Special print

SD920-228e-05.02
Piezoelectric
Sensors
Extending functionality
and simplifying
applications with
microelectronics
B. Bill, C. Gossweiler,
A. Kirchheim and D. Otter
Kistler Instrumente AG
Winterthur, Schweiz
Piezoelectric Sensors: Extended Functionality and Simplified
Applications using Microelectronic Systems
Dipl.-Phys. B. Bill, Dr.-Ing. C. Gossweiler, Dr.-Ing. A. Kirchheim, Dipl.-Ing. D. Otter
Kistler Instrumente AG, Winterthur (Switzerland)
Paper given at the 9th "Sensor and Measurement Data Recording Symposium",
held at the Esslingen Technical Academy during the period 4-6 June 2002.
1. Introduction
The "conventional" piezoelectric measuring chain consists mainly of the sensor, the
highly insulated cable between the sensor and the charge amplifier, the charge
amplifier and a signal processing unit (see Fig. 1). Thanks to rugged sensor design,
these measuring chains are capable of providing precise measurements of
processes ranging from very slow ("quasi-static") to highly dynamic, even in harsh
environments such as wet conditions and temperatures as low as -196 C or as high
as 600 C. The charge signal produced by the sensor is converted by the charge
amplifier into a voltage signal proportional to the measurand, which can be amplified
and filtered. The signal processing unit can be used, for example, to monitor or
control processes. The measuring range available in the piezoelectric measuring
chain covers several powers of ten, while the ratio of range to response threshold
can reach 10
9
. This type of measuring chain has proved successful for measuring
force, pressure, strain, torque and acceleration.
Sensor Anschluss-
kabel
Ladungs-
verstrker
Oszilloskop PC
Fig. 1: Piezoelectric measuring chain for measuring force. The charge
signal from the sensor is fed via a highly insulated cable to the charge amplifier, the
output of which is an analog voltage signal proportional to the measurand.
Connecting
cable
Charge
amplifier
Oscilloscope
In the case of piezoelectric accelerometers, a measuring chain incorporating an
integral charge/voltage converter (also called an "impedance converter") has been
used successfully for over 30 years. As this is already integrated in the sensor, there
is no need for the highly insulated cable from the sensor to the charge amplifier.
Here, the charge amplifier is replaced by a more cost-effective coupler, which
serves, on the one hand, to feed the charge/voltage converter integrated in the
sensor, and on the other, to decouple the useful signal from the output bias voltage.
These voltage-output accelerometers offer the same advantages as the
charge-output measuring chain described above, except that the integral electronic
circuitry limits the maximum temperature to 165 C and the ratio of range to response
threshold is smaller.
The latest IEEE 1451.4-compliant acceleration sensors are also referred to as "smart
sensors". They come with an additional microelectronic circuit, which includes the
TEDS (Transducer Electronic Data Sheet). This means that all manufacturer-specific
and sensor-specific data, such as manufacturer, sensor type, serial number,
calibration values, sensor position, etc are stored electronically in the sensor and can
be called up at any time. The data can be altered by authorized persons (e.g. the
manufacturer) on such occasions as a recalibration. Furthermore, this standard
allows linearization of the frequency response, thereby extending the useful
frequency range of the sensor. The automatic sensor detection greatly facilitates
measurement configuration and performance, particularly in multi-channel
measurements, such as in experimental modal analysis, where as many as several
hundred acceleration sensors may be used in a test arrangement. Thus,
microelectronic circuitry not only expands the functionality of the measuring chain but
also simplifies its application. Fig. 2 shows which individual characteristics originally
located outside the sensor are stored inside the sensor.
The use of these sensors offers such benefits as:
better quality assurance (TEDS: electronic storage of type, serial number and
calibration data)
simplified configuration (TEDS)
more compact measuring chains (less ancillary equipment)
voltage signals (simpler to handle than charge signals; no triboelectric effect, i.e.
no charge generation due to the movement of charge-carrying cable)
Sensor
Ladungs-
verstrker
Kabel-
einfluss
Kalibrierdaten
(z. B. Empfindlichkeit)
Position
Herstellerbezeichnung
Typ, Serienummer
Signal-
vorverarbeitung
barkeit Abgleich
