Heat Transfer in Solid and Fluids

Heat Transfer in Solid and Fluids
John Dunec
COMSOL
Jon Ebert
SC Solutions
2013 COMSOL. COMSOL, COMSOL Multiphysics, Capture the Concept and COMSOL Desktop are registered trademarks of
COMSOL AB. LiveLink is a trademark of COMSOL AB. Other product or brand names are trademarks or
registered trademarks of their respective holders.
Agenda
Multiphysics and the Power of COMSOL
An Overview of Heat Transfer with COMSOL
Conduction / Convection / Radiation
Coupling Heat Transfer with other Physics
Thermal Modeling of a CVD Reactor

Video Demo
Q&A Session
Multiphysics: Multiple Interacting Phenomena

Could be simple
Heat convected by Flow
Could be complex
Local temperature sets
reaction rates
Multiple exothermic reactions
Convected by flow in pipes
and porous media
Viscosity strongly temperature
dependent
COMSOL Multiphysics Solves These!

Multiphysics Everything can link to everything
Flexible You can model just about anything
Usable You can keep your sanity doing it
Extensible If its not specifically thereadd it!
All Inclusive Interactive Modeling Environment

COMSOL Desktop
Straightforward to
use, it gives full
insight and control
over the modeling
process
Model Builder
Provides instant
access to any part of
the model settings
CAD/Geometry
Materials
Physics
Mesh
Solve
Results
Graphics
Ultrafast graphic presentation, stunning
visualization, and multiple plots
Product Suite
Anywhere you can type a number or an equation

Or an interpolation function
And it can depend on anything known in your problem
Example: Concentration-dependant viscosity
0.001 1 2c 2
Low concentration,
High velocity
High concentration,
Low velocity
Add Your Own Equations to COMSOLs

Dont see what you need?
Add your own equation
ODEs
PDEs
Weak form PDEs
Just type them in
No Recompiling
No Programming
Interface with CAD, Excel and MATLAB
CAD import
LiveLink for CAD softwares
LiveLink for Excel
LiveLink for MATLAB
Pacemaker Electrode Modeled with LiveLink for SolidWorks
Support for High-Performance Computing

Multi-Core Parallel Computing
No Extra Charge
Fully Supported on all Licenses
Cluster Parallel Computing
No Extra Charge
Requires Floating Network License
Freq Sweep / Parametric Sweep
Distributed Single Large Problem
Solvers
Direct / Iterative - Fully Coupled / Segregated
Heat Transfer in COMSOL Multiphysics

Used on its Own
Conduction
Thermal Radiation
Thin Conductive Media and Resistive Layers
Linked to Flow
Conduction-Convection
Laminar / Turbulent
Porous Media
Bioheat Equation
Linked to Other Physics
Structural mechanics
Electromagnetics

Temperature of a disc brake of a car in brakeand-release sequence
Conjugate heat transfer around an

aluminum heat sink
Light Bulb: All Forms of Heat Transfer

60 W filament heats rapidly over the first seconds
Induces a flow driven by natural convection
Conduction / Convection / Radiation
t=0.1 sec
Temperature
t=6 sec
Velocity
Temperature
t=60 s
Velocity
Temperature
Velocity
Laser Heating: Surface Heating

Define Surface Flux hf(x,y)
Multiply by emissivity
Wafer spinning,
Laser moving back
and forth
Laser Intensity - Gaussian
Phase Change:
Boiling
Two Phase Flow with Heat Transfer
Use Phase Field for 2-Phase Flow
1
1
Heat: 105 W/m3
Heat Transfer Linked to Other Physics

Electrical, Mechanical, Fluid, Chemical, Acoustic
Anything can link to anything!
Microwave heating in a waveguide
Skin depth heating of copper plated waveguide
Volumetric heating of dielectric block
Properties of block are temperature dependent
Joule Heating
Volts x Amps = Power
Power goes to heat
Heat expands metal
Current Direction, Isotherms
Current Density from 0.2 volts across resistor
Temperature [C], Deformation (10x)
Magnetic Induction Heating

Furnace reactor that heats a susceptor of graphite, using an 8
kW RF signal at 20 kHz
Used in the fabrication of semiconductors to grow layers on
wafers
Surface Plot
Temperature
Contours
Temperature
Arrow Plot
B-field
Exothermic / Endothermic Reactions

Three Physics: Flow / Heat / Convection-Diffusion with Reactions
Flow
Temperature WITHOUT exothermic reaction
Temperature WITH exothermic reaction
Heater lifts T over activation energy Higher Temperature speeds reaction
Chemical Heating
PMMA Cement
Temperature Profile After 750 sec
Heat from Curing Reaction After 700 sec

