Cleanroom Airflow Modeling to Determine

the Required Air Change Rate (Phase 1)

Principal Investigator

Wei Sun, P.E.

Principal, Director of Engineering
Engsysco, Inc.
Ann Arbor, Michigan, USA
Co-Investigators
John Mitchell
Particle Measuring Systems, Inc.
Boulder, Colorado, USA

Keith B. Flyzik
Micro-Clean, Inc.
Bethlehem, Pennsylvania, USA

Shih-Cheng Hu, Ph.D

Junjie Liu, Ph.D
National Taipei University of Technology
Tianjin University
Taipei, Taiwan
Tianjin, China
Sponsored by TC 9.11
ASHRAE Annual Meeting
(June 22, 2008, Salt Lake City, UT)

Engsysco

Strategies of Cleanroom Fan Energy

Conservation
During Operational Phase
Use Flow Demand Control to cut down
unnecessary airflow over-supply
During Design Phase
Use Modeling to Determine the Airflow Change
Rate (AHR) to maintain the required cleanliness
classification

Air Change Rate

- Cleanroom vs. General-Purpose Room
Type of Facilities

Cleanroom Spaces
- To Mainly Dilute and Remove Particles
15
10%

General Purpose Spaces

To Meet Heating & Cooling Loads

6 25

Air Change Per Hour (ACH)

540 600

Cleanrooms utilize much higher airflow rates than for generalpurpose buildings, energy saving potential from airflow rate
reduction is significant.

Cleanroom Air Change Rate

- Existing Guidelines
High volume airflows have been utilized to meet FS-209
standard, and IEST (RP) for decades
FS-209 Class

100,000

5 48

10,000

60 90

1,000

150 240

100

240 480

10

300 540

360 540

360 600

IEST Recommended (RP-12)

Air Change Rate For Cleanrooms
700
600

600

Air Change Per Hour (ACH)

ISO Class

Air Change
Per Hour
Range

Classification

600
540

540
480

500
400
360

300

360

360
240

300

200

240
150

100

90
48
60

0
0

ISO Cleanliness Class

1
IEST Recommended Practices RP-12

This practice was based on old experience, in which air

change rates were arbitrarily selected Solely based on room
cleanliness classes.

Cleanroom Air Change Rate,

Existing Practices & Problems
Intuitively, ACR should be based on the required
cleanliness class and the activities being
performed in the space. Activities that generate
higher level of dust would need higher ACH than
those that generate at lower level.
Most design/operating engineers choose to obey
the existing guideline to avoid being challenged.
However, to have a scientific justification to save
fan energy, modeling to have a quantitative tool
is required.

Cleanroom Air Change Rate,

Existing Practices & Problems
Cleanroom airflow rate should be provided as
needed instead of picking an arbitrary rate
from the table, a better approach should be
similar as those of building heating/cooling load
calculations utilized today.

Establish Mathematical Model

Configuration 1 (Conventional Primary Loop)
SA

C
C

FILTER

AHU Unit
H
C

OA+RA

OA
Makeup
Air

Efficiency Ea

Co

V
OA
SA
RA
EA
Q
Cs

=
=
=
=
=
=
=

Efficiency Eb

Supply
Air

HEPA

SA

Co =

Space Impurity
Cs
Concentration
RA

Space
Particle Generation

Q
Leakage
Air
Cs

G
Deposition
D

Return
Cs
Air
EA

Es =
G =

Exhaust
Air
Ce

T =
Ea =
Eb

Space volume (ft3)

Rate of makeup airflow (volume/time)
Rate of supply airflow (volume/time)
Rate of return airflow (volume/time)
Rate of exhaust airflow (volume/time)
Rate of leakage airflow (volume/time)
Impurity concentration in space
(parts/volume)
Impurity concentration in makeup air
(parts/volume)
Filter efficiency (mass basis)
Rate of impurity generation in space,
averaged throughout the space
(parts/volume/time)
Rate of impurity deposition from air to
surface in space, averaged throughout
the space (parts/volume/time)
Time
AHU filters combined efficiency

[ = 1 - (1 - E2)(1 - E1)]
= Ceiling HEPA filter efficiency

Establish Mathematical Model

Configuration 1 (Conventional Primary Loop)

Indoor Particle Balance Differential Equation

During Time Interval : dt
SA

C
C

Room particle count change: dCS

H
C

OA+RA

Co

Efficiency Eb

SA
Supply
Air

Space Impurity
Cs
Concentration
RA

Space
Particle Generation

Q
Leakage
Air
Cs

G
Deposition
D

OA
Makeup
Air

Efficiency Ea

HEPA

= Supply air particle addition

+ Room particle internal generation
- Return air particle removal
- Exhaust air particle removal
+ Leakage air particle removal/addition
- Particle deposition on surface

