1 Sensors

1.
Sensors
1.1. Definition
1.2. Calibration of Sensors
1.3. Classification of Sensors
1.4. Sensor Principles
1.5. Sensors Output Signals
1.6. Passive Sensors
1.7. Stages of Development of a Sensor System
S. 1-1
Prof. Dr.-Ing. O. Kanoun

Chair for Measurement and Sensor Technology
P. 1-1
1.1 What is a Sensor?

Latin Sensus = The Sensing
Also Sensing Element, Probe, Transducer
Excitation, Energy
Physical Quantity
or Event
Sensor
Signal
Sensor Part of a measurement equipment that responds to a measurement quantity

[DIN 1319]
Sensor - System, that converts a physical quantity and changes it in a suitable signal
Example: A resistance changes with temperatur
S. 1-2

P. 1-2
A Sensor is a Transducer
Output Signal
Output Energy
el. resistance
Radiation
thermal
magnetic
electrical
mechanical
Current or Voltage
chemical
thermo electric effect

for temperature
measurement
Measurement Quantity
Environment Energy
Excitation
Energy Supply
S. 1-3

P. 1-3

Measurement Principle - physical principle in use
Non Electrical
Signal
Pressure
p
Position
l
Position
l
S. 1-4
piezo electric effect
strain sensor
capacitive sensor
Principle
el. Field E
Analog Electrical
Signal
Rotation Speed
U
A B
Induktionsgesetz
induction
Resistance
R
Temperature
T
R(T ) R0 (1 T )
Capacitance
C
Temperature
T
U a (Tm Tv )

(M etalle)
metals
Thermoelement
thermo couple
el. Voltage
U
Resistance
R
el. Voltage
U
P. 1-4
1.2 Calibration
CalibrationTo find out the relationship between Input and output quantity
Real Value of the

Measurement Quantity
Mi
Sensor Signal
Sensor
Si
Calibration Data
[DIN 1319]
S. 1-5
M1
S1
M2
S2
M3
S3

Professur fr Mess- und Sensortechnik
1.2 Calibration
Possibilities of Calibration
Calibration by Comparison
using a Precision Device
Sensor
Calibration by using
an Etalon
Etalon
Sensor
Output Value
Measurement
Quantity
Output Value
Precision Device
Real Value
Real Value
Gn
Calibration Data
S. 1-6

M1
S1
M2
S2
M3
S3
1.2 Calibration
Example: Calibration of Thermometers
Calibration at a Fixed Point
(Water Triple Point)
Calibration by Comparison
Vapor
Thermostat Bath
ICE
Tempered Liquid
Water
S. 1-7

1.2 Calibration
Calibration Hierarchy
ISO 90XX
Calibration Certificate
Company
National
Etalon
Technical
Requirements
Reference Etalon
Product
+ Data Scheet
Client
S. 1-8

Working Standard
1.2 Classification of Sensors
Principle
Application
- Resistive
- Capacitive
- Inductive
- Electrochemical
-
- Automotive
- Environment
- Medicine
- Intelligent home
- Research and development
-
Information Technology
Aspects
- Signal
- System ability
- Signal parameters
S. 1-9
Energy supply
Development Level
- Active
- Passive
- Elementary
- Integrated
- Intelligent

P. 1-9
1.3 Measurement Principles

Example 1: Resistive Sensors
Principle: Resistance Changes
l
l
A
: Specific resistance
R l A
l
A
Changes of Geometry
Measurement of strain, force, ..
Changes of the Resistivity
Measurement of temperature, gas, ..
S. 1-10

P. 1-10

Resistance Thermometer
RT R0 1 a1 T T0 a2 T T0
2
R R0 at T0 0C
Example Platin-Resistance Thermometer

[IEC 751 / DIN EN 60751]
a1 3,9 103 K 1
a2 0,58 106 K 2
a3 4,18 1012 K 3
0
for T 0C
for T 0C
Class |T|= 0.39 K

-80C 120C
S. 1-11

P. 1-11

Negative Temperature Coefficient Resistance
Carier Density
A better conductor if heated
R R0 e
1 1
b
T T0
b b
T0 T
R0 e e
b: Material Constant
R0: Resistance at the Temperature T0
Temperature Coefficient
1 dR
b
2 0
R dT
T
NTC: Negative Temperature Coefficient

S. 1-12

P. 1-12

Strain Gauges
l
4l
d 2
: specific resistance
R l
d
d d l
2

1 2
l
d l l
l l l
Strain
l
l
Poisson Ratio
1 2 k with k 1 2
R
S. 1-13

d d
l l
resistance:
R R0 1 k
P. 1-13

Strain Gauges (SG)
Piezoresistive Effect
Metall SG
R R0 1 k
Changes of
Geometry
Low Noise
Semiconductor SG
Dependence of the band structure of elastic
lattice distortions due to the action of
external mechanical stresses.
Higher Sensitivity
Small measurement Range

