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  • A Micromachined Quartz Angular Rate Sen... Vanced Inertial Applications - Sensors

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    Sensor rotación control estabilidad

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    Sensor rotación control estabilidad

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    56 tayangan7 halaman

    A Micromachined Quartz Angular Rate Sen... Vanced Inertial Applications - Sensors

    Diunggah oleh

    Ricky Garcia
    Sensor rotación control estabilidad

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    © All Rights Reserved
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    " c—e - — @BONG Home | News | Resource Center | TechnicatArtcies | About Sensors | Advertise | Browse by Topic | Sensors Expo prdenis Your Technical Resource for Home> Sensors Products> Postion/Presence/Proximity Related topes: Position/Presence/ProximilySensors Mae, Technologies in Depth, Technology Tutorials @©enanenieres _ Position/Presence/Proximity A Micromachined Quartz Angular Rate Sensor for Qrnerseeru27 Automotive and Advanced Inertial Applications gust 1999 @ sensorsjob eoard By Robert D. Geddes, BEI Technologies, In. ne. . Dr. Asad M. Madh, BEI Technolages, ne Me usta AT prensa gua nl Sper dei igs Most Read Articles ‘ADozen Ways to Measure Fluid Level and How They wearouthave been a goalof the industry for many Work years, The concept of using a vibrating element to measure rotational velocty based on the Corie principle has aso been around fora few decades. n fact, the ides arose from the observation that a certain ‘Truly low-cost highly producibe inertial sensors with no known Fundamentals of Pressure Sensor Technology Manometerfasles species of fy uses a pair of ubrating antenna to stabllze its flight. This sensing technique was he Inspirauon behind the pracucal embodiment of BEL The Principles of Level Gyrthip. Measurement ‘The Coriolis Beet The Basics of Rtameters Editor's Picks and mathematician Gustave Gaspard de Cortolls neers ‘anding, Measuring, Coriol's is best remembered for his 1835 seminal ‘And Using Thermistor paper, "Sur les Equations du mouvement relatif des systémes de corps,” in which is demonstrated that the laws of Figure 1. A vibrating dual-ended quartz tuning {ore and signal processing electronics constitute ‘a complete gyroscope. WES tor aner __tferenceifan extra force called the Carli ES Oscar Mavi cleans aed the estos o 22 msi news Iherotatng ame orefeence ite rarer to Develop rst TE rotating velo othe Enh anneal 200 fables veoasie wth {esse physess and maternacane Monarch TEM Chip Cominueto eto explain in yrs how eee eee eee of Photo 1. BEI MotonPak and BEI GyroChip series angular NEWS ‘that ite rate sensors are offered in a varety of packages and pion Automat the Cori efecs that exited by wine brecsion Automated piternsontarth,Connectan rey wine specifications to satisfy a wide spectrum of applications. Thermal netae Emosphere et up awn fl rom the Management Apes pales toward the equator wth a northsuthorentaton, The Earth's retavon, however, causes thes near fows mee tecevelop a sidenay (ochogonshamponet 9 maton. This "bende the wind rom a north-south an eae west diecton, cs the Caras erfect that creates the east-west “rade wind,” and which s responsible forthe spiralof clouds observed in satelite photos. The basic formula defining the Corll effects: Ieael And Exprivia To Launch New Teleme system 2m angular velocity) x velocty in a rotating frame) (1) ‘As apalied a the motion ofa particle P along 2 path inthe lamina asthe lamina, and thus she path, aswell moves, the otal acceleration aps Ben by: 8" ypu 18 20K V pain 2) where: CWS aH ‘SUBSCRIBE TODAY! colnides atthe instant organ veloc of P relative to polnt Mt, which is onthe path and ith whieh P coincides at the instant this veloc can only be tangentalto the path along which Pfs moving in the body (= angular velocity of the path r lamina) 20x pipxh* Corliss component: its directions obtained by visualizing the rotation inthe plane of the lamina of V pai through 2 Fight angle in the same sense as ‘The Coriolis force is one of three Irsportantdasses a forces in physics thacare called "thous, The ether swo are centritugal force and the apparent force that isa accelerating reference frame. Yet ‘those experiencing these forces cannot tel that they are feious In any sense. Indeed, the cornerstone of Einstein's theory of _ereral relativity i the equivalence Principle, wich states tat “cious forces cannot be stinguished in ary way whatsoever fram rea forces, by any interior