Christophe Fitamant
Sales & Marketing Director, Yole Dveloppement
Christophe Fitamant joined Yole Dveloppement in 2013 to lead Mdia and Sales activities. He holds
an engineering degree of INP Grenoble - Phelma - with a major in Chemical Process Engineering. He
has worked at IBM Corbeil-Essonnes, and Applied Materials. Hes lived in California when he managed
the Applied etch product support group for Taiwan and Japan. Back to France for Lam Research he
first took the responsibility of the ST Crolles site, before taking the Sales Account Management for
Europe. With the acquisition of SEZ in Austria by Lam in 2008, he led Sales and Marketing for Lam
penetration in MEMS and Advanced Packaging for Clean.
2013
Fields of Expertise
Yole Developpement is a market, technology and strategy consulting
company, founded in 1998. We operate in the following areas:
Photovoltaic
Power
Electronics
Microfluidic
& Med Tech
Advanced
Packaging
REPORTS
CONSULTING
Market research
Technology & Strategy
Patent Analysis
www.yole.fr
YOLE FINANCE
M&A / Due Diligence /
Fund raising services
2013
Rozalia Beica
Chief Technical Officer, Yole Dveloppement
Rozalia Beica is the CTO and Business Unit Manager leading Advanced / 3D Packaging and
Semiconductor Manufacturing activities within Yole Dveloppement. For more than 15 years she has
been involved in research, strategic marketing and application of WLP and 3D/TSV at materials (Rohm
and Haas), equipment (Semitool, Applied Materials, Lam Research) and device manufacturing (Maxim
IC) organizations.
Rozalia has authored over 50 papers and publications and she is actively participating in several 3D &
Advanced Packaging Committees worldwide.
Rozalia holds a M.Sc. in Chemical Engineering (Romania), a M. Sc. In Management of Technology
(USA) and a GXMBA from IE University (Spain).
2013
Courtesy of Fraunhofer-IZM
Rozalia Beica
SEMI Networking Day: Packaging - Key for System Integration
Porto June 27, 2013
2013
Copyrights Yole Dveloppement SA. All rights reserved.
Presentation Outline
Advanced Packaging
Platforms
Emerging Packaging
Technologies
FOWLP
Market Forecasts
Cost Considerations
IP Activities
Conclusions
FCI
2013
NXP
Introduction
The evolution of semiconductor packaging technologies over the past 40 years has
been driven by the need to bridge the increasing I/O interconnect gap, between the
fast decreasing silicon geometries (Moores law) and the slower shrink of the Printed
Circuit Board technologies
Wafer-level-packaging market is gaining more and more significance in the semiconductor industry; it
shows the greatest potential for significant future growth in the semiconductor industry.
Historically supported by the market growth in flip-chip wafer bumping with electroplated gold, solder
bumps and today copper pillars; wafer-level-packages are actually coming in many different, namely
Fan-in WLCSP packages, 3D WLP, FO WLP packages, 2.5D Glass / Silicon interposers and of course
3DIC integration with TSV interconnects.
2013
Wafer-Level-Packaging
In the semiconductor IC wafer processing industry
% Ratio of WW Semiconductor IC Wafers Packaged at the Wafer-Scale
(Volume in millions of 300mm wafers eq.)
