05 Flexures Sullivan Sp09

Precision Machine Design
ME 250
Flexures
(Adapted from ME 324 course material ,
Dan DeBra, Stanford University)
Mark Sullivan
February 12, 2009

Flexures
Acknowledgements
Text and figures in these lecture notes are taken from the
following sources:
Slocum, A. H., FUNdaMENTALs of Design, MIT, 2008.
Blanding, D., Exact Constraint: Machine Design Using Kinematic
Principles, ASME Press, New York, 1999.
DeBra, D. ME 119 Lecture Notes on Flexures, Stanford University,
1987.
Jones, R. V., Anti-distortion Mountings for Instruments and
Apparatus, J. of Sci. Instr., vol. 38, October 1961, pp. 408-409.
Jones, R. V., Some Uses of Elasticity in Instrument Design, J. of
Sci. Instr., vol. 39, 1962, pp. 193-203.
Hale, L. C., Principles and Techniques for Designing Precision
Machines, UCRL-LR-133066, Lawrence Livermore National
Laboratory, 1999. (http://www.llnl.gov/tid/lof/documents/pdf/235415.pdf)
Smith, S. T., Flexures, Gordon and Breach Science Publishers,
2000.
Trease, B., Flexures Overview, ME 599 Lecture Notes, University
of Michigan, 2004.
Sullivan
Feb 12, 2009
Page 2

Flexures
Introduction Flexures
Sullivan
Feb 12, 2009
Chart from FUNdaMENTALs of Design, Slocum
Page 3

Flexures
Flexure History
Sullivan
Feb 12, 2009
Chart from ASPE Flexure Course Notes, Culpepper
Page 4

Flexures
Flexures The Good

Simple, inexpensive
Smooth, continuous motion
No friction
No backlash
Repeatable
No wear
Sub-micron accuracy
Increased life
No noise
No lubrication required
Can be fabricated from single, monolithic material
Compatible with planar manufacturing
Milling, EDM, water jet, chemical milling, photolithography (MEMS)
Fewer parts
No assembly required
Mechanical leverage easily implemented
Failure mechanisms well understood (yield, fatigue)
Sullivan
Feb 12, 2009
Page 5

Flexures
Flexures The Bad & The Ugly

Small range (short travel distance)
Low load capacity
Proper design often requires high stiffness in direction of
motion
Simple flexures have parasitic motion in unwanted directions
Parasitic error
Low stiffness for out-of-plane motions

Force-displacement characteristics require good knowledge of:
Elastic modulus (E)
Geometry / dimensions
Sensitive to (accidental) overload

Plastic deformation (misalignment)
Buckling
Sullivan
Feb 12, 2009
Page 6

Flexures
Engineering Knowledge Required

Material Properties
Load-deflection characteristics
Hookes Law
Geometry
Load-deflection relationships for different shapes
Element deformation, e.g., beam bending
Constraints
Understand how to constrain / guide motion
Constraints / kinematics
Stiffness matrices
Reciprocity
Sullivan
Feb 12, 2009
Text from ASPE Flexure Course Notes, Culpepper
Page 7

Flexures
Blade Flexure
Sullivan
Feb 12, 2009
Figure from Limitations of Flexures, McCarthy
Page 8
Conceptual Basis
for Flexure Design

Flexures
Kinematic Design
A rigid body has 6 DOF with respect to a reference frame (or
another rigid body)
With exactly 6 constraints suitably arranged, no relative motion.
If more than 6 constraints are applied to the body, it is
overconstrained and can be strained if its support base strains
If less than 6 constraints are applied, movement is made possible
(e.g., bearings):
1 rotation free - spindle, rotary bearing
1 translation free - carriage on ways
Sullivan
Feb 12, 2009
Page 9
Constraints
and Strain Attenuation

Flexures
A constraint is (relatively) stiff along its line of constraint

Can substitute suitable arranged flexible elements to provide
functionally equivalent constraint
Ex. Your stick models
Strain attenuation is important

Frictional forces from contacts can transmit unwanted strain
Sullivan
Feb 12, 2009
Page 10
Kinematic and
Semi-Kinematic Constraint

Flexures
Is this mount overconstrained?
Sullivan
Feb 12, 2009
From Hale, 1999
Page 11
Basic Building Blocks

of Flexures

Flexures
Rod
Which DOF are Stiff
Which are Flexible?
Rz
y Rx
Bellows
Which DOF are Stiff
Which are Flexible?
Sullivan
Feb 12, 2009
z
x
Ry
Rz
y
Rx
Ry
Page 12
Basic Building Blocks

of Flexures (2)

Flexures
Sheets or plates
Which DOF are Stiff
Which are Flexible?
z
L
bh determines strength
L influences buckling strength
Rz
b
Ex. of combining sheet flexures to reduce

constraints.
Rx
Ry
Ex. of combining sheet flexures to increase

constraints.
Sullivan
Feb 12, 2009
Page 13

Flexures
Blade Flexures
Rigid constraint in its own plane (x, y, & z)
Three degrees of freedom: z, x, & y.
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Feb 12, 2009
Page 14

Flexures
Parallel-Blade Flexure
Sullivan
Feb 12, 2009
Page 15

Flexures
Cross-Blade Flexure
Sullivan
Feb 12, 2009
Page 16

Flexures
Commercial Flexures
http://www.c-flex.com/home.html
Sullivan
Feb 12, 2009
Page 17

Flexures
Design Guidelines for Flexures
Sullivan
Feb 12, 2009
Chart from FUNdaMENTALs of Design, Slocum
Page 18

