/lifo
Commission of the European Communities
ber information
APPLIED METROLOGY
Report
EUR 12180 EN
Blow-up from microfiche original
ber
APPLIED METROLOGY
W. H I L L M A N N
Physikalisch-Technische Bundesanstalt
Bundesallee, 100
D-3300 BRAUNSCHWEIG
Contract No. 763/1/0/063/82/3/BCR-D (30)
SYNTHESIS REPORT
1989
' l\
3EUR 12180 EM
CL K
Published by the
COMMISSION OF THE EUROPEAN COMMUNITIES
Directorate-General
Telecommunications, Information Industries and Innovation
L-2920 LUXEMBOURG
LEGAL NOTICE
Neither the Commission of the European Communities nor any person acting on behalf
of the Commission is responsible for the use which might be made of the following
information
III
Summary
Roughness measurements were carried out in 12 i n s t i t u t e s and a t 3 contact
stylus
Instrument
measured
with
makers
in
9 countries
irregularly
ground
of
standard,
profiles
and
the
three
four
EC. The
objects
PTB roughness
talons
de rugosit
to
be
standards
LCA with
groove
roughness
depths
standards,
were
measured
the
on
arithmetical
peak-to-valley
height R z
were measured
under well-defined
the
calibration
mean
deviation
standard.
Ra,
the
On
the
average
height
R m ax
to
* 10
Etalons de rugosit:
* 15
This is the
first
extensive
6,5%
international
intercomparison
in the field
of
analysis
of
the
technical
details
of
the
instruments
used
CONTENTS
Pag
1. Preliminary remarks
1.2. Participants
1.5. Measurands
2. Measurement results
11
11
11
11
12
12
13
16
15
'. Conclusions
16
. Literature
20
1.
Preliminary remarks
increasing
exchange
of
products
and
vendor
parts
within
the
EC
products
under
to
this,
Calibration
comparison
Service
show
measurements
differences
carried
of
only
out
a
by
few
the
German
percent.
The
with
absolutely
clear
and
unambiguous
definitions
of
and
testing
of
the
contact
stylus
instruments
with
the
BCR,
in
measurements
conditions.
the
being
EC
to
carried
obtain
out
results
under
differing
very
clear
only
and
slightly,
the
well-defined
1.2 Participants
12 Institutes and 3 contact stylus instrument makers from 9 countries
(Table 1) took part in the measurements. The Physikalisch-Technische
Bundesanstalt (PTB) was the body responsible for the project.
1.3 Objects measured
1 calibration standard /6/, make Halle, Braunschweig.
3 PTB roughness standards / 6 / with irregularly ground profiles.
1 x 4 talons de rugosit LCA , ETCA, Arcueil, with turned profiles.
The calibration standard (Fig. 1) serves to refer the vertical roughness
parameters to the SI units of length.
The calibration standard is a
40 mm 20 mm 10 mm.
provided with 6 grooves. The
a radius of 1,5 mm. The width
exact
values
by interferometry
and
issues
The roughness standards (Fig. 2) serve to calibrate and test the complete
contact stylus instrument, from the stylus to the indicating device.
The roughness standards are made of hardened, stainless steel of the
dimensions 40 mm 20 mm 10 mm. They have an irregularly ground
profile which is repeated every 4 mm in the longitudinal direction of the
0,2
1,5
0,5
3
1,5
8,5
the
standard
Normally, the PTB determines the exact values of the preference roughness
parameters Ra, Rz and Rmax according to DIN 4768, sheet 1 / 8 / and issues
certificates of calibration. Other roughness parameters are determined on
request.
These roughness standards have been accepted all over the world. They
have so far been delivered to 20 countries, with roughness parameters
according to DJN 4768, sheet 1. Due to the irregular profile form, they allow
a rather critical testing of the contact stylus instruments.
The talon de rugosit LCA (F ig. 3) is an electroplated nickel calibration
block comprising 4 geometrical specimens with circular arc profiles.
Dimensions of the block:
Dimensions of the specimens:
120 mm 50 mm
40 mm 15 mm
The specimens are laid out in a geometrical series of ratio 2 for the
nominal values of the roughness parameters and the spacing between the
circular arc profiles is 250 and 800 mi.
For each specimen, the actual values of the different parameters and the
physical and statistical criteria of the surface conditions are stated in the
calibration certificate of the F rench National Metrology Bureau
Centre d'Etalonnage Agr BNM
of the
Etablissement Technique Central de l'Armement
1,6
3,2
6,3
12,5 ^m.
