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Vacuum Pumps
for the chemical
and pharmaceutical
industry
100.91.02

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Requirements
regarding explosion protection in the chemical industry

In the chemical industry, the

aspect of explosion protection in
connection with machinery like, for
example, vacuum pumps plays an
important role both for the
operating company and also the
manufacturer of such systems. In
Europe, the requirements for the
aforementioned parties have been
standardized through the ATEX
Directives.
For the operator of systems, the
directive 1999/92/EG (ATEX 137)
applies.

The classification into zones takes into

account the presence of a potentially
ignitable mixture.

Minimum requirements for improving

the safety and health protection of
workers potentially at risk from
explosive atmospheres.

Such mixtures are present in

Besides the classification into zones,

the following information is also
important when selecting a suitable
vacuum pump:

Zone 0:
continuously or for long periods
or frequently

information on the substances which

are to be pumped

According to this, the operator is

committed to document his risk
assessment by way of an explosion
protection document. Here also the
zone inside and outside the system is
defined.

Zone 1:
during normal operation occasionally

the desired gas class inside and

outside the system

Zone 2:
not likely to occur in normal
operation, but if it does occur will
persist for a short period only

the desired temperature class inside

and outside the system

Ex Zones and
Equipment Categories
Explosive
atmosphere

Zone

Category

No ignition source,

Continuously,
for long periods
or frequently

Probability that
the pump is an
ignition source

Based on this information, the

manufacturer is then in a position to
select a corresponding pump or pump
combination of a suitable category.
Hereby the manufacturer is subject to
the directive 94/9/EG (ATEX 100)
Equipment intended for use in
potentially and protecting Systems
explosive atmospheres.

even not in the

event of
rare malfunctions

Occasionally
during normal

No ignition source,
1

operation
Not likely to
occur, but if
for a short

also in case of
malfunctions
No ignition source,

during normal
operation

period only

Further detailed information on the ATEX Directives is available from the website
of the European Community.
http://ec.europa.eu/enterprise/atex/index_en.htm

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Our answer
to the requirements of manufacturing plants

Only an early and close cooperation between the

manufacturer and the user of vacuum pumps will ensure
that the best suited products are selected for use in the
chemical and pharmaceutical industry also in
consideration of explosion protection aspects.

As one of the worldwide leading

vendors for vacuum pumps and
vacuum systems, Oerlikon Leybold
Vacuum has developed products
which meet the stringent requirements
of the chemical and pharmaceutical
industry. Here vacuum pumps are
deployed in numerous applications, like
for example:

Distillation

Drying

Filtration

Pervaporation

Evaporation and crystallisation

Freeze drying

Degassing

Central vacuum systems

Classification
The certified vacuum pumps from
Oerlikon Leybold Vacuum comply as
to their design and manufacture with
the fundamental requirements of the
ATEX Directive (Directive 94/9/EG)
equipment and protecting Systems
intended for use in potentially
explosive atmospheres and
specifically for equipment group II,
category 3 to category 1. If the
category differs between the inside (i),
i.e. the process gas passage and the
outside (o) - pump sections not in
contact with the process gas - then
this is stated separately. Moreover, a
classification according to gas groups
and temperature classes is provided.

Depending on the type of application,

the required pumping speed, the
process and ultimate vacuum, the
process temperature and other
parameters as well as the ATEX
classification, differ widely between the
applications listed above. Another
important factor is the choice between
dry compressing or oil lubricated
vacuum systems. For both, Oerlikon
Leybold Vacuum has suitable pumps.

Please ask our sales representatives, who shall be pleased

to provide the information you need.

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Our products
for the chemical and pharmaceutical industry

SCREWLINE SP
Dry Compressing Screw
Pumps

Two types offering pumping speeds

of 250 and 630 m3/h

Ultimate vacuum below 0.01 mbar

Integrated motor

No bearing or seal in the pump

chamber

Easy to open and clean pump

chamber

Suited and certified for pumping of

IIC gases (hydrogen)

Constant monitoring of the internal

gas temperature

ATEX versions of the SCREWLINE (for gases and vapours at 50 Hz)

Different ATEX versions

Category

Certified for gases and dusts

As standard all SCREWLINE

ATEX pumps are equipped with a
purge gas monitoring unit.