Fig. 2: Individual characteristics, originally located outside the sensor, are stored
inside the sensor
The features already largely implemented in accelerometers are now also being
applied in other piezoelectric measuring chains for measuring force, strain and
pressure. The primary aim here is not to accommodate the electronic circuitry in the
sensor under all circumstances but rather to produce a measuring chain that has the
advantages described above as compared with the conventional piezoelectric
measuring chain. For physical reasons, it is currently not possible to incorporate the
electronic circuitry in a sensor which is exposed to an operating temperature of over
165 C. However, it is possible to construct a chain with a sensor measuring at
temperatures above 165 C by building the associated electronic circuitry, for
example, into the cable connector, which is subject to a lower temperature. This
paper describes these new measuring chains.
The common feature of the new measuring chains for force and strain described
below is the fact that they use the same miniaturized charge amplifier as a modular
element.
2. Measuring Chains for Measurement of Force
In tool monitoring on metal-cutting machine tools, the measurement of the cutting
forces provides accurate information on the condition of the tools used, as well as on
the machining process itself. Reliable process monitoring requires highly accurate
Cable
influence
Charge
amplifier
Manufacturer's
designation, type, serial
number
Signal
preprocessing
Adjustability
Position
Calibration data
(e.g. sensitivity)
measurement of the cutting force components. This is ensured by means of a "force
transmitter", a new sensor with integrated electronic circuitry for measuring up to
three force components.
Because of their high rigidity and small size, Kistler piezoelectric force sensors are
successfully employed for measuring from one to three components on rotating
machines for monitoring collision, breakage and wear. Newly designed specifically
for use in production, these sensors now have all their electronic circuitry for signal
processing housed in a rugged steel case. The transmitters, which are seal-welded,
have either an integrated cable outlet (degree of protection IP 68) or a more flexible
design with a connector sealed to degree of protection IP 67. Fig. 3 shows different
versions of these force transmitters. As a result, sensor installation and the wiring in
the machine can now be carried out separately. Because of their identical height,
width and ring-shape, the new force sensors with integrated electronic circuitry are
largely compatible with existing one to three-component force sensors. To optimize
adaptation to different machining processes (e.g. roughing: large forces, finishing:
small forces), the gain of the integral charge amplifier can be increased by an
external switching signal in the ratio of 5:1. The operating temperature range of these
force sensors with integral electronic circuitry is 0 ... 60 C.
Fig. 3: Multi-component force sensor with integrated electronic circuitry
(three-channel charge amplifier with external gain setting). Various structural
designs available
Kistler multi-component force sensors, already successfully launched onto the
market, consist of a package of quartz crystal discs fitted precisely into a steel case.
Up to three force components can be measured simultaneously by using different
quartz sections and disc orientations. Measurement is made of forces in the axial
direction, i.e. in the direction of the preload force (Fz), and also of the shear force
about two orthogonal axes (Fx, Fy). The force components perpendicular to the
sensor axis are transmitted as shear forces by friction, an arrangement which
requires the sensor to be preloaded in the axial direction. Problem-free multi-
component force measurement (good linearity, minimum crosstalk of the forces)
requires precise manufacture of the sensor and optimal spatial application of force on
the sensor element. To achieve this, the sensor must be preloaded over its entire
surface in the machine tool structure, as is possible with the ring-shaped sensors
mentioned. Fig. 4 compares the force measuring signals from a Type 9602A... three-
component force sensor with integrated electronic circuitry and the force measuring
signals from a Type 9121 cutting force dynamometer in all three measuring axes.
The three-component force transmitter is built into the machine structure under the
turret housing for force transmission by stiction, see Fig. 5.
Zeit [s]
K
r
a
f
t

