Nanoscience and
Nanotechnology
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CONTENTS
1. Introduction
2. Raman Scattering in Hexagonal Crystals
and Nanostructures
3. Phonons in Quantum Wells and Superlattices
4. Phonons in Quantum Dots Structures
5. Summary
Glossary
References
1. INTRODUCTION
The scope of this chapter is the review of recent experimental studies of phonons in nanostructures made of nitride
semiconductors with an hexagonal structure. First let us
recall some basic denitions. A quantum well (QW) is
described as a thin layer exhibiting semiconducting properties, located between a couple of layers made of another
semiconductor and playing the role of barriers. Indeed, the
electronic bandgap energy in the latter is higher than its
counterpart in the former, thus favoring carrier connement
and electrical transport inside the well. Single or multiple
QW structures can be fabricated as well as superlattices (SL)
which are periodic arrays of QWs. A quantum dot (QD)
is an island made of a given semiconductor embedded in
another semiconductor acting as barrier. It is usually characterized by a pyramidal shape and a small height (typically
5 nm). The samples are periodic stackings of planes containing the QDs, which can be self-assembled by the effect of
vertical correlation.
The purpose of the extensive work recently devoted to
GaN-AlN or GaN-AlGaN nanostructures is the development of new devices, particularly laser diodes emitting in
the ultraviolet range. Their light emission is expected to be
much stronger than from heterostructures made of GaN and
AlN (or AlGaN) thick layers grown in the nineties, due to
the low-dimensional geometry of nanostructures. In addition, the crystallographic structure of nitride semiconductors
is responsible for their piezoelectric properties, generating
very strong electric elds in strained nanostructures; as a
ISBN: 1-58883-064-0/$35.00
Copyright 2004 by American Scientic Publishers
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2. RAMAN SCATTERING
IN HEXAGONAL CRYSTALS
AND NANOSTRUCTURES
2.1. Phonons in Bulk
GaN-Like Semiconductors
Only GaN, AlN, or AlGaN semiconductors with wurtzite
structure will be considered in the present article. Before
dealing with nanostructures, we must recall briey the
vibrational properties of bulk crystals, which were recently
Encyclopedia of Nanoscience and Nanotechnology
Edited by H. S. Nalwa
Volume 8: Pages (513526)
514
GaNa
AlNb
a
b
From [3].
From [4].
0.31890
0.31106
0.51864
0.49795
144
249
533
610
561
669
569
656
735
889
E1 (LO)
743
912
From [7].
From [8].
Note: The notation of phonons is that used in [5].
Note that q = 0 phonons, usually not involved in rstorder Raman scattering, must be invoked in some cases,
for example, when the translational symmetry is lost in
the sample under study. For hexagonal GaN, the phonon
dispersion
q , which is quite distinct from the angular
dispersion previously discussed, has been calculated in the
high-symmetry directions of the Brillouin zone [9, 10] and
have been recently determined by X-ray inelastic scattering
[11]. A scatter of results is observed, but the dispersion of
published data is always found much lower for the branch
starting from the E2 (high) phonon than for its LO counterpart, for example. We must keep in mind this difference
when effects of phonon connement in the nanostructures
will be considered later.
For bulk-disordered AlGaN solid solutions, the evolution of phonon frequencies versus their aluminum content is characterized either by a two-mode or a one-mode
behavior, depending on the symmetry of the vibrational
mode. In the rst case, corresponding to the E2 (high)
optic phonon for example, the GaN- and AlN-like oscillators
exhibit strengths of comparable orders of magnitude in most
parts of the composition range. In the second case, observed
for A1 (LO) and E1 (LO) phonons, the oscillator strength
is strongly transferred from one to the other type of oscillators, thus allowing the observation of one mode only in
the whole composition range of the alloy [1216]. Evidence
for two-mode behavior of the E1 (TO) mode has been given
from infrared measurements [17]. In contrast, the case of
the A1 (TO) phonon seems to be more complicated [16].