Within the pump (inside)

Zone
Gas class
Temperature class

Pump surroundings (outside)

Category
Zone
Gas glass

Temperature class

SP 250
3
3
2
2

2
2
1
1

IIC
IIC
IIC
IIC

T160 C
T160 C
T4
T4

3
2

2
1

IIC
IIC

T160 C
T160 C

3
3
2

No explosion hazard area

2
IIC
T160 C
2
IIC
T160 C
1
IIB
T4

No explosion hazard area

2
IIC
T160 C

SP 630

SOGEVAC SV
Oil Circulation Lubricated Rotary Vane Pumps
ATEX versions of the SOGEVAC SV (for gases and vapours at 50 Hz)
Category

Within the pump (inside)

Zone
Gas class
Temperature class

Pump surroundings (outside)

Category
Zone
Gas glass

Temperature class

SV 40
3
2
1
1

2
1
0
0

IIC
IIB + H2
IIA
IIB + H2

T3
T3
T3
T3

3
2
2
2

2
1
1
1

IIC
IIC
IIA
IIB + H2

T3
T4
T3
T4

2
1

IIC
IIC

T3
T4

3
2

2
1

IIC
IIC

T3
T3

3
3

2
2

IIC
IIC

T3
T3

SV 65 and SV 100
3
2

2
1

IIC
IIB + H2

T3
T3

3
2

SV 200 and SV 300

3
2

2
1

IIC
IIB + H2

T3
T3

3
2

2
1

IIC
IIB + H2

T3
T3

SV 630

6 types with pumping speeds of 40,

65, 100, 200, 300 and 630 m3/h

Ultimate vacuum below 0.5 mbar

Standard motors for fulfilling

customer requirements

Free of non-ferrous metals

Well tried and tested technology

Suited and certified for pumping of

IIC gases (hydrogen)

Different ATEX versions with

corresponding ATEX motors. Plastic
parts are electrically conducting;
exhaust filters are equipped with a
protecting mesh preventing the
build-up of static charges.

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If pumping speed and ultimate vacuum

of a single pump are not adequate,
then this situation may be remedied by
using suitable Roots pumps. With
RUVAC WA Roots pumps Oerlikon
Leybold Vacuum offers the possibility
of assembling complete pump systems
in connection with dry or oil-sealed
backing pumps: standard pump
systems or custom pump systems.

4 types with pumping speeds of

250, 500, 1000 and 2000 m3/h

Standard motors for fulfilling

customer requirements

Horizontal and vertical arrangement

is possible

Well tried and tested technology

Constant monitoring of the internal

gas temperature

Suited and certified for pumping of

IIC gases (hydrogen)

Different ATEX versions

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RUVAC WA Roots Pumps

ATEX pump system with SOGEVAC SV 300 and RUVAC WA 1001 pumps

ATEX versions of the RUVAC WA (for gases and vapours at 50 Hz)

Category

Within the pump (inside)

Zone
Gas glass
Temperature class

Category

Pump surroundings (outside)

Zone
Gas class
Temperature class

WA 251, WA 501, WA 1001 and WA 2001

3
3
2

2
2
1

IIC
IIC
IIC

T3/T4
T3/T4
T3/T4

ATEX certified Roots pumps are also

available for the RUVAC WAU
251/501/1001/2001 series.

3
2

No explosion hazard area

2
IIC
T3/T4
1
IIC
T3/T4

They fulfil the requirements of ATEX

category 3 (inside) and (outside), and
for temperature classes T3 or T4 and
they are equipped with the
corresponding motors.

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Also for the laboratory

we have interesting things to offer

In the chemical industry exists beside

the demand for production equipment,
a demand for vacuum systems in
research and development as well as
quality assurance. Here the TRIVAC-B
dual-stage rotary vane pump is a
natural choice which is also available in
explosion protected versions.

Explosion protection is not always

required in research laboratories and
quality assurance facilities. Also in these
cases Oerlikon Leybold Vacuum offers a
broad line of products:

Oil circulation lubricated

dual-stage rotary vane
pumps TRIVAC B

6 types offering pumping speeds of

4, 8, 16, 25, 40 and 65 m3/h

Dry compressing piston vacuum

pumps ECODRY M offering nominal
pumping speeds of 15, 20 and
30 m3/h.

Oil-free scroll pumps SCROLLVAC

SC-D with pumping speeds of 5, 15,
30 and 60 m3/h

Single and dual-stage diaphragm

pumps DIVAC with nominal pumping
speeds of 0.6, 1.2 and 2.2 m3/h.

Vacuum valves and vacuum

measurement instrumentation

Ultimate vacuum below 0.005 mbar

Dual-stage design

KF and ISO-K vacuum components

Well tried and tested technology

Leak detectors

Different ATEX versions

ATEX versions of the TRIVAC B (for gases and vapours at 50 Hz)

Within the pump (inside)
Category

Zone

Gas class

Pump surroundings (outside)

Temperature class

Category

Zone

Gas class

Temperature class

D 4B, D 8B, D25B, D 40B and D 65B

3
3

2
2

IIC
IIC

T4
T4

No explosion hazard area

2
IIC

T3

3
2
2

No explosion hazard area

2
IIC
1
IIB
1
IIC

T3
T4
T4

D 16B
2
2
0
0

IIC
IIC
IIB3
IIC

T4
T4
T4
T4

Headquarters Germany
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
T +49 (0) 221-347-0
F +49 (0) 221-347-1250
info.vacuum@oerlikon.com
www.oerlikon.com

BICOM 09605.02-100.91.02
0.3.01.08 GK
Printed in Germany on chlorine-free bleached paper

Technical alterations reserved

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