experiment" Simply stated, this principle relies on experiments demonstrating ‘equivalent forces measured outside the rotating frame of reference on this case, Earth, Photo 2, The BEI GyroChip yaw ‘sensor is a crucial component in automotive dynamic stability control systems. (Courtesy of GM McG.) Photo 4, BEI GyroChip technology plays a key role in the platform stabilization of the Longbow Apache helicopter (A) and the ‘Sikorsk §-92 HELIO stabilization systems (8) 1m 1851, ean Bernard Léon Foucaut (1819-188), 2 French physicist and georetician, became the fist to use the Foucault pendulum to experimentally determine the rotation ofthe Earth, and in doing so confirmed the presence othe Coriolis effet. His experiments represented atthe Smithsonian in Washington, DC. In 1852, Foucaule went ont invent the ‘modern gyroscope. Obviously al his early experimentation was carted aut without the benefit of today’s satelite technology Principle of Operation The 81 GyroChip family of products uses avirating quart tuning fork to sense angular velocity 1) By using the Corals efec, a otational motion about the sensor's longitudinal axs produces a OC voltage proportonalte the rate of rotation. The sensor consists ofa micoministure double-ended quart tuning fork ana supporting structure, al fabricated chemical froma single wafer of monocrystalline piezoelectric quartz similar te quartz watch ery). ‘The use of plezoclecric quar materia simplifies the active element, esulng In exceptional stably over temperature and time. The drive tines, whien| Constitute the active potion of the sensor, are driven by an ascltor crcl at a precise amplitude that causes te ines to move towar and away from one another at arin frequency (see Figure 1). Each tne willhave 2 Corils force acting on tof: mO\xV, where: = Instantaneous radial velocity Photo 5. A trad of ORSt1s provided the astronauts I=inputrate with an inertial reference during untethered This forces perpendicular to both the input rate andthe instantaneous radial Soacewalks. [Courtesy of velocity. The to drives tines move in apposite directions; the resukantforces NASA) are perpendicular to the plane of the fork assembly and In opposite drectons ae wel [hi pracuces a torque thats proportional othe input rotational ate, Because the radial velocity sinusoidal she torque produced is also sinusoldalat the same frequency ofthe drive ines, and in phase with the radial velociy of the tne $ignal proportional tothe sensor's rotation. The output signal of the BEL GyroChip reverses sign with the reversal of the input ate since the osllaing torque produced bythe Cora effect reverses phase when the direction of rotation reverses The 8E1 GyroChip will generate signal only with rotation about the aus of symmetry of the fork, Thats the only motion that wil by Coriolis sensing, produce an oscilaing torque at the frequency athe drive tines. Ths a0 ‘means thatthe BEI GyroChip can truly sense a zero rate input Photo 6. The BEI GyroChio Applications used in the Mars rover ale sel model (eho tte grosapesare sedn aise SOumMBE Mae SL ‘arty of apalications, The Automotve Quart Rate Sensor AQRS)ISUsed "tg operate onthe Martian detect yaw for vehicle dynamic control systems and by General Motorsenits surface, (Courtesy of Jet StabiliTrak Sytem offered on certain models of Ccllas and Corveses) (2) Propulsion Laboratory.) ‘and Continental Teves on its Electronic Stability Program (offered on many models of Mercedes, BMWS, Volswagens, and other European automobiles). This advanced sensor package together with other sensors, helps detec anc correct deviations between the driver's intended course and the actual course ofthe vehicle, Such deviations are determined through the use of stering column sensors to measure intended course, nd yaw rate sensors that measure the car's actual course by detecting the degree of vehicle spin or rotation The stably control computer receives the inputs ofthese and other sensors and actwates contraletforts through the front brakes to help keep the cron ts intended course (see Photo 2) Typical specications ofthe AQRS are Isted in Table 1 “a> [TABLE 7 ‘KGRS Performance Specifications [Stoxx [ WeterFato Covet spnparornanc vein ot queso he QR, uy ‘Sikorsky $92 HELIO stabilization system (see Photo 4), Typical specications oF the QRS are listed in Table 2 ‘Aviad ofthe standara quarerate sensors was used forthe ertcalineral reference unin the SAFER (simplified ad for EVA rescue, an astvonaut backpack (see Photo 5) designed for extravehicular atviy on the 9 September 1994 STS.64 Space Shutla/Space Station mission [3]. cold gas