As previously mentioned, most samples are thick layers
grown on a substrate (sapphire, SiC, or Si) and on a buffer
layer (GaN or AlN). Due to the lattice mismatch and to the
different expansion coefcients of materials constituting the
nanostructure, the layers are usually submitted to a strong
biaxial stress acting in the plane normal to the z axis of the
hexagonal crystal. The induced strains zz and xx , respectively parallel and perpendicular to the z axis, modify the
phonon frequencies in the layers. For the mode , the corresponding frequency shift with respect to its value in the
relaxed material is given by the following linear equation
= 2 a xx + b zz
(1)
515
d B
KB =
(2)
d1
(3)
where n is an integer and d1 is the layer thickness. The frequencies of conned modes can be deduced from the LO
phonon dispersion
q of the bulk material along the z
direction; they correspond to the discrete qz values calculated using Eq. (3). If the top of the branch of the LO branch
is at the zone center , as for the LO phonon of GaN, frequency shifts towards lower frequencies are expected and
can be measured, specially for very thin (a few nanometers
thick) layers. On the other hand, connement effects should
be negligible for the E2 (high) phonon, due to the weak dispersion of the corresponding branch in the Brillouin zone.
Other phonons specic to the SLs are the folded acoustic phonons. Indeed, if the dispersion of acoustic branches
is similar in both materials, that is, when their sound velocities are not too different, acoustic waves can propagate
through the whole nanostructure. Folding of the acoustic
phonon branches of the constituent layers into the reduced
Brillouin zone of the SL generate new vibrational modes,
which are characteristic of the periodicity d = d1 + d2 of the
SL (d1 and d2 stand for the thicknesses of wells and barriers, respectively). They may show up as doublets located in
the low-frequency range of the Raman spectra. The average
frequencies of these doublets are given by [27]
n = n
2 v
d
(4)
GaN, calculated
GaN, measured
AlN, calculateda
AlN, measured
E2 (low)
A1 (TO)
E1 (TO)
E2 (high)
A1 (LO)
E1 (LO)
+75
+115b
+149
640
630b
776
930d
717
820b
835
982d
742
850b , 818c
881
1092d , 1083e
664
685c
739
643d
775
867
b (cm1 )
GaN, calculateda
GaN, measured
AlN, calculateda
AlN, measured
a
From [21].
From [19].
From [18].
d
From [25].
e
From [23].
b
c
E2 (low)
A1 (TO)
E1 (TO)
E2 (high)
A1 (LO)
E1 (LO)
4
80b
223
695
1290b
394
904d
591
680b
744
901d
715
920b , 797c
906
965d , 1187e
881
997c
737
1157d
703
808
516
v 1 v2
1 v2 + v1
(5)
(6)
2.3. Experiments
In the following, the incident (resp., scattered) light is
dened by its wavevector ki , its frequency
i , and its linear polarization ei (resp., kS ,
S and eS ). The experimental
conguration will be indicated by the usual Portos notation
ki ei eS kS . For bulk crystals, conservation law between the
initial and nal states is obeyed both by the wavevector and
the energy. In rst-order Raman scattering, the wavevector
q and the frequency
of the phonon involved in the scattering process are given by
q = ki kS
(7)
=
i
S
(8)
and
4 n
i
(9)
Conguration
zxx z
zxy z
xzz x
xyy x
yzy x
Allowed phonons
E2 , A1 (LO)
E2
A1 (TO)
E2 , A1 (TO)
E1 (LO)
far from any electronic resonance, the dominant electronphonon interaction is the deformation potential process
and the nonpolar E2 (high) optic phonon exhibits a scattering cross section much stronger than the other phonons,
specially the A1 (LO) mode also allowed in the zxx z conguration. Note that the Raman spectra usually contain features from the GaN QDs or QWs and from the barriers of
the nanostructure, but also from the underlying thick buffer
layer (usually GaN or AlN), due to the negligible optical
absorption of the constituent layers in the visible range; thus
an unambiguous assignment of phonons may prove difcult.
However, the signature of the nanostructure itself can be
obtained using a confocal set-up with a low depth of focus,
as illustrated later.
On the other hand, a strong enhancement of Raman scattering by the polar LO phonon is observed under near resonant conditions, that is, if the energy of incident or/and
scattered photons is close to an electronic transition energy,
when the forbidden scattering process associated with
the intraband Frhlich electron-phonon interaction becomes
dominant [28]. With the present materials, resonant conditions can be achieved in the ultraviolet range only; indeed
the room temperature bandgap energy is about 3.4 eV and
6.1 eV for bulk GaN and AlN, respectively. The scattering
cross section of the A1 (LO) phonon can be enhanced by
several orders of magnitude [29], thus allowing the signature
of very small volumes inside the sample. However, it should
be noted that the penetration depth of the incident light in
the sample is strongly reduced under ultraviolet excitation,
due to high optical absorption. In addition, an intense photoluminescence (PL) band may show up in the spectra, making an observation of faint Raman features superimposed
on the PL signal very difcult.
517
submitted to an internal compressive (resp., tensile) stress.
