pp.145-148
Detection of Dilute Aromatic VOCs Using WO3 Thin Film Sensors Equipped
with Au Interdigitated Microelectrode
Jun Tamaki Member (Ritsumeikan University)
Yuka Michiba Non-member (Ritsumeikan University)
Susumu Kajita Non-member (Matsushita Electric Works)
Keywords : Aromatic VOCs, WO3 thin film sensor, Interdigitated microelectrode
Fig. 1.
Schematic drawing of Au interdigitated
microelectrode