12
Multichip Module
Technologies
12.1
12.2
Introduction
Multi-Chip Module Technologies
12.3
MCM-L MCM-C
Processing HTCC Ceramics Metal Powder and
Paste Thick-Film Metallization HTCC in Summary
12.4
12.5
12.6
LTCC Substrates
Aluminum Nitride
Materials for Multi-layered AlN Packages
MCM-D
12.7
12.8
12.9
Victor Boyadzhyan
Jet Propulsion Laboratory
12.12 Summary
12.1 Introduction
From the pioneering days to its current renaissance, the electronics industry has become the largest and
most pervasive manufacturing industry in the developed world. Electronic products have the hallmark
of innovation, creativity, and cost competitiveness in the world market place. The way the electronics
are packaged, in particular, has progressed rapidly in response to customers demands in general for
diverse functions, cost, performances, and robustness of different products. For practicing engineers,
there is a need to access the current state of knowledge in design and manufacturing tradeoffs.
Thus arises a need for electronics technology-based knowledge to optimize critical electronic design
parameters such as speed, density, and temperature, resulting in performance well beyond PC board
design capabilities. By removing discrete component packages and using more densely packed interconnects, electronic circuit speeds increase. The design challenge is to select the appropriate packaging
technology, and to manage any resulting thermal problems.
The expanding market for high-density electronic circuit layouts calls for multi-chip modules (MCMs)
to be able to meet the requirements of fine track and gap dimensions in signal layers, the retention of
accurately defined geometry in multilayers, and high conductivity to minimize losses. Multi-chip module
technologies fill this gap very nicely. This chapter provides engineers/scientists with an overview of
existing MCM technologies and briefly explains similarities and differences of existing MCM technologies. The text is reinforced with practical pictorial examples, omitting extensive development of theory
and details of proofs.
The simplest definition of a multi-chip module (MCM) is that of a single electronic package containing
more than one integrated circuit (IC) die.1 An MCM combines high-performance ICs with a customdesigned common substrate structure that provides mechanical support for the chips and multiple layers
of conductors to interconnect them.
One advantage of this arrangement is that it takes better advantage of the performance of the ICs
than it does interconnecting individually packaged ICs because the interconnect length is much shorter.
The really unique feature of MCMs is the complex substrate structure that is fabricated using multilayer
ceramics, polymers, silicon, metals, glass ceramics, laminates, etc. Thus, MCMs are not really new. They
have been in existence since the first multi-chip hybrid circuit was fabricated. Conventional PWBs
utilizing chip-on-board (COB), a technique where ICs are mounted and wire-bonded directly to the
board, have also existed for some time. However, if packaging efficiency (also called silicon density),
defined as the percentage of area on an interconnecting substrate that is occupied by silicon ICs, is the
guideline used to define an MCM, then many hybrid and COB structures with less than 30% silicon
density do not qualify as MCMs. In combination with packaging efficiency, a minimum of four conductive
layers and 100 I/O leads has also been suggested as criteria for MCM classification.1
A formal definition of MCMs has been established by the Institute for Interconnecting and Packaging
Electronic Circuits (IPC). They defined three primary categories of MCMs: MCM-L, MCM-C, and
MCM-D.
It is important to note that these are simple definitions. Consequently, many IC packaging schemes,
which technically do not meet the criteria of any of the three simple definitions, may incorrectly be
referred to as MCMs. However, when these simple definitions are combined with the concept of packaging
efficiency, chip population, and I/O density, there is less confusion about what really constitutes an MCM.
The fundamental (or basic) intent of MCM technology is to provide an extremely dense conductor matrix
for the interconnection of bare IC chips. Consequently, some companies have designated their MCM
products as high-density interconnect (HDI) modules.
MCM-L
Modules constructed of plastic laminate-based dielectrics and copper conductors utilizing advanced
forms of printed wiring board (PWB) technologies to form the interconnects and vias are commonly
called laminate MCMs, or MCM-Ls.2
Advantages
Economic
Disadvantages
Technological
MCM-L development has involved evolutionary technological advances to shrink the dimensions of
interconnect lines and vias. From a cost perspective, it is desirable to use conventional PWB technologies
for MCM-L fabrication. This is becoming more difficult as the need for multi-chip modules with higher
interconnect density continues.