1.5 Measurands
Groove depth of the 4 greatest grooves of the calibration standard.
Arithmetical mean deviation Ra, average peak-to-valley height R z and
maximum peak-to-valley height R m a x according to DIN 4768 sh. 1 / 8 / on
the 3 roughness standards and the 4 talons the rugosit LCA.
The arithmetical mean deviation is defined by the equation
x*=_ lm
L
m
Ra = Lm
-
/y/ dx
where
y =
=
lm =
=
* -
"
4_
/yi
profile ordinate
abscissa in traversing direction
total sampling length
number of digital steps in x-direction
/9/.
measurement have also been specified for them /10/. In addition to these
there are a great number of other roughness parameters for which
measurement conditions must, however, be agreed upon between the trado
partners in each particular case.
to use
reference
surface
contact
systems
in
displacements
lengths
arranged in parallel, the initial points do not lie in one row normal to the
direction of measurement, but are somewhat staggered in the direction of
measurement. The 12 measurements can, for example, be distributed over the
whole measurement surface according to t h e t e s t point plan (Fig. 4), as it
is done at t h e PTB.
had
been
agreed
that
each
participant
should
thoroughly
test
his
with 4 slots,
the
stylus
moves
more
or
less
deep
into
these
slots
during
scanning. From this, the tip radius can be roughly estimated. This stylus
wear gauge is above all suited to indicate changes of the stylus tip in
the case of prolonged application.
The best - but at the same time most sophisticated - method of
determining the tip radius consists in taking micrographs of the stylus
tip, or of casts taken from it, in the scanning electron microscope /16/.
But even the evaluation of such micrographs is not easy.
2. Determination of the static measuring force in zero position.
3. Determination of Ra and Rz on a glass flat for testing electrical noise
and mechanical vibrations.
4. Testing of the uniformity of the feed rate with a precisely graduated
rule.
5. Testini of the vertical
calibration standard.
stylus
deflection
with
known grooves
of a
'.
Flach
Measurement results
participant,
measurement
provided
results
is
25
measurement
available.
These
results,
are
i.e.
shown
a
in
total
of
375
Table
2,
the
laboratories being designated by Nos. 1 to 15. Under the No. 0, the mean
values of all participants are listed. The diagrams of Fig. 5 to Fig. 8 are
graphical representations. Here, the distribution curves of the measurement
results are plotted in relation to the reference values (reference value =
100%). A representation
of
all
individual
results
can
be
found
in
the
diagrams of Figs. 9 to 16. Each sheet contains all the values determined on
one standard. Over the number of the respective participant, the deviation
from the reference
value is marked
as a horizontal
line. The
pertaining
reference values for the groove depth, R a , R7j and R m a x are given in each
diagram. The hatched area gives the indicated u n c e r t a i n t y of measurement.
For the
groove
depths,
the
values
measured
by t h e
as
15
here are
mean
between
the
values
obtained
before
and
after
the
PTB, the
mm/s,
roughness
the
fine
standards
are
PTB roughness
scanned
standard
with
a feed
rate
of
with
rate
of
feed
in
feed
direction
roughness standard
in steps
of = 0.67 \, for
the fine
PTB
selecting
10
11
This
is
the
measurements
variety
of
first
which
extensive
has
measuring
international
furnished
equipment
intercomparison
such
good
results,
has
been
used
of
roughness
although
in
great
the
individual
with
laboratories.
3.
Several
participants
desired
to repeat
the
measurements
digital,
uncertainty
4.
dispersion
which
surface of the s t a n d a r d s .
is
due
to
the
unavoidable
dispersion
on
the
12
In the case of the Rz values of the fine roughness standard (Fig. 10) it.
turns out that the PTB's deviation of +6,1% is the highest (participant 1),
while the other participants' deviations amount to up to -6,8%. This
corresponds in fact to absolute values which do not exceed 0,08 pm and
which are in the order of the uncertainty of measurement; however, there
are quite obviously differences in the measuring instruments used which
should be identified. The potential causes are discussed in the next section.
The Rz values of the other roughness standards show smaller
deviations.
relative
13
After elimination of the discrepancies described in sections 4.2 and 4.3, the
deviations will surely become smaller even when phase-corrected filters are
used. The influence
exerted
by using somewhat different
filter
characteristics should not be very serious.
