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art ic l e i nf o
a b s t r a c t
Article history:
Received 16 August 2013
Received in revised form
18 March 2014
Accepted 19 March 2014
Available online 26 March 2014
SEM imaging has been used by researchers to characterize the membrane properties. However, limited
information is generally reported regarding the sample preparation and imaging parameters used,
making it difcult to compare results from different studies. The present study focuses on the inuences
of sample preparation and imaging parameters on the observed membrane surface properties obtained
from SEM images. Polymeric membranes were prepared with different coating metals (gold, gold
palladium and iridium) and coating thicknesses, and imaged with different imaging parameters
(magnication, detector, sample orientation). Image analysis was done using a custom Matlab application. The effects were observed both qualitatively and quantitatively (pore size/shape and porosity). All
of the sample preparation and imaging parameters affected the observed membrane properties of
interest. In general, the membrane properties were less sensitive to the parameters when membranes
were coated with iridium than with gold or goldpalladium. Iridium should be used as the coating metal
in the studies where coating thickness and/or, one or more imaging parameters need to be varied. The
results suggest the need of a standardized SEM procedure for membrane characterization, and clear
reporting of the parameters used in any SEM study, to enable appropriate comparison of the results
obtained in different studies.
& 2014 Elsevier B.V. All rights reserved.
Keywords:
SEM
Coating
Detector
Magnication
Membrane surface property
1. Introduction
Microltration (MF) and ultraltration (UF) membranes are
increasingly used for water/wastewater treatment applications
because of their ability to effectively remove contaminants of
concern. However, over time, the properties of the membrane
surface can change due to the accumulation of foulants [1] or due
to the weathering of the membrane material [2], both of which
affect the performance of membrane system. Therefore, a proper
understanding of the membrane surface properties is essential to
assess how these can change over time. Scanning Electron Microscopy (SEM) and High Resolution SEM (HRSEM), also known as
Field Emission SEM (FESEM) imaging, have been extensively used
to characterize the membrane surface properties, both qualitatively (e.g. visual observation) and quantitatively (e.g. pore size,
pore shape and porosity). A literature review of all the articles
published in the Journal of Membrane Science in the volumes
51100 (20102012) revealed that a relatively large number of
studies (i.e. 37 in total) have used SEM and/or HRSEM (hereafter
http://dx.doi.org/10.1016/j.memsci.2014.03.048
0376-7388/& 2014 Elsevier B.V. All rights reserved.
114
Table 1
Summary of the information available in reviewed journal articles.
Parameters
Reported
information
Fraction of published
journals providing
information on the
parameters of interesta
Sample
preparation
parameters
Coating material
Coating thickness
28
4
Imaging
parameters
Magnication
Detector type
Sample orientation
(i.e. tilt angle)
30
2
0
Total count based on review of all the journal articles published in the 2010
2012, in which SEM was used as a membrane characterization technique for PVDF
based polymeric membranes (i.e. 37 in total).
Table 2
Effect of the different sample preparation and imaging parameters on SEM imaging.
Parameter
Coating material
Gold and gold composite: often result in coating with uneven thickness, and a relatively thick layer is needed to get a uniform coating.
Iridium/chromium: provides smoother coating and even coating thickness can be archived with a relatively thin layer [38].
Rate of oxidation of coating metal depends on the metal used.
Chromium: coating layer becomes oxidized quickly (i.e. within few hours).
Coating thickness
Magnication
Detector type
Magnication used to image the membranes has impact on the resolution of the obtained images [40], which may inuence the information on
membrane surface properties obtained from the images.
Typically SEM comes with two electron detectors.
Two detectors can be used independently (i.e. upper detector UD, and lower detector LD), or
Upper detector has high sensitivity, which results in a greater signal and produce images with high resolution.
Upper detector captures the image of only very top layer of the surface.
When some degree of subsurface imaging is desired, either lower or mixed detector mode is used.
The lower detector's sensitivity is about half that of the upper detector, so a higher beam energy or longer working distance is typically
needed to collect the required signal. This results in a noisier or grainier image with low resolution than is normally produced using the
upper detector.
The mixed detector mode is useful for giving a composite surface and subsurface image, which can take on a 3D-like effect. The
combination of signal may make image interpretation difcult when trying to determine true surface features.
Sample orientation
(i.e. tilt angle)
Tilting the sample relative to the electron beam increases the signal magnitude, and presents some vertical relief of the membrane surface to
the beam, making the roughness information more evident [39].