As MCM technologies are being considered for high-volume consumer products applications, a focus
on containing the cost of high-density MCM-Ls is becoming critical.
The most usefull charateristic in assessing the relative potential of MCM-L technology is interconnection density,3,4 which is given by:
(12.1)
The above formula measures how much of the surface of the board can be used for chip mounting pads
versus how much must be avoided because of interconnect traces and holes/pads.
MCM-C
These are modules constructed on co-fired ceramic or glass-ceramic substrates using thick-film
(screen printing) technologies to form the conductor patterns using fireable metals. The term cofired implies that the conductors and ceramic are heated at the same time. These are also called
thick-film MCMs.
Ceramic technology for MCMs can be divided into four major categories
Thick-film hybrid technology produces by the successive deposition of conductors, dielectric, and/or
resistor patterns onto a base substrate.5 The thick-film material, in the form of a paste, is screenprinted
onto the underlying layer, then dried and fired. The metallurgy chosen for a particular hybrid construction
depends on a number of factors, including cost sensitivity, conductivity requirements, solderability, wire
bondability, and more. A comparative summary of typical ceramic interconnect properties is compiled
in Table 12.1.
TABLE 12.1 A Comparative Summary of Typical Ceramic Interconnect Properties
Item
Line width (m)
Via diameter (m)
Ave. No. conductor layers
Conductor res. (mohm/sq)
(dielectric)
CTE
Tc Dielectric (W/mC)
Relative cost (low volume)
Tooling costs
Capital outlay
Thick Film
125
250
16
2100
59
47.5
2
Medium
Low
Low
HTCC
100
125
175
812
910
6
1520
High
High
High
LTCC
100
175
175
320
58
38
12
High
High
Medium
Thick-Film Metallization
The greensheet is cast, dried, stripped from the carrier film, and blanked into defect-free sheets, typically
200 mm2. The greensheet is then processed through punching, screening, and inspection operations.
HTCC in Summary
Electrical performance characteristics include 50-ohm impedance, low conductor resistance, ability to integrate passive components such as capacitors and inductors, the ability to achieve high
wiring density (ease of increasing the number of wiring at low cost), the ability to support highspeed simultaneous switching drivers, and the ease of supporting multiple reference voltages.
Inherent thermal performance characteristics superior to MCM-L and MCM-D.
Time-demonstrated reliability.
silicon to improve the reliability of solder interconnections. Unlike the case of a crystallizing glass, the
mixed glass and ceramic approach allows for a much wider choice of materials.
ALN
175
8.9
0.0004
320
HTCC
25
3.3
9.5
0.0004
420
LTCC
2
3.9
5.0
0.0002
210
BeO
260
2.6
6.7
0.0004
220
Si
150
2.8
Cu
394
8.9
(12.2)
2Al + N2 2AlN
(12.3)
MCM-D
Modules are formed by the deposition of thin-film metals and dielectrics, which may be polymers or
inorganic dielectrics. These are commonly called thin-film MCMs.
Here, the focus will be on materials to fabricate the high-density MCM-D interconnect. The materials
of construction can be categorized as the thin-film dielectric, the substrate, and the conductor metallization.
enough to withstand handling, thermal cycling, and shock. The substrate must also meet certain CTE
constraints because it is in contact with very large silicon chips on one side and with the package on the
other side.11,12 Thermal conductivity is another important aspect when heat-generating, closely spaced
chips need that heat conducting medium. It is informative to state that high-density, large-area processing
has generated interest in glass as a carrier material.
Metallic substrates have been used to optimize the thermal and mechanical requirements while minimizing substrate raw material and processing costs. Metallic sandwiches such as Cu/Mo/Cu can be
tailored to control CTE and thermal properties. 5%Cu/Mo/5%Cu is reported to have a thermal conductivity (TC) of 135 W/mK, a CTE of 5.1 ppm, an as-manufactured surface finish of 0.813 m, and a
camber of 0.0005 in/in.