[
N
]
0 2 4 6 8 10 12 14 16
Fz
Fx
Fy
Fz
Fx
Fy
-100
0
100
200
300
400
500
600
Fig. 4: Comparison of cutting force measurements using a three-component force
sensor with integrated electronic circuitry (lower family of curves) and cutting force
dynamometer (upper family of curves). Qualitatively and quantitatively different
results are produced due to the different measuring locations.
Time [s]
F
o
r
c
e

[
N
]
Schnittkraft-
dynamometer
Kraft-
transmitter
Fig. 5: Three-component force transmitter under the turret housing
Another new piezoelectric force sensor with integrated electronic circuitry is the
welding force sensor for testing the welding force of the electrode. The electrode
welding force, welding current and switching instant of the welding current are
quality-determining process parameters in spot-welding. Reliable process control
requires an effective monitoring system, the quality of which depends mainly on the
sensor technology. Kistler has developed new sensor systems that measure the
electrode welding force directly at the welding tongs. Fig. 6 illustrates the application
of a welding force transmitter with integrated electronic circuitry.
Fig. 6: Welding force measuring system (consisting of Type 9831A... transmitter and
Type 5823 welding monitor) used for checking the electrode welding forces on a
robot spot-welding gun
Force
transmitter
Cutting force
dynamometer
These welding force transmitters can be supplied for electrode welding forces of 5 kN
and 10 kN. The force sensor used is the same in both cases, the electrical measuring
range of 5 V being matched to the two force measuring ranges by appropriate
factory adjustment of the modular charge amplifier integrated into the hand grip (see
Fig. 6). The operating temperature range of these welding force transmitters is 0 ...
60 C. The welding force transmitter and the welding monitor combine to form a
mobile measuring system, capable of storing up to 99 evaluations of force/time
curves. The values measured can then be read and/or further processed by a
computer via an RS 232 interface. In addition to the mobile application welding force
transmitters, there is also a version which is intended for stationary use. In this case,
the sensor is installed in a permanent location, such as the electrode dressing
station. The signals can be evaluated with the Kistler Type 5857A... Control Monitor
CoMo II or by the machine control system.
The force sensor with integral, modular charge amplifier shown in Fig. 7 is fitted in a
swivel-head screw. On the left is the previous standard swivel-head screw, and, in
the middle and on the right, the new swivel-head measuring screw with integral force
transmitter.
Fig. 7: Z18349swivel-head measuring screw with integral force transmitter (center
and right). Standard swivel-head screw (left).
Fig. 8 shows a rotating cutting force dynamometer for high cutting speeds. The
dynamometer is connected directly to the spindle via the cone and provides precise
measurement of the cutting forces at the rotating cutting edge in the Z-direction, as
well as the torque about the Z-axis up to a maximum of 25 000 rpm The complete
measuring system consists of rotor, stator, connecting cable and signal conditioner.
The spindle capacity of the machine tool determines the structure of the rotor,
integrated into which are the piezoelectric two-component sensor, two charge
amplifiers and the digital transmission circuitry. An external diameter of only 74 mm
has been achieved by miniaturization. This compact design is very important for high
speed applications because the small external diameter reduces the centrifugal
forces acting on the rotating components. Transmission of the measuring signals to
the stator (telemetry head), range switching and active switching of the charge
amplifiers, as well as the power supply, are all controlled by a non-contacting control
system. The stationary telemetry head is mounted on the machine tool at a distance
of 1 ...2 mm from the rotor. The downline signal conditioner is responsible for the
power supply, signal transmission and system control. Three measuring ranges can
be selected and measurement can be started either manually or via the serial
interface. The measuring signal is available as an analog voltage signal of 10 V.
The dynamometer is sealed to degree of protection IP 67 and the operating
temperature range covers 0 ... 60 C.
Fig. 8: Rotating multi-component dynamometer with integrated electronic circuitry
Type 9125A... for speeds up to 25 000 rpm.
With this application, complete integration of the electronic circuitry is decisive for the
functionality of the system. As the tool is fixed directly to the rotating cutting force
dynamometer, the measuring error caused by the moment of inertia can be reduced
as compared with conventional cutting force dynamometers.
3. Measuring Chains for Measurement of Strain
The method described in the section above for the direct measurement of electrode
welding force is very suitable for regular checking of this force. On the other hand,
indirect measurement of the electrode welding force by means of piezoelectric strain
sensors allows monitoring during production of each individual welding point and is
particularly suitable for use in harsh environments. In addition, piezoelectric strain
sensors are easier to apply than strain gages. While indirect measurement of
electrode welding force is suitable primarily for C-shaped stands, it is also
appropriate for robot spot-welding guns. The electrode welding force and also the
closing force during welding cause strains which, though relatively small, are easily
measurable in the machine structure or in the tongs. The highly sensitive Type
9234A... strain sensor with integrated, modular charge amplifier (strain transmitter) is
in general use for the measurement of dynamic forces in industrial process
monitoring but is equally suitable for measuring minute strains in structures. It is
secured with an M6 screw, requiring only a very small but finish-machined mounting
surface (Fig. 9).
Pos. 1
Pos. 2
Referenz-
Schweisskraftsensor
Welding
Monitor
Fig. 9: Strain sensors with Type 9234A integral charge amplifier (strain transmitter)
mounted in different positions (Pos. 1 and Pos. 2) on an automatic welding machine.
Calibration of the transmitters by Type 9833 reference welding force measuring
system with Type 5823 welding monitor
Reference welding
force sensor
The transmitter is located at a position at which the strain correlates well and as
linearly as possible with the electrode welding force. Fig. 9 shows these strain
transmitters at two different locations on an automatic welding machine. The strain
transmitters can be calibrated to the electrode welding force with a welding
measuring system which directly measures the welding electrode force. The strain
transmitters supply a voltage signal proportional to the strain at the mounting position
of the transmitters. Fig. 10 shows the calibration curves of the Type 9234A... highly
sensitive strain transmitters with integrated electronic circuitry for positions 1 and 2
as shown in Fig. 9. They have been plotted together with the Type 9833 welding
force measuring system.
-3
-2
-1
0
1
2
3
0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8
-200
0
200
400
600
800
1000
S
c
h
w
e
i
s
s
k
r
a
f
t
s
e
n
s
o
r