In the last few years, contacts have been established between the three
leading European instrument makers in order to standardize uniform
characteristics for phase-corrected filters within the framework of DIN and
ISO. As a result, the draft standard DIN 4777 /18/ has been drawn up. The
same filter characteristic is also discussed within ISO.
5.
14
was
descending
slope
of
the
transmission
noise
coefficient
at
very
short
to
also
used
and
the
stability
of
the
mechanical
measuring
set-up
are
evidently of Importance.
Fig. 28 shows the tip radius r with values between about 1,3 m and 4 .
Fig. 29 shows the s t a t i c measuring force F g with values between 0,6 mN
and 2 mN.
Fig. 30 shows the feed r a t e with values between 0,1 mm/s and 1,3 mm/s.
In order
to
approximate
the
true
standard
as closely as possible, it
the
differences
between
the
Rz
value
is without
and
Rz
of t h e
fine
PTB
roughness
doubt advisable
to use a
values
measured
which
have
been
15
On
the
other
hand,
small
tip
radius
is
also
of
advantage
when
measuring force FQ and feed rate v j are not too high, so t h a t damage to
the surface of the roughness standard is avoided.
6.
At
the
beginning
of
the
comparison
measurements,
after
use
by
each
participant and at the end of the comparison, the standards were examined
for
the
appearance
of
wear.
The
original
condition
and
the
individual
photomicrographs.
In
the
course
of
time,
the
taking
technique
was
the
feed
direction
existed
at
the
beginning
of
the
mechanical
16
under the
usual p i c k - u p
the
(r, FQ , V )
conditions
be
said:
Despite
numerous
visible
traces
of
wear,
the
roughness
Conclusions
This Is the
first
extensive
international
intercomparison
in the
field
of
from
the
reference
values
(mean
values
of
all
measurement
participants)
lie
*10% resulted.
This
was attained
although
an
extraordinarily
great
gain
valuable
experience
on
the
basis
of
these
measurements.
The
2.
One participant,
some of
whose
measurement
results
showed
greater
profile
d a t a after
the
17
4.
A detailed
used
wavelengths
is
required,
taking
the
stylus
dimensions
into
horizontal
measurements
were
digital phase-corrected
identical
filter
carried
out
by
way
of
experiment
characteristics.
The
discussion
group
has
using
totally
defined
of the
increasing
technique
considerable
also
exchange
in
the
of goods within
field
of
roughness
recommendations
measurements.
are
These
given
to
industry
recommendations
to
EC, a
already
uniform
measurement
is why t h e
guarantee
have
the
uniform
been
is
of
following
roughness
successfully
applied for years by the German Calibration Service and by large sectors of
German industry:
1.
Well-defined
roughness
parameters
with
precise
conditions
of
"7 1
18
2.
3.
4.
19
into
of the
measuring
electron
microscope.
method
The
developed
books
by
/ 2 3 / and
Eckolt
/24/
/28/
give
using
a
great
scanning
number
of
shown
measurements.
during
the
time
required
for
the
complicated
roughness
20
Literature
Weingraber, H. v.:
Die Genauigkeit und Zuverlssigkeit der Rauheits
messung.
Ann. CIRP, 18 (1970), S.. 6376.
3/
4/
Hillmann, W.:
Westeuropische Vergleichsmessungen an PTBRauhnor
malen.
PhysikalischTechnische Bundesanstalt,. Braunschweig,
Jahresbericht 1981, S. 87.
5/
6/
7/
21
mit
/11/
/12/
Henzold, G.:
Rauheitsmessung mit elektrischen Tastschnittgerten.
Normenheft 12, BeuthVerlag 1971.
/13/
/14/
/15/
22
/16/
/17/
Hillmann, W.:
Forschung und Entwicklung auf. dem Gebiet der Rauheitsmessung.
Technisches Messen tm 47 (1980), S. 169-174, S. 209218, S. 273-283; tm 48 (1981), S. 36-37.
/18/
/19/
/20/
/21/
/22/
23
/23/
Degnali, H.:
Exploring Surface Texture.
Rank Taylor Hobson, Leicester, England.
/24/
/25/
Kranz, 0.:
Untersuchungen des Abtastvorganges bei Rauheitsmessungen
PTB-Bericht PTB-Me-29, 1980.
