Item No 18-Dual Beam Scanning Electron Microscope

UGC-DAE Consortium for Scientific Research
(An Autonomous Institution under University Grants Commission)

University Campus, Khandwa Road, Indore- 452001 (India)
Phone : +91 0731 2361546, 2463913, 2762267 Fax : +91 0731 2361546, Website: www.csr.res.in E-mail:iucstores@csr.res.in
Dual Beam Scanning Electron Microscope: Item No.*18, NIT 01/2015-16 dated 28-01-2016 due on 29-02-2016.
TWO PARTS TENDER ITEM
Item No.*18- Dual Beam Scanning Electron Microscope:

Specifications:
No.
SPECIFICATION
1.
Supply, installation and performance demonstration of dual beam FEG/ Focused Ion Beam (FIB) system with
necessary hardware and software to meet following specifications
2.
MATERIAL DEPOSITION & ETCHING

Five or more reconfigurable fully automatic separate gas injectors for
2.1.
Gas Injectors
2.2.
Imaging
(a) Deposition of Pt, W, Au & SiO2

(b) Gas Assisted Etching of insulators and metals
The system should be capable of sequential as well as simultaneous patterning/imaging
using ion and electron beams
The system should have provision for neutralizing the specimen when milling insulating
substrates.
2.3.
3.
3.1.
Charge neutralization
HIGH PRECISION PIEZO STAGE & CHAMBER

5-axis motorized stage for mounting upto 2 - 4 Si wafer and arbitrary sizes pieces
3.2.
Max. specimen size
3.3.
Movement range
3.4.
Tilt Range
3.5.
Ports
3.6.
Specimen holders
3.7.
3.8.
4.
Vacuum system
Chamber vacuum
50mm x 50mm; 10 mm thickness

X 50 mm; Y 500 mm; Z 10 mm; Rotation=360
From -10 to + 60
Atleast three spare ports on chamber and one spare port on door.
(a) Specimen holders & stubs for mounting 2 4 wafers
(b) Sample holder for mounting eight or more 1cm 2 sample
(c) STEM sample holders for mounting grids
Fully automatic oil free vacuum system consisting of Ion getter pumps for gun and column,
TMP, backing pump, pneumatic valves and gauges in column, chamber, pumping & backing
line.
Base vacuum: 6 x 10-6 mbar ( 5 x 10-5 mbar in 10 minutes)
ION SOURCE & OPTICS
4.1.
Ion source and

column
4.2.
Source lifetime
Suitable column with Ga liquid metal ion source with provision for beam & aperture
alignment, adjustable stigmator, variable scan speed and blanker for blanking, pulsing and
modulating ion beam
1000 hours


4.3.
Imaging Resolution
4.4.
Magnification
4.5.
Acc. voltage
4.6.
Beam current
5.
7 nm at 30 kV at beam coincident point

From 300X to 500,000X (Continuously variable)
5kV to 30kV, continuously variable
Variable from 2 pA to 50nA
ELECTRON SOURCE & OPTICS
5.1.
Source & column
5.2.
Source Lifetime
5.3.
Magnification
5.4.
Acc. voltage:
5.5.
Probe current
5.6.
Electron beam
induced deposition
6.
Electron column with Field Emission GUN (FEG with provision for beam and aperture
alignment, adjustable stigmator, variable scan speed etc.
1000 hours
From 30X to 10,00,000X (Continuously variable)
500 V to 30 kV (Continuously variable)
Upto 200nA
(a) Electron beam induced deposition system with GDSII Files and capability to import files
in BMP format.
DETECTORS & MANIPULATOR
6.1.
SE Detector
Everhart Thornley detector

At optimum WD: 1.2 nm @ 30 kV;
6.1.1.
6.2.
6.2.1.
6.3.
6.3.1.
6.4.
6.4.1.
6.5.
Resolution
BSE detector
Resolution
Ion Detector
Resolution
STEM detector
Resolution
Energy Dispersive
Spectrometer
At beam coincidence: 1.2 nm @ 30 kV