A detailed discussion of the Raman data suggested that
these SLs were in a free-standing state: both kinds of layers adopted a common in-plane lattice parameter, different
from the one of the underlying thick GaN layer. The analysis
of infrared ellipsometry measurements led to the determination of an electron concentration higher than 1018 cm3
in the GaN layers of the SLs; these free carriers could originate from dislocation-activated donors or from the AlGaN
layers. Moreover, the in-plane mobility introduced for tting
the infrared spectra was found higher than its out-of-plane
counterpart: this result indicated a connement of free carriers inside the wells along the z axis, the AlGaN layers of
the SL acting as barriers for the free electrons as expected.
Another more recent article combining Raman and X-ray
diffraction measurements [34] deals with a GaN-AlN SL
grown on an AlN buffer layer and on a 6H-SiC substrate;
the GaN wells were specially thin (1.5 nm) in this sample,
compared to the AlN barriers (10 nm). The map of the
reciprocal lattice, which was deduced from X-ray diffraction
experiments, gave the average value of both lattice constants
a and c of the whole SL. Figure 1 shows three micro-Raman
spectra recorded in the zxx z conguration, when the laser
spot was focused slightly higher and higher upon the surface
of the sample. The variation of relative intensities of the
experimental features made their assignment easy either to
the SLs layers or to the underlying buffer layer, allowing the
measurement of the strain-induced frequency shift of the E2
(high) phonons from the SL. Combining all these data and
taking into account the measured in-plane strain of GaN
layers (xx = 2 35%) derived from in-situ RHEED experiments, both components of the biaxial strain of AlN and
GaN layers could be determined. The out-of-plane strain
zz was found almost negligible for both types of layers,
giving for the ratio zz /xx a value quite different from
that predicted from the simple elastic theory (2C13 /C33 =
0 51). This difference is likely due to the large spontaneous
and piezo-electric polarization effects which can signicantly
decrease this strain ratio in the hexagonal SL, as demonstrated in a calculation by Gleize et al. [35].
518
Further resonant scattering experiments on single or multiple GaN-AlGaN QW structures will be reported in the following. Later Ten GaN QWs of 1.5 nm width, embedded
in 5 nm wide Ga0 89 Al0 11 N barriers and grown on a GaN
buffer layer, have been investigated under various ultraviolet excitations [37]. In the present structure, the QWs
were nearly relaxed, whereas the barriers were submitted
to an internal compressive stress, due to the presence of
the underlying buffer layer. As expected, rst-order scattering by the A1 (LO) phonons from GaN wells, favored by
the Frhlich interaction, was found strongly enhanced by
electronic resonance in the incoming channel when excitation is achieved using the 3.54 eV laser line. Indeed, the
energy of the incident photon was very close to the QWs
fundamental transition, as estimated using the simple model
of independent square potential wells of nite height. In
these experimental conditions, the second-order scattering
by the LO phonons from the thick buffer layer was dominant. Under a 3.70 eV excitation, LO phonons from GaN
wells were clearly evidenced in the second-order scattering
signal, due to electronic resonance in the outgoing channel;
weak contributions from the barriers were also evidenced.
Similar features were also observed in third-order scattering
under 3.80 eV excitation.
Another study performed in resonant conditions has been
devoted to a collection of four different single GaN QWs
separated by 10 nm thick Ga0 83 Al0 17 N barriers and grown
on a thick GaN buffer layer [38]; their thicknesses were
1 nm, 2 nm, 3 nm, and 4 nm (corresponding, respectively, to
4, 8, 12, 16 monolayers). The fundamental excitonic transitions in these wells were already determined from previous
PL measurements performed at a low temperature. In this
work, thick GaN and Ga0 83 Al0 17 N layers were also investigated in the same experimental conditions for comparison
with the structure under study. The Raman spectra recorded
at room temperature in backscattering geometry are shown
in Figure 3. The PL signature of the various wells was clearly
observed in the spectra, thus accurately giving the energy of
the fundamental transitions in the wells at room temperature. Under excitation at 3.53 eV, rst-order scattering by
GaN A1 (LO) phonons conned in one of the wider QWs
(3 nm) showed up in the spectra, enhanced by electronic
resonance in the outgoing channel; no similar observation
could be achieved on the thick GaN layer used as reference,
since the excitation was too far from resonance in the bulk
material. The measured frequency was close to 734 cm1 ,
corresponding to relaxed GaN, because the well involved
was almost unstrained in the nanostructure. In this case, the
Raman signature of the 3 nm-thick well, whose PL signal
was located at 3.43 eV, close to the observed Raman feature,
could be obtained. On the other hand, when the 3.70 eV
excitation was used, a rst-order Raman feature peaking
at higher frequency (775 cm1 and a weak contribution
at lower frequency was observed. They are clearly related
to phonons of the Ga0 83 Al0 17 N barriers and of the GaN
wells, respectively. Scattering by vibrational modes of both
layers requires an extended intermediate electronic state
of the QW with a signicant penetration into the barriers.
