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Asghar Ramezani

School of Mechanical Engineering,


Sharif University of Technology,
P.O. Box 11365-9567, Tehran, Iran
e-mail: a.r@mech.sharif.edu

Aria Alasty
Center of Excellence in Design, Robotics,
and Automation (CEDRA),
School of Mechanical Engineering,
Sharif University of Technology,
Tehran, Iran
e-mail: aalasti@sharif.edu

Javad Akbari
School of Mechanical Engineering,
Sharif University of Technology,
Tehran, Iran
e-mail: akbari@sharif.edu

Effects of Rotary Inertia and


Shear Deformation on Nonlinear
Free Vibration of Microbeams
In this paper, the large amplitude free vibration of a doubly clamped microbeam is
considered. The effects of shear deformation and rotary inertia on the large amplitude
vibration of the microbeam are investigated. To this end, first Hamiltons principle is used
in deriving the partial differential equation of the microbeam response under the mentioned conditions. Then, implementing the Galerkins method the partial differential
equation is converted to an ordinary nonlinear differential equation. Finally, the method
of multiple scales is used to determine a second-order perturbation solution for the
obtained ODE. The results show that nonlinearity acts in the direction of increasing the
natural frequency of the doubly clamped microbeam. Shear deformation and rotary inertia have significant effects on the large amplitude vibration of thick and short
microbeams. DOI: 10.1115/1.2202167

Introduction
The Euler-Bernoulli formulation for a thin beam vibrating at
relatively low frequencies is sufficient. However, effects of rotary
inertia and shear deformation are not negligible for thick beams or
even thin beams that are vibrating at high frequencies. Due to
their dimensions, resonance frequencies of micro- and nano-scale
resonators are extremely high, namely in the range of kHz to GHz
1. It has been observed experimentally that micro- and nanomechanical resonators tend to behave nonlinearly at very modest
amplitudes 25. This nonlinear behavior has already been exploited to achieve mechanical signal amplification and noise
squeezing 6,7.
While there is an ample literature on the large amplitude vibrations of Euler-Bernoulli beams 811, only a few contributions
have considered the effects of shear deformation and rotary inertia
12,13. Abramovich investigated the influence of compressive
axial loads on the linear frequencies of Timoshenko beams having
various boundary conditions 12. This formulation, however, neglected the joint action of rotary inertia and shear deformation.
Foda studied the nonlinear vibrations of a Timoshenko beam using perturbation method 13. While, both shear deformation and
rotary inertia were considered, it was restricted to the pinned
boundary condition.
In this paper, the large amplitude free vibration of a doubly
clamped Timoshenko beam, which includes shear deformation
and rotary inertia effects, is investigated. The governing partial
differential equation is obtained by the application of Hamiltons
principle. Then, the Galerkin technique is applied to convert the
partial differential equation to an ordinary differential equation.
Finally, one of the most powerful perturbation methods, i.e., the
method of multiple scales is used to determine a second-order
perturbation solution. Then the developed theory is applied to
study a doubly clamped microbeam. The results give a basic understanding of the influence of shear deformation and rotary inertia on the nonlinear frequencies of a doubly clamped microbeam.
In this way, the method used by Foda 13 in macro-scale has been
applied to another set of boundary conditions in micro-scale. To

the best knowledge of the authors, this is the first time that the
effects of rotary inertia and shear deformation on nonlinear vibration of microbeams are investigated.

Derivation of Governing Equations


A doubly clamped beam with uniform cross section made of a
homogenous isotropic material with negligible damping is considered. The case where the amplitude of vibration is of the same
order as the thickness of the beam is presented. At this situation,
due to large displacement of the beam centerline, the elementary
linear beam theory must be extended in order to include the nonlinear effect of the stretching that occurs at the centerline. Therefore, the proper strain-displacement relations are

x =

Journal of Vibration and Acoustics

x =

2w
x2

where u and w are the axial and transverse displacements, respectively, and x is the axial coordinate of the beam. Also, x and x
are the normal strain and curvature at the centerline, respectively.
Considering the existence of shear deformation, the slope of the
beam centerline maybe written as

w
=+
x

where is the rotation of the beam cross section due to bending


and is the shear angle. The shear force is given by
V = kAG

where A is the cross-sectional area of the beam, G is the shear


modulus and k is the shear correction factor that depends only on
the geometric properties of the cross section of the beam.
To apply Hamiltons principle, first the kinetic energy function
T and the strain energy function U of the beam should be obtained. They can be written as
T=

1
2

U=
Contributed by the Technical Committee on Vibration and Sound of ASME for
publication in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received April
12, 2005; final manuscript received January 14, 2006. Assoc. Editor: Sotirios Natsiavas.