Case Study: Temperature Control of a Cold-wall Vertical
CVD Reactor with Rotating Susceptor
Jon Ebert
SC Solutions, Inc.
1261 Oakmead Pkwy., Sunnyvale, CA 94085
Email: jle@scsolutions.com
COMSOL Webinar
March 7, 2013
20
Copyright 2013, SC Solutions, Inc. All Rights Reserved
SC SOLUTIONS
SC Solutions
Engineering firm in Silicon Valley 40 employees
Structural Division Founded in 1989
Control Division Founded in 1996
o Engineering Consulting
Using models for equipment design
o Feedback Control Software for Semiconductor Industry

Using models for equipment control
o Contract Research
COMSOL Certified Consultant, MathWorks Partner.
MATLAB is a registered trademark of The MathWorks, Inc.
21
SC SOLUTIONS
Overview
Overview of Chemical Vapor Deposition (CVD)
o Chemical process for growing thin solid films
Metal-organic Chemical Vapor Deposition (MOCVD)

o CVD with metal-organic precursors (e.g., tri-methyl Gallium)
o Used to manufacture Light Emitting Diodes (LEDs)
A Case Study of Temperature Control of a Rotating Susceptor CVD Reactor

o Show how we use COMSOL and Livelink for Matlab in concert with optimization and
control tools.
o Evaluate design limits for a range of operating conditions.
Summary
22
SC SOLUTIONS
Chemical Vapor Deposition

Process by which a thin solid film is formed on a surface (e.g., wafer) from gasphase precursors via chemical reactions.
Used for growing high-purity crystalline layers, typically semiconductor
multilayers.
Heater Coils
Gas flow
Wafer
Wafer
Wafer
Susceptor
Process Gas Entry
Heater Coils
Rotating Heated
Susceptor
Wafer
Wafer
Horizontal Reactor
Wafer
Process Gas Entry
Wafer
Wafer
Vertical Reactor
Rotating Heated
Susceptor
Gas Exit
Pancake Reactor
23
SC SOLUTIONS
MOCVD for LEDs

MOCVD is used to produce Light Emitting Diodes (LEDs) by
reacting metal-organic precursors (e.g.,tri-methyl Gallium, trimethyl Indium, etc.).
Increasingly important for many applications (LED TVs,
Lighting, etc.) due to potential for high efficiency.
InGaN/GaN multiple quantum well (MQW) structures are
grown on sapphire substrates for green, blue, and white LEDs.
Wikipedia
Studies* have shown that LED properties such as photoluminescence and

electroluminescence can vary by a factor of two if the substrate temperature is
changed from 1000C to 1030C.
Involves many process steps over a wide temperature range (500-1100C).
As a result, real-time control of substrate temperature to within 1C or less is
essential for repeatable manufacturing of LEDs with desired color.
* For example, see J. W. Ju, et al., Effects of p-GaN Growth Temperature on a Green InGaN/GaN Multiple Quantum
Well, Journal of the Korean Physical Society, Vol. 50, No. 3, March 2007, pp. 810-813.
24
SC SOLUTIONS
A Case Study
Temperature Control of a Rotating Susceptor, Cold-wall

MOCVD System
25
SC SOLUTIONS
COMSOL Model
A vertical reactor with top-side showerhead and rotating susceptor.
2D Axisymmetric COMSOL model Non-isothermal flow, with swirl and buoyancy.
Cold walls
Showerhead
CVD Surface
The temperature on the CVD Surface is critically important
26
SC SOLUTIONS
Example Operating Conditions
Nominal operating temperature is 1100C.

Susceptor rotation rate = 100 RPM
Flow rate (SLM)
Hydrogen is the main carrier gas (no reactions, only heat transfer).
50
Process
Window
5
100
500
Pressure (Torr)
Operating pressure range is 100 Torr p 500 Torr
(1 Atm = 760 Torr)
Operating flow rate range is 5 slm Q 50 slm (slm = standard liters per minute)
Required temperature uniformity of 0.5C (over widest possible area of susceptor)
The goal is to adjust the control flux, q(r), to get good temperature
uniformity on the CVD Surface.
27
SC SOLUTIONS
Heat Transfer
Gas Convection and Conduction
o The cold gas (27C) is injected at the showerhead
o Convective cooling flux of the susceptor is of order 104 W/m2
o qc = h(Tsus-Twall), h is of order 10-100 W/m2C
Radiation
o qr = es (Tsus4 Twall4 ), e = effective emissivity, s = Stefan-Boltzmann constant.
o Radiation losses are of order 105 W/m2
o Radiation does not vary with flow rate or pressure.
Conduction
o Gas conduction is fairly high for Hydrogen (compared to other gases)
o Solid conduction in susceptor is important, especially if we heat from backside.
The distribution of heat transfer at the CVD surface varies with flow rate and
pressure due to changes in convection heat transfer.
28
SC SOLUTIONS
Heater Zone Definition

