Bringing Your MEMS to Market

Spatial Light Valve (SLV)

MEMS Deformable Mirror

Overview Benefits of Micralyne’s Spatial Light Valve

Micralyne’s MEMS-based SLV is • Market leading 10 MHz digital imaging speed
a diffractive spatial light • 5-year track record in a commercial application
modulator (SLM) that can • Highly efficient with 98% light throughput
control light at extremely high • Scalable for high volume production
speeds on a pixel-by-pixel • High resolution with up to 40:1 contrast
basis. This deformable mirror
device varies the light
intensity according to its
electrically addressable
reflective ribbon pattern, which
is fabricated on a silicon base.

The photograph above shows an array of 960

channels with bonding pads extended out to the
perimeter to address each segment.

Custom Spatial Light Valves

Micralyne custom designs and manufactures application-specific Spatial Light
Valves for customers using our core competencies in thin film metallization, silicon
micromachining, and MEMS. Micralyne works closely with its customers from
product design, through prototype development and into volume
manufacturing. Micralyne’s MEMS-based SLV is ideal for several digital imaging
applications such as high-resolution displays and lithography tools. Wavelengths
from 400 nm UV to 10.6 micron far IR have been tested on devices with
geometries optimized for these type of applications. The SLV is covered by US
patents 6,661,561; 6,836,352; 6,856,448 and German patent DE10213579.

www.micralyne.com ETDS313_Rev030-0907_SLV
Bringing Your MEMS to Market

Spatial Light Valve (SLV)

Specifications

About Micralyne Spatial Light Valve Capabilities

Micralyne is a world leading The table below summarizes the standard capabilities of Micralyne’s MEMS-based
independent MEMS foundry. Spatial Light Valve as a digital imaging device:
From its state-of-the-art
50,000 ft2 manufacturing Speed Throughput # of Channels Contrast Size
Micralyne SLV
facility, Micralyne develops and 10 MHz plus 98% 1000+ 40:1 40 µm wide
300 µm long
manufactures MEMS-based
components in volume.
Micralyne is a profitable and
growing company located in
Edmonton, Alberta, Canada.

For More Information...

Membrane type structure lends to high speed with reasonable contrast. Greater
Micralyne Inc. than 1 MHz resonant frequency shown in the graph above with a 20:1 contrast
1911 – 94 Street ratio.
Edmonton, Alberta
Canada T6N 1E6
The SEM photograph shown on
Tel: +1.780.431.4400 the right displays 40 micron by
Fax: +1.780.431.4422 300 micron elements, separated
by 1 micron spaces.
info@micralyne.com
www.micralyne.com

ETDS313_Rev030-0907_SLV
www.micralyne.com