160
50%
45%
40%
120
35%
100
30%
80
25%
20%
60
15%
% penetration Ratio
Wafer shipments
40
10%
20
0
2011
2012
2013
2014
2015
2016
2017
84
92
101
111
122
135
148
13
14
17
21
25
31
35
15%
16%
17%
19%
20%
23%
23%
% ratio
5%
0%
CAGR
10%
21%
In 2012, ~ 16% of overall semiconductor IC wafers were manufactured with packaging features
(bumping, RDL, TSV, etc) processed at the wafer-scale
2013
Wafer-Level
Interface / Encapsulation
Electrical Redistribution
Stacking / Integration
WLOptics
3D WLP
WL CSP
Fan-in
FOWLP
Embedded die
Fan-out
in PCB / laminate
3D IC
& TSV
Glass / Silicon
2.5D
interposers
Flip-chip
wafer bumping
on BGA
Historically supported by flip-chip wafer bumping with electroplated gold & solder bumps, today
there are an array of solutions, such as: copper pillars, Fan-in WLCSP packages, 3D WLP, FO-WLP
packages, 2.5D Glass / Silicon interposers and 3DIC with TSV interconnects
2013
10
Middle end technologies are found in the overlap area between the IDMs or CMOS foundries backend of line (BEOL) wafer fabs and the the back-end wafer bumping assembly facilities of the OSATs
and wafer bumping houses
Middle-end vs Front-End vs Back-End
Middle-end
FE
BE
wafer manufacturing
etch
PVD
Courtesy of Stats ChipPAC
CVD
inspection
implant
cleaning
Wafer test
dicing
CMP
TSV
RDL / wiring
handling
bumping
thinning
inspection
BGA
C2C / C2S
W2W
C2W
underfill
molding
Final test
Middle-end is a strategic area where Foundries, OSATs, WLP Houses and IDMs stepped in,
an infrastructure that has emerged by itself in the last 5 years.
Middle-end infrastructure is growing and is the leading driver and the fastest growing
semiconductor packaging technology with more than 18% CAGR in units over the next 6 years
2013
11
Technological Differences
Packaging applications, as a function of pitch size requirements are divided in flip chip
and wafer level packaging.
WAFER BUMPING
WAFER LEVEL PACKAGING
FLIP CHIP
Silicon on silicon
microbumping
FC BGA
FC CSP
Chip on Board
COF/COG
Bump
characteristics
Bump
characteristics
Bump
characteristics
Bump
characteristics
Bump
characteristics
Plating, screen
printing
pitch: <180m
Plating, screen
printing, stud
pitch: < 150m
Plating
pitch: <150m
Plating
pitch: < 60m
Ball dropping
pitch: 400-500m
Courtesy of Statschippac
Courtesy of 3M
Courtesy
of SPIL
FAN IN
FAN OUT
CHIP
EMBEDDIN
G
Courtesy of
NXP and FCI
While flip chip is more economically feasible to smaller size pitches (< 200um), larger
pitch size requirements are addressed using embedded technologies
2013
12
3DIC
40,0
3D SiP
30,0
FO WLP
25,0
3D WLP
20,0
WL CSP
15,0
2.5D interposers
10,0
5,0
Flip-chip
0,0
2011
2012
2013
2014
2015
2016
2017
Significant growth of 3D Packages: 3D IC, Embedded (3D SIP and FOWLP) and Interposers
2013
13
$3 000 M
FO WLP / SiP
$2 500 M
3D WLP
$2 000 M
Fan-in WL CSP
$1 500 M
2.5D interposers
$1 000 M
$500 M
$0 M
TOT
2013
2011
2012
2013
2014
$867 M
$642 M
$863 M
$1,204M
2015
$1,721M
2016
$2,578M
2017
$3,782M
28%
In 2012, the equipment market is lower compared to the market in 2011 due to the high
investment made in 2011 for 3D IC & WLP applications.
14
Materials
market
YoleGlobal
Dveloppement
October
2012
forecast breakdown
for 3DIC & Wafer-Level-Packaging (in M$)
$2 000 M
FO WLP / SiP
3D WLP
$1 500 M
Fan-in WL CSP
$1 000 M
2.5D interposers
CAGR
$500 M
2011
2012
2013
2014
2015
2016
2017
Flip-chip wafer
bumping
$0 M
2011
2012
2013
2014
2015
2016
2017
The material market will grow from ~$590M this year to over $2B by 2017 with a CAGR of 23%,
driven mainly by the expansion of 2.5D interposers and 3D TSV& WLP platforms.