Tilting the sample highlights smaller differences in vertical relief compared to samples that are orthogonal (i.e. 01 tilt angle) to the beam.
However, the image becomes somewhat foreshortened on the y-axis, while maintaining the x-axis dimensionality.
Tilting of the membrane samples during SEM imaging is common, as typically membranes have minimal surface topography. Orthogonal
viewing of the membranes results in a at view of the surface, which may be more appropriate for measuring pore diameter, as this provides a
truer representation of the two-dimensional shape of the surface pores. However, this comes at the expense of being able to easily identify pore
structure (e.g. false detection of pores, as a surface depression may appear as a pore).
Table 3
Sample preparation and imaging parameters considered.
Sample preparation
parameters
Imaging parameters
Coating
metal
Coating
thickness
Goldb
2 nm
5 nm
L
M
U
25k
50k
0
30
Iridiumb
2 nm
5 nm
L
M
U
25k
50k
0
30
Goldpalladium
2 nm
5 nm
L
M
U
25k
50k
0
30
Note: All the parameters were used for articially aged membranes.
a
b
converted to gray scale binary images and pixels with less than a
certain value (i.e. threshold value) were considered belonging to
the pores. Threshold values were empirically found by visual
observation of the efciency of the pore identication (i.e. maximizing the detection of the obvious pores and minimizing the
detection of false pores) [41]. Threshold values did not differ more
than 2% for the images obtained with any given parameter
combinations. The pore pixels in contact with each other were
considered belonging to a single pore. The area of a pore was
calculated by multiplying the total number of the pixels in that
pore to the area equivalent of a pixel. The porosity was calculated
by dividing the total cumulative number of the pixels in the pores
by the total number of the pixels in a SEM image. The pore
diameter was the diameter of a circle, which was equal in area to
the estimated area of the pores by image analysis. The pore aspect
ratio was the average ratio of the major axis length to the minor
axis length of an ellipse equivalent in shape to that of a pore. Fig. 1
summarizes the work ow diagram used for the image analysis.
coater (Cressington 208C HR) to achieve a specic coating thickness. A quartz crystal monitor (Ted Pella Inc. MIM 10) with a
resolution of 0.1 nm was used to monitor the coating thickness
during the coating process. A Field Emission Scanning Electron
Microscope was used (Hitachi S-4700) to acquire the images. The
sample preparation (i.e. coating metals and coating thickness) and
imaging parameters (i.e. detector, magnication and tilt angle)
considered for the two types of membranes are presented in
Table 3. These were selected to cover the range of parameters
reported in the reviewed literature.
The upper detector was a through-the-lens (TTL) type detector; the lower detector was an EverhartThornley (ET) type
detector, and the mixed detector was a xed combination of the
upper and lower detectors. Electron energy of 5 kV and recording
time of 80 s were used to acquire the images. The working
distance during the imaging was maintained as close as possible
to 5 mm. However, for only few parameter combinations, a
minimum of 12 mm working distance needed to be used while
imaging with UD. The xed focus technique was used during the
imaging of all the samples.
It should be noted that, the magnication is dependent on the
size of the output medium (e.g. computer screen). The pixel size of
the SEM image is the more appropriate parameter to express the
sizes of the objects in an image. For the present study, the pixel sizes
were 3.968 10 9 m and 1.984 10 9 m for the images obtained
with 25k magnication and 50k, respectively. However, it is common
to express the SEM images in terms of magnication. In the
discussion which follows, images are labeled according to the sample
preparation (i.e. coating metals and coating thickness) and imaging
parameters (i.e. detector type, magnication and sample orientation)
used. As an example, an image labeled Au2nmLD25k30tilt was
obtained with a gold coating, a 2 nm coating thickness, a lower
detector, a 25k magnication and a 301 tilt angle.
2.3. Analysis of the SEM images
SEM imaging was used to quantitatively characterize the
membranes based on the porosity (), the average pore diameter
(dav), the 90th percentile of cumulative pore size distribution (d90),
and the pore aspect ratio (dt/dc). A Matlab application was
developed to obtain the membrane surface characteristics from
the SEM images, using the Matlab and Simulink software package
(MathWorks, Inc.). During the image analysis RGB images were
115
116
Ir2nmLD50K0tilt Au2nmLD50K0tilt
p
SIr2nmLD50K0tilt Au2nmLD50K0tilt 2=n
the images was low. Also, the coefcient of variation values for
, dav, d90 and dt/dc were 0.1, 0.016, 0.025 and 0.002, respectively,
which indicated that the measurements were reproducible.
