Ken Stevens
Interconnect
l
delay
power
inductance
Interconnect
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Wire Resistance
l
R = Rsq WL
Rsq =
1
t
6
:
?
9
-
Wire Resistance
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Resistance
Rsq = 2. 9 tcm
cm
Rsq = 1. 8
. . . but for copper, thickness t is less than whole wire thickness due
to barrier layer
Wire Resistance
For 350nm process technology:
Metal
metal 4
metal 13
poly
unsilicided poly
ndiff
unsilicided ndiff
pdiff
unsilicided pdiff
contact
Resistance
0.02
0.04
2
40
2
40
2
120
Wire Capacitances
Two simple models
1. Parallel plate
2. Cylindrical
Good approximation obtained by combination of the two
parallel plate model:
d LW
C=
= 0. 035 fF
Since
d
technology,
C = CiW L
is
fixed
by
Wire Capacitance
Combine parallel plate and cylindrical model for full wire model:
(
C f ringe = L
)
t
4d
ln 1+ 2dt 1+ 1+ dt
Wire Capacitance
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C f ringe = 0. 04 fF 0. 05 fF
C = CiW L + 2C f ringe
Transmission Lines
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V
I
Transmission Lines
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L
C
Impedance is set by Z =
Image Currents
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no ground plane
return currents far from signal path
1
C
Inductance
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Rb
a
E l
Two separate paths exist between a & b, a drive and return path
H
If electric field is time invariant, the integral is irrelevant E l = 0
This is Kirchoffs Voltage Law - which doesnt hold here
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l
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H
t
Inductance
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Inductance Loops
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u
u
u
u
Inductance Loops
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Inductance Loops
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Interconnect Scaling
The transistor delay scales approximately linear to scaling factor s
What happens to wire delay?
Interconnect Scaling
The transistor delay scales approximately linear to scaling factor s
What happens to wire delay?
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1
s. . .
Interconnect Scaling
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Interconnect Scaling
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H
Aspect ratio (W
) was increasing
u
u
u
Interconnect Scaling
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copper (Cu)
n
n
n
n
width
280
350
800
width
200
280
600
width
150
200
500
width
100
140
450
spacing
280
350
800
spacing
200
280
600
spacing
150
200
500
spacing
100
140
450
thickness
450
650
1250
thickness
450
450
1200
thickness
300
450
1200
thickness
200
350
1200
ILD height
650
650
650
ILD height
450
450
450
ILD height
300
300
300
ILD height
200
200
200
ILD
3.5
3.5
3.5
ILD
3.2
3.2
3.2
ILD
2.8
2.8
2.8
ILD
2.2
2.2
2.2
Z = R + jL
L is the inductance at a given frequency.
Skin effect
u
u
u
u
Inductive Ringing
Ringing or reflections occur with impedance mismatches in a
transmission line
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Inductive Ringing
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Inductive Ringing
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load impedance: ZL = C
R
transmission impedance: Z0 2C
(1 j)
for lossy conductor with f fcrit or R L
relative sign and magnitude of reflected voltage:
Z0
Vre f lect = Vin = ZZLL+Z
Vin
0
where is the reflection coefficient
Inductive Ringing
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Inductive Ringing
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n
n
R and C Scaling
Scaling Solutions
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u
u
2
,
I
R power losses
IR, dI
dt
2. Transmission impedance:
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l
l
L
R
3. Time of flight: LC
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LC
115.0 11.5
1.2
Models a wide bus above a ground plane and beneath orthogonally
routed signals for a 180nm process.
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l
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dual-rail signaling
Wire Delay
Wires are a distributed RC circuit
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R C
L
C
2
C
2
R
2
R
2
C
T
Wire Delay
Wires are a distributed RC circuit
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R C
L
C
2
C
2
R
2
R
2
C
T
Wire Delay
A physical wire is a distributed RC circuit
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td = 12 RT CT
td = RC
n+1 1
n 2 RT CT
Wire Delay
Assume an M3 wire 10mm long and 1. 5 wide driving a 0.1pF load
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Intrinsic delay:
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1
2 RC
= 266ps
Wire Delay
Driver Size:
2.1pF
4
=0.5pF
resistance is now 0. 5
capacitance increases by 1.3 to 1.4 (depends on spacing. . . )
active regeneration
Tdn =
RiCdi
iP(n)
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l
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Elmore Example
R4
C4
R1
R2
R3
+ C
1
"!
