Concrete
Non-Uniform
Wafers
Abstract
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Clearly Dene
Problem
Comment
What is Non-Uniform?
How Do We Measure?
Postulate
Important Factors
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Formulate
Working Model
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Conduct
Experiment
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Plan
Experiment
Estimate
Model
Determine
Important Factors
Revise
Working Model
Plan Conrmatory
Experiment
Conduct
Conrmatory
Experiment
Repeat as Necessary
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B. Probabilistic Models
The scientic method requires:
data collection
data analysis
Problem: Data always exhibit variability.
Variability obscures our ability to make decisions.
The scientic method has always used abstract models to address concrete problems.
For example, consider Ohms Law
V = IR
where
V is the voltage,
I is the current,
R is the resistance.
Note: This is a deterministic model.
If we know I and R, we claim to know V
exactly.
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C. Regression Models
Consider the thickness of the silicon layer
on a wafer for an integrated circuit.
Let yi be the thickness of the silicon layer
on the ith wafer.
A deterministic model is
y = 0 + tt + T T + AA
where
the s are constants,
t is the deposition time,
T is the deposition temp, and
A is the Argon ow rate.
A better model is
yi = 0 + tt + T T + AA + i.
where i is the random error associated with
the ith wafer.
We note that this model is an example of a
first-order Taylor Series approximation!
The scientic basis for many of our regression models is Taylor Series.
George Box: All models are wrong; some
are useful.
The simple linear model:
yi = 0 + 1xi + i
The multiple linear regression model:
yi = 0 + 1x1i + 2x2i + . . . + k xki + i
In general, k represents the number of regressors (independent variables).
Observational studies interact with the process only as much as is required to obtain
relevant data.
Usually we use observational studies to monitor processes.
Observational studies usually use a sampling plan to collect their data.
Some common sampling plans are:
simple random sampling
stratied random sampling
systematic sampling
Of these three, the most common is simple
random sampling.
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