u 1 w
+
x 2 x

1
2

w
t

EI

+m

u
t

+ mr2

dx

+ kAG2 + EA2x dx

where I is the second moment of area of the cross section with


respect to the bending axis, L is the length of the beam, m is the

Copyright 2006 by ASME

OCTOBER 2006, Vol. 128 / 611

mass per unit length and r is the radius of gyration of the beam
cross section i.e., r2 = I / A. The mass moment of inertia is replaced by mr2.
On the basis of the Hamiltons principle, the variations of the
Lagrangian tt T Udt = 0, where t is the time, provide the gov0
erning equations as well as the boundary conditions. The resulting
governing equations are

w
2
EI
+ kAG
mr2 2 = 0
x
x
x
t

2w
w
kAG

2
t
x
x

2u
u 1 w
EA
+
2
t
x
x 2 x

w
=0
x

=0

at x = 0,L

In general, the axial inertia is small compared to both the transverse inertia and the rotary inertia 14. Neglecting the term
m2u / t2, Eq. 7 can be integrated with respect to x and the
result substituted into Eqs. 5 and 6 to give

EI

EA
2L

10

w
x

11

dx

where N0 is the pre-tension in the beam, if any. Combining Eqs.


9 and 10 results in

4w
2w
mEI 4w
m 2r 2 4w
EI 4 + m 2 mr2 +
2
2 +
x
t
kAG x t
kAG t4

where
N = N0 +

2w
EI 4w mr2 4w
N

+
=0
x2 kAG x4 kAG x2 t2

.
q+

1
q 2
2L2

= w/L
w

13

16

dx

17

1
N0
q 4 8
EAL4
2r

1
N0kG
kG
2 2 2
r48 EL4
E Ar L

2dx q +

2dx

kG

Er2L2

1
q3 = 0
L4

18

where the prime and dot denote derivation with respect to x and t,
respectively. In order to reduce Eq. 18 to an ordinary differential
equation, averaging over the space variable Galerkins method is
applied. Multiplying both sides of Eq. 18 in and integrating
over the interval of 0 , 1 results in

q + 1 + 2q2q + 3q + 4q3 = 0
where the coefficients ii = 1 , . . . , 4 are

19

1
kG
kG
E
N0
f1 2 1 +
f2
f2
f 1r 2 4E r 2
L
kG
AL2

2 =

1
f2f3
2f 1r24L2

1
N0kG
N0
kG
3 = 4 8
f4
f2 +
f4
f 1r E L 4
EIL2
AL4

4 =

f1 =

1
f3
kG
f2 4 f4
2f 1r48 Er2L2
L

where f is i = 1 , . . . , 4 are

x = x/L

w
x

1
kG
kG
E
N0
2 1+

r24 Er2
EL
kG
EAL2

The first and second terms in Eq. 12 correspond to classical


Euler-Bernoulli beam model. The third term represents the correction for rotary inertia while the fourth term represents the shear
deformation effect. The fifth term represents the joint effect of
rotary inertia and shear deformation. The last bracketed terms represent the effect of the axial force N that causes nonlinearity due
to large amplitudes.

t = t

wx,t = x qt

12

In general, it is more convenient and efficient to work with


dimensionless quantities. Here, these can be introduced as

EA
2

15

where x is the mode shape of the corresponding doubly


clamped Euler-Bernoulli beam and has a unit value at the midpoint of the beam i.e., 0.5 = 1. Substituting Eq. 17 into Eq.
15, one obtains after some manipulations

1 =

Nondimensionalization and Model Reduction

Hereinafter the caret on all the variables is dropped for notational


convenience.
Next, the solution for the nth mode is approximated as

Now, the axial force N can be given by


N = N0 +

w
w
w
kAG

N 2 =0
t2
x
x2 x
2

+ kAG
mr2 2 = 0
x2
x
t
2

NL2 2w
EI 4w mr22 4w

+
=0
2
2
4
2
EI x
kAGL x
kAG x t2

The boundary conditions for a doubly clamped beam are


w = 0 and = 0

u 1 w
EA
+
x
x 2 x

4w m2L4 2w mr22L2
4w
E
m 2r 2 4L 4 4w
+

1+
+
4
2
2
2
EI t
EI
kG x t
kAGEI t4
x

2dx

f2 =

. dx

20

2dx

21

f4 =

where

f3 =

. dx

= 2EI/m

14

is the linear frequency for a corresponding doubly clamped EulerBernoulli beam. Substitution of Eq. 13 into Eq. 12 and use of
the chain rule of differentiation results in
612 / Vol. 128, OCTOBER 2006

Equation 19 represents a system with inertia and stiffness cubic


nonlinearities. Four initial conditions are specified as
q0 = wmax/L

q0 = q0 =
q0 = 0

22

where wmax is the midpoint amplitude of the beam.