propelled system in che SAFER intended to provide an astronaut who "alls of” the spacecraft withthe means ta get ack, ‘The autonomous Sojourner Mars rover (ee Photo 6), deployed during the Pathfinder mission, used a standard, otfthe-sheW quate rate sensor 35 the inertial heading reference fr traversing the plane's surtace. The same model has been selecte by the Jet Propulsion Laboratory for the ext Mars mission wich 2 roving vehicle. Inthe Sojourner application, the quart rate sensor was followed by an A/D converter feeding the vehicle's central computer that handle the navigation (airectional commands) tasks, The blas characteristics the single rate ya) channel were corrected by a zeroing cut that was switched on when the vehicle was not moving, The rovers tit and its influence Photo 7. Three QRS11s were compensates ty a builtin inelinareter ejoroned and etabeat ipensated bya builtin incl Teference and stabilization Tor NASA'S autonomous outside a spacecrat the small, unobirusive camera platform has a sl-contaned propulsion system that gves sin degreeotsreedom TABLE 2 ‘GRSt1 Performance Specifications Standard High +/5.VO0 $5, Input Voltage regulation Input Current <70 mA (each supply) ‘Standard Ranges #50, 100, 200, 500,1000''s 22.5 Full Range Output voe SF. Calb. < 1% of value SF. Over Temp. <009'e Bias Cal. @ 22°C «2.075 Bias Variation over Temp. <1.80"I5 <0.5's Short-Term Bias Stability <0.002"Is <0.35%5 Long-Term Bias Stability <0.2"'5 |g Sensitivity <0.02"/s/9 Start-Up Time 60 Hz Nonlinearity <0.05% of Full Range Threshold/Resoistion <0.04%/5 Output Noise <0.010"Is/(checkHtz Operating Life 40 yr. typical Operating Temperature 40°C to 60°C bration Operatin Bg rms 20 Hz-2 Vibtion Operating kHz random Shock 200 Weight <60 gms ‘moverment ané an automatic atttude-holdcapabity. The vehicle moves ata rate of-0.25 fps and is protected from impact damage by a cushioned mousing ‘men the sphere was flown by radio contro rom the arbiter around the space shuttle in the Navernber 1997 reson, the stability of the inerval reference Z system and resulting TV images were reported as "extremely precise” bythe strona [The quara rate sensors in ths phere ware standard ortahe-shelt 5 é 4 For orbital applications, space adition tests have been performed on the v ‘standard quartz rate sensor. These include total dase and heavy particle radiation Figure 2. Shipboard, and- based, and aitbomo antennas are being stabilized for accurate satelite pointing by means of the BEI GyroChip. (Courtesy of SeaTel, Inc.) 4.910 partcestem? krypton/xenon isotopes to an LET (linear energy transfer) of 111 MeV /(mgyem 2 ) Je » ~ gQonG during or ater testing ‘The QRS11, BEI GyroChip Il and Horizon versions of the sensors are uses {or stabilizing shipboard satelite antenna systems and area and land vehicle antennas as well (see Figure 2} They are aso being incorporated into emerging technologies suchas the newest generation of high- reliably, solid-state avionics and tight Information systems (see Photo 5. Inertial Measurement The Global Postoning System (GPS) has reached a maturity that allows low-cost accurate state position determination in a small lightweight Portable unt. When augmented with addtional information provided by ‘round-ased beacons and vehicle-mounted transponders, elable Felatve pesition accuracy I a proven technique avalabe for combat, vehicles, automobiles, fed bets, personnel. or ether alatforms (3). Photo 8, BEI GyroChip technology is used to enhance ‘new-generation avionics and flight information systems for In ele” applications, however, ps be adversely affected Commercial and military aircraft by interference, tion dat breakdowns, and blackouts. GPS signals for example, canbe abscured by objects the recelving operational environment or electronically jammed “0 with countermeasures, Theres also a geometric factor associated wih the | ag finite numberof satelitesin view, which could degrade the acl Frrally, several seconds can be required for computation ofa new position Update, The GPS ie trefore led in ts ability ta Keep constant accurate track ofthe relative postion of multiple high-elocty interacting objects | the "current reading will always lag behind the objects tru positions. ny Cone solution to these problems isan inertial measurement sytern (MU) Consisting of incremental angle sensors (gyroscopes) as shown Figure 3 Because inertial sensors are self-contained they cannct bejammedby Figure 3. A six-degree-of- external signals. Moreover thet postion update rates fast enough to ‘freedom inertial measurement keep accurate track of even very rapily moving