Flexures
Rowlands Ruling Engine
Sullivan
Feb 12, 2009
Henry Augustus Rowland III [1848-1901] - American physicist

Page 19

Flexures
Anti-Distortion Mountings
Sullivan
Feb 12, 2009
Jones, 1961
Page 20

Flexures
Other Flexures
Sullivan
Feb 12, 2009
Jones, 1962
Page 21

Flexures
Other Flexures, cont.
Why have 2 sets of

cantilevered blade flexures?
(At least 2 reasons)
Sullivan
Feb 12, 2009
Jones, 1962
Page 22
Series and Parallel

Connections of Springs

Flexures
Rule 1: The equivalent compliance of springs connected in

series is the sum of their individual compliances.
Rule 2: The equivalent stiffness of springs connected in parallel
is the sum of their individual stiffnesses.
cseries
Sullivan
Feb 12, 2009
Page 23
Series and Parallel

Connections of Springs (2)

Flexures
Corollary: When springs are connected in series, add

stiffnesses like resistors in parallel. When springs are
connected in parallel, add stiffnesses like resistors in series.
k1
Sullivan
Feb 12, 2009
k2
k3
Page 24

Flexures
Parallel Springs (Flexures)
Sullivan
Feb 12, 2009
Page 25

Flexures
Series Flexures
Sullivan
Feb 12, 2009
Page 26

Flexures
Parallel & Series Flexures
Sullivan
Feb 12, 2009
Page 27

Flexures
Hexapod
Sullivan
Feb 12, 2009
Page 28

Flexures
1 DOF Flexure Example
Sullivan
Feb 12, 2009
Chart from Limitations of Flexures, McCarthy
Page 29

Flexures
1 DOF Flexure
Sullivan
Feb 12, 2009
Photo from Danaher Motion

http://www.DanaherPrecision.com
Page 30

Flexures
2 DOF Flexure
Sullivan
Feb 12, 2009
Photo from Danaher Motion

http://www.DanaherPrecision.com
Page 31
Evolution of the
Translational Flexure
Sullivan
Feb 12, 2009
Figure from Flexures Overview, Trease

Flexures
Page 32
Flexure Used for

Simple Lever Motion Amplifier
Sullivan
Feb 12, 2009
Figure from PI Piezo University (http://physikinstrumente.com)

Flexures
Page 33
Parallelogram Flexure
with Motion Amplification
Sullivan
Feb 12, 2009

Flexures
Page 34
Zero-arcuate-error
Flexure System
Sullivan
Feb 12, 2009

Flexures
Page 35

Flexures
Example: PI Piezo Stages
Sullivan
Feb 12, 2009
Page 36

Flexures
PI Piezo x-y Stage
Sullivan
Feb 12, 2009
Page 37

Flexures
PI Piezo Stage w/Position Sensors
Link to PI
Sullivan
Feb 12, 2009
Page 38

Flexures
Macro Flexure Systems
Sullivan
Feb 12, 2009
Page 39

Flexures
Macro Flexure Systems (2)
Sullivan
Feb 12, 2009
Page 40

Flexures
Macro Kinematic Mechanism
Sullivan
Feb 12, 2009
Page 41

Flexures
Micro Flexures
Sullivan
Feb 12, 2009
Page 42
Carbon Nanotube (CNT)

Flexures
Sullivan
Feb 12, 2009

Flexures
Page 43

05 Flexures Sullivan Sp09

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Precision Machine Design

Precision Machine Design

Precision Machine Design

Chart from FUNdaMENTALs of Design, Slocum

Precision Machine Design

Chart from ASPE Flexure Course Notes, Culpepper

Precision Machine Design

Flexures The Good

Precision Machine Design

Flexures The Bad & The Ugly

Low stiffness for out-of-plane motions

Sensitive to (accidental) overload

Precision Machine Design

Engineering Knowledge Required

Text from ASPE Flexure Course Notes, Culpepper

Precision Machine Design

Figure from Limitations of Flexures, McCarthy

Precision Machine Design

Precision Machine Design

A constraint is (relatively) stiff along its line of constraint

Strain attenuation is important

Precision Machine Design

Is this mount overconstrained?

From Hale, 1999

Basic Building Blocks

Precision Machine Design

Basic Building Blocks

Precision Machine Design

Ex. of combining sheet flexures to reduce

Ex. of combining sheet flexures to increase

Precision Machine Design

Precision Machine Design

Precision Machine Design

Precision Machine Design

Precision Machine Design

Design Guidelines for Flexures

Chart from FUNdaMENTALs of Design, Slocum

Precision Machine Design

Rowlands Ruling Engine

Henry Augustus Rowland III [1848-1901] - American physicist

Precision Machine Design

Precision Machine Design

Precision Machine Design

Other Flexures, cont.

Why have 2 sets of

Series and Parallel

Precision Machine Design

Rule 1: The equivalent compliance of springs connected in

Series and Parallel

Precision Machine Design

Corollary: When springs are connected in series, add

Precision Machine Design

Parallel Springs (Flexures)

Chart from ASPE Flexure Course Notes, Culpepper

Precision Machine Design

Chart from ASPE Flexure Course Notes, Culpepper

Precision Machine Design

Parallel & Series Flexures

Chart from ASPE Flexure Course Notes, Culpepper

Precision Machine Design

Chart from ASPE Flexure Course Notes, Culpepper

Precision Machine Design

1 DOF Flexure Example

Chart from Limitations of Flexures, McCarthy