It is common to divide the control flux into a number of independently controlled
zones.
Here we divide the control flux into six independent zones.
o Uniformly divided along the radius
o Heaters can be made in many ways
This is the system to be controlled
Resistive films
Lamp arrays
Hot filaments
RF Inductive elements
Gas inflow
Axis of Rotation
29
Surface temperature
CVD Surface
Heater zones
SC SOLUTIONS
The Control Problem

The controller, C, adjusts the flux, q, to make the temperature T on the CVD
surface uniform at the reference temperature, Tref.
Controller
CVD System
(1100C)
Feedback
Matlab
LiveLink for Matlab
COMSOL
This is a form of the inverse problem.

(What inputs do I need to produce a given output?)
Real-time feedback is a common method of dynamically solving this problem.

For this demo, we will focus on steady-state, but the same methods are used to solve the timevarying dynamic control problem (e.g., uniformity during temperature ramp, stabilization, etc).
30
SC SOLUTIONS
Baseline System Performance
Temperature on CVD Surface
32 degC
100 Torr, 50 slm

Edge cold, can
we do better?
31
5x power on zone 6
Normalized power commands
SC SOLUTIONS
Optimal Control
In words:
Find the input control flux, q, for each heater that produces the best
temperature uniformity.
subject to the constraint that q 0
the uniformity is optimized over limited radius (r < Rmax).

Mathematically:
32
SC SOLUTIONS
How Many Independent Heaters do we Need?

In practice, for each independent heater we need an another power supply and
an another temperature sensor adding heaters is expensive.
We want as few as possible.
We also want uniformity over the largest possible radius (Rmax).
Can we make ONE heater work for the entire operating range of pressure and
flow rate?
Strategy: fix the ratio of each heater power from baseline optimal result (100Torr,
50slm) and scale this power distribution up and down with one input scaling.
o This ratio can be done in hardware (e.g., filament density distribution, or resistance
variation, etc.)
o One zone control requires only one temperature sensor.
33
SC SOLUTIONS
Optimizing Rmax (6-zone control)

100 Torr, 50 slm
It is only possible to get

the inner 0.13m radius
within the design limits.
Rmax = 0.13 m
Rmax = 0.15m
If we try to optimize T for the
whole radius (0<r<0.15m) we
cause a large region of the
susceptor to fall outside the
design limits.
Each zone independent.
For remaining analysis we will

only control the temperature
for radius r<0.13m.
34
SC SOLUTIONS
One-zone Control
We found the optimal Rmax to produce the largest area of temperature within
design limits.
Next we want to optimize the input flux distribution for different operating
conditions.
First we look at 1-zone control, then look at the improvement of increasing the
number of independent control zones.
35
SC SOLUTIONS
One Zone Control

In all cases the mean
temperature optimized for
r<0.13m and Tref= 1100C
Except for the baseline case
(100T, 50slm), the
uniformity is poor.
58C (500T,50slm)
High pressure is a problem.

Look at the flows to see
why.
Group q1-q6 as one zone

(ratio of heater powers constant)
36
SC SOLUTIONS
Lower Pressure Flow fields (100 Torr)

100 Torr, 50 slm
Baseline case.
100 Torr, 5 slm
For slower flow we start to see

some lift of the streamlines
at larger radius.
37
SC SOLUTIONS
Higher Pressure Flow fields (500 Torr)
500 Torr, 50slm
Buoyancy driven recirculation is

causing a significant
redistribution of the convective
losses.
500 Torr, 5slm

Buoyancy driven recirculation
even more complex here.
1-zone control cannot work
for this range of operating
conditions.
38
SC SOLUTIONS
Two-zone Control
Temperature 2-zone Control
Much better, but still
not within design
limits.
Both 100 Torr
processes are close to
being within the design
limits.
Group q1-q5 as one zone
39
q6 is second zone
SC SOLUTIONS
Six-zone Control
40
SC SOLUTIONS
Temperature Uniformity vs Number of Control Zones
41
SC SOLUTIONS
Summary
This case study illustrates how COMSOL can be used in concert with SC control
tools to evaluate optimal closed-loop performance of a system.
In this particular case study, the results point to a need to eliminate roll cells in
the flow, either by changing the geometry, increasing the flow rate, or increasing
the rotation rate.
Demo will show:

o Livelink for Matlab is a very powerful feature of COMSOL, allowing use of control tools
that have been developed over many years.
o The swirl feature in COMSOL is very important for these types of problems where
models must be run many times.
42
SC SOLUTIONS
Video Demo
Please wait while the content is
loading
Applications shown in the demo
3D swirling flow over a hot susceptor
2D swirling flow over a hot susceptor

