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6496 IEEE SENSORS JOURNAL, VOL. 16, NO.

17, SEPTEMBER 1, 2016

ISFETs in CMOS and Emergent Trends


in Instrumentation: A Review
Nicolas Moser, Student Member, IEEE, Tor Sverre Lande, Fellow, IEEE, Christofer Toumazou, Fellow, IEEE,
and Pantelis Georgiou, Senior Member, IEEE

Abstract Over the past decade, ion-sensitive field-effect


transistors (ISFETs) have played a major role in enabling the
fabrication of fully integrated CMOS-based chemical sensing
systems. This has allowed several new application areas, with
the most promising being the fields of ion imaging and full
genome sequencing. This paper reviews the new trends in front-
end topologies toward the design of ISFET sensing arrays in
CMOS for these new applications. More than a decade after the
review of the ISFET by Bergveld which summarized the state of
the art in terms of device and early readout circuity, we describe
the evolution in terms of device macromodel and identify the
main sensor challenges for current designers. We analyze the
techniques that have been reported for both ISFET instrumenta-
tion and compensation, and conclude that topologies are focusing
on device adaptation for offset and drift cancellation, as opposed
to system compensation which are often not as robust. Guidelines
are provided to build a tailored CMOS ISFET array, emphasizing
that the needs in terms of applications are the keys to selecting
the right pixel architecture. Over the next few years, the race
for the largest and densest array is likely to be put on hold to
allow the research to focus on new pixel topologies, ultimately
leading to the development of reliable and scalable arrays. A wide Fig. 1. 3232 ISFET sensing array for applications such as chemical imaging
range of new applications are expected to motivate this paper or DNA sequencing [5].
for at least another decade.
applications such as electrolyte imaging or DNA sequencing,
Index Terms ISFET, review, chemical sensor, trapped charge,
drift, ISFET instrumentation. which have motivated the research over the past ten years.
ISFETs have allowed to carry out numerous projects, amongst
them the Human Genome Project, which has seen the price
I. I NTRODUCTION of genome sequencing dropping at a rate steadier than Moores
law since 2010 [3].
M ORE than 40 years have passed since the introduction
of the ISFET by Bergveld in 1972 [1]. Yet the prospects
of a CMOS-based chemical sensor are still numerous nowa-
Bergveld, who developed the idea of using a floating gate
transistor as a chemical sensor, shared his insights into the
days, including inherent scalability, low-power processing and first 30 years in a review paper [4] which has now become a
improved SNR [2]. Large-scale integration of these sensors reference in the field of Isfetology, cited more than a thousand
has been demonstrated since then by conceiving lab-on-chip times. The paper indeed provides essential information on the
platforms structured as microarrays with a high density of state of the art, summarising the theory behind the sensor
ISFET pixels, as illustrated in Fig. 1. Although the sensor was operation, listing common techniques used for its fabrication
first developed in the context of neurophysiological measure- or mentioning typical applications. However, there are two
ments, this biochip revolution has increased their popularity in main points that have proven to be essential for the future
development of Lab-on-Chip systems integrating such sensors.
Manuscript received April 4, 2016; revised June 8, 2016; accepted First, Bergveld presents the early ISFET readout configura-
June 13, 2016. Date of publication June 28, 2016; date of current version tions and identifies their benefits as well as limitations, usually
August 3, 2016. This work was supported by the Engineering and Physical
Sciences Research Council within the Centre for Doctoral Training in High including basic instrumentation extensively used with MOS
Performance Embedded and Distributed Systems under Grant EP/L016796/1. transistors. Then some of the issues related to the ISFET
The associate editor coordinating the review of this paper and approving it are mentioned, including drift and REFET fabrication for
for publication was Prof. Janice Limson.
The authors are with the Department of Electrical and Electronic differential measurements, but no viable solution is presented.
Engineering, Institute of Biomedical Engineering, Imperial College These have paved the way to a whole new area of ISFET
London, London SW7 2AZ, U.K. (e-mail: n.moser@imperial.ac.uk; research, focusing on improving robustness and resolution
t.lande@imperial.ac.uk; c.toumazou@imperial.ac.uk; pantelis@imperial.
ac.uk). of readout, as well as compensating for the major device
Digital Object Identifier 10.1109/JSEN.2016.2585920 challenges in efficient ways.
1558-1748 2016 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
See http://www.ieee.org/publications_standards/publications/rights/index.html for more information.
MOSER et al.: ISFETs IN CMOS AND EMERGENT TRENDS IN INSTRUMENTATION 6497

Fig. 2. ISFET structure. (a) Schematic view [4]. (b) Extended gate for implementation in unmodified CMOS technology [2].