/26/
'27/
'28/
Eckolt, K.:
Messung von Oberflchenprofilen mit dem Raster-Elektronenmikroskop - Herstellen und Auswerten von Stereobildpaaren.
PTB-Bericht PTB-Me-44, 1983.
'29/
Stuht, P.:
Mikroskop mit Beleuchtungseinrichtung fr Auflichtuntersuchungen.
Deutsches Patentamt, Offenlegungsschrift DE 3417075 A1,
9.85.
24
Table 1
List of Participants
25
Physikalisch-Technische Bundesanstalt
Postfach 3345
D-3300 Braunschweig
BR Deutschland
Politecnico di Torino
Dipartimento di Tecnologie
e Sistemi di Produzione
Corso Duca degli Abruzzi, 24
1-10129 Torino
Italy
Rank Taylor Hobson Ltd.
New Star Road
Leicester LE4 7JQ
England
Twente University of Technology
Department WB
P.O.Box 217
NL-7500 AE Enschede
Niederlande
26
Universitt Hannover
Institut fr Metechnik im Masch
Nienburger Strae 17
D3000 Hannover
BR Deutschland
Universit de Liege
Institut de Mcanique
Rue de ValBenoit 75
4000 Liege
Belgium
University di Pisa
Istituto di Tecnologia Meccanica
Pisa
Italy
27
Table 2, Part 1
Measurement Results
Participant No.
Standard
No.
1 un =
3un=
1 E 5
2 I Z O O M 6un=
1 Oun=
3
1
5 RH G H
6
l
Rz
Rnax
o+)
1 .36G
2 .908
5.990
9.055
1 .352
2.091
5.996
9.051
2
1 .350
2.870
5 .950
9.0G0
1 .376
2.098
5.993
9.033
1 .102
2.906
5.967
9 .002
1 .316
2.916
6.016
9 .1 8 7
1 .350
2 .880
5.920
9 .010
7
1
2
6
9
.300
.920
.UHI
A)/,.'.
1 . 6 7 0 1 . 6 6 3 1 . 7 1 0 1 . 6 5 3 1 . 7 0 9 1 . 7 7 0 1 . 6 5 0 t .f2Ct
9.198
9.127
9 .510 9 .090 9 . 5 6 1
9.380
.9;>u
8.950
1 0 . G 0 1 1 0 . 1 0 1 11 . 2 3 0 1 0 . 3 7 7 11 . 5 7 9 11 . 3 2 0 1 0 . 1 0 0 1 0 . 2 2 S
R
7
0 RH l6 2 6 R z
Rnax
9
.196
3.270
4.311
.501
3.311
1 .359
.520
3.310
1.330
.191
3.29G
1 .303
.185
3.329
1.162
.505
3.200
1.560
.191
3.130
1 .200
.101)
Z.2.M
4 .250
Ra
Kl
11 RH IG38 R z
Rnax
12
.173
1 .151
1 .376
.177
1 .221
1 .105
.175
1 .160
1 .180
.170
1 .208
1 .110
.159
1 .097
1 .384
.175
1 .105
1 .370
.171
1 .076
1 .270
.1 G 9
1 .100
1 .375
Ra
Rz
Rnax
1 .530
5.611
5.816
1 .520
5.550
5.710
1 .527
6.073
1 .506
5.577
1 .510
5.000
6.363
5.725
1 .511
5.919
6.313
1 .510
5.100
5.630
1 .160
5 .160
5 .690
13
11
15
Len
6.160
Ra
Rz
Rnax
3.011
3.129
3.09G
3.100
3.002
3.120
3.070
3.015
1 1 , 7 1 2 11 . 6 9 0 1 2 . 5 7 6 1 1 . 3 8 7 1 2 . 5 0 5 1 2 . 1 2 0 1 1 . 3 7 0 1 1 . 3 5 0
1 1 . 9 5 3 I l . 0 0 0 1 2 . 7 3 1 1 1 . 1 9 6 1 2 . 9 5 6 1 3 . 2 0 0 11 . 4 6 0 11 . 1 5 0
LCR C
Ra
Rz
Rnax
6.330
6.257
6.323
6.219
6.352
6.350
6.300
6 .231)
2 3 . 3 9 1 2 3 . 6 1 0 2 6 . 7 5 3 2 3 . 1 1 3 2 5 . 0 8 7 2 5 . 6 5 0 2 3 . 2 9 0 2 3 .5011
2 3 . 7 1 1 2 3 . 9 5 0 2 7 . 2 1 8 2 3 . 9 3 0 2 6 . 7 8 2 2 6 . 1 8 0 2 3 . 1 0 0 2 3 .721)
22
2 3 LCR 0
21
Ra
Rz
Rnax
IG
17 Len
18
19
20
21
28
Table 2, Part 2
Measurement Results
Participant No.