Case Study: Temperature Control of a Cold-wall Vertical
CVD Reactor with Rotating Susceptor
Jon Ebert
SC Solutions, Inc.
1261 Oakmead Pkwy., Sunnyvale, CA 94085
Email: jle@scsolutions.com
COMSOL Webinar
March 7, 2013
44
SC SOLUTIONS
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North America
Europe
Calgary, AB
San Diego, CA
Sacramento, CA
Oak Brook, IL
Markham, ON
San Jose, CA
Spring, TX
Toronto, ON
Cambridge, ON
East Syracuse, NY
Richardson, TX
Nrnberg-Erlangen, Germany
Saint Martin d'Hres, France
Brno, Czech Republic
Uppsala, Sweden
Helsinki, Finland
London, United Kingdom
Wien, Austria
Trondheim, Norway
Cranfield, United Kingdom
Zilina, Slovakia
Register to our free hands-on

workshops at
www.comsol.com/events
Contact Us
Questions?
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Heat Transfer in Solid and Fluids

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Heat Transfer in Solid and Fluids

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Heat Transfer in Solid and Fluids

Thermal Modeling of a CVD Reactor

Multiphysics: Multiple Interacting Phenomena

COMSOL Multiphysics Solves These!

All Inclusive Interactive Modeling Environment

Anywhere you can type a number or an equation

Add Your Own Equations to COMSOLs

Interface with CAD, Excel and MATLAB

Pacemaker Electrode Modeled with LiveLink for SolidWorks

Support for High-Performance Computing

Cluster Parallel Computing

Heat Transfer in COMSOL Multiphysics

Temperature of a disc brake of a car in brakeand-release sequence

Conjugate heat transfer around an

Light Bulb: All Forms of Heat Transfer

Laser Heating: Surface Heating

Laser Intensity - Gaussian

Heat: 105 W/m3

Heat Transfer Linked to Other Physics

Current Direction, Isotherms

Current Density from 0.2 volts across resistor

Temperature [C], Deformation (10x)

Magnetic Induction Heating

Exothermic / Endothermic Reactions

Temperature WITHOUT exothermic reaction

Temperature WITH exothermic reaction

Heater lifts T over activation energy Higher Temperature speeds reaction

Heat from Curing Reaction After 700 sec

Thermal Modeling of a CVD Reactor

Copyright 2013, SC Solutions, Inc. All Rights Reserved

o Feedback Control Software for Semiconductor Industry

COMSOL Certified Consultant, MathWorks Partner.

MATLAB is a registered trademark of The MathWorks, Inc.

Copyright 2013, SC Solutions, Inc. All Rights Reserved

Metal-organic Chemical Vapor Deposition (MOCVD)

A Case Study of Temperature Control of a Rotating Susceptor CVD Reactor

Copyright 2013, SC Solutions, Inc. All Rights Reserved

Chemical Vapor Deposition

Process Gas Entry

Copyright 2013, SC Solutions, Inc. All Rights Reserved

MOCVD for LEDs

Studies* have shown that LED properties such as photoluminescence and

Copyright 2013, SC Solutions, Inc. All Rights Reserved

Temperature Control of a Rotating Susceptor, Cold-wall

Copyright 2013, SC Solutions, Inc. All Rights Reserved

The temperature on the CVD Surface is critically important

Copyright 2013, SC Solutions, Inc. All Rights Reserved

Example Operating Conditions

Nominal operating temperature is 1100C.

Flow rate (SLM)

Operating pressure range is 100 Torr p 500 Torr

(1 Atm = 760 Torr)

Required temperature uniformity of 0.5C (over widest possible area of susceptor)

Copyright 2013, SC Solutions, Inc. All Rights Reserved

Copyright 2013, SC Solutions, Inc. All Rights Reserved

Heater Zone Definition

Copyright 2013, SC Solutions, Inc. All Rights Reserved

The Control Problem

LiveLink for Matlab

This is a form of the inverse problem.

Real-time feedback is a common method of dynamically solving this problem.

Copyright 2013, SC Solutions, Inc. All Rights Reserved

Baseline System Performance

Temperature on CVD Surface