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  • Silicon Optical Bench - Micralyne MEMS Foundry

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    Micralyne
    307 tayangan2 halaman
    Benefits of a Silicon Optical Bench Platform • Passive alignment and automated assembly • Greater sub-component integration capabilities • Scalable production yielding lower per unit manufacturing costs • Fewer process and assembly steps • Greater versatility to integrate new applications into existing product platforms • Enhanced testing and measurement capabilities

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    Benefits of a Silicon Optical Bench Platform • Passive alignment and automated assembly • Greater sub-component integration capabilities • Scalable production yielding lower per unit manufacturing costs • Fewer process and assembly steps • Greater versatility to integrate new applications into existing product platforms • Enhanced testing and measurement capabilities

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    Attribution Non-Commercial (BY-NC)
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    307 tayangan2 halaman

    Silicon Optical Bench - Micralyne MEMS Foundry

    Diunggah oleh

    Micralyne
    Benefits of a Silicon Optical Bench Platform • Passive alignment and automated assembly • Greater sub-component integration capabilities • Scalable production yielding lower per unit manufacturing costs • Fewer process and assembly steps • Greater versatility to integrate new applications into existing product platforms • Enhanced testing and measurement capabilities

    Hak Cipta:

    Attribution Non-Commercial (BY-NC)
    Unduh sebagai PDF, TXT atau baca online dari Scribd
    Tandai sebagai konten tidak pantas
    dari 2

    Bringing Your MEMS to Market

    Silicon Optical Bench


    Platform for Integration and Alignment of Multiple Optical Components

    Overview Benefits of a Silicon Optical Bench Platform


    A Silicon Optical Bench (SiOB) • Passive alignment and automated assembly
    system serves as a platform to • Greater sub-component integration capabilities
    integrate optical components • Scalable production yielding lower per unit manufacturing costs
    and subsystems while, at the • Fewer process and assembly steps
    same time, reducing develop- • Greater versatility to integrate new applications into existing product platforms
    ment and manufacturing costs. • Enhanced testing and measurement capabilities

    Silicon Optical Bench (SiOB) Diagram

    Custom SiOBs
    Micralyne custom designs and manufactures application-specific SiOBs for
    customers using our core competencies in thin-film metallization, silicon
    micromachining, and MEMS. Micralyne works closely with its customers from
    product design, through prototype MEMS development and into volume MEMS
    manufacturing.

    www.micralyne.com ETDS306_Rev040-0907_SIOB
    Bringing Your MEMS to Market

    Silicon Optical Bench


    Specifications

    About Micralyne SiOB Capabilities


    Micralyne is a world leading Micralyne integrates its core capabilities to custom design and manufacture
    independent MEMS foundry. application-specific SiOBs for clients. The following summarizes Micralyne’s
    From its state-of-the-art standard capabilities:
    50,000 ft2 manufacturing
    facility, Micralyne develops and Wafer Material: Silicon
    manufactures MEMS-based Thickness: Standard: 450 - 550 µm; Other thickness and
    components in volume.
    tolerances can be specially ordered
    Micralyne is a profitable and
    growing company located in Resistivity: High resistivity wafers available
    Edmonton, Alberta, Canada.
    Silicon Etch Depth: ± 10% <140µm deep; ± 20% >140µm
    Width: ± 5% <140µm deep; ± 10% >140µm
    Features Wells, V-Grooves, Double Level Etching

    Oxidization PECVD and Thermal Available


    Metallization Conductor System: Ti/Pt/Au, Ti/Mo/Au, or Custom
    Resistor System: TaN
    Solder Material System: AuSn (80/20); Electroplated
    For More Information... Thickness: 1 to 20 µm

    Micralyne Inc. Dicing Die Size Tolerances: ± 50 µm


    1911 – 94 Street Edge of Die to First Feature: ± 25 µm
    Edmonton, Alberta
    Canada T6N 1E6

    Tel: +1.780.431.4400
    Fax: +1.780.431.4422

    info@micralyne.com
    www.micralyne.com

    Side View of Silicon Optical


    Bench Step Etch

    ETDS306_Rev040-0907_SIOB
    www.micralyne.com

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