It should be noted that, the smallest pore size detectable was
limited by the size of the pixels (i.e. magnication) used during
imaging. For the present study, the smallest pore diameters were
0.012 m and 0.006 m for the images obtained with 25k and 50k
magnication, respectively.
The values of , dav, d90 and dt/dc obtained from the SEM
images acquired with different parameter combinations, ranged
from 0.04 to 0.22, 0.017 to 0.042 m, 0.023 to 0.066 m, and 1.7 to
2.3, respectively. These values are comparable with the published
values of (i.e. 0.060.15) and dav (i.e. 0.0150.045 m) for the
type of membrane used in the present study [42,43]. This
indicated that the SEM imaging and the image analysis techniques
used in the present study were capable of capturing the actual
membrane surface properties.
3.2. Effect of sample preparation and imaging parameters
on the SEM imaging on articially aged membranes
3.2.1. Qualitative analysis
As done with most of the manuscript reviewed, a preliminary
analysis was rst performed to obtain qualitative information on
the membranes, based on a visual observation of the SEM images.
As presented in Fig. 4, the sample preparation and imaging
parameters had a substantial effect on the appearance of the
SEM images. Images of membranes coated with gold (Fig. 3ac)
suggested that these membranes had greater surface roughness
(i.e. higher density and/or relatively larger height of the mountainous peaks) than membranes coated with iridium (Fig. 3df) or
goldpalladium (Fig. 3gi), for a given combination of imaging
2
3. Results and discussion
3.1. Typical results from SEM imaging and image analysis
A typical image obtained by SEM imaging and the pores
identied by the custom Matlab application are presented in Fig. 2.
The repeatability of the measurement performed was assessed
by quantifying the spread of the results obtained, when a randomly selected (i.e. images were collected from 3 different membrane samples in different collection periods) subset of 5 images
acquired with a given combination of sample preparation and
imaging parameters (e.g. Ir2nmUD50k0tilt) was considered. As
presented in Fig. 3, the spread of the pore size distributions for 5 of
Fig. 2. Typical SEM images of articially aged membrane: (a) original image and (b) pores identied with the custom Matlab application; Au2nmUD50k0tilt.
117
Fig. 4. Typical HRSEM images of articially aged membranes: (a) Au2nmLD25k30tilt; (b) Au2nmMD25k30tilt; (c) Au2nmUD25k30tilt; (d) Ir2nmLD25k30tilt;
(e) Ir2nmMD25k30tilt; (f) Ir2nmUD25k30tilt; (g) AuPd2nmLD25k30tilt; (h) AuPd2nmMD25k30tilt; (i) AuPd2nmUD25k30tilt; (j) Au5nmUD25k30tilt;
(k) Au5nmUD50k30tilt; and (l) Au5nmUD50k0tilt; insets are magnied (3.6 ) versions of the original images.
118
119
Fig. 6. Effects of coating metal on the average observed membrane properties of interest. (t Statistics values for the membrane properties of interest (i.e. , dav, d90 and dt/dc)
for the images obtained with different coating metals, (a) iridium vs. gold and (b) iridium vs. goldpalladium; n were placed for the parameter combinations for which the
values were missing for at least one of the comparing conditions.)
effect could account for lower dav, d90 for membranes coated with
thicker gold coating as some of the smaller pores could be entirely
covered with thicker gold coating. The tendency of agglomeration may
also have contributed to the observed lower values, and higher dav
and d90 for some sample preparation and imaging parameter combinations, which is mainly due to the detection of the different numbers
of pores per unit membrane area. The t statistic values for the images
of membranes coated with 2 nm and 5 nm of iridium suggested that
these membranes had similar dt/dc, , dav and d90 values (i.e. values
are within the shaded area) (Fig. 7b) for most of the sample
preparation and imaging parameter combinations.
The results demonstrated that the observed membrane properties of interest obtained from the SEM images of the membranes
coated with gold were sensitive to the coating thickness. However,
the sensitivity was statistically insignicant for the membranes
120
Fig. 7. Effects of coating thickness on the average observed membrane properties of interest. (a) t Statistics values for the membrane properties of interest (i.e. , dav, d90 and
dt/dc) for the membranes coated with 2 nm and 5 nm (a) gold and (b) iridium; n was placed for the combination for which the values were missing for at least one of the
comparing conditions.