The overall divergence in sensing topologies reported in type and output encoding scheme. Their capabilities in terms
papers published in the last decade have illustrated that more of compensation have also become essential over the past few
and more groups are now giving up on classical configurations years to allow for integration as part of a full sensing platform.
in favour of novel implementations. In this context, the authors This is highlighted in Sec. V, which enlists the achievements
have felt the need to review the progress carried out in the carried out so far to answer for the challenges previously
field and identify the most promising directions to pursue in described. These compensation strategies are diverse, as some
the near future. However, due to the high number of papers research groups focus on device adaptation while others prefer
published each year on ISFETs, it has become difficult to write to implement a solution on a system level. In Sec. VI, we
an overview of the entire research area. Instead, it is now provide our own guidelines on the design of a custom ISFET
necessary to specifically delimit the scope of the review, tar- system, tailored for a certain set of specifications determined
geting a certain sub-field e.g. chemical experimentation, device by the application. In Sec. VII, building upon the work
physics and readout electronics, or an application such as DNA described throughout this review, we make an attempt at
sequencing and cellular imaging. This review paper focuses on predicting the evolution of the research in the field of ISFET
summarising the major advances in ISFET instrumentation, instrumentation in the next few years. Finally, we provide a
which were mostly reported in the last 15 years. In particular, discussion and a conclusion in Sec. VIII.
it will focus on ISFET arrays, which the authors believe are the
most promising structure considering their numerous prospects II. F UNDAMENTALS OF ISFET O PERATION
in terms of applications. We will set the emphasis on front-end We describe the Ion-Sensitive Field-Effect Transis-
topologies introduced in the literature, along with their benefits tor (ISFET) as a MOS transistor with the gate connection
and limitations. These will not be presented historically, but separated from the device and tied to a reference electrode
rather classified according to their topology and performance (typically Ag/AgCl) in contact with the solution, and an
in terms of sensitivity and compensation capabilities. This insulating membrane replacing the gate oxide. Its structure
falls in with the quest for conceiving a dense, reliable and is depicted as a schematic view in Fig. 2a [4].
scalable ISFET array enabling massive parallelism and high The device operation as a chemical sensor consists in a
throughput. shift in its threshold voltage with the ion concentration of
In terms of device modelling, improvement brought to the the solution in which the electrode is immersed. The ISFET
initial theory includes the derivation of a more intuitive ISFET characteristic can be derived using the site-binding model
macromodel which will be presented in Sec. II. However, for for ions on the insulating membrane and considering the
the past few years, the main contribution lies in the character- capacitive double layer formed by the Helmholtz plane and the
isation of the common nonidealities in the ISFET behaviour Gouy-Chapman layer [7], [8]. The ISFET threshold voltage is
and the identification of the sensor challenges. These include then expressed as the equivalent MOSFET threshold voltage
trapped charge in the device, leading to significant mismatch and a chemical contribution
between the pixels of the array in a similar fashion to Fixed-
Vth(ISFET) = Vth(MOSFET) + + SN pH (1)
Pattern Noise (FPN) which is a common issue for the design of
CMOS imagers [6]. Designers must also face temporal drift where is a constant chemical term, SN is the ideal pH
of the sensor output and noise contributions from both the sensitivity, designated as Nernstian sensitivity and typically
chemical interface and the analogue front-end. We discuss all equal to 59 mV/pH, and is the sensitivity deviation due
these issues in Sec. III and define the criteria which must be to the double layer capacitance [2]. The dependency of the
met by the readout topology. Various architectures have been ISFET I-V curve over pH is characterised in Fig. 4a. The
reported in the literature, and in Sec. IV we classify them first implementation of ISFETs in CMOS was reported by
according to their instrumentation technique, measurement Wong and White [10] in 1988. Although studies have been
6498 IEEE SENSORS JOURNAL, VOL. 16, NO. 17, SEPTEMBER 1, 2016

Fig. 3. ISFET behavioral macromodel [2], [9].

The structure of fabrication is shown in Fig. 2b. However,


ISFETs fabricated in a standard CMOS technology suffer
from a degradation in performance compared to when post-
processing of the gate material is allowed, as highlighted
in [17]. In particular, nonidealities include extra attenuation in
the chemical input signal through capacitive division, leading
to a reduction in sensitivity illustrated in Fig. 4b.
All the effects mentioned hereabove can now be summarised
in a simplified ISFET macromodel, first derived in 1999 [9]
and depicted in Fig. 3. In this model, we emulate the threshold
voltage shift as a change in the floating gate voltage of the
device, modulated by the pH through capacitive effects. The
dependence is as follows
VG = VG Vchem = VG ( + SN pH) (2)
The device can now be operated in the same regions as its
MