S ta n d a r d G r a tic u le s

O u r C o m p a n y
IMT has been providing top quality microlithographic products since 1954.
From our headquarters near Zurich, Switzerland, and supported by a global
customer service organisation, we provide our customers with high-quality custommade microlithographic products, large area photomasks as well as standard
graticules and testing targets.
In our state-of-art production facility using the most modern equipment, our staff of 60
manufactures our products with the keen attention to detail and quality that is
associated with Swiss products.

O u r p ro d u c ts
This brochure contains an overview of our standard graticules and reticules.
IMT is primarily a supplier of complex customized microlithographic solutions as well
as large area photo-masks.
The deep technical know-how of our team and the fact that we operate one of the
best equipped facilities for microlithography, allows us to offer our customer unique
solutions for optical components on flat substrates.

T e c h n ic a l s p e c ific a t io n
This brochure covers our standard precision graticules.
The standard precision graticules are available from stock in small quantities.
The patterns of the graticules are made with a bright chrome coating. The chrome
coating is vacuum deposited onto the substrate.
Glass substrate:
Dimension:
Layer thickness:

Optical glass
0.5 mm, protective chamfer
0.1 m

Reflection of graduation
air side and glass side:

50 60%

View:

Always seen on layer

Residual light transmission:

< 0.1% at 550 nm

Index letters a and b have been added to some of the illustration item numbers to
indicate the following designs:
a p o s it i v e :
b n e g a tiv e :

opaque pattern on transparent background

transparent pattern on opaque background

If the number has no index, the item is only supplied as illustrated.

Other glass substrates or transmissions and reflections are available as to customer
specifications.
Measure protocols and calibration charts are available at extra charge.

1 a , 1 b L a r g e r e s o lu t i o n
t a r g e t w it h U S A F p a t t e r n

2 a , 2 b S m a ll r e s o lu t io n
t a r g e t w it h U S A F p a t t e r n

10 line groups each comprising 6 Identical to target No.1, but

three-bar pairs
without the 12 peripheral three1 to 6from 4 mm to 4.4 m
bar pairs.
pitch*).
8 line groups comprising 6 threeG l a s s s u b s t r . :101.6 x 82.6 x 2
bar pairs.
mm
1 to 6 from 1mm to 4.4m
7 7 7 4 3 7 (1a positive)
pitch*).
7 7 7 3 6 0 (1b negative)
G l a s s s u b s t r . : 38 x 38 x 2mm
7 7 8 0 0 0 (2a positive)
7 7 7 4 9 4 (2b negative)
*) refer to resolution table on page 14

3 , 4 , 5

*) refer to resolution table on page 14

S e c to r s ta r ta r g e t

Comprising 36 transparent and

opaque sectors of equal width.
Smallest resolved grating pitch at
the centre approx. 8.7 m,
corresponding to an unresolved
dark core of 0.1 mm dia.

G l a s s s u b s t r . : 10 x 1.5 mm
7 7 7 6 8 7 (3)
G l a s s s u b s t r . : 25 x 1.5 mm
7 7 7 4 4 8 (4)
G l a s s s u b s t r . : 60 x 1.5 mm
7 7 8 0 0 1 (5)

S e c to r s ta r ta r g e t
Comprising 72 transparent and
G l a s s s u b s t r . : 60 x 1.5mm
opaque sectors of equal width.
7 7 7 5 4 0 (6)
Smallest resolved grating pitch at
the centre approx. 8.7 m,
corresponding to an unresolved
transparent core of 0.1 mm dia.

s m

a ll s e c t o r s t a r a r r a y

33 sector star targets each 2 mm G l a s s s u b s t r . : 50 x 50 x 1.5 mm

dia. comprising 36 transparent
7 7 8 0 0 2 (7)
and opaque sectors of equal width
on a common transparent field of
approx. 29.2 x 21 mm. Smallest
resolved grating pitch at the
centre of the sector stars approx.
8.7 m, corresponding to an
unresolved dark core of 0.1 mm
dia.

M e d iu m

s e c to r s ta r a rr a y

37 sector star targets each 4 mm G l a s s s u b s t r . : 80 x 80 x 1.5 mm

dia. comprising 36 transparent
7 7 8 0 0 3 (8)
and opaque sectors of equal width
on a common transparent
background.
The array covers a transparent
field of 50 x 50 m. Smallest
resolved grating pitch at the
centre of the sector stars approx.
17.5 m, corresponding to an
unresolved dark core of 0.2 mm
dia.

L a r g e s e c to r s ta r a rr a y
59 sector star targets each 4.5
G l a s s s u b s t r . : 101x101x2 mm
mm dia. comprising 36
7 7 8 0 0 4 (9)
transparent and opaque sectors of
equal width on a common
transparent background.
The array covers a transparent
field of 90 x 90 m. Smallest
resolved grating pitch at the
centre of the sector stars approx.
13 m, corresponding to an
unresolved dark core of 0.15 mm
dia.

1 0

S e c t o r s t a r w i t h g r a t in g s

Sector star with 24 mm dia.

comprising 36 transparent and
opaque sectors of equal width on
a common opaque background.
Also combining 4 linear gratings
with transparent and opaque lines
on an opaque background
G l a s s s u b s t r . 40x40x 1.5 mm
7 7 8 0 0 5 (10)

Grating pitch of the four

gratings:
Grating 1)
0.64 mm;
Grating 2)
0.32mm;
Grating 3) and 4) 0.16 mm.
Smallest resolved grating pitch at
the centre of the sector star
approx. 22m, corresponding to
an unresolved dark core of 0.25
mm.

1 1

M i c r o m e t e r s c a le
g r a t i c u le
2 mm in 200 divisions; Line width
2 m 0.5m. Graduation
accuracy: 0.5 m.
L in e le n g th s :
10 mm lines: 0.1 mm
5 mm lines: 0.075 mm
1 mm lines:0.05 mm
G l a s s s u b s t r . : 76 x 26 x 1.5 mm
7 7 7 4 6 9 (11)

1 2

O c u la r m
g r a t i c u le

ic r o m e te r s c a le

10 mm in 100 divisions:
Line width 15 m 2 m.
Graduation accuracy 5 m.
L in e le n g th s :
10 mm lines: 1 mm
5 mm lines: 0.7 mm
1 mm lines: 0.3 mm

1 3 a , 1 3 b

C r o s s lin e g r a t ic u le

Continuous crossline.
Line width 5 m 1 m
Angular accuracy 1 arc minute

1 4

1 m m

G l a s s s u b s t r . : 15 x 1.5 mm
7 7 7 6 7 6 (13a positive)
7 7 8 0 0 7 (13b negative)

G r id c h a r t

100 mm square grid subdivided

into 1 mm squares.
Graduation accuracy:
Interval 2 m; Total length 15
m.
Grid viewed through glass.

1 5 a , 1 5 b

G l a s s s u b s t r . : 15 x 1.5 mm
7 7 8 0 0 6 (12)

0 .5 m m

G l a s s s u b s t r . 110x110x3 mm
7 7 7 3 9 6 (14)

G r id c h a r t

75 mm square grid subdivided

G l a s s s u b s t r . : 85 x 85 x 3 mm
into 0.5 mm squares.
7 7 7 7 5 9 (15a positive)
Graduation accuracy:
7 7 7 5 0 7 (15b negative)
Interval 3 m; Total length 10
m.
Grid viewed through glass.

1 6 a , 1 6 b

0 .1 m m

G r id c h a r t

50 mm square grid subdivided

into 0.1 mm squares.
Graduation accuracy:
Interval 5 m; Total length
10 m.
Grid viewed through glass

1 7 a

G l a s s s u b s t r . : 60 x 60 x 3 mm
7 7 7 4 0 9 (16a positive)
7 7 8 0 0 8 (16b negative)

D o t a r r a y

Calibration of Image Systems

Dot-: 0.25 mm 1.0 m
Dot to Dot: 0.5 mm 1.0m
Image field: 25 x 25 mm

G l a s s s u b s t r . : 50x50x 1.5mm
7 7 8 7 9 6 (17a positive)

1 9 a , 1 9 b D o t a n d lin e
c o m p a r is o n
3m to 100m. 2 adjacent rows G l a s s s u b s t r . : 60 x 30 x 2 mm
of 17 dots and lines of equal
7 7 7 3 4 3 (19a positive)
width: Line length 2 mm with
7 7 7 7 4 4 (19b negative)
designation numbers.
Line width:
3, 4, 5, 6, 7, 8, 9, 10, 12, 15, 20,
25, 30, 40, 50, 75 and 100 m.
2 mm spacing.

2 0 a , 2 0 b D o t a n d lin e
c o m p a r is o n
10 m to 1000 m. As version
19, but with 19 dots and lines
with following widths:
10, 20, 30, 40, 50, 60, 70, 80,
90, 100, 125, 150, 200, 250,
300, 400, 500, 750 und 1000
m.

G l a s s s u b s t r . : 60 x 30 x 2 mm
7 7 7 3 3 9 (20a positive)
7 7 7 6 6 6 (20b negative)

2 1 a , 2 1 b F u ll f o r m a t
r e s o l u t io n t a r g e t a r r a y
0.5 mm grid chart as per version G l a s s s u b s t r . : 60 x 60 x 3 mm
15 interrupted by 13 single
7 7 7 7 5 5 (21a positive)
resolution targets each with 6
7 7 7 7 3 5 (21b negative)
groups comprising 6 three-bar
pairs with grating pitches
between 250 to 4.4 m (as per
version2 group 2 to 7 of the
small resolution target*)
*) refer to resolution table on page 14

2 2 a , 2 2 b C r o s s lin e
g r a t i c u le
Continuous crossline.
L in e w id th s :
I
20 2 m
II
50 3 m
I I I 100 5 m
IV
200 10 m
Angular accuracy within 1 arc
minute.
G l a s s s u b s t r . : 25 x 1.5 mm

2 3

P o
7 7
7 7
7 7
7 7

s i
8 0
7 9
8 0
8 0

t iv
0 9
3 9
1 0
1 1

N e
7 7
7 7
7 7
7 7

g a
7 6
7 7
8 0
8 0

t iv
9 7
8 7
1 2
1 3

e
(22a
(22a
(22a
(22a

I)
II)
III)
IV)

e
(22b
(22b
(22b
(22b

I)
II)
III)
IV)

R a d i u s g r a t i c u le

Continuous crossline and

G l a s s s u b s t r . : 25 x 1.5 mm
concentric circles with following 7 7 7 4 7 3 (23 I)
diameters:
7 7 7 3 3 8 (23 II)
1, 2, 3, 4, 5, 7.5, 10, 12.5 and
15 mm.
L in e w id th :
I 15 2 m
I I 70 5 m
Angular accuracy within 1 arc
minute.
Concentric circles with radius
accuracy within 0.01 mm.

2 4

G r a t i c u l e w it h a n g le
g r a d u a t io n s
Radial lines to max. 20 mm dia. G l a s s s u b s t r . : 25 x 1.5 mm
Angle divisions 15, 22.5, 30,
7 7 8 0 1 4 (24)
45, 60, 75 and 90 with
concentric circles dia 5, 10 and
15 mm.
Line width : 15 2 m
Angular accuracy within 30

2 5

O c u la r m ic r o m e te r
s c a l e g r a t i c u le
10 mm in 200 divisions
Line width: 10 2 m
L i n e l e n g t h s : 0.05mm-line.=
0.2mm, 0.1mm-line.= 0.4mm, 0.5
und 1mm-line= 0.6mm. Every
0.5mm(Height 0.2mm) numbered
Graduation accuracy: Interval
1m, total length within 5m
G l a s s s u b s t r . : 15 x 1.5 mm
7 7 7 4 3 6 (25 I) h o r i z o n t a l
7 7 8 0 1 5 (25 II) v e r t i c a l

2 6

O b je c t m ic r o m e te r
s c a l e g r a t i c u le
10 mm in 500 divisions
Line width: 3 1 m
L i n e l e n g t h s : 0.02mm-line=
0.1mm, 0.1mm-line= 0.2mm,
0.2mm-line= 0.3mm. Every 0.2
mm (Height 0.075 mm)
numbered.
Graduation accuracy: Interval
1m, total length within 3m
G l a s s s u b s t r . : 15 x 1.5 mm
7 7 7 3 4 4 (26 I) h o r i z o n t a l
7 7 8 0 1 6 (26 II) v e r t i c a l

2 7

D o t a n d lin e
c o m p a r is o n c h a r t
For detection of surface flaws
to optics standard DIN 10110.
3 rows of 5 dots and lines of
equal width with designation
numbers from 0.0025 to 1.6
mm

2 8 a , 2 8 b
a r r a y

G l a s s s u b s t r . : 60 x 30 x 2 mm
7 7 7 4 0 6 (27)

R e s o lu t io n t a r g e t

41 resolution targets as per

G l a s s s u b s t r . : 50 x 50 x 3mm
target No 1 with groups 4, 5, 6 7 7 8 0 1 7 (28a positive)
and 7.
7 7 8 0 1 8 (28b negative)
Largest grating pitch= 0.06 mm
(16 lines per mm)
Finest grating pitch= 4.4m*)
(228 lines per mm) in cross
formation.
*) refer to resolution table on page 14

2 9 a , 2 9 b R e s o lu t io n t a r g e t
w it h N B S p a t t e r n
49 groups comprising five-bar
lines at right angles to each
other. Resolution from 1 line
per mm to 250 lines per mm.
Finest grating pitch 4 m
Each group designated by the
number of lines per mm. Line
lengths correspond to 12 x the
grating pitch.

3 1 a , 3 1 b S u r fa c e
C o m p a r is o n p l a t e
For detection of surface flaws
to optics standard DIN 10110.
Chrome structures (Lines and
dots) from 10 m up to 1.0 mm
G l a s s s u b s t r .: 90 x 50 x 2 mm
7 7 2 0 2 4 (31a positive)
7 7 9 5 6 3 (31b negative)

3 2

L in e g r a t in g te s t p la te

16 groups of line gratings from

1.25 to 100 lines per mm.
Grating pitches from 0.8 mm to
0.01 mm, line-to-space
ratio=1:1.Length of lines 22 mm
Group lengths form approx. 2.4
mm to approx. 5 mm
G l a s s s u b s t r . : 85 x 35 x 3 mm
7 7 8 0 2 2 (32)

10

G l a s s s u b s t r . : 70 x 70 x 3mm
7 7 7 4 1 3 (29a positive)
7 7 8 0 1 9 (29b negative)

3 3

T e s t p la te

Concentric circles and squares

on diameters 5, 10, 15, 20 and
25 mm including centre and
diagonal lines.
L in e w id th s :
I 15 2 m
I I 70 5 m
Angular accuracy: 1 arc
minute.
Radius accuracy: 0.01mm

3 4

0 .2 5 m m

G r id c h a r t

50 mm square grid subdivided

into 0.25 mm squares.
Line widths: 15 m, every forth
line 30 m.
Graduation accuracy:
Interval 2m
total length 5m
Grid viewed through glass.

3 5

0 .0 6 6 m m

0 .0 5 m m

G l a s s s u b s t r . : 70x70x1.5mm
7 7 7 8 7 0 (34)

G r id c h a r t

30 mm square grid subdivided

into 0.066 mm squares.
Line widths: 5 m, every third
line 10 m.
Graduation accuracy:
Interval 2m;
total length 5m
Grid viewed through glass

3 6

G l a s s s u b s t r . : 50x50x1.5 mm
7 7 8 0 2 3 (33 I)
7 7 8 0 2 4 (33 II)

G l a s s s u b s t r . : 50x50x1.5mm
7 7 8 0 2 5 (35)

G r id c h a r t

30 mm square grid subdivided

into 0.05 mm squares.
Line widths: 5 m, every fifth
line 10 m.
Graduation accuracy:
Interval 2m;
total length 5m
Grid viewed through glass

G l a s s s u b s t r . : 50x50x1.5mm
7 7 7 8 6 9 (36)

11

3 7

0 .0 3 3 m m

G r id c h a r t

20 mm square grid subdivided

into 0.033 mm squares.
Line widths: 3 m, every sixth
line 5 m.
Graduation accuracy:
Interval 2m;
total length 5m
Grid viewed through glass

3 8

0 .0 2 5 m m

G r id c h a r t

20 mm square grid subdivided

into 0.025 mm squares.
Line widths: 3 m, every fourth
line 5 m.
Graduation accuracy:
Interval 2m;
total length 3m
Grid viewed through glass

3 9

0 .0 2 m m

G r a t in g te s t a r r a y

10 groups 10 x 10 with gratings

of 5 to 125 lines per mm.
Line-to-space ratio = 1:1.
Each group designated by the
number of lines per mm.
G l a s s s u b s t r . : 165 x 30x3 mm
7 7 8 0 2 8 (40)

12

G l a s s s u b s t r . : 50x50x1.5mm
7 7 8 0 2 7 (38)

G r id c h a r t

20 mm square grid subdivided

into 0.02 mm squares.
Line widths: 3 m, every fifth
line 5 m.
Graduation accuracy:
Interval 2m;
total length 3m
Grid viewed through glass

4 0

G l a s s s u b s t r . : 50x50x1.5mm
7 7 8 0 2 6 (37)

G l a s s s u b s t r . : 50x50x1.5mm
7 7 7 4 9 9 (39)

