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Opto-digital Microscope

DSX500

Discover another dimension

Opto-digital Micr

When You Need to See a New Dimension,


Olympus Provides the Answer

The DSX500 opto-digital microscope is the new standard for industrial microscopes.
Born of Olympus leading-edge opto-digital technology, this instrument offers superior
operating simplicity and a high level of reliability. Any operator, regardless of experience,
can use the Olympus DSX500 for a complete inspection and accurate analysis every time.

Superb Operating Simplicity

Absolute Performance Reliability

oscope DSX500
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The DSX500 Offers a New World of Observation and Analysis

Various Observation Methods with Simple Operation.


Quickly Acquire the Image You Need for Observation

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The DSX500 can be used for any industrial microscopic observation method. Also, a new observation method
called MIX, which combines bright-field and dark-field observation. Now pressing a single button changes the
image on screen, and you acquire the high-resolution images expected of high-end optical microscopes.

BF
Bright-field observation.
The most common
method with optical
microscopes.

DF
Dark-field observation.
Illuminate from the side
to emphasise imperfections. Best method for
identifying defects.

MIX (BF+DF)
Use bright-field (BF) and
dark-field (DF) observation
methods at the same
time, a mix of BF ease of
observation and DF ease
of detection.

DIC
Differential Interference
Contrast observation.
The method to use when
inspecting uneven
surfaces or nanometre
level imperfections.

PO
Simple polarised light
observation is a valuable
technique for eliminating
glare on substrates such
as printed circuit boards
or transparent films,
allowing surface characteristics to be faithfully
displayed.

Image Clarity Exceeds the Naked Eye, with Superb High-Definition Surface Images
In addition to advanced optics, use of digital capabilities such as High Dynamic Range (HDR) or WiDER
enhances hard-to-see microscopic textures as well as samples prone to glare.

HDR image

Surface Shown Clearly in 3D


View sample surfaces in 3D from any angle, and rely on extended focal image to maintain focus across the
entire surface.

2D image, entirely in focus

3D images at a touch

Panoramic Images Allow You to Image beyond the Field of View

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Panoramic images let you easily capture areas beyond the standard field of view. The images are automatically combined into an on-screen image that shows a very broad field in high definition. 2D, EFI, and 3D can
all be combined.

Panoramic image

A Huge Variety of Measurement Capabilities Are Standard on the DSX500,


So All Your Measurement Objectives Are Met
Fundamental industrial microscope measurements are standard features of DSX software, so it is easy to
obtain measurement results. In addition, optional software is available for 3D measurement, caliper measurement and particle analysis.

Prole measurement

Easy-to-Use Customisable Report Function

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One click sets the report function in motion to record and create a report of both the images and measurement
results. Reports can be customised for your application to greatly improve efficiency.

A click can generate a report

Option

Report output

Expand Your DSXs Capabilities

Ease of operation and high reliability come standard with your DSX500 but Super HDR provides it with even
greater imaging performance.

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Superb Operating Simplicity

MEMS Pattern

Advanced Mode
Provides the exibility and power advanced users need while retaining an intuitive and simple to use interface.

Tutorial Mode

Operator Mode

Even rst-time users can follow the suggestions of the system


and it will create the image that meets their needs.

This customisable mode is ideal for routine work as all


non-essential menus can be eliminated.

Three user-selectable modes Choose the mode that best fits your measurement environment

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Operating Simplicity that Guides Operators to


Optimum Output, Regardless of Their Experience

The DSX500 provides a new way to see. No need to look through eyepieces, everything you need is on the
screen. Operate the instrument with touch panel or mouse. Whats more, virtually anyone of any experience
level can use this new system efficiently. The screen guides the operator through the process, from inspection
to measurement to analysis to final report. Short, simple steps. Quick results.

Three User Modes Meet


Operator Experience Levels and Job Demands
Select Tutorial, Operator or Advanced Mode to best match
the experience of your operator and the job at hand. Operator
Mode can be customised to speed up routine work. The
operators ID and password open the application, and automatically sets the scope to the operators preferred mode,
observation, analysis, and measurement settings.