Transactions of the ASME

A1 = A1T2 and A2 = A2T2

Application of the Method of Multiple Scales


At this step a second-order uniform expansion for the solution
of Eq. 19 is to be obtained using the method of multiple scales
14,15 in the form
qt = . q1T0,T1,T2 + 2q2T0,T1,T2 + 3q3T0,T1,T2
23

T1 = t

T0 = t

T2 = t

Substituting Eqs. 30 and 36 into Eq. 29 yields


D40q3 + 1D20q3 + 3q3 = 2i1221 1D2A1 + 3221
4A21A1 + 2221 + 222
34A1A2A2ei1T0 + 2i2222
1D2A2 + 3222 4A22A2 + 2222

24

+ 221 34A1A1A2ei2T0 + 221

It follows that the derivatives with respect to t become

4A31e3i1T0 + 222 4A32e3i2T0

d
= D 0 + D 1 + 2D 2 +
dt

+ 221 + 222 34A1A22ei1+22T0


+ A1A22ei122T0 + 222 + 221

d2
= D20 + 2D0D1 + 2D21 + 2D0D2 +
dt2
d4
= D40 + 4D30D1 + 26D20D21 + 4D30D2 +
dt4

34 A21A2ei21+2T0
25

where
Dj =

Tj

26

j = 0,1,2

Substituting Eqs. 23 and 25 into 19 and equating coefficients


of like powers of , one obtains
D40q1
D40q2

1D20q2

1D20q1

+ 3q 2 =

+ 3q 1 = 0

4D30D1q1

2 1D 0D 1q 1

27
28

29

The general solution of Eq. 27 is


q1T0,T1,T2 = A1T1,T2ei1T0 + A2T1,T2ei2T0 + c . c. 30
where c.c. stands for the complex conjugate of the preceding
terms. The linear frequencies 1 and 2, i.e., the natural frequencies of
q + 1q + 3q = 0 are

21 =
22 =

2
1
+
2

21
3
4

31

32

which indicate that there are two sinusoidal modes of different


frequencies corresponding to the same spatial mode. The smaller
frequency 1 is associated with bending deformation, and the
larger one 2 is associated with shear deformation. The existence of these frequencies, which is the most important difference
between a Timoshenko and an Euler-Bernoulli beam, has been
demonstrated experimentally 16.
Substituting Eq. 30 into 28 yields
D40q2 + 1D20q2 + 3q2 = 2i1221 1D1A1ei1T0 + 2i2222
1D1A2ei2T0 + cc

33

which gives
Journal of Vibration and Acoustics

2i1221 1D2A1 + 3221 4A21A1 + 2221 + 222


34A1A2A2 = 0

38

2i2222 1D2A2 + 3222 4A22A2 + 2222 + 221


34A1A1A2 = 0

39

Now A1 and A2 are expressed in polar forms, i.e.,


A2 = 2 a2T2ei2T2
1

40

where a j and j are real.


Substituting Eq. 40 into Eqs. 38 and 39, separating real
and imaginary parts and solving the resulting differential equations, it follows that a1 and a2 are constants and

1 = 1T2 + 10 2 = 2T2 + 20

41

where 10 and 20 are constants and

1 =
2 =

3221 4a21 + 2221 + 222 34a22


81221 1
3222 4a22 + 2222 + 221 34a21
82222 1

42

Returning to 40, one finds


A1 = 2 a1 expi21t + i10
1

A2 = 2 a2 expi22t + i20 43
1

where T2 = 2t is used. Solving for q3 with retaining only the particular solutions and combining the resulting expressions for q1,
q2 and q3 gives
q = a1 cos1t + 10 + a2 cos2t + 20 + 3C1a31 cos31t
+ 310 + C2a32 cos32t + 320 + C3a1a22 cos1 + 22t
+ 10 + 220 + C4a1a22 cos1 22t + 10 220
+ C5a21a2 cos21 + 2t + 210 + 20 + C6a21a2 cos21
2t + 210 20

44

where the nonlinear frequencies are

Elimination of secular terms implies that


D1A1 = 0 and D1A2 = 0

37

where A j is the complex conjugate of A j.


Elimination of secular terms in q3 implies that

+ 2D0D2q1 2q21D20q1 4D30D1q2

21

+ A21A2ei212T0 + c . c.