Aluminum
Aluminum is a low-cost material that has adequate conductivity and can be deposited and patterned by
typical IC techniques. It is resistant to oxidation. It can be sputtered or evaporated, but cannot be
electroplated.
Copper
Copper has significant conductivity over aluminum and is more electromigration-resistant. It can be
deposited by sputtering, evaporation, electroplating, or electroless plating. Copper rapidly oxidizes,
forming a variety of oxides that can have poor adhesion to polymer dielectrics and copper itself.
Gold
Gold is used in thin-film structures to minimize via contact resistance problems caused by oxidation of
Cu and Al. Gold can be deposited by sputtering, evaporation, electroplating, or electroless plating. Cost
is high with excellent resistivity characteristic. Adhesion is poor and so it requires a layer (50 to 200 nm)
of Ti or Ti/W.
Substrate Technologies
Assembly Techniques
Chip-on-board
Chip-on-flex
Thick-film ceramic
Cofired ceramic
Thin-film ceramic
Surface mount
Chip-and-wire
Mixed technology
Special module
Under Substrate Technologies and Assembly techniques it will be very informative to look at some
pictorial examples, a primary source of which is Maxtek. The pictorial examples, followed by a brief
description of technology or assembly technique shown, will serve as a quick guideline for someone who
would like to get a feel of what technologies are viable in the MCM technology domain. Here, it is
important to mention that a lot of current space electronic flight projects use MCM technologies for
their final deliverables. Project Cassini, for example, used MCM hybrids in telecommunication subassemblies. On this note, take a look at some of the examples of MCM technologies currently on the market.
Chip-on-Board
Chip-on-board substrate technology (Fig. 12.1) has low set-up and production costs and utilizes Rigid
FR-406, GETEK, BT Epoxy, or other resin boards.3 Assembly techniques used are direct die attach/wire
bonding techniques, combined with surface-mount technologies.
Chip-on-Flex
Chip-on-Flex substrate technologies18,19 (Fig. 12.2) are excellent for high-frequency, space-constrained
circuit implementation. In creating this particular technology, the manufacturer needs Kapton or an
equivalent flex-circuit base material with board stiffeners. Here, the die can be wire-bonded, with globtop protection, while other discretes can be surface mounted. Integral inductors can be incorporated
(e.g., for load matching).
Thick-Film Ceramic
This technology is the most versatile technology, with low-to-medium production costs. The 1-GHz
attenuator above demonstrates the versatility of thick film on ceramic substrate technology (Fig. 12.3),
which utilizes both standard and custom ICs, printed resistors and capacitors actively trimmed to 0.25%
with extremely stable capacitors formed between top plate and ground plane on the other side of substrate.
Thick-film thermistor here senses overheating resistor and protects the remainder of the circuit.
Co-fired Ceramic
Co-fired ceramic MCM substrate technologies (low- or high-temperature co-fired multilayer ceramic)
(Fig. 12.4) are particularly suited for high-density digital arrays. Despite its high set-up and tooling costs,
up to 14 co-fired ceramic layers are available from this particular manufacturer. In this technology, many
package styles are available, including DIP, pin-grid array, and flat pack.
Thin-Film Ceramic
For thin-film ceramic technologies (see Fig. 12.5), here is the outlined technology features include:
High-performance MCMs, offset by high set-up and tooling costs
Alumina or BeO (as shown here) substrate
Both sides of substrate can be used, the back side typically being a ground plane, with access
through plated-through holes
Chip-and-wire assembly with epoxied capacitors
Many packaging styles available, including Kovar or ceramic package and lid
Primarily used for high-frequency circuits requiring thin-film inductors or controlled impedance lines
For quick reference, some specifications and MCM technology information are summarized in Tables
12.3 and 12.4.
TABLE 12.3 Thick-Film Specifications
Printed Component
Conductor, Gold
35 mohm
Etched thick-film
Conductor, Pd-Ag
35 mohm
<50 mohm
Resistor
Typical Values
3 ohm1 Mohm
Capacitor
Inductor
4100 nH
Comments
Lowest resistivity, 5-mil
min. line/space
2 mil min. line/space
Lowest cost, solderable,
10-mil min. line/space
<100 ppm/C, laser
trimmable to 0.25%
Untrimmed 30%, may be
actively trimmed dielectric
constant
Untrimmed 10%
Material
Glass-epoxy (FR-4),
polyimides
Kapton or equiv. with
stiffeners
Alumina
BeO
Lo-fire alumina
Hi-fire alumina
Alumina
BeO
Alumina
Line/Space
(mils min.)