Macro Map: Always Know Where You Are


As you adjust the zoom magnification to a higher level the
area you can see at one time is reduced. The system automatically records a full field of view image in a separate macro
window. On this full field image your location on the sample is
noted and updated as you move your sample. In addition, if
you use the panorama function it will be displayed in the macro
window to provide the same convenience on an even larger
area.

New Touch Screen User Interface


In the past, operators had to make complicated adjustments
on their microscopes to achieve their desired results; with the
DSX500, its simple. Once the sample is in place, everything
is controlled by touch screen, computer mouse or joystick
inspection position, focus, zoom, illumination, and choice of
inspection methods. All controls are direct and easily performed.
In addition, auto-focus and auto-gain ensure illumination and
focus are correct every time.

Macro map: Always know where you are

Optical Zoom Gets You Closer to Your Sample


Change the magnification to fit your needs with continuously
variable optical zoom. The DSX500 gives you an optical zoom
up to 13x and a digital zoom all the way to 30x. A single optical
lens can cover the typical magnification range of conventional
optical microscopes. Plus, two lenses can be mounted at
once for an even greater magnification range. When you
switch lenses, DSX500 automatically adjusts magnification so
the viewing area size is maintained.

GUI enables direct and comfortable operation

Zoom in on your sample

Superb Operating Simplicity

Best Image Just choose the image you want from the previews on the screen

Anisotropic conductive film (ACF) on the LCD pattern

HDR Enables high-definition inspection even in areas that have both high and low reflectance materials

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Operating Simplicity Lets Even an Inexperienced Operator


Observe Samples They Couldnt Before

The leading-edge digital technology of this microscope lets you see more than any other microscope can.
Before, only experts with years of experience could adjust microscopes to achieve optimum images. The
DSX500 allows any operator to do that with an easy to use interface. Now all it takes is a touch of the finger
to follow a few easy steps to achieve the ideal image for inspection or analysis.

Best Image Function Ensures


Optimum Performance

Change Observation Methods with One Click

Now you can operate your system just by choosing the image
that works best for you, and the DSX500 will set the necessary parameters to achieve that image. That ensures the best
possible image, whether looking for defects, uneven surfaces,
or foreign objects. Anyone can operate the system, beginner
or expert, and it can be customised for each operator or
advanced user.

With virtually every industrial observation method at hand, its


easy to choose the proper one for the current task. No complicated adjustments needed.

A click of a button gives you the image you want on screen

HDR Gives High-Definition Visuals that


Go beyond the Human Eye

MIX Observation Method Easily Detects Defects


and Imperfections

Samples may appear differently depending on the quality of


material, surface conditions, or illumination methods. The High
Dynamic Range (HDR) function of the DSX500 combines
several images taken at different exposures to very accurately
correct brightness differences on the sample surface. HDR
provides high-fidelity images that show not only textures but
also flaws and defects that were undetectable before. Glare
can also be reduced for more comfortable observation.

MIX combines BF with DF LED illumination, something conventional microscopes cannot do. With bright-field visibility
and added dark-field detection capabilities, defects and
imperfections can easily be detected.

WiDER Provides Easy Inspection of Samples


with High Reflectance Difference
If the non-reflective area cannot be seen, merely increasing
the illumination power is often not enough, because glare can
occur. Olympus intelligent image processing technology
eliminates these problems with WiDER, a proprietary system
that works effectively with live images, is ready to go at the
click of a button, and takes care of the high contrast problems
in real time. No blackouts. No glare.

BF

DF

MIX (BF+DF)

Periphery of a through-hole

A click removes imaging problems caused by different materials

Superb Operating Simplicity

Panoramic photos Use the mouse or your finger to select the areas you want to see

MEMS

3D measurement A click of a button lets you view your sample in 3D

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Simple Operation Lets You See


What You Couldnt See Before

The DSX500 requires no extensive knowledge or special techniques to show you exactly what you want to see.
By calling on leading-edge electronic technology, you can now see what was unclear or impossible before.