2013
15
Embedded
Technologies
PANEL / WLP Platforms
Wafer-Level
Wafer-Level
Interface / Encapsulation
Electrical Redistribution
Stacking / Integration
WLOptics
3D WLP
WL CSP
Fan-in
FOWLP
Embedded die
Fan-out
in PCB / laminate
3D IC
& TSV
Glass / Silicon
2.5D
interposers
2013
16
Flip-chip
wafer bumping
on BGA
Market Trends
The move to embedded wafer-level-packages
Several players, such as Freescale with RCP, Infineon with eWLB, and
Ibiden for die embedding into PCB laminated substrates have developed
dedicated technologies and have processed IP in this area for years.
2013
17
Courtesy of AT&S
Single chip
AT&S
FO MCP
Embedded die
Embedded MCP
FO PoP
Embedded PoP
FO SiP
FOWLP
1st generation
2013
18
Embedded SiP
Fan-out WLP
NANIUM
2013
Copyrights Yole Dveloppement SA. All rights reserved.
Next CMOS
generation
Fan-Out WLP
PCB
0.5mm pitch
FC-CSP, WB/FC-BGA
PCB
Next CMOS
generation
PCB
0.5mm pitch
0.4mm pitch
Some restrictions are appearing at the package level, since global chip trends tend toward smaller chip areas
with an increasing number of interconnects: so the shrinkage of the pitches and pads at the chip/package
interface is happening much faster than the shrinkage at the package/board. As a result:
2013
20
FC-CSP, WB/FC-BGA package cost is increasing fast with I/O density (mainly due to interposer substrate cost)
Fan-in WLCSP are substrate-less but face inherent limitations due to available die area for re-routing
Fan-out WLP has the potential to realize any number of interconnects
with standard pitches at any shrink stage of the wafer node technology
Copyrights Yole Dveloppement SA. All rights reserved.
PMU chip
PMU chip
PCB
0.5mm pitch
PCB
0.55mm
0.5mm pitch
21
Fan-Out WLP
IC
FC BGA
IC
22
Fan-in WLCSP
IC
2013
23
FO WLP package
WBBGA
BGAPackage
package
WB
- Cost structure scenario in 2010 Depreciation of
equipments
* For a reference
scenario of 64 I/Os,
0.4mm pitch, same IC
application
FOWLP Package
- Cost structure scenario in 2010 Test
Test
15%
25%
25%
Materials
Assembly
Process +
Materials (wire
Depreciation of
equipments
30%
Substrate
30%
Direct / Indirect
(mold compound,
passivation
resists,
chemistries and
cleaners)
55%
BGA packaging technology has today reached a maturation point where it is difficult to scale
the cost down further. On the other hand, FOWLP platform has a new value proposal because:
Substrate, Wire bonds, underfill and -bumps are removed Reduced cost and no more substrate inventories!
The BOM Bill Of Materials is likely to aggressively scale down in cost with time, thanks to
2013
24
Standardization of new material selection (mold compound, passivation resists, chemistries & cleaners, etc.)
Amortization of the infrastructures (linked to new equipment introduced)
Combinations and synergy between Wafer Test/Final Test procedures
Copyrights Yole Dveloppement SA. All rights reserved.
0.6
0.5
0.4
WB-BGA
0.3
QFN
0.2
WL CSP
0.1
Pin count #
10
35
100
350
750
FOWLP is now a lower-cost package platform than any competing flip-chip solution
2013
The FOWLP cost position (0.002 - 0.003 $/IO) is a clear advantage compared to flip-chip packages today
However, the application window is still quite narrow (between 35 700 IOs only) and theres strong
restriction in terms of chip to package IC co-design environment only a few companies are mature enough
to design their chip/package for FOWLP at this early stage
25
200mm
FOWLP
$0.5
$0.30
2.5x
$0.20
Cost reduction!