FILTER

AHU Unit

Return
Cs
Air
EA
Exhaust
Air
Ce

Establish Mathematical Model

Configuration 1 (Conventional Primary Loop)
Indoor Particle Balance Differential Equation
V dCS = (OA CO + RA CS ) (1 EU ) (1 E H ) dt + G V dt RA CS dt EA CE dt Q CS dt D V dt

Room Mass Balance Equation

SA = OA+RA, SA = EA+Q+RA

With basic operations, define:

m + (EU + EH EU EH ) r = a
(1 EU ) (1 EH ) m +

GD
=b
Co ACR

b
C ST = Co =
a

(1 ) G
ACR
m + ( EU + E H EU E H ) (1 m )

(1 EU ) (1 E H ) m CO +

Establish Mathematical Model

Configuration 1 (Conventional Primary Loop)
Equation to Calculate Room Particle Concentration:

b
b
CST = CSO Co e a ACR t + C o
a
a

If t,
CST

GD

(
1
)
(
1
)

m
+
U
H

Co ACR
b
= Co =
Co
a
(
)
(
1
)
m
E
E
E
E
m
+
+

U
H
U
H

Room Particle Concentration is a function of variables of:

Room air change rate ACR,
Room particle generation G, (data survey)
AHU filters combined efficiency EU,
Room HEPA efficiency EH,
Particle deposition rate on exposed surfaces D
Outdoor particle concentration CO,
Outdoor air/supply air ratio m

Effect of Internal Particle Generation Rate

on Room Particle Concentration
Room Particle Concentration versus Air Change Rate
(Steady State)
- Effect of Internal Particle Generation Rate

Concentration (Number of Particles Per FT3)

1,000,000.0

Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space

Condition:

100,000.0

OA/SA=5%
6
CO=1x10
EU=95%
EH=99.97%
=5%

10,000.0

1,000.0

Unit:
Particals/FT3/Min.
100.0
G=1
10.0

G=10
G=100
G=1000

1.0

G=10000
0.1
0

100

200

300

400

Supply Air ACH (Air Change Per Hour)

500

600

Effect of Room HEPA Filter Efficiency

on Room Particle Concentration
Room Cleanliness (Concentration) versus Air Change Rate
- Effect of Final HEPA Filter Efficiency
1,000.0

Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space

Concentration (Number of Particles Per FT3)

Condition:
OA/SA=5%
CO=1x106
EU=95%
G=10
=5%

100.0

Unit:
3
partIcals/FT /Min.

10.0

EH=99.97%
1.0
EH=99.997%

EH=99.9997%

0.1
1

10

100

Supply Air ACH (Air Change Per Hour)

1,000

Effect of Outdoor Air Intake Particle

Concentration on Room Particle Concentration
Room Particle Concentration versus Air Change Rate
(Steady State)
- Effect of Outdoor Air Intake Particle Concentration
Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space

1,000.0

Concentration (Number of Particles Per FT3)

Condition:
OA/SA=10%
EU=95%
G=10
= 5%
EH = 99.997%

100.0

Unit:
3
PartIcals/FT /Min.

10.0

Co=100,000
1.0

Co=1,000,000
Co=10,000,000

0.1
0

100

200

300

400

Supply Air ACH (Air Change Per Hour)

500

600

Effect of Outdoor Air Percentage of Supply air

on Room Particle Concentration
Room Particle Concentration versus Air Change Rate
(Steady State)
- Effect of Outdoor Air Percentage of Supply Air
Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space

1,000.0

Concentration (Number of Particles Per FT3)

Condition:
5

Co=1x10
EU=95%
G=10
= 5%
EH = 99.997%

100.0

Unit:
3
PartIcals/FT /Min.

10.0

m=5%
m=10%

1.0

m=15%
m=20%

0.1
0

100

200

300

400

Supply Air ACH (Air Change Per Hour)

500

600

Model-Based ACH versus

IEST RP-Based ACH
Model-Based ACH vs. Recommendation-Based ACH
100,000

Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space

Concentration (Number of Particles Per FT3)

Condition:
OA/SA=10%
CO=1x105
EU=95%
EH=99.997%
= 5%

10,000

1,000

Unit:
particals/FT3/Min.
100

G=100, Model
Based
G=1,000, Model
Based

10

G=5,000, Model
Based
ACH-Low, Rec.
Based

1
0

100

200

300

400

Supply Air ACH (Air Change Per Hour)

500

600

ACH-High, Rec.
Based

Research Experiments & Validations

Experiments to validate model-based ACR
determination have being conducted in three research
labs. Final data and conclusions will be published in
November, 2008, supported by CEC. Real-world
application and software development will start in 2010.
Demonstrate cost-effective approaches to lower the
Air Change Rate, to reduce fan energy waste.
Propose new Air Change Rate Recommendation Group of Charts, to replace existing over-simplified
guidelines.