P. 1-14

Strain Gauges (SG) Metall-SG
Piezoresistive Effect in Metall-SG
Load
Changes of
Geometry
Changes of the
Electric
Resistance
Dependence of the piezoresistive effect
Material
Nominar Resistance value without load
Poisson- Number

P. 1-15

Strain Gauges (SG) Semiconductor-SG
Piezoresistive Effect in Semiconductors
Load
Deformation of
the crystal
lattice
Change of the
mobility of
charge career
Changes of
resistivity
Dependence of the piezoresistive Effect
Orientation of the semiconductor cristall

Doping of the semiconductor
Type
Density
Distribution
Example: higher Bandgap of InSb at higher pressure

(also other Semiconductors - 1000 MPa)
P. 1-16

Strain Gauges (SG) Realization
Metall-SG
Wire-SG
Wound Wire (d 20 m)
Application by adhesive
Foil-SG
h 10 m
Application by adhesive
Thin Film-SG
Application by sputtering or direct vapor deposition under
vakuum conditions (0,1 m < h < 5 m)
Semiconductor-SG
p- oder n-doped silicon (h 15 m)
Application by adhesive or sputtering
P. 1-17

Strain Gauges (SG) Examples

P. 1-18

Strain Gauges (SG) Materials
nichtlineares Verhalten
Werkstoff
Zusammensetzung
kFaktor
Konstantan
58% Cu, 42% Ni
2,04 bis
2,12
Nichrome V 80% Ni, 20% Cr
2,1 bis
2,63
Nickel
x% Ni
-12 bis
20
Platin
x% Pt
4,1
p-Si
[111]
175
n-Si
[100]
-133

P. 1-19

Strain Gauges
Pressure Measurement Cell, Force Measurement
Sensors with Semiconductor strain gauges:
S. 1-20

P. 1-20

Further Resistive Sensors
Photo Resistance
Anisotrope Magneto Resistive Effect (AMR)
Giant Magneto Resistive Effect (GMR)

Ni/Fe/Co
Cu
5-10nm
Ni/Fe/Co
Without field
Higher Resistance
S. 1-21

With magnetic field

Lower Resistance
P. 1-21
What did we learn?

Resistive Sensors are mainly based on changes of resistvity or geometry
Are used for different Measurement quantites like:
- Temperature
- Strain ( forces, pressure)
- Light
- Magnetic fields, position
Challenges are for example:
- Sensitivity
- Measurement range
- Sensitive measurement procedures for small changes around a realitve
big nominal value
- Linearity should be investigated
- Wires may have an impact on the measurement value (small resistances,
temperature gradients along the wires)
- Contact resistances

Capacitive Sensors
Principle: Capacitance Changes
A
C 0 r
d
r
d
Distance Changes
Surface Changes
Distance, Position, Material Thickness

e. g. Pressure Measurement
Distance, Position
e. g. Measurement of a Shift
Changes of the Dielectric
Fill level, Humidity, Thickness of a Layer

e. g. Detection of Snow at an Airplane Wings
Changes in the Stray Field
Detection of Conducting Material

e. g. Protection of Paintings in Museum
S. 1-23

P. 1-23
Capacitance with Changes in Distance
Capacitance with Layered Dielectric

and Changes of Dip in Depth
S. 1-24

Capacitance with Changes

in Surface
Capacitve Fill Level Sensor

for Isolating Liquids
P. 1-24

Capacitive Pressure Sensor:
Pressure
Application: Microphones
S. 1-25

P. 1-25

Capacitive Sensors
S. 1-26

P. 1-26
What did we learn?

Capacitive sensors are able to measure changes of position, geometry and
material properties of the dielectric material
Examples for measurement quantities are:
- Position
- Material thickness
- Moisture
- Fill level
- Pressure
For calculation of the haracteristic of the sensor, generally we should think about
parallel and series connection of part-capacitances.
Dependence on surface is linear, on distance is hyperbolic ( suitalbe only for
small distances)
Challenges:
- Stray field
- Unwanted changes of the geometry
- Sensitivity to conducting materials in the stray field,
- Films can be built on the electrodes (Fill level Sensor)
- Moisture dependence
Inductive Sensors
Rm
A
N2
A 2
L
0 r N
Rm
L: Inductance
N: Number of Windings
Rm: Magnetic Resistance
: Permeability
l, A: Length and cross section of the iron core
Electro dynamic Measurement principles:
Eddy current sensor
S. 1-28
Magneto-elastic principle

P. 1-28
Inductive Sensors
Elektrodynamische
Fhler
Electro
dynamic principles
S. 1-29

P. 1-29
Inductive Sensors
Eddy current principle

Magnetic field of the inductance
Eddy currents in the target material
Eddy currents in the target material
Opposite magnetic field
Damping of the inductance
Measurements of:
- Material properties
- Material failures
- Distance (Proximity Sensor)
S. 1-30

P. 1-30
Principle
Application
- Resistive
- Capacitive
- Inductive
- Electro chemical
-
- Automotive
- Environment
- Medicine
- Intelligent Home
- Research and Development
-
Aspects
- Signal
- System ability
- Signal parameters
S. 1-31
Energy supply
Development Level
- Active
- Passive
- Elementary
- Integrated
- Intelligent