Panoramic Images Include Areas


beyond the Field of View

Customisable Report Function Makes


Generating Reports Simple and Easy

On the DSX500 there is no such thing as outside the field of


view. Just move the observation position on the screen, and
the motorised stage will move the sample to that place. As
the stage moves, the system automatically stitches images
into a single large field of view, in real time. Where conventional
microscopes reduce field area with increases in magnification,
Panoramic View maintains the original field while giving closeup clarity with 2D, extended focus, or 3D, or any combination of the three.

With DSX500, you can perform an observation or measurement, and the system will automatically generate the relevant
reports.

A click can generate a report

3D Imaging Allows You to View Your Sample


as It Actually Is
The DSX500 can easily show your sample in three dimensions, and then you can examine it from any angle.

Extended Focal Range Imaging Shows Everything


Where conventional microscopes can focus only at one level,
DSX500s Extended Focal Image (EFI) capability maintains
focus across the entire range, which makes uneven surfaces
easier to inspect.

Report output

Colour Enhancement Feature Shows Only


What You Want to See
If you put what you need to see in colour and leave the rest in
monochrome, its much easier to find defects, if any exist.

filament

Even when using dark-eld or DIC


images, focus is automatically
maintained across the eld of view

Inspection is easier when you can highlight possible defects or contamination


for inspection

Absolute Performance Reliability

Semiconductor pattern

User-friendly GUI Complete with traditional Olympus reliability

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Olympus Long Experience Gives DSX Microscopes


the Ability to See What Digital Microscopes Cannot

Olympus guarantees the reliability of all DSX500 microscopes because they are born of Olympus optical and
digital technology. Glare is minimised and colour reproduction is real. And to make sure of that, Olympus uses
the perfect combination of CCD chip and graphic boards. The sample is reproduced with such accuracy its
like a new dimension.

High-Quality Optics Let You See Into


Another Dimension

High Resolution 18MP Images Reproduced


with a High-Performance CCD*

The DSX Series is the cumulation of Olympus long history of


superior engineering and design capabilities as well as proven
manufacturing quality. In the clear images produced by the
DSX500 opto-digital microscope, youll find neither flare nor
distortion, unheard of in other digital microscopes.

Olympus High-Performance CCD is the engine that shows


exactly what our high-quality optics reveals. The image shift
function ensures high fidelity with fine detail processing, so the
clarity extends from corner to corner.

The optical technology and dedicated lenses

High performance CCD

Dedicated DSX500 Field Lenses Make


High-Grade Image Dissection a Simple Matter

LED Illumination Gives Picture-Perfect


Inspection While Reducing Energy

These new 10x and 40x lenses were designed and manufactured for the DSX500. They combine high NA and long working distance as never before. Just zoom in and achieve
extremely high resolution. Whats
more, you can also use other
standard Olympus UIS2 lenses.

New LED illumination not only assures accurate observation,


but also provides low running costs. Most importantly, the
colour does not change with the LEDs intensity thus minimising the need for white balancing. And the long working life of
the LEDs means the instruments are virtually maintenance
free.

*4800x3600 pixels, 3CCD mode conversion triples the pixel count

Absolute Performance Reliability

Caliper measurement

Through-holes on a substrate

2D measurement

Particle analysis

3D Step measurement

Prole 3D measurement

Solar cell electrode

3D Area and Volume


measurement

2D and 3D measurements Enable measurements from every angle for various applications

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Precision Measurement with Absolute Reliability that


Cannot Be Matched by Conventional Digital Microscopes

The DSX500 shows Olympus dedication to accurate measurement with its telecentric optics and stabilised
frame design. The measurements are accurate and reproducible.

Accuracy and Repeatability Guaranteed


The DSX500 provides precise and repeatable measurements.
The accuracy is traceable to national standard.
*Calibration by Olympus or dealer specialists necessary

National Institute of
Advanced Industrial Science and Technology
National Metrology Institute of Japan**

Low Centre of Gravity, Sturdy Frame, and


Anti-Vibration Ensure Measurement
Performance
The low centre of gravity and sturdy frame of DSX500 scopes
provide sufficient stability at high magnification. Furthermore,
the anti-vibration function reduces vibration significantly that
might affect inspection or measurement at high magnification.