Selected Cleanroom Labs Description

Lab 1
Floor Plan
Symbol
2'x2' Fan
Filter Unit

2'x4' Fan
Filter Unit

Prep. Room
Class 1,000-10,000

30"x24' Sidewall
Return Grille &
Shaft
48"x24' Sidewall
Return Grille &
Shaft

Gown Room
(Airlock)
Class 100,000
Process Room
Class 1-100

Selected Cleanroom Labs Description

Lab 1
Airflow Diagram

Mixing

Mixing

AHU

12

10

11

Prep Room
Class: 1,000-10,000
Flow: 1,641 cfm, 74 ACH
Size: 143"x167"x96"(H)

Gown Room
Class: 100,000
Flow: 601 cfm, 77 ACH
Size: 96"x88"x96"(H)

Process Room
Class: 1-100
Flow: 4,2874 cfm, 712 ACH
Size: 96"x72"x90"(H)

Selected Cleanroom Labs Description

Lab 2
Floor Plan
Symbol
2'x2' Fan
Filter Unit
Airlock
Class 10,000

2'x4' Fan
Filter Unit

Testing Cleanroom
Class 1-1,000
48"x12' Sidewall
Return Grille &
Shaft

Selected Cleanroom Labs Description

Lab 2
Airflow Diagram
OA
MAU

FFU
DCC

DCC

Particles

RA

Non-unidirectional Cleanroom
Class: 1 ~ 1,000
Air Velocity = 60~100 FPM
Temp.: 723F, R.H.: 455%
Pressure: +0 ~ 0.08 in.

Particles

RA

Selected Cleanroom Labs Description

Lab 3
Floor Plan
Symbol

Return

HEPA Supply

(Pattern 1)

2'x2' HEPA
Supply

Return
(Pattern 2)

Research Cleanroom
Class 1,000-10,000
ACH: 5-50

2'x2' Return
(Ceiling)
Return
2'x2' Return
(Low Sidewall)

HEPA Supply

(Pattern 1)

Return
(Pattern 2)

1'x1' HEPA
Supply
1'x1' Return
(Ceiling)

PassThrough
Airlock
Class 10,000

ACH: 5-30

Prep. Room
Class 10,000

ACH: 5-30

Selected Cleanroom Labs Description

Lab 3
Airflow Diagram

Supply Air

Ceiling

HEPA Supply

Research Cleanroom
Class 1,000-10,000
ACH: 5-50

Return Air

Supply Air

Return Air

HEPA Supply

Airlock
Class 10,000

HEPA Supply

Prep. Room
Class 10,000

Particle Concentration and Distribution under

Various Flow Scenarios
Lab 3
Particle Sensor
Locations

12

10

5
13

11

15

Research Cleanroom
Class 100-10,000
3
8
Ceiling

14

HEPA Supply

E
A

Prep. Room
Class 10,000

C
Floor

Sensor Elevation Panes

Particle
Generation
Point

Sensor Location Plan

Particle Concentration and Distribution under

Various Flow Scenarios
Space Velocity Profile under Air Change Rate
(Flow Pattern: Ceiling Supply & Ceiling Return)

Sensor Location

0.6

01-A
01-C
02-A
02-C
03-B
04-A
04-B
05-A
05-B
05-C
07-C
07-E
08-C
08-E
09-E
10-B
10-E
11-C
12-A
12-C
13-B
14-A
14-C
15-B

Air Velocity (m/s)

0.5

0.4

0.3

0.2

0.1

0.0
5

10

15

20

Air Change Rate Per Hour

25

30

Particle Migration Under Pressure Differential

Between Rooms
2

Measure Particle Migration to

Cleanroom (Contamination Receiver)
5

Pneumatic Air-Seal Door

Sealed PassThrough

Generate Particles in Prep.

Room (Contamination Source)

Particle Deposition on Exposed Surface

Room Space Particle Generation Rate: 9,300,000 counts/min., Duration: 4.75 hours=285 min.

Walls
Ceiling
Window Glass
Floor

Unit Surface Particle

Areas (m ) Areas (F ) Deposition Rate
(counts/minm2)
39.32
423.2
2.13E+03
20.16
217.0
2.07E+03
3
32.3
3.37E+03
20.16
217.0
4.28E+03

Total

82.64

Exposed Surfaces

889.5

Surface Particle
Deposition Rate
(counts/m2)
6.07E+05
5.90E+05
9.60E+05
1.22E+06

Surface Particle
Deposition Rate
(counts/min.)
8.38E+04
4.17E+04
1.01E+04
8.63E+04

Surface Particle
Deposition
Percentage

Percentage of
Particles Removed
through Return Air

0.90%
0.45%
0.11%
0.93%
2.39%

97.61%

Experimental Validations of Cleanroom

Airflow Rate Modeling Approach
(Phase 2)

More Test Data

More Mathematical & Statistical Analysis
Conclusions & Recommendations
To Be Published in CEC Research Report In
November, 2008, and Available in ASHRAE
Chicago Meeting, January 2009.

Q&A