Solid-state Back scattered electron (BSE) detector
3.0 nm @ 30 kV
Secondary ion detector
At optimum WD & high vacuum: 10.0 nm at 30 kV
It should produce both separate and combined dark field, bright field and high angle annular
dark field STEM images
At optimum WD & high vacuum: 0.8 nm @ 30 kV
Energy dispersive spectrometer (LN2 free) along with necessary software & hardware for
detection of elements from Boron upwards


6.5.1.
Spectral
Resolution
133 eV or better for Mn K at 2,500cps

60 eV or better for C K at 2,500cps:
6.5.2.
Peak Drift
with cps
1eV between 1,000 and 10,000cps (Mn K).
6.5.3.
Software
6.6.
EBSD Detector
6.7.
CCD
6.8.
6.8.1.
Micromanipulator
Range
For data acquisition, quantitative analysis and multi-element mapping.

EBSD Detector coplanar with EDS detector for determination of crystallographic orientation,
grain size and orientation
IR-CCD camera with necessary diodes for illumination
Total FOUR nos. of three-axis manipulators including feedthroughs, control unit etc. out of
which TWO should have low current option. The motion of the manipulators should be
Cartesian.
Operating: >10 mm in XYZ; Piezo Range: >10m in XY & > 1m in Z with resolution better
than 10 nm
Leakage current 0.5 pA @ 1 V ( 0.05 pA for low current option)
6.8.2.
Electrical
Maximum voltage 100 V ( 200 V for low current option)

Current range 100 mA to 10 nA ( 10 pA for low current option)
7.
6.8.3.
Four probe
plug-in
(Optional)
6.8.4.
Probe tips
6.8.5.
Current
sensor
Current sensor for crash-proof landing of probe tips on sample surface
6.8.6.
TEM Lamella
extraction
The manipulator should allow for detachment and retrieval of TEM lamella and should be
capable of repositioning the lamella for in-situ STEM imaging
Three four-point probe plug-in for micromanipulator with probes having 5 m, 15 m and 25
m spacing, mounting tweezers, test resistor
100 Nos. of assorted size
SYSTEM CONTROLLER


System controllers with licensed controller software, OS and latest hardware configuration
better than 2 x 17-inch QXGA monitor, necessary interface cards and ports. Separate
system controller for electron beam induced deposition system and EDS detector, should be
provided.
System controller
The system controller should be capable of:
7.2.
Control panel
(a) Complete control of system and sub-systems.

(b) Automated sequential deposition/etching and imaging of all materials in desired pattern
using generated patterns and imported files..
(c) Automated preparation of multiple 100nm thick TEM samples
(d)
Independent control panel with keyboard, 5-axis joystick controller and knobs for adjustment
of frequently used system parameters.
7.3.
Scripting
Scripting interface details and commands to be provided for automation of different

components and sub-systems of FIB
7.4.
Image resolution
7.5.
Scan types
7.6.
Image Display
7.7.
Image processing
7.1.
8.
Multiple image resolutions from 512 x 384 to 3072 x 2304

Upto 256 continuous averaging, frame averaging and line integration
(a) Split screen for simultaneous display of multiple detectors
(b) 1024 X 768 both single frame/4-quadrant with display of magnification, WD, EHT,
scale bar, date & custom data
System controller should be capable of auto brightness, auto contrast, pseudo coloring,
multiple annotations, point to point & line width measurement and storing image (tiff, bmp or
jpeg format) and video
CONSUMMABLES, SPARES & TOOLS
8.1.
Consumables:
8.2.
Spare Parts Kit
8.3.
Tool Kit
(a) Consumables for THREE YEARS of trouble free operation including but not limited to
electron source, replacement Ga-ion source, gas precursors, apertures, aperture strips,
objective caps, copper gaskets, seals, O rings, fuses etc. to be quoted separately.
(b) Spare Parts Kit for five years trouble free operation and to ensure minimum downtime is
to be quoted separately.
(c) Firm has to guarantee system & spares support for 10 years
Necessary tools kits for:
(a) Mounting and demounting of samples
(b) Replacement of consumables such as electron source, ion source, aperture strips, gas
precursors etc.
(c) Regular maintenance of system and subsystem.