Standard
No.
1
2
3
EH
128011
1
5 RH 6 1 1
6
1 un:
3un =
6un=
10un=
Ra
Rz
Rnax
8
1 .363
2.915
6.119
9.13V
9
1 .333
2.850
5.930
9.020
10
1 .360
2.090
5.990
9.010
11
12
1 .137
3.027
5.913
8.900
1 .360
2.920
6.010
9.130
13
1 .351
2.090
5.991
9.059
14
1 .300
2.915
6.015
9.005
15
1 .3tj(J
2 .mm
5.990
9.130
1 . 6 0 1 1 . 6 6 8 1 . 6 6 9 1 . 6 6 5 1 .660
8.638
8.900
9.006
.900
9.122
9 . 9 5 7 1 0 . 0 0 1 0 . 3 7 1 11 . 1 1 0 1 0 . 5 0 0
7
Ra
0 RH 6 2 6 Rz
9
Rnax
.195
3.230
1.250
.162
3.161
1 .336
.195
3.280
1.210
.503
3.177
1.288
.197
3.180
1.260
.501
3.300
1.289
.508
3.198
1 .750
.506
3 .270
1 .320
10
Ra
11 RH 6 3 0 R z
12
Rnax
.179
1 .100
1 .310
.171
1 .185
1 .399
.173
1 .200
1 .370
.179
1 .128
1 .389
.171
1 .081
1 .300
.177
1 .197
1 .398
.180
1 .135
1 .101
.171
1 .150
1 .350
13
1 1 LCFI
IS
Ra
Rz
Rnax
1 .500
5.390
5.100
1 .551
5.830
5 .973
1 .510
5.500
5.600
1 .506
5.136
5.620
1 .570
5.710
5.930
1 .535
5.566
5.702
1 .577
5.156
5.650
1 .550
5 .770
6 .050
16
IV
10
ucn
Ra
Rz
Knax
3.060
3.110
3.116
3.070
3.208
3 .070
3.070
3.115
1 1 . 3 V 0 11 . 8 V 0 1 1 . 5 0 0 1 1 . 9 9 1 11 . 8 0 0 11 . 5 3 6 1 0 . 8 0 0 11 .500
1 1 . 5 1 0 1 2 . 1 3 0 1 1 . 7 0 0 1 2 . 1 1 1 1 2 . 1 0 0 11 . 6 7 5 1 0 . 9 0 0 11 . 7 0 0
19
2U
21
Lcn c
Ra
Rz
Rnax
6.200
6.350
6.128
6.308
5.911
6.290
6.258
6 .200
1 6 . 0 1 0 2 3 . 5 1 0 2 3 . 1 0 0 2 1 . 1 0 0 2 3 . 1 7 0 2 3 . 7 5 0 2 3 . 0 8 0 23 . 3 0 0
1 6 . 9 1 0 2 3 . 8 1 0 2 3 . 7 0 0 21 . 7 0 0
0 . 0 0 0 2 1 .1 2 0 2 3 . 1 6 0 23 .100
22
23
21
Ra
Lcn
1 2 . 1 2 0 1 2 . 1 8 0 1 2 . 5 0 0 11 . 5 6 7 1 2 . 5 6 0 1 2 . 5 1 0 1 2 . 5 5 0 1 2 . 6 0 0
3 3 . 0 8 0 1 1 . V 7 0 1 5 . 5 0 0 1 1 . 6 9 0 1 5 . 5 6 0 1 5 . 8 6 0 1 5 . 8 7 0 I G .500
3 3 . 2 0 0 1 5 . 2 1 0 1 5 . 9 0 0 1 2 . 0 2 2 0 . 0 0 0 1 6 . 1 3 0 1 6 . 2 1 0 16 . 0 0 0
Rz
Rnax
29
Fig. 1:
Calibration Standard / 6 /
30
31
Face Avant
Face
ETALONS
RUGOSITE
UJ
Arrire
VALEURS NOMINALE S
MICROMETRES
,250,
U
E N
50
A
A
Ra = 1,6 |
cc
IL
UJ
u
c
o
II
IS
IU
<
UREAU N A T I O N * ,L
DE ME T ROLOGIE
CE N'1
F i g . 3:
VaUurt I f t c t l v ! d e r l t r
d profil rfrer tu C.C
( Cartine, d Ulonrmg I
1 pre 4 0 In
32
3.