[
N
]
S
i
g
n
a
l
e

D
e
h
n
u
n
g
s
s
e
n
s
o
r
e
n

[
V
]
Pos. 1
Pos. 2
Schweisskraft-Messsystem
Zeit [s]
Fig. 10: Measurement on a spot welding machine. Calibration curves for Type
9234A... strain transmitters at Positions 1 and 2, plotted with the Type 9833 welding
force measuring system. Since tensile force operates in the stand at Pos. 1 and
pressure operates in the electrode support in Pos. 2, the signals have
correspondingly opposing plus and minus signs
This highly sensitive, acceleration-compensated strain transmitter is sealed
according to degree of protection IP 65 and has two measuring ranges, which can be
selected by remote control. Each sensitivity/measuring range can be selected from a
maximum of 100 steps. For each measuring range, the output signal is 10 V. Fig. 11
shows the electrical schematic diagram which shows at once that all components in
the transmitter (charge amplifier, voltage amplifier, adjustment facilities) can be
operated and adjusted via a single multi-core cable.
Time [s]
Welding force measuring system
S
i
g
n
a
l
s

f
r
o
m

s
t
r
a
i
n

s
e
n
s
o
r
s

[
V
]
W
e
l
d
i
n
g

f
o
r
c
e

s
e
n
s
o
r

[
N
]
Other uses for these strain transmitters include process monitoring during press
work, in metal forming, closing force measurement and mold protection on injection
molding machines, as well as indirect force measurement on machine tools.
R_CS
5 (Grey)
R_U/D
10n
V=0,1 .. 1
DC
1 (White)
10n
DC
Range
V=1
2 (Brown)
10n
6 (Pink)
+Out
10n
R_INC
4 (Yellow)
+Vcc
7 (Blue)
8 (Red)
V=10
100
10n
3 (Green)
DC
DC
1n
Exct.
-Vcc
GND
Operate
Piezo-
kristall
Ladungs-
verstrker
einstellbare
Verstrkerstufen
Kabel Sensor
Fig. 11: Schematic diagram of a strain transmitter with high sensitivity and integral
charge amplifier
4. Measuring Chains for Measurement of Pressure
Thanks to their extremely high dynamic response and excellent thermal behavior,
Kistler piezoelectric pressure sensors are used for indicating internal combustion
engines. However, because of the high operating temperatures involved, no
electronic components can be included in the sensor itself. Kistler succeeded in
overcoming this problem 15 years ago by accommodating the charge/voltage
converters in the very much cooler connectors. The cable between the sensor and
the connector has a length of 1.5 m. This voltage-output pressure sensor is mainly
used for monitoring purposes in diesel engines. In the new pressure sensors with
sensor detection, the TEDS (EEPROM with sensor-specific data such as
manufacturer, type, serial number, sensitivity, calibration date etc.) is also housed in
the connector. The connector has a maximum diameter of 5 mm to enable the cable
to be inserted through a tubular socket wrench when installing the sensor. It connects
with a charge amplifier which converts the charge signal from the sensor into an
analog voltage signal proportional to the prevailing pressure and which can read the
information of the electronic data sheet. When the sensor is connected to this charge
amplifier, the latter automatically adjusts to the optimum calibration value. The
Piezo-
electric
crystal
Charge
amplifier
Adjustable
amplifier stages
Cable
system components, comprising sensor, cable and connector with integral EEPROM,
are inseparably interconnected. Fig. 12 shows the measuring system consisting of
two engine pressure sensors with integral cable and TEDS connector, as well as the
associated charge amplifier. This amplifier is accommodated as a module in a multi-
channel data processing unit, which allows communication with a computer via an