NOTICE INVITING TENDER No. 01/2015-16 dt. 28-01-2016 due on 29-02-2016 at 16.00 hrs.
Director, UGC-DAE Consortium for Scientific Research, Indore invites separately sealed bids from eligible bidders
for supply of the following:
Sl. No.
Description of Item
Two Parts Tender Items
*1.
Water Chiller for Helium Gas Compressor
*2.
Helium Gas Cylinders
*3.
Mass Flow Meter for helium gas
*4.
Stabiliser 300 KVA
*5.
Helium Gas Recovery Compressor
*6.
Helium Gas Bags
*7.
UPS System
*8.
Dewars
*9.
Flexible Liquid Helium Transfer Line
*10.
Stirlin 4 Cryo Generator
*11.
Dilution Refrigerator
*12.
Liquid Nitrogen Plant
*13.
Objective lenses
*14.
Probe Station
*15.
Temperature Controller


*16.
473 nm Laser Source and interface filter for Raman Spectrometer
*17.
Scanning Electron Microscope
*18.
Dual Beam Scanning Electron Microscope
*19.
Vacuum Pumps
*20.
X-Ray Scintillation Detector
*21.
Motorized Cross slits for X-ray and x-y-z sample positioning stages
*22.
Water Chiller
*23.
Vacuum Compatible Silicon Drift Detector
*24.
Intensity and frequency stabilized He Ne Laser for MOKE
*25.
High Temperature Tubular Furnace
*26.
Lock-in Amplifier
*27.
16T Wet Superconducting Magnet
*28.
Current source, Nano-Voltmeter. Electrometer
*29.
High Precision Capacitance Bridge
*30.
Tri Arc Furnace for making high purity intermetallic compound
*31.
Manual Wire Bonder
*32.
Research Based Microwave Synthesizer
*33.
Laser Diode Module
*34.
High Frequency Function Generator
*35.
Interferometry displacement Sensor Cryogenic temperature
*36.
LCR Meter
*37.
Source measure unit


*38.
Table Top Lithography System
*39.
Lorentz Objective Lens for Tecnai-G2-20
*40.
Advance Ferroelectric AC Loop Tracer
*41.
1-Slot multiplexer scanner for switching AC signals for capacitance measurement
*42.
UHV Chamber
*43.
Experimental Station for in-situ XAS measurements
*44.
Low Energy Electron Diffraction (LEED)
*45
Electron beam evaporator
*46.
Sputter ION source
*47.
Z-only liner translator for UHV
*48.
Cleaver
*49.
Ultrasonic Transducers and Receiver
*50.
UHV Vacuum Gauge Controller
*51.
1 Cathode for Magnetron Sputtering System
*52.
Piezometer
*53.
Air Conditioners
*54.
XMCD Experimental Alignment Stand
*55.
Helium Leak Detector
*56.
Substrate Heater for IBS System
*57.
16T Magnet
*58.
4-Circle X-Ray Diffraction System and lane setup
*59.
IR Furnace for single crystal growth

Single Part Tender Items

60.
Pure Helium Gas
61.
High Purity Chemicals
62.
Targets and substrates
63.
UHV Components
64.
Mossbauer Source
a.
Cost of the Tender Document: Rs. 200/- (Non-Refundable) for each item, payable by demand draft in favour of
UGC-DAE CSR payable at Indore,
b.
Detailed tender document can be obtained in person, by post from Administrative Officer-I (Purchase & Stores
Section), UGC-DAE CSR, Indore (address given above) after paying the cost of the tender document. The details
of the tenders are also available on our website www.csr.res.in.
c.
The Tender Document can also be downloaded from our website www.csr.res.in. In case the Tender Document
is downloaded from the website, the cost of Tender Document is Rs. 200/- for each item shall be payable by
Demand Draft in favour of UGC-DAE CSR payable at Indore in separate envelope along with the tender. The
tenderer must submit the tender cost along with the tender. The tenders, if received without tender cost, will
not be considered.
d.
If any overseas suppliers participate in the tender directly (Who does not have Indian Agent or Branch Office
in India), then the cost of the tender documents may be waived.
e.
Starred (*) Items must be quoted in two separate sealed parts (Part A-Technical and Part B-Financial).
f.
Tender document will be available from 29-01-2016 to 27-02-2016 on all working days - Monday to Friday
(10.00 AM to 4.00 PM).
g.
These items can be shifted in any laboratory of the consortium in the country.
Administrative Officer-I
(Purchase & Stores Section)