abjets, The principal _urit consists of three applcation shortfall ofan IMU is tha the postion estimate error increases 9yTOSCopes, three vith tie such shat even typical ignter aircraft qualty IMUs willbe outside @0Celerometers, and signal the typical GPS postion accuracy in a minute or two. However, GPS and an Processing electronics, IMU canbe combined to take advantage ofthe GPS postion accuracy and the IMU's rapid update capabilry and self-contained position Sensing, Tobe praticalin the "fel the IMU should be as portable as the GPS receiver, irspying smalls, ght weight lov power, ruggedness, high reilly low cost, and the necessary performance and production maturity to match that avallable in GPS ‘technology. IMUs alse provide the bass fr postion measurements where GPS snot auailable(eg, indoor applications, other planets, or near the poles) In conjunction with a compass which has low response time and problem at the poles) and incinometers, the devices can provide position and oriantation estimation for rabotie applications ‘Algal MU igpart ofthe Rocke Colins Proline 21 avionics system, serving asthe Photo 9. The Inertial sensor portion ofthe aircrafts attitude and heading reference system. The Boeing 777 (shown, Boeing 777 and 737 airplanes use quart rate sensors in thele ght tabilzation systems here) and 737 (see Photo 9). The sensors have accumulated more than 2 millon aperatinghours in the aircraft use quartz 2777 without a failure rate sensors in their fight ‘The MotionPak IMU, asolsstate sicdegree-otreadom system, capable of measuring stabilization Inear accelerations and angular rates in instrumentation, contol and feldrobove systems. More appliations (6). The reliable, compact ane fully seltcontained motion measurement than two milion ackage has been adapted by Carnegie Mellon Unversity for integration nt te Nomad S6NSOr operating Bon nb un mere ev hours have been logged in the B77 without a failure. robot. This autonomous mebile unt designed to demonstrate developing technologies for lunar and planetary exolpration, recently participated in afield experiment named ‘Atacma Desert Trek (see Photo 10). Table 3 sts the performance speciation ofthe MotionPak. summary ‘not recent, there was no lightweight inexpensive, reliable ines sensor that could be used to clrecly measure rotational veloc. Traditional spinning whee! -yr0scopes mere heayy, consumed alot of power, and, because they had moving ‘mechanical part, wore out after just afew thousand hours of aperation ‘Advances micromachining of quartz crystals, combined with the miniaturization of electronics, have made i possible to produce a monolith vibrating quartz "sensor ina compact package for use in measuring angular velo. The GryoChip = small and lightweight, consumes very Ite power, and since thee is only ane active Je » ~ gQonG BEI GyroChip and MotionPak are registered trademarks of BEI Technologies, Inc. Spained from the MotionPak to derive the inertial heading and ‘The authors wish to thank Brad Sage, Director of @usiness Development systron reference of the Nomad. ‘Acknowledgements Donner Inerial Diu, for providing quartz rate sensor application dats; and Lint (Courtesy of Camegie- ‘Aghassi or her help in preparing evs arti Mellon University.) References 1AM, Madi eal 3-10 Feb. 1996."A Microelectromechanical Quartz Rotational Rate Senso fr Inertial Applications” Proc 1996 IEEE Aerospace Applications Cont, Aspen, CO, Vol 3:315-382. 2. AM, Madn a9-12 Nov. 1997."A Miniature Yaw Rate Sensor for Intelgent Chass Contra Proc ITSC97, IEEE Cont an Intligent Transportation Systems, Boston, MA, Paper No, 0002. 3. "Rescue Device Shines in Untethered EVA Test"26 Sept 1994, Aviation Week 25, 4 "Columbia BVA Adee to Ad Station "8 Dec. 1997. Aviation Week: 34 5. “Global Postioning System (GPS) and Ineral Measurement Unis (MU) for Combat ID" Apr, 1985, Syston Donner Inerial Div nernal Report 5AM Madn etal. 12-16 Oct 1998, "Solid-tate Si Degree of Freedom Motion Sensor For Feld Robotic Applications" Proc 1988 IEEE/RSF In. Cont on Inteligent Robots and Systems IROS), Canada, Vol 31388-4338, TABLE 3 WotionPak Performance Specifications P4639" PARAMETER, ‘SPECIFICATION POWER #15VDC Input Supply Voltage ™w Input Power RATE, ‘ACCELERATION. PERFORMANCE CHANNELS: CHANNELS Standard Ranges 50, 100, 200, 500% || 1, 2, 5, 100s Full Scale Outputs 25voe a7svoe SF. Calibration <1% <1% SF, Temp, <0,03%°C <0,03%°C Sensitivity Bandwidth >60 He DC to >500 Hz Linearity <0.05% FR. <25 palg 2 Bias (Factory Set) ‘Temp. Sensitivity <2.0''s <#12,5 mg {over full emp.)

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