Dielectric
Constant
4.3-5.0
4.0-4.6
3.2-3.9
3 inner, 5 outer
5
5
5
5
1
1
2
9.26.3
5.8-9.0
9.0-9.6
9.9
6.3
9.2
Integral
C
Y
Y
Y
Y
Y
Y
Y
Y
Y
Y
Other thick-film components are available, such as thermistors and spark gaps. In many applications,
both sides of a substrate can be used for printed components.
Chip-and-Wire Assembly
In order to minimize interconnect electronic circuit parasitics, a high-density layout is one of the assembly
techniques recommended as a solution. The highlight of this technique is epoxy attachment/wire bonding
of integrated circuits and components (e.g., capacitors) to a glass-epoxy board (chip-on-board). Of
course, another way is attachment to a thick- or thin-film ceramic substrate. Currently, many package
styles are available and can be listed as follows19,20:
Epoxy seal, using a B-stage ceramic lid epoxies to the substrate (quasi-hermetic seal)
Encapsulation, in which bare semiconductor die are covered with a glob top (low-cost seal)
Metal (typically Kovar) package with Kovar lid either welded or soldered to the package (hermetic seal)
Leads are typically plug-in type, SIP, DIP, PGA, etc.
Mixed Technologies
Another category of assembly technique recognized as mixed technologies combines chip-and-wire
with surface-mount assembly techniques on a single substrate, which may be a glass-epoxy board or
ceramic substrate. Heat sink/heat spreaders are available in a variety of materials.
The Maxtek module shown in Fig. 12.7 includes a 4-layer, 20-mil-thick glass-epoxy board mounted
to a beryllium copper heat spreader.
Selectively gold plated for wire bonding pads and pads at each end for use with elastomeric connectors,
Special Modules
Under special modules we can emphasize and highlight technologies of complex assemblies of mixedtechnology substrates, flexible circuits, and/or electromechanical components. (See Fig. 12.8.) Complex assemblies of mixed-technology substrates often utilize a B-stage epoxy lid or glob top over
chip-and-wire circuitry. These technologies enable designers to provide an integrated solution complex system problems like in a module shown on page 22 which is CRT Driver System capable of
displaying 4 million pixels with 1.5-ns rise and fall times. The circuit incorporates a thin-film MCM
connected by a special high-frequency connector to an FR-4 board with thick-film ceramic lowinductance load resistor and flex circuit with an integral impedance-matching inductor, connecting
directly to the CRT.19,20
The design engineer of an MCM chip should work with customer to partition the circuit and optimize
the design to be implemented in MCM technology. Application of technologies for placement, routing,
via minimization, tree searching, and layer estimation will be important to assess at this point. The
general function, purpose, and configuration of the active elements, interconnects, and assembly technology should also be assessed, along with key materials and critical properties, representative manufacturing-process flows, potential failure mechanisms, qualification procedures, and design for testability.
Note that two concepts must be carefully examined for successful MCM production. An MCM design
is initiated by selecting appropriate technologies from the many options available. The basic choices are
for substrate technology and assembly techniques. Design trade-offs are analyzed, and a preliminary
specification is completed. Following circuit simulation, prototypes are produced and tested. When the
application requires it, an ASIC can be designed to be included in the MCM.
12.12 Summary
In summary, it is customary to give an answer to the fundamental question: What multi-chip modules
do for you? and here is the answer
MCMs optimize critical design parameters such as speed, density, and temperature, resulting in
performance well beyond PC board design capabilities. By removing discrete component packages and
using more densely packed interconnects, circuit speeds increase. The design challenge is to select the
appropriate packaging technology, and to manage any resulting thermal problems.20
MCM technologies found their way and are utilized in the wireless, fiber, and instrumentation markets;
space and military programs; and in the real world, they stand in the forefront of best merchant-market
technology .
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