Terms and Conditions
1.
Tender in sealed cover duly superscribed "Tender No. . dt. due on ..for .. item .. " complete with all details,
otherwise tender may not be opened/considered. If you are interested to quote more than one items, you shall submit the
quotations in sealed cover separately.
(*) items as mentioned in the Tender No. No. 01/2015-16
dt. 28-01-2016 due on 29-
02-2016 at 16.00 hrs. must be quoted in two parts (Part A-Technical and Part B-Financial). The two parts show separate
sealed covers.
2.
Price should be quoted CIP / CIF Mumbai & Insurance up to Indore separately (As per INCOTERMS 2010). In case of local
firms they should quote for delivery in premises of this office.
3.
Director, UGC-DAE CSR, Indore, reserves the rights of accepting in full or part /not accepting the tenders without assigning
any reasons.
4.
The acceptance of tender, will rest with the Director, UGC-DAE CSR, Indore, who does not bind himself to accept the lowest
tender and reserves to himself the authority to reject any or all of the tenders received without assignment of any reason.
5.
Delivery period must be mentioned.
6.
The tender shall remain open for acceptance for a period of 90 days from the date of receipt.
7.
The decision of the Director, UGC-DAE CSR, Indore, shall be final in all the cases.
8.
Director, UGC-DAE CSR, Indore, shall not be liable for postal delays. The incomplete tenders or the tenders received after
due date will not be considered.
9.
Quote your offer along with literatures/catalogues, if any.
10.
We are exempted from the excise duty. The excise duty exemption certificate is issued by Department of Science & Industrial
Research (DSIR), Govt. of India, New Delhi under Notification No. 10/97-Central Excise dt. 1 March 1997. Our Registration
No. is F.No.11/375/99-TU-V dtd. April 1, 2013 & valid up to 31-03-2016.
11.
Price should be quoted exclusive of Customs Duty. This institution will take care of Customs Duty.
12.
Sales Tax / VAT must be quoted separately.
13.
No claim for any tax or duty, not stipulated in the tender will be admitted at any stage.
14.
The tenderer should furnish the users list where similar equipment has been supplied recently.
15.
Special care should be taken to write the rates in figures as well as in words. No overwriting be done on the rates and units.
16
Arbitration: in connection with the present contract shall be finally settled under the Rules of conciliation and arbitration of the
International Chamber of Commerce should be replaced by between both parties in connection with the CONTRACT which


cannot be settled amicably shall be exclusively & finally settled by Arbitration under the rules of conciliation and arbitration of
the International Chamber of Commerce, Mumbai by one or more Arbitrators appointed in accordance with the said Rules.
17.
No deviation from the stipulated terms and conditions will be allowed. Tenders should be unconditional.
18.
The equipment should be warranted for 12 months from the date of commissioning / installation.
19.
It will be obligatory on the part of the tenderer to sign on your offer.
20.
Subject to Indore Jurisdiction.
21.
For Imported goods, the payment will be made through Letter of Credit or after receipt of goods by Wire Transfer. No advance
payment will be made.
22.
For Indigenous goods no advance payment will be made.
23.
The Performance bank guarantee must be provided till the warranty period.
24.
The last date for submission of the tender documents is 29-02-2016 up to 16.00 hrs. Tender will be opened on 02-03-2016
at 11.30 hrs. Tenderer (s) / authorized representative(s) may attend on the opening of the tender bids.

Item No 18-Dual Beam Scanning Electron Microscope

Diunggah oleh

Informasi Dokumen

Hak Cipta

Format Tersedia

Bagikan dokumen Ini

Bagikan atau Tanam Dokumen

Opsi Berbagi

Apakah menurut Anda dokumen ini bermanfaat?

Apakah konten ini tidak pantas?

Hak Cipta:

Format Tersedia

Item No 18-Dual Beam Scanning Electron Microscope

Diunggah oleh

Hak Cipta:

Format Tersedia

UGC-DAE Consortium for Scientific Research

(An Autonomous Institution under University Grants Commission)

TWO PARTS TENDER ITEM