GaN MMIC Foundry Services

GaN-based HEMTs
Broadband performance - Enables high power, multi-octave bandwidth amplifiers

Cree’s GaN HEMT MMIC processes are available for MMIC development
using standard full-wafer (SFW) service or a shared multi-project
(SMP) “pizza mask” fabrication service. Customers can design into
the foundry using ADS or MWO design kits or have Cree perform the
design service. The process features high-power density (4 Watts/
mm) transistors, slot vias, high reliability up to 225ºC operating
junction temperatures, and scalable unit cells (1 to 8mm/Cell). The
value of such MMICs is more power bandwidth and higher efficiency

within a smaller footprint compared to other MMIC technologies.

Applications
• 2-Way Private Radio
• Test Instrumentation
• Broadband Amplifiers
• EW Jammers
• Class A, AB, Linear amplifiers suitable with OFDM,
QPSK, QAM, FM waveforms
• Radar
• Military Communications

Features
• Agilent ADS & AWR MWO Process Design Kits (PDK)
• Layout Support and DRC
• Typically 4 PCM good wafers for SFW service
• Each circuit delivered in Gel Paks
• Testing of two parameters
• SMP Pizza Mask Service

Circuit Types
• FET Limiters • Broadband Amplifiers
• High power FET Switches • High Efficiency Amplifiers
ev 4.0

• High Power FET Amplifiers • High IP3 Amplifiers

• High IP3 FET Mixers • Multi-function Integrated MMICs
9R
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y2
Ma

1
Standard Full-Wafer (SFW) Service for GaN MMICs

Cree offers non-linear, scalable GaN HEMT models for MMICs, as well as

full PDKs for both AWR Corporation’s Microwave Office® (MWO) and

Agilent Technologies’ Advanced Design System (ADS).

Stage Duration
(Typical)
Preliminary Design Review 4 Weeks
Circuit A Circuit B
Critical Design Review 4 Weeks
MMIC Fabrication 12 Weeks
Circuit C
MMIC Testing 2 Weeks
Final Review 2 Weeks

Delivery 24 Weeks ARO Custom Reticule

• Custom designs • 10 mm X 10 mm reticule size

• DRC, layout and model support • 4 PCM good wafers, 2 parameter on-wafer testing

Shared Multi-Project Pizza (SMP) Mask Service for GaN MMICs

Cree offers the SMP service with reduced cost and MMIC size, providing multiple customers the opportunity to get their

MMIC designs fabricated faster. Available areas are 6mm x 6mm, 6mm x 4mm, and 4mm x 6mm. All die from PCM

good wafers will be delivered. See www.cree.com for details. The typical

duration is 16 weeks.

Shared RTP Schedule

DRC Clean GDS & PO Start
MMIC Fabrication 12 Weeks
MMIC Testing 2 Weeks Customer
Customer Tile #2
Final Review 2 Weeks Tile #1
6mm x 6mm
6mm
x 4mm

Customer
Delivery 16 Weeks Tile #3
4mm x 6mm
PCM

• Limited DRC, model & layout support, on-wafer electrical testing

Fixed Reticule

Copyright © 2009 Cree, Inc. All rights reserved. Permission is given to reproduce this
document provided the entire document (including this copyright notice) is duplicated. Cree, Inc.
The information in this document is subject to change without notice. Cree and the 3026 East Cornwallis Road
Cree logo are registered trademarks and Wireless by Cree is a trademark of Cree, Inc. Research Triangle Park, NC 27709
Other trademarks, product and company names are the property of their respective USA Tel: +1.919.313.5300
owners and do not imply specific product and/or vendor endorsement, sponsorship or Fax: +1.919.869.2733
association. www.cree.com/wireless

2
GaN HEMT MMIC Process Components

Au T-gate MIM Capacitor Au Airbridge

Resistor

i-GaN
44 mils
mil
Semi-insulating 4H-SiC

Substrate Via

Process Features RF Performance Features

• GaN HEMT Process • 4 W/mm Power Density
• Thin Film Nichrome Resistors, ~12 ohms/sq. • 60 % PAE at 3.5 GHz
• MIM Capacitors, >100 V breakdown • 19 dB Gmax at 3.5 GHz
• Slot via Holes through SiC Substrate • 28 V Drain Operation
• 0.4 µm Gate Length
• 100 µm Die Thickness
• Solderable Backside Gold Metalization

GaN HEMT MMIC Process Design Kit

Available for AWR Corporation’s Microwave Office

40

30
Power (dBm)

• CREE’s scalable non-linear model 20

• All passives created with Cree design rules 10

• Full schematic driven layout 0

0 1 2 3 4 5 6 7 8
0 2 4 6 8
• Real time design rule checking
Frequency (GHz)
Frequency (GHz)
20
• AWR test design example: DC-6 GHz Drive Amplifier
S21, S11 & S22 (dB)

10

-10

-20
0 2 4 6 8
Frequency (GHz)

MWO Layout Example

Copyright © 2009 Cree, Inc. All rights reserved. Permission is given to reproduce this
document provided the entire document (including this copyright notice) is duplicated. Cree, Inc.
The information in this document is subject to change without notice. Cree and the 3026 East Cornwallis Road
Cree logo are registered trademarks and Wireless by Cree is a trademark of Cree, Inc. Research Triangle Park, NC 27709
Other trademarks, product and company names are the property of their respective USA Tel: +1.919.313.5300
owners and do not imply specific product and/or vendor endorsement, sponsorship or Fax: +1.919.869.2733
association. www.cree.com/wireless

3
About Cree Inc.

Cree is a market-leading innovator of semiconductor solutions for wireless and power applications, lighting-class LEDs,

and LED lighting solutions. Cree’s product families include power-switching devices and radio-frequency/wireless

devices, blue and green LED chips, high-brightness LEDs, lighting-class power LEDs, and recessed LED down lights.

Cree solutions are driving improvements in applications such as variable-speed motors, wireless communications,

general illumination, backlighting and electronic signs and signals.

Cree drives its increased performance technology into multiple

applications, including exciting alternatives in brighter and

more-tunable light for general illumination, backlighting for

more-vivid displays, optimized power management for high-

current, switch-mode power supplies and variable-speed motors,

and more-effective wireless infrastructure for data and voice

communications. Cree customers range from innovative lighting-

fixture makers to defense-related federal agencies.

Durham, NC
campus

A publicly traded company founded in 1987, Cree now employs more than 1,500 people at its Durham, NC, headquarters

and has additional offices in Santa Barbara, CA, and Asia. The Cree facility is ISO/TS 16949 certified.

Contact

For inquiries and sample requests, please contact the Cree Wireless team

at: 919-313-5300 or rfsales@cree.com

Copyright © 2009 Cree, Inc. All rights reserved. Permission is given to reproduce this
document provided the entire document (including this copyright notice) is duplicated. Cree, Inc.
The information in this document is subject to change without notice. Cree and the 3026 East Cornwallis Road
Cree logo are registered trademarks and Wireless by Cree is a trademark of Cree, Inc. Research Triangle Park, NC 27709
Other trademarks, product and company names are the property of their respective USA Tel: +1.919.313.5300
owners and do not imply specific product and/or vendor endorsement, sponsorship or Fax: +1.919.869.2733
association. www.cree.com/wireless