This delocalization implies high-lying states whose energy is
close to the bandgap of the alloy. Resonance most likely
519
(10)
520
Figure 4. Angular dispersion of zone-center phonons of an ultra-thin hexagonal GaN (0.5 nm)-AlN (0.5 nm) SL calculated in different strain
situations. From (l)(r), the results are given for SLs pseudomorphic on AlN, elastically relaxed on an average in-plane lattice constant, and
pseudomorphic on GaN. Reprinted with permission from [41], J. M. Wagner et al., IPAP Conference Series 1, 669 (2000). 2000, Institute of Pure
and Applied Physics.
dispersion is related to the anisotropy of the nanostructure. In contrast, another type of phonon, the quasi-conned
modes, exhibit an angular dispersion originating from the
anisotropy of the constituent materials. Indeed, the frequencies of the A1 and E1 phonons of GaN and AlN, in the
TO as well in the LO range, are the limits of their spectral
regions; the corresponding intervals are nite for wurtzite
crystals, but vanish for isotropic materials. Quasi-conned
modes correspond to oscillations in one type of SLs layers
but, in contrast with conned modes in cubic SLs, the associated electric eld penetrates into the adjacent layer with
a decay length much larger than the lattice constant: that is
why they are called quasi-conned. Note that modes delocalized throughout the whole nanostructure, characterized
by an oscillatory behavior in both types of layers, were found
only in GaN-GaAlN SLs with barriers made of Ga-rich
alloys within this dielectric approach.
Very recently, Romanov et al. [4546] calculated the polar
phonons of a single GaN QD, within the framework of a
macroscopic continuum dielectric model. They obtained formal analytical solutions for the surface vibrations of a GaN
QD exhibiting an oblate spheroidal form, embedded in AlN.
These modes are not discrete, in contrast with their counterparts in cubic GaAs-AlAs QDs, and they are found inside
a continuous, allowed frequency range, due to the crystal
anisotropy. In addition, two other types of phonons were
found: runaway modes that freely leave the QD surface and
quasi-stationary leaky modes.
The inuence of strong electric elds present in GaNAlN nanostructures has been discussed by Coffey and Bock
[47]. These authors calculated the wavefunctions associated
with electron and holes conned in strained GaN-AlN QWs.
The inuence of the electric elds (up to 1 MV/cm) induced
by internal strains on these states was shown in the particular case of a 2.6 nm-thick QW: holes and electrons are
521
x = x
d2
d1 + d 2
(11)
where d1 and d2 are the width of wells and barriers, respectively. Accordingly, these modes are considered as delocalized in the whole structure. The frequency variations of the
522
A1 (TO) phonons from the SLs under study and from the
corresponding ternary alloy were found rather similar. The
same observation was made on the E1 (LO) phonons. This
kind of evolution seems to be consistent with results of a
calculation performed in the framework of a dielectric continuum model, where the nanostructure was treated as an
homogeneous and anisotropic crystal, characterized by an
average dielectric constant z
.
Another possible evidence for the nature, localized or not,
of SLs phonons could be found by measuring their angular
dispersion
experimentally, if the latter is signicantly
different from that of the bulk material. This has been
done by Gleize et al. [44] for polar phonons through an
experimental study of a GaN-AlN SL, performed for checking the validity of the continuum dielectric model previously developed [42]. Micro-Raman spectra were recorded
under 2.54 eV excitation, in backscattering geometry on the
top surface ( = 0), on the edge ( = 90 ), and also on a
bevel at 45 fabricated on the edge of the nanostructure
by ion etching. The variation of the angle around the
above values was achieved by tilting the sample with respect
to the incident light beam; in this experiment, the uncertainty on was lower than 5 . The measured frequencies of
various polar modes from the SL could be compared with
the predicted ones. As observed in Figure 6, the agreement
was found rather satisfactory, particularly for the TO modes
quasi-conned in GaN and AlN layers, which could not be
confused with the dispersive extraordinary TO modes from
the underlying thick AlN buffer layer.