interface, in which the voltage signal proportional to the pressure measured is made
available as an analog signal.
Fig. 12: Pressure measuring system with TEDS integral electronic data sheet and
Type 5064 charge amplifier module. Front sensor: Type 6052A uncooled pressure
sensor with front part 5 mm for temperatures up to 350 C. Rear sensor:
Type 7061B water-cooled precision pressure sensor
As with the TEDS acceleration sensors referred to at the beginning, the advantage of
this type of measuring system with sensor detection consists mainly in the fact that
when measuring with many channels, the sensors can be connected to the relevant
data-processing units in any sequence. Thanks to integrated sensor detection, the
user receives correctly assigned amplifier settings and thus calibrated measurands
via the computer. This results in considerably reduced preparation time for
measurements and prevents any confusion of measuring signals and calibration
data.
EEPROM (TEDS)
-Sensor type
-Serial number
-Sensitivity
-Calibration date
5. Summary
New types of piezoelectric measuring chains with integrated electronic circuitry have
been introduced for the measurement of force (in one or more directions), strain and
pressure. Sensors for force and strain generally come with a modular, integrated
charge amplifier with simple external adjustment and control facilities. These sensors
have an operating temperature range of 0 ... 60 C.
The new piezoelectric measuring chains for pressure are provided with integrated
sensor detection and are IEEE 1451.4-compliant. The EEPROM with the sensor-
specific data is at a lower temperature because it is located in a connector at some
distance from the sensor. Thus, the sensor itself (depending on type) can be
exposed to an operating temperature of up to 350C. These sensors require a
special charge amplifier capable of reading the information from the electronic data
sheet. Communication between this special charge amplifier and a computer passes
via a serial interface, an arrangement which ensures that the channel assignment
and the sensitivity selected are correct. As with the already familiar TEDS
accelerometers, authorized persons can alter the information in the electronic data
sheet (for example by introducing new calibration data).
The original, "conventional" piezoelectric measuring chain (sensor, highly insulated
cable, external charge amplifier) remains as useful as ever, for example in laboratory
measurements, and continues to offer maximum flexibility and dynamic response.
Nevertheless, attention must be paid to the special characteristics of the piezoelectric
measuring technique, such as the high insulation resistance needed at the sensor
output, at the cable and at the charge amplifier input.
The new piezoelectric sensors presented in this paper with their integral and remote-
controlled charge amplifier not only offer a degree of flexibility comparable to that of
the conventional piezoelectric measuring chain but also have the major advantage
for industrial applications that, now, it is only voltage signals which are transmitted
and no longer charge signals. As a result, longer and more cost-effective cables can
be used and the influence of the triboelectric effect is eliminated. With the addition of
the electronic data sheet, each sensor is provided with individual, important data,
which allow the recording of clearly assigned and calibrated measurands in a very
simple way, thereby facilitating quality assurance.
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