121
Fig. 8. Effects of detector on the average observed membrane properties of interest. (t Statistics values for the membrane properties of interest (i.e. , dav, d90 and dt/dc) when
imaged with the lower detector than those obtained using the upper detector for the samples coated with (a) gold and (b) iridium; t statistics values for the membrane
properties of interest (i.e. , dav, d90 and dt/dc) when imaged with the mixed detector than those obtained using the upper detector for the samples coated with (c) gold and
(d) iridium; n was placed for the combination for which the values were missing for at least one of the comparing conditions.)
122
Fig. 9. Effects of magnication on the average observed membrane properties of interest. (t Statistics values for the membrane properties of interest (i.e. , dav, d90 and dt/dc)
when imaged with 25k magnication than those obtained using 50k magnication for the samples coated with (a) gold and (b) iridium; n was placed for the combination for
which the values were missing for at least one of the comparing conditions.)
Fig. 10. Effects of tilt angle on the average observed membrane properties of interest. (t Statistics values for the membrane properties of interest (i.e. , dav, d90 and dt/dc)
when imaged using 01 angle than those obtained using 301 tilt angle for the samples coated with (a) gold and (b) iridium; n was placed for the combination for which the
values were missing for at least one of the comparing conditions.)
Table 4
P-values for membrane properties of interest obtained from the multi-way ANOVA
analysis.
Source of variation
Coating metal
Coating thickness
Detector
Magnication
Tilt Angle
dav
d90
dt/dc
0.0487
0.0006
0.3647
0.0005
0.0186
0.8164
0.4752
o 0.0001
o 0.0001
0.0172
0.3565
0.3956
o 0.0001
o 0.0001
0.0067
0.0155
o 0.0001
o 0.0001
0.0296
o 0.0001
Note: Membrane properties with P-value r 0.05 identied in bold are signicantly
affected by individual or interactive sample preparation or imaging parameters.
123
objectives of the present study was to show that the tilt angle has
signicant impact on the obtained images for both qualitative and
quantitative analyses. To address this research question, no
manipulation of the images for tilt was conducted.
Fig. 11. Typical HRSEM images of fouled membranes: (a) Au5nmMD25k30tilt; (b) Ir5nmMD25k30tilt; (c) Ir5nmMD25k0tilt; (d) Au5nmUD25k30tilt; (e) Ir5nmUD25k30tilt;
and (f) Ir5nmUD25k0tilt.
124
4. Conclusions
Images obtained for both types of membranes (i.e. articially and
naturally aged membranes) were substantially affected by the sample
preparation and imaging parameters considered. The images suggest
that the surface roughness of the membranes coated with gold was
greater than those coated with iridium, regardless of the sample
preparation or imaging parameters considered. The surface roughness
of membranes imaged with a mixed or lower detector, or a 301 tilt
angle also appeared to be greater than for those imaged with an upper
detector or a 01 tilt angle.
All of the sample preparation and imaging parameters signicantly
affect the observed surface properties of interest for membranes. In
general, the apparent membrane surface properties were less sensitive
to the sample preparation or imaging parameters when membranes
were coated with iridium than with gold. Hence, iridium should be
used as the coating metal in the studies where coating thickness and/
or, one or more imaging parameters need to be varied. However,
when the values are the major membrane properties of concern,
care should be taken before using different iridium coating thicknesses
or different tilt angles, as several of the parameter combinations
showed signicant sensitivity of the values to the change in coating
thickness or tilt angle. Also, for iridium-coated membranes, UD and
MD can be used interchangeably during imaging, if necessary.
When the dav and d90 values are the major membrane properties of concern different magnications (i.e. different pixel sizes of
the SEM images) should not be used during imaging, as this will
introduce articial variability among the similar samples and
comparison between different samples will become difcult. This
is true for both the membranes coated with either gold or iridium.
To be able to compare the results obtained in different studies, it is
necessary to conduct the studies with a x set of parameters. This
suggests the need of a standardized SEM procedure for membrane
surface characterization to enable appropriate comparison. Finally, to
facilitate comparison of the SEM results, all studies should clearly
report the sample preparation and imaging parameters used.
Acknowledgments
This work has been supported by the Natural Science and
Engineering Research Council of Canada Collaborative Research and
Development Grant (CRDPJ 413062-11) in Partnership with GE Water
and Process Technologies. The authors are grateful for the assistance
provided by Ms. C. Wang from the University of British Columbia,
Vancouver, for the literature review.
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