4. PHONONS IN QUANTUM
DOTS STRUCTURES
4.1. Nonresonant Raman Scattering
The rst Raman signature of QD structures has been published by Gleize et al. [52]. The samples were stackings of
GaN-AlN QDs grown along the (0001) direction on an AlN
buffer layer and a sapphire substrate. As demonstrated by
TEM studies [53], GaN islands exhibited a pyramidal shape
with a broad basis (about 30 nm) and a typical height of
4 nm, as shown in Figure 8. Micro-Raman spectra were
recorded under 2.54 eV excitation, in a backscattering geometry along the z axis. However, the whole sample was probed
Figure 7. Raman spectra of GaNAl0 28 Ga0 72 N superlattices with different periods (23.8 nm, 12.8 nm, and 6.1 nm), recorded under a 2.54 eV
excitation. Only the low frequency part of the spectra, exhibiting the
folded acoustic phonons, is shown. Reprinted with permission from [49],
Phys. Stat. Sol. (A), 188, 863 (2001). 2001, Wiley-VCH.
Figure 8. Cross section of a GaN-AlN QD stacking, observed by transmission electron microscopy. The typical height of GaN QDs was 4
nm. Reprinted with permission from [53], C. Adelmann, Compte-Rendus
Academ. Sci. (Paris) 1, Serie IV, 61 (2000). 2000, Bruno Daudin.
523
were used. In fact, large internal electric elds take place
in this kind of nanostructure, thus lowering the fundamental bandgap energies signicantly. In the present structure,
this quantum conned Stark effect was specially strong. The
room temperature PL originating from GaN QDs was centered around 2.35 eV, much lower than the excitation energy,
and thus did not merge the Raman signal. The more interesting result was obtained using the 3.80 eV laser line. A feature clearly showed up in the rst-order scattering range
at 744 cm1 in Raman spectra from the nanostructure, in
contrast to those recorded on the GaN layer used as a reference (see Fig. 9). The observed peak, which could not originate from the underlying GaN buffer layer of the sample,
was assigned to the polar A1 (LO) phonon from the QDs.
A weaker Raman feature located at 602 cm1 was associated with the nonpolar E2 phonon from the strained dots.
It should be noted that the latter mode could be observed
under the 2.33 eV excitation, that is, at an energy close
to the PL maximum, in contrast to the A1 (LO) phonon
from QDs. These results gave evidence for a strong resonant enhancement of the scattering by polar phonons in the
incoming channel at 3.80 eV, implying probably an excited
state of the dots.
Another original study was carried out by Kuball et al.
[56] on a single plane of self-assembled GaN QDs grown
on a Al0 15 Ga0 85 N layer, using silicon as anti-surfactant.
Two clearly distinct distributions of QD sizes were revealed
by means of atomic force microscopy. The Raman spectra
from the nanostructures are shown on the top of Figure 10.
Under a 3.53 eV excitation, rst-order scattering located at
736 cm1 , superimposed onto a broad PL band, was assigned
to the A1 (LO) phonon from the large (about 40 nm high)
dots, where connement effects on the LO phonon frequency are almost negligible. In the same experimental conditions, a phonon was observed at the same frequency but
with a lower intensity, on another sample grown in similar
524
5. SUMMARY
Hexagonal GaN-AlN or GaN-GaAlN QW and QD structures have been extensively studied in the last few years, on
account of their important applications in opto-electronics.
The lattice-dynamical properties of two-dimensional systems
have been reviewed in this article. Only a few calculations of
phonons in such nanostructures have been performed yet.
Most articles published are actually devoted to experimental studies by Raman spectroscopy, or less often by infrared
measurements. The signature of QW and QD structures has
been obtained from nonpolar or polar phonons, by means
of nonresonant or resonant Raman scattering, respectively.
The results allowed the probing of internal strains and connement effects in the constituent materials. Up until now,
specic modes of GaN-AlN or GaN-GaAlN SLs have been
the subject of a few investigations. However, phonon connement in layers of the structures has been evidenced for
SLs in a wide range of periods. Moreover, the angular dispersion of quasi-conned and interface modes has been predicted and checked experimentally for the former. Finally,
GaN pillars recently investigated by Raman spectroscopy did
not exhibit lattice dynamical properties characteristic of onedimensional systems.
GLOSSARY
Quantum dot (QD) A small island made of a given semiconductor embedded in another semiconductor.
Quantum well (QW) A thin layer made of a given semiconductor located between two other semiconductors called
barriers.
Superlattice (SL) A periodic array of wells and barriers.
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