JCSS AccreditedLaboratory 0044 Olympus Corporation


Quality Assurance Division Testing and Research Center**

Standard Scale for DSX500 Series

DSX500/500i
**Differs according to national and regional statutes

Without anti-viberation
compensation

With anti-viberation
compensation

Traceability diagram from a DSX500 series opto-digital microscope

Auto-Calibration Eliminates User Errors


Proper calibration is crucial to precise measurements, and
with the Olympus DSX500, any operator can calibrate simply
and accurately. This eliminates any differences that
occur when different operators calibrate.

Telecentric Optics Ensures Precise Dimension


Measurement
With telecentric optics, the size of the image does not alter
when focus changes.

Advanced Materials Analysis Capability Is


Available Through OLYMPUS Stream
Metallographic evaluation, such as granularity analysis can
be accomplished through Olympus Stream Image analysis
software*. At the touch of a button, Olympus Stream software starts up and accesses the DSX image and data files
immediately.
*Available as an option

*Calibration sample is required

Choice of 2D and 3D Measuring


The DSX500 microscope comes equipped with both 2D and
3D imaging capabilities. That means you can measure along
the X, Y axis, or along X, Y, and Z axis. Observe, inspect, or
measure from any angle.
*3D imaging function is an option

Option

The Super HDR Option Provides Even Greater Imaging


Performance for Your DSX500 Microscope
Your DSX500 comes standard with ease of operation and high reliability beyond any other industrial
microscope. But if you need even more efficient observation, the super HDR option provides it.

Super HDR
User-selectable Fine and Fast HDR modes
As the SNR is higher, inuence of noise is lower to get a better image.
High

Fine HDR

SNR (Signal-to-noise ratio)

When you need higher image quality without sacrificing


speed, Olympus offers our Super HDR software. This software offers two modes, in the fast mode, you have increased
frame speed while in fine mode you achieve finer definition
than the standard HDR mode.

(Higher quality image)

Fast HDR

Standard
HDR

(Fast live image)

Normal
image
High

Refresh rate*

* Refresh rate is the number of times a displays image is refreshed per second.
It depends on observation conditions (exposure time, reection and so on).

Fast HDR Mode

Fine HDR Mode

Fast HDR provides images at 12 frames per second so you


smooth imaging even when moving the stage or focusing the
sample.

Fine HDR images provide a better image quality with less


noise. This is accomplished by gathering more data than
standard HDR.

IC pattern

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The DSX500 Opto-digital Microscope Offers Operating Simplicity


and High-Resolution Images that Cannot Be Matched by
Other Microscope Systems

CCD
(Bright-field)

Particle on semiconductor wafer


(Dark-field)

Particle on semiconductor wafer


(MIX)

LCD
(Bright-field, transmitted light illumination)

Coating surface
(DIC)

Coating surface
(DIC + HDR)

Printing surface
(Bright-field + HDR)

Mould component
(3D)

Diamond grindstone
(3D)

DSX500 System diagram


XLMPLFLN40XDSX

XLMPLFLN10XDSX

DSX-HR specialised
objective lens 40x

DSX-HR specialised
objective lens 10x

UIS2 objective lenses

BD-M-AD
Adopter to mount
BF objectives

LG-SF
Light guide

DSX-ILPS
DSX-HRSU

DSX-CALS-HR

High intensity LED


light source

High resolution head

Calibration sample for DSX500

DSX-HRUF

DSX-CB

DSX-CTRL-E

DSX-TLCD

Upright frame

Control box for DSX system

Controller English OS

23 touch panel display

DSX-BSW
Software licence

U-SIC4R2
Right hand control
large-size stage

DSX-UFSSU
100x100mm motorised
stage for Upright frame

OLS40-EMG
Emergency stop device

DSX-ASW-3D
3D measuring software

DSX-ASW-EDM
U-WHP2

U-MSSP4

Right hand control


large-size stage

Stage plate

Joystick

Edge detecting measurement

DSX-ASW-PAM
Particle analysis

DSX-ASW-SHDR
Super HDR

BH2-WHR43

DSX-ILT

3-4 Wafer holder plate

LED transmitted light illuminator

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DSX500 Specifications
Zoom ratio

