and see item 1
8 Cannot start video Camera configuration of the EISS init file does not
correlate to connected cameras; e.g. because BSA
was upgraded. Call SUSS service dept.
6.0 Service Functions
To guarantee best image quality, please set
CCD camera to gain mode manual (M) on
the back of the camera itself. Then adjust
the sensitivity with the potentiometer right
next to it.
6.1 Block Diagram EISS
illustration 11 : Overview EISS, Cable Wiring
Explanation : Connections and Connectors
The PC main power connection is made over the regular power sup-
ply of the Aligner
Cable connections
Dat a exchange cable:
connect the SCSI plug to the 15pol. SubD plug from the machine
camera cable:
connect to the adapter cable framegrabber
supply cable:
connect 9pol. SubD plug to distribution board to +24V
focus control card:
insert in electronic rack Slot C11, ( connect SubD25pol plug
to the hirose 12pol camera focus line )
PS/2 cable keyboard:
connect to PS/2 PC keyboard
PS/2 cable trackball:
connect to PS/2 PC mouse
USV connection cable:
connect to COM2 port
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7.0 Appendix
7.1 Init File for EISS
[AutoSave]
AutoSave Start Num=0 start number by autosave
AutoSave Path=D:\ autopath partition D:\
[Cameras]
TSA Camera Num=2 [0, default 1, 2]
numbers of cameras
BSA Camera Num=2 [0, 1, default 2]
number of cameras
GrabBitmapAtStartup="C:\EVS2\Please Grab Image.bmp" name of Bitmap image
Installed Card (c -> Cognex, d -> Data Translation)=d [c, d] = install framegrabber card type
[Window Size]
Resolution=1280 [800, default 1280]
/* storage of all necessary image settings under a special profile number
[Profile NR 3]
Contrast=128
Brightness=128
Alpha=128
[Profile NR 0]
Contrast=128
Brightness=128
Alpha=128
[Profile NR 1]
Contrast=128
Brightness=128
Alpha=128
[Profile NR 4]
Contrast=128
Brightness=128
Alpha=128
[Profile NR 5]
Contrast=128
Brightness=128
Alpha=128
[Profile NR 2]
Contrast=128
Brightness=128
Alpha=128
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7.2 Spare Parts
Spare Part Name Part Number
EISS PC complete 181722
19 housing 181721
Framegrabber DT3132 181718
I/O card Advantech 181720
17 CRT monitor (1280x1024) 181716
16 LCD monitor (1280x1024) 181717
Trackball 181652
6 channel focus control card 181723
Adapter cable framegrabber 181719
Adapter cable focus controller 181729
Data exchange cable MA6/BA6-EISS 181725
Power cable +24V 181726
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7.3 Circuit Diagram
Focus control microscope adapter
EISS power cable + 24 V
EISS data exchange cable MA6/BA6
Adapter cable frame grabber
6 channel focus control card lower
6 channel focus control card upper
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SUSS MicroTec Worldwide
ASIA
SUSS MicroTec KK (Japan)
GITC 1-18-2, Hakusan, Midori-ku
Yokohama, Kanagawa, Japan 226-0006
Phone (+81)-45-931-5600
Fax (+81)-45-931-5601
SUSS MicroTec (Shanghai) Co.,Ltd.
580 Nanjing W.Rd
Nanzheng Building Room 606
200041 Shanghai PRC
Phone (+86) 21-52340432
Fax (+86) 21-52340430
SUSS MicroTec (Taiwan) Co., Ltd.
8F l11 l No. 81 l Shui-Lee Road
Hsin-Chu l 300 l Taiwan
Phone (+886)-(3)-5169098
Fax (+886)-(3)-5169262
SUSS MicroTec Co., LTD
(South and Northeast Asia)
3388/92-93 I 25th Floor l Sirinrat Building
Rama IV Road l Klongtoey
Bangkok 10110 l Thailand
Phone (+66)-(0)-2350 6038
Fax (+66)-(0)-2633 5728
EUROPE
SUSS MicroTec Ltd.
Hogwood Ind. Estate
23, Ivanhoe Road
Finchampstead, Wokingham
Berkshire RG40 4QQ l England
Phone (+44)-(0) 1189-732144
Fax (+44)-(0) 1189-734395
www.suss.com
SUSS MicroTec S.A.
Avenue des Colombires
F-74490 Saint Jeoire l France
Phone (+33)-(0) 4 50 35 83 92
Fax (+33)-(0) 4 50 35 88 01
SUSS MicroTec Test Systems GmbH
Sss-Strasse 1
D-01561 Sacka/Dresden l Germany
Phone (+49)-(0) 35240-73-0
Fax (+49)-(0) 35240-73-700
SUSS MicroTec Lithography GmbH
Schleissheimer Strasse 90
D-85748 Garching/Mnchen l Germany
Phone (+49)-(0) 89/3 20 07-0
Fax (+49)-(0) 89/3 20 07-162
NORTH AMERICA
SUSS MicroTec Inc.
Western Regional Sales Office
8240 So. Kyrene Road Suite 101
Tempe, AZ 85284-2117 l USA
Phone (+1) (480) 557-9370
Fax (+1) (480) 557-9371
SUSS MicroTec Inc.
228 Suss Drive
Waterbury Center, VT 05677 l USA
Phone (+1) (802) 244-5181
Fax (+1) (802) 244-5103

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