C2
C3
Moment Matching
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Moments:
u
u
u
Calculating Moments
The transfer function Vin = (t) of a circuit can be expressed as:
Vout (s)
Vin(s)
=
H(s) =
where j > i
1+a1s+a2s2++aisi
1+b1s+b2s2++b j s j
Calculating Moments
Setting these two equations equal to each other and multiplying by
the denominator produces the form:
a1 = m0b1 + m1
a2 = m0b2 + m1b1 + m2
a3 = m0b3 + m1b2 + m2b1 + m3
Calculating Moments
For an RC circuit the DC gain is 1, so a0 = 1 and a0 = m0. The next
four s terms express the coefficients of the pole polynomials in
terms of m j :
m0
m1
m2
m3
m1
m2
m3
m4
m2
m3
m4
m5
m3
m4
m5
m6
b4
b3
b2
b1
m4
m5
m6
m7
The first 8 m j s are used to calculate the poles (bs) and zeros (as)
for a fourth order circuit.
Calculating Moments
The above method only works well if the moments (ms) are easy to
calculate.
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Set the cap current and voltage for RC node in the network
Model Reduction
Accurately modeling interconnect requires at least a model
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Cl , R, and Cr
Model Reduction
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Model Reduction
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Ce f f
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Ce f f Calculation
Select two k-factor equations:
td = k(tin,CL)
tr/ f = k0(tin,CL)
Select time points t20 and t50 that are related to the delay and
transition times of the driver by
t50 = td + t2in
tr/ f
tin
t20 = td + 2 2
Ce f f Calculation
We can model these regions as:
Vout (t) =
Vt ct 2,
0 t t20
a + b(t tx), t20 t t50
1
t50
1
I (t)dt =
t50
ICe f f (t)dt
Ce f f
= Cl +Cr 1
RCr
t
t50 20
2
t t
50RCr20
(RCr )2
+
e
t
t20(t50 20
)
2
t20
RC
1e 1
Ce f f Calculation
Iterative solution:
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Electromigration Physics
Electromigration caused when electrons accelerated through
electric field collide with ions in the metal lattice
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Review
1. Three primary model characteristics of wires (RLC)
2. Simple resistance model for wires
3. Relative resistance of copper and aluminum
4. The two simple capacitance models for a wire
5. Magnitude of fringe capacitance relative to plate cap
6. Impedance of a wire
7. What is an inductor L
8. Inductor model terminals, and their behavior
9. Design of a PC Board microstrip
Review
1. Inductive crosstalk
2. Effect of inductive loop size in inductive cross talk
3. Self-inductance vs mutual inductance
4. Scaling of parameters in interconnect scaling that are not part of
transistor scaling (length, thickness, . . . )
5. RC scaling in interconnect
6. Effect of aspect ratio in interconnect, and how it is scaling
7. Cladding, and barrier cladding
Review
1. Inter-layer dielectric scaling and values
2. How edge rates relate to inductance
3. Scaling of on-chip self-inductance (rise time, propagation velocity,
attenuation constant)
4. Skin effect
5. Mechanism that causes inductive ringing
6. Design techniques to reduce induction
7. Wire delay models - resistive, impedance, time of flight
Review
1. How wire delay models scale and their effect on wire length
2. Design techniques to reduce capacitive coupling
3. Process methods of reducing crosstalk ( )
4. Wire delay models: L, , T
5. Calculation of wire delay using simple model
6. Design techniques to reduce long wire delay
7. Elmore wire delay
8. Benefits and drawbacks of Elmore delay
Review
1. Calculate Elmore delay of a circuit network
2. Basic understanding of AWE, moment matching, how moments
are generated and solved.
3. Other representations of moments m0 and m1
4. Two parameter models for circuit and wire delays
5. Why model is not efficient for cell-based design modeling
6. Model order reduction and effective capacitance Ce f f model
7. How electromigration physically displaces metal molecules