13.5x optical zoom (0.26x-3.5x), 30x with digital zoom


No. of objective lens

Max 2 (restriction applies)


DSX Dedicated
objective lens

Nosepiece (Manual)

Accuracy and
repeatability (X-Y plane) * 2

XLMPLFLN10X, XLMPLFLN40X

Mountable objective lens

MPLFLN1.25X, MPLFLN2.5X, MPLFLN5XBDP, MPLFLN10XBDP,


UIS2 objective lens MPLFLN20XBDP, MPLFLN50XBDP, LMPLFLN10XBD,
LMPLFLN20X, LMPLFLN50X, MPLAPON50X

Accuracy of magnification

3%

Repeatability of magnication 3 n -1 = 2%
Embedded standard

Bright field: LED, Dark field: LED

Optional illumination

High intensity LED * 1 / Transmitted LED

Image sensor

1/1.8 inch, 2.01 megapixels, Colour CCD (Total pixels : 2.10 megapixels)
Total pixels
: 1688(H) x 1248(V)
Available pixels : 1628(H) x 1236(V)
Effective pixels : 1600(H) x 1200(V)

Cooling method

Peltier cooling

Scan mode

Progressive scan

Illumination

Main frame

Camera

Frame rate

15fps / 27fps with binning mode

Image size

Normal
: 11941194(1:1) / 15921194(4:3)
Fine
: 11941194(1:1) / 15921194(4:3)
Super fine : 35943594(1:1) / 47923594(4:3)

Sensitivity

ISO100 / 200 / 400 / 800 / 1600 equivalent

Stroke

95 mm

Resolution

0.01 m

DSX

65 mm

UIS2

95 mm

Stroke

100 x 100 mm

Load capacity

3 kg

Stroke

100 x 100 mm

Load capacity

1 kg

Size

23 with Touch panel and Full HD colour LCD monitor

Resolution

1920(H) x 1080(V)

Focusing unit

Maximum sample height

DSX-UFSSU (Motorised)
Stage
U-SIC4R (Manual)

LCD Monitor
Weight

Approx. 38.6 kg (Main frame, Motorised stage, LCD Monitor, Control box, Controller)

Input rating

100-120V/220-240V, 300VA, 50/60Hz

*1 Cannot be used with the embedded standard LED. *2 Calibration by Olympus or dealer specialists necessary.

DSX500 Series Objective Lens


Series

N.A.

W.D. (mm)

Actual F.O.V. (m) * 3

Total Magnication * 4

0.3

30.0

1,960-151

139x-1,803x

0.8

4.5

490-38

555x-7,211x

0.04

3.5

15,684-1,206

17x-225x

*2

0.08

10.7

7,842-603

35x-451x

MPLFLN5XBDP

0.15

12.0

3,921-302

69x-901x

MPLFLN10XBDP

0.25

6.5

1,960-151

139x-1,803x

MPLFLN20XBDP

0.4

3.0

980-75

277x-3,606x

MPLFLN50XBDP

0.75

1.0

392-30

693x-9,014x

LMPLFLN10XBD

0.25

10.0

1,960-151

139x-1,803x

LMPLFLN20XBD

0.4

12.0

980-75

277x-3,606x

LMPLFLN50XBD

0.5

10.6

MPLAPON50X * 1

0.95

Model

Perforcal distance

XLMPLFLN10XDSX * 1
DSX dedicated objective lens

75 mm
XLMPLFLN40XDSX

*1

MPLFLN1.25X * 2
MPLFLN2.5X

UIS2 objective lens

45 mm

0.35

*1 DF and MIX are not available *2 Available for BF only *3 At aspect ratio 1:1 (with factory default value) *4 At aspect ratio 1:1

392-30

693x-9,014x

392-30

693x-9,014x

DSX Series

High-resolution
Inverted scope

Free-angle
Wide zoom scope

DSX500 Dimensions
363

550

338

375

215

1300

unit: mm

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