P. 1-31
1.4. Sensor Output Signals
Output signal
Example:
System ability
Analog
signal
Temperature
Binary
signal
Digital
signal
Overfill sensor
Bus comunication
Without bus
communication
Examples: CAN, LON, ASI, ..
S. 1-32

P. 1-32
1.4. Sensor Output Signals
Amplitude
analog
Time
analog
Value
Frequency
analog
Value
Value
f1
t1
Static accuracy
Dynamic
Sensitivity to distortion
Signal processing
S. 1-33
Value
f2
t2
t
Signal value ~ Measurand
digital
t
Time ~ Measurand
t
Frequency ~ Measurand
t
Digital value ~ Measurand
Static accuracy
Dynamic
Sensitivity to distortion
Signal processing

P. 1-33
Principle
Application
- Resistive
- Capacitive
- Inductive
- Electro chemical
-
- Automotive
- Environment
- Medicine
- Intelligent Home
-
Aspects
- Signal
- System ability
- Signal parameters
S. 1-34
Energy supply
Development Level
- Active
- Passive
- Elementary
- Integrated
- Intelligent

P. 1-34
Active Sensors
Energy Supply
Sensor
Passive Sensors
Piezo Electric Sensors
Surface Acustic Wave -Sensors

Antenna
Reflectors
RF request signal
Request
unit
Piezoelectric
IDT
crystal
RF response
Amplitude, Frequenz
Phase, Ankunftszeit
S. 1-35

P. 1-35

Temperature measurement with a thermo couple
Seebeck effect
Kontaktspannung U
Vakuum-Niveau
EF1
Metal 2
EF
EF
Metal 1
Metal 2
e-
F2
F1
EF2
Metal 1
Measurement
Point
T
F2
Metal 1
Metal 2
Prozessor
F1
Thermoelectric voltage
U K T Tv
K: Seebeck coefficient
Comparison point
TV <T
S. 1-36

Advantages:
- Wide measurement sector
- Fast reaction time
36
- No energy supply!

Examples for thermo couples
Example: Typ K (NiCr-Ni)

mV
mV
mV
K 2,2
(-1,9
) 4,1
100K
100K
100K
Thermo electric voltage

should be amplified!
-200C to +1000 C
|T|= 0.25% -0,75 % of the measurement range limits

S. 1-37

P. 1-37
Piezo electric effect
FY
Quarz Cristal
+
-
Si
+
+
+
+
+
+
+
+
+
+
+
Si
FY
S. 1-38

P. 1-38
Piezo electric sensors

Acceleration sensors
S. 1-39

P. 1-39
Principle
Application
- Resistive
- Capacitive
- Inductive
- Electro chemical
-
- Automotive
- Environment
- Medicine
- Intelligent Home
-
Aspects
- Signal
- System ability
- Signal parameters
S. 1-40
Energy supply
Development Level
- Active
- Passive
- Elementary
- Integrated
- Intelligent

P. 1-40
1.6. Stages of Development of a Sensor System
Elementar Sensor
Integrated Sensor
Intelligent Sensor
Signal
Measurement
S. 1-41
Signal
Preprocessing

Signal
Processing
P. 1-41

1 Sensors

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1.

Prof. Dr.-Ing. O. Kanoun

1.1 What is a Sensor?

Sensor Part of a measurement equipment that responds to a measurement quantity

Example: A resistance changes with temperatur

Prof. Dr.-Ing. O. Kanoun

1.1 What is a Sensor?

thermo electric effect

Prof. Dr.-Ing. O. Kanoun

1.1 What is a Sensor?

piezo electric effect

Prof. Dr.-Ing. O. Kanoun

Real Value of the

Prof. Dr.-Ing. O. Kanoun

Prof. Dr.-Ing. O. Kanoun

Prof. Dr.-Ing. O. Kanoun

Prof. Dr.-Ing. O. Kanoun

1.2 Classification of Sensors

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

Measurement of strain, force, ..

Changes of the Resistivity

Measurement of temperature, gas, ..

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

Example Platin-Resistance Thermometer

Class |T|= 0.39 K

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

A better conductor if heated

NTC: Negative Temperature Coefficient

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

Dependence of the piezoresistive effect

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

Dependence of the piezoresistive Effect

Orientation of the semiconductor cristall

Example: higher Bandgap of InSb at higher pressure

1.3 Measurement Principles

1.3 Measurement Principles

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

58% Cu, 42% Ni

Nichrome V 80% Ni, 20% Cr

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

Sensors with Semiconductor strain gauges:

Prof. Dr.-Ing. O. Kanoun

1.3 Measurement Principles

Anisotrope Magneto Resistive Effect (AMR)

Giant Magneto Resistive Effect (GMR)

Prof. Dr.-Ing. O. Kanoun

With magnetic field

What did we learn?

1.3 Measurement Principles

Distance, Position, Material Thickness

Changes of the Dielectric

Fill level, Humidity, Thickness of a Layer