A1 = 2 a1T2ei1T2

D40q3 + 1D20q3 + 3q3 = 6D20D21 + 4D30D2q1 1D21


21D0D1q2 4q31

36

q2 = 0

where the small dimensionless parameter is the order of the


amplitude of vibration. Expansion of qt is performed around q
= 0 which is the linear solution of 19. Also, the time scales are
defined as
2

35

Consequently, the right hand side of Eq. 28 is zero and

34

j = j + 2 j + O3

j = 1,2

45

and the coefficients C j are


OCTOBER 2006, Vol. 128 / 613

C1 =

221 4
48141 9121 + 3

C2 =

222 4
48142 9122 + 3

C3 =

221 + 222 34
41 + 224 11 + 222 + 3

C4 =

221 + 222 34
41 224 11 222 + 3

C5 =

222 + 221 34
421 + 24 121 + 22 + 3

C6 =

222 221
421 24 121

34
2 2 + 3

Table 1 The parameters 02 and in Eq. 48 for EulerBernoulli, Rayleigh and shear beams

Table 2 Microbeam geometric and material properties

46

The satisfaction of the initial conditions 22 requires that


a1 =

22wmax
22 21L

a2 =

21wmax
21 22L

10 = 20 = 0

47

Now, we consider the special cases of Euler-Bernoulli, Rayleigh no shear deformation and shear beams. In all of these cases
there is only one linear natural frequency 0 and Eq. 19 degenerates into the general form:
q + 20q + q3 = 0

48

and are according to the Table 1. The initial condiwhere


tions are

20

q0 = wmax/L

q0 = 0

49

Application of the method of multiple scales results in the following solvability conditions
D 1A = 0

50

2i0D2A + 3A2A = 0

51

Vibration of a Microbeam
A doubly clamped microbeam with rectangular cross section,
made of silicon undergoing flexural vibration is considered. The
microbeam geometric and material properties are given in Table 2.
Since the linear Euler-Bernoulli beam theory is widely used by
researchers, for comparison the ratio of the nonlinear frequency,
, of different beams to the linear frequency, 0, of EulerBernoulli beam has been computed and plotted for different slenderness ratios and maximum amplitude-thickness ratios. In all of
the figures, the frequencies correspond to the first spatial mode of
vibration. In addition, for Timoshenko beam the lower fundamental frequency 1 is used in the figures.
In Fig. 1, the slenderness ratio, L / r, is 10, which corresponds to

Equation 50 implies A = AT2. Expressing A in polar form, i.e.,


1
A = 2 aT2eiT2, substituting it into Eq. 51 and separating real
and imaginary parts results in

0a = 0
0 + 8 a 2 = 0
3

52

where the primes indicate differentiation with respect to T2. Solving Eq. 52 gives
a = a0

3a2
T2 + 0
80

53

where a0 and 0 are constants determined from the initial conditions as

0 = 0
a0 = wmax/L

54

q = a0 cost + 0 + O3

55

Therefore,
where, the nonlinear natural frequency is
= 0 +

32a2
80

614 / Vol. 128, OCTOBER 2006

56

Fig. 1 Nonlinear frequency of free vibration of a doubly


clamped microbeam for L / r = 10

Transactions of the ASME

Fig. 2 Nonlinear frequency of free vibration of a doubly


clamped microbeam for L / r = 20

L / h = 2.8867, where h is the thickness of the microbeam. The


figure shows that the effects of shear deformation and rotary inertia are significant for thick microbeams. Therefore, the nonlinear
natural frequency which is predicted from Euler-Bernoulli beam
theory deviates considerably from the actual one. Comparing the
nonlinear frequencies of shear and Rayleigh beams, it can be concluded that the effect of shear deformation is more significant than
the effect of rotary inertia on the large amplitude vibration of
microbeams. However, as the midpoint amplitude-thickness ratio
increases, the effect of rotary inertia becomes more pronounced.
In Fig. 2, the slenderness ratio is 20 i.e., L / h = 5.7735. The
effects of shear deformation and rotary inertia are significant for
small midpoint amplitude-thickness ratios.
In Fig. 3, the slenderness ratio is 50 i.e., L / h = 14.4338. The
figure presents that for slender microbeams, the nonlinear frequency of Rayleigh, Euler-Bernoulli, Shear, and Timoshenko
beams are almost equal. Hence, as expected, the effects of rotary
inertia and shear deformation can be neglected for slender microbeams.
Finally, all of the three figures show that increasing the vibration amplitude intensifies the stretching effect which leads to increase of the nonlinear frequency of vibration for the microbeams
with different slenderness ratios. Therefore, application of the linear theory in these cases results in erroneous predictions.

Conclusion
The large amplitude vibration corresponding to the first spatial
mode of a doubly clamped microbeam, which includes shear deformation and rotary inertia effects, was studied. The method of
multiple scales was used to find an approximate perturbation solution for the resulting nonlinear equation. It was observed that a
nonlinear model results in higher natural frequencies for the considered doubly clamped microbeam. The effects of shear deformation and rotary inertia are significant and cannot be neglected in
the case of thick and short microbeams undergoing large amplitude vibrations. Therefore, when the theory of beams is used for
the study of micro- and nanomechanical structures, shear deformation and rotary inertia effects should be considered for an accurate dynamic analysis.

Journal of Vibration and Acoustics

Fig. 3 Nonlinear frequency of free vibration of a doubly


clamped microbeam for L / r = 50

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