3.8
7.6
1 1.4 mm
E
Fig. 4:
0.1
3.9
7.7
1 1.5 mm
0L3
4.1
7.9
1 1.7 mm
OJ
20
10
Fig.
5:
30
40
50
60
70
80
90
100
D i s t r i b u t i o n c u r v e o f Ra v a l u e s
relative
t o mean v a l u e s o f a l l r e s u l t s
( 100/ )
110
120
quant i t y
30
r-
25
20
15
10
) mistake removed a f t e r w a r d s
0
0
J_
JL
-L
10
20
30
40
Fig.
G:
X)
am
HL
50
60
70
D i s t r i b u t i o n c u r v e o f Rz v a l u e s
t o mean v a l u e s o f a l l
results
(
90
tLQ
100
relative
100/C )
110
-*
120
quant i ty
3 0 I-
25
20
15
10
" )
-L
X)
J.
80
90
100
10
20
30
40
50
60
70
Fig. 7: Dis tribution curve of Rmax values relative
to mean values of all res ults
( 100^ )
mei .%
110
120
quant i t y
55
50
45
-
40
-
35
30
25
20
15
10
-.
^ 1
mistake
0
3
10
Fig.
removed a f t e r w a r d s
1
20
8:
30
40
x)
.
50
D i s t r i b u t i o n curve of
t o mean v a l u e s o f a l l
in .
70
Ra, Rz,
results
80
Il
90
100
Rmax v a l u e s
( 100* )
110
I*/
120
relative
37
Dev.
15
Groove 3 tl,352pm
10-.
5H
O
vxxxxxx^^yvxxxv*
ESEES
A W W V iWVVVV
E^SS
-io]
-15 -i
5
Dev. .
1 5
10
11
12
13
14
15
10
11
12
13
14
15
Groove 4 :2.631 pm
~\
10 \
s\
o\
Is
JSSSS
www
-5\
-10 \
-;5-
5
6
7
Groove 5 t 6,
ES5SS
gjgSS.
??FcnF!oS^ii>>>^!^
\ \ \ \
RWJKSNSXSK
m
2
10
11
12
13
14
15
Groove 6 . 9.05pm
Dev. X
15 \
105-.
KK*m
o sum
^^ \ \ \ \ \ '
KSSSa
5j
-IO1.
15 H
Fig. 9: Calibration
Deviations
relativo
10
11
12
13
14
15
38
Rn ~ a 173
-15-.:
7
8
9
Rz ' 1,154 /
7
Rmax
10
11
12
13
14
15
8
9 10
1.376
11
12
13
14
15
11
12
13
14
15
10
39
40
Ra = 1.670
1
Dav. X
20}.
Rz
8
9
9,13
8
R^-10.60
10
11
12
13
14
15
10
11
12
13
14
15
10
11
12
13
14
41
Ra
1530 JM
Rz~
8
9
5.64 *
10
11
12
13
14
15
10
11
12
13
14
15
42
43
Dov.
20-
;5
Ra
6.26
1i
10+
w^h
5-
O
sssteasss
ses
5+
-10+
-30+
L * ;
DQV. X
20-
8
9
23.39
10
11
12
13
14
15
10
11
12
13
14
15
10
11
12
13
14
15
ff may - 23. 74
sST
m
)
* ;
44
/? IZ 41
Dev.
'Hi
10+
5
Balten
KSSS
10+
-**H
-30+
*
DQV.
20k
15+
10
11
12
13
14 15
0
a
fiaax"*ZOf**
;z?
;;
73
;*
10
11
12
13
14 15
Rz * 45.5 *
K
/-li
fe
" 5 1
10+
-75-ji
-Hi.
30+.
*
20.
is\
5j
o\ M
-O-r.
^ S 5 3
SS3
m
3
5^
^
i5
S55
'^^^"<
-Sss****
^
-/5-jj
-20^
-2S.
30+
* 1
Essa
53
8
45
Ra * 0.177
8
Rz ' 1.230
* 1
10
11
12
13
14
15 1
8
9 10
Rnax " 1* 441 "
11
12
13
14
15
11
12
13
14
15
10
46
Ra - a 433
5
Dev.