4 1

G r id t e s t a r r a y

10 groups 10 x 10 with grids of

5 to 125 lines per mm.
Line-to-space ratio = 1:1.
Each group designated by the
number of lines per mm.
G l a s s s u b s t r . : 165 x 30x3 mm
7 7 8 0 2 9 (41)

4 2 a , 4 2 b
p la t e

F o u c a u lt t e s t

As per VG 95442 for testing

binoculars and telescopes.
2x17 groups (double
arrangement) comprising
line groups w ith lines
arranged at 45 to each
other.
Resolution 6.3Lp/mm to 25
Lp/mm i.e. grating pitches
from 160 m to 4m
Progression ratio 32:1. Each
group designated by the
number of line pairs per mm.
4 3

O b je c t m

G la s s s u b s tr .:
I 50 x 50 x 2 mm
I I 12 x 2 mm
P o s i t i v e 42a
I 7 7 8 0 3 0
II 7 7 8 0 3 1
N e g a t i v e 42b
I 7 7 8 0 3 2
II 7 7 8 0 3 3

ic r o m e te r

20 mm in 200 divisions, with

G l a s s s u b s t r . : 26 x 1.5 mm
crosshair;
7 7 8 0 3 4 (43)
Line width 15 2 m
L in e le n g th s :
0.1 mm-Line = 0.4 mm
0.5 mm-Line = 0.5 mm
1.0 mm-Line = 0.7 mm
Every tenth line (each mm) 0-20
numbered;
Height of numbers: 0.4 mm

4 4

O b je c t m

ic r o m e te r

20 mm in 200 divisions, with

crosshair;
Line width 15 2 m
L in e le n g th s :
0.1 mm-lines = 0.4 mm
0.5 mm-lines = 0.5 mm
1.0 mm-lines = 0.7 mm
Every tenth line (each mm)100-10 numbered;
Height of numbers: 0.4 mm

G l a s s s u b s t r . : 26 x 1.5 mm
7 7 7 4 9 3 (44)

13

R e s o lu t io n t a b le s f o r t a r g e ts
For standard graticules
L= Number of line pairs per mm
S= Line/space width in m
N o . 1 , N o . 2 , N o . 2 1 u n d N o . 2 8
P r o g r e s s i o n r a t i o 6 2 : 1
Element
Group - 2
Group - 1
Group 0
No
L
S
L
S
L
S
1
0.25
2000
0.5
1000
1.00
500
2
0.28
1780
0.56
890
1.12
445
3
0.31
1590
0.63
790
1.26
395
4
0.35
1410
0.71
710
1.41
355
5
0.40
1260
0.79
630
1.59
315
6
0.44
1120
0.89
560
1.78
280
Element
No
1
2
3
4
5
6

14

Group 3
L
8.00
8.98
10.1
11.3
12.7
14.3

S
63
56
50
44
40
35

Group 4
L
16.0
18.0
20.2
22.6
25.4
28.5

S
32
28
25
22
20
18

Group 5
L
32.0
35.9
40.3
45.3
50.8
57.0

S
16
14
12
11
10
9

Group 1
L
2.00
2.24
2.52
2.83
3.17
3.56

S
250
223
198
178
158
140

Group 6
L
64.0
71.8
80.6
90.5
102
114

S
8
7
6.2
5.5
5
4.4

Group 2
L
4.00
4.49
5.04
5.66
6.35
7.13

S
125
112
99
89
79
70

Group 7
L
128
144
161
181
203
228

S
4
3.5
3.1
2.8
2.5
2.2

15

Other Products
Large area photomasks in sizes up to 24 x 32, used for the following applications;
Optical Calibration tools
Photomasks for LCD production
Bumpmasks for the semiconductor industry ( Wafer Level Packaging)
others
Tailormade graticules, such as:
Incremental- and coded discs for rotary encoders
Eye test charts for Ophthalmology
Graticules for various applications, such as:
--Medical surgery equipment
--Research applications
--Optics
--etc.

Contact
Switzerland

USA

IMT Masken und Teilungen AG

Im Langacher, Greifensee
Postfach, CH-8606 Nnikon
Switzerland
Telephone + 41 44 943 19 00
Fax
+ 41 44 943 19 01
E-mail
info@imtag.ch
FTP
ftp@imtag.ch
Internet www.imtag.ch

IMT North America, Inc.

11 Bridge Street
West Wyoming, PA 18644
USA
Telephone + 1 570 954 0933
Fax
+ 1 570 693 3631
E-mail
rtrottini@mobile.imtag.ch
FTP
ftp@imtag.ch
Internet www.imtag.ch

Version002/2008

18
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