PANEL
FOWLP
$0.10
470mmx370mm
2008
2013
26
2010
2012
2014
2016
FO-WLP Revenues (M $)
$600M
$500M
$400M
$300M
Transition phase
Intel Mobile/
IFX eWLB driven
CAGR ~ 0%
$200M
$100M
$0M
TOT FOWLP (M$)
2013
27
2008
$13M
2009
$48M
2010
$75M
2011
$107M
2012F
$114M
2013F
$107M
2014F
$118M
2015F
$195M
2016F
$280M
2017F
$374M
2018F
$477M
2019F
$571M
2020F
$641M
2 000
1 500
1 000
500
0
3D Stacked DRAM
3D Stacked NAND Flash
MEMS / Sensors
Logic 3D SiP / SoC
RF, Power, Analog & Mixed signal
2010
0
0
0
243
10
2011
0
0
0
324
32
2012
0
0
0
323
57
2013
0
0
0
281
89
2014
0
0
4
241
136
2015
1
9
23
334
300
2016
2
19
40
469
432
2017
3
33
63
623
531
2018
4
49
78
780
686
2019
4
68
105
944
758
2020
5
84
123
1 066
925
Beyond digital wireless SOC applications (APE/BB, BB, ASICs, FPGA, etc.), FOWLP market
demand will be driven by very different application fields, such as RF, Analog, MEMS and
stacked memory markets
2013
28
Preliminary remark: for all of the evolution charts, the data corresponding to the years 2010 and 2011 may
not be complete, since a significant number of patent applications filed during those years might not have
been published yet.
100
No. of Patent Families
80
60
40
20
0
1967
1994
1996
1998
2000
2002
2004
2006
2008
2010
Priority Years
The FOWLP technological area has picked up significantly only in recent years, coinciding with the need
to meet future device packaging requirements
2013
29
ACE (TW)
INFINEON (GE)
14
41
SAMSUNG (KR)
15
40
19
17
34
TESSERA (USA)
ASE (TW)
14
Up to 1995
13
16
11
19
2
1
13
8
1996 - 2000
2001 - 2005
FREESCALE (USA)
MICRON (USA)
MEGICA (TW)
2006 - 2011
QIMONDA (GE)
Priority Years
Bubble size represent number of Patent Families
In recent years (i.e. from 2005), most players have increased their focus on innovation
Exceptions: Tessera and Micron, whose filings in the last few years have decreased.
2013
30
RDL
(multiple)
14
Singulation
KGD
Bump
1
11
Contact
pad
3
Die
placement - Carrier
47
RDL
(single)
58
Bonding
10
Passivation
3
Carrier
Debonding
1
Encapsulation
29
Basic step
RDL (single)
ACE, Tessera
ACE
Encapsulation
Infineon, Tessera
RDL (multiple)
Freescale
Bump
Infineon
Bonding
Amkor
Passivation
Contact pad
Infineon
Singulation , KGD
Samsung
Carrier Debonding
Infineon
Most efforts are dedicated to RDL (to improve signal redistribution), die placement (to limit
die shift issue) and encapsulation (to reduce CTE mismatch)
2013
31
FOWLP Conclusions
FOWLP is a new packaging platform offering new solutions towards integration and miniaturization (10um
line/space, reduced package thickness < 0.5mm, etc.)
FOWLP technology basically extends the concept of wafer scale packaging to many new applications that
are today packaged in BGA and WL CSP packages.
Key applications driving initial FOWLP volume demand will be wireless basebands, RF transceivers and
power management units. Other applications include stacked memories and analog-specific ICs such as
audio codec, MEMS & Sensors, network switches, etc.
A new production infrastructure and opportunity to scale packaging cost down by:
2013
32
CTE mismatch on bigger package dimensions > 8x8mm (target are 10x10mm, 12x12mm)
Cost and market acceptance
Co-design tool implementation
Manufacturing yield improvements (70% 80% 95-98%)
Testing approach is yet to be defined (the ultimate goal being to realize the Wafer Test and Final Test in the same
infrastructure)
Development of 2nd-generation FOWLP with multi-die and double-side RDL to enter in the 3D SiP dimension
Copyrights Yole Dveloppement SA. All rights reserved.
Thank you!
2013
Copyrights Yole Dveloppement SA. All rights reserved.
REPORTS
CONSULTING
Market research
Technology & Strategy
Patent Analysis
www.yole.fr
YOLE FINANCE
M&A / Due Diligence /
Fund raising services
2013
34