40.
10
11
12
13
14
15
Rz 3,53
35\
3\
2S\
2\
15
io\
S55
5H
35
-5
.JOi^
15
20
*
S S
2 ^ ^
DQV.
Rrnox '
404
10
11
12
13
14
15
10
11
12
13
14
15
4.52
30-W
25
Hi
20\
15H!
SS
5-W
ss:
-5-iS
1015-20-*
m
8
filter
47
Ra - 1, 738
Dov.
40
35
30
25
20-
15
10
5
04
5
lo
is
20
*
1
5
Dov.
40
35
3\
'J:
25
20
15
10
5
^
^
7
Rz"
8
9
3.70
10
11
12
^
;
14
15
13
14
15
14
15
04
51
10
15
20
*
13
LVVVVfi3^^>^>Jh ^
8
9 10
*max " U U V
11
12
kVsNN
10
11
12
13
filter
48
Ra - 1,535 yrn
9
Rz - 5,73
Dav.
20-:.
SSSSSiS
iM
10
11
12
13
14
15
10
11
12
13
14
15
10
JU
12
13
14
15
15- :
10-:.
J-i:
0 ~
-J-:
-10-}.
-15-}
x
1
DQV. X
20\
7
*max "
5.96
15-}
10-}
5-}
O
-5-\
10-}
-15-.:
x
l
2 3
8 9
Deviations relative
to mean values and
relative
uncertainties.
Phase correct
filter
49
3.13
DQV.
an
15-}.
io-}
5-.\
t^roiSSSS
0-}
-5-}
-10-}
-15-:
x
DQV.
1
X
10
11
12
13
14
15
Rz - 11.96 ym
20\
15-.':
10-}.
5-}
JSS
o-}
-5-.\
-10-}
-15-}
x
1
X
DQV.
7
8
9
Rmt 12.13
10
11
12
13
14
15
10
11
12
13
14
15
20-}
15-}
10-}
5-}
o-}
-5-\
10-}
15-.:
x
50
RQ
6,37
"*\3
Dav.
2\
15
10
11
1
12
13
14
15
14
15
14
15
Rz - 24.43
v\
IO1:.
5-i:
t\v\\\i
5!
1
O.:
~5.\
IO.':
15.:
1
- ;
OQV.
20
9
fimax '24.75
10
11
12
13
15.':
10.':
5.:
W$
m
ms
Or.
5.:
10.':
15.:
* 1
10
11
12
13
filter
51
Dov.
RQ'
12.58
io},
5}.
mm
O
5
liti:
15.:
8
9
Rz 47.1 m
Dov.
20}.
10
11
12
13
14
15
14
15
14
15
15.':
10
5'
O:
Pffi
SS
Is
S.':
-llr\
15.:
x
Dov. X
20}.
8
9 10
Rmax " 47.4 ym
11
12
13
15}.
Wr.
s-}
Epa
Oir
-5-:
10-}
15.:
x
1
10
11
12
13
filter
52
=0,25
III'
F i g . 24:
Ac=0.8
! ! ' I
l l l l f
10"
10"
Sine wavelength in mm
95
=2,5
i..,
| ilt
/ c =8,0
'
20H
en
/itt/a.
Fig. 25:
ym.
3
Wavelength
6
g5
ressa
9
10 11
W7Z^
12
13
14
15
101
jjm0
^!\
1
Fig. 26:
rrrrrrr ^
_ESSSS
10
^w//^Nste^
11
12
13
14
15
53
4
5
6
7
8 9
10 11 12
R _ measured on an o p t i c a l f l a t .
F i g . 27:
F i g . 28:
10
12
13 14
13
14 15
Tip r a d i u s r .
1
2
3 4
5
6
7
8
9
10
Fig. 29: S tatic measuring force FQ.
mm/s -
FS$?ZL
i*mM
11
12
13
14 15
11
12
13
14 15
Ws
^$^^m^>^i^\
1
2
3 4
5
6
7
8
9
Fig. 30: Traversing speed -,.
10
54
55
Fig. 32:
56
IL
Fig. 33:
57
#mmMm--m
Fig. 34:
t,iM : '
58
il
s
.
I!
' iil
I
il'
1
j
Fig. 35:
59
60
61
S*
Veie*-^
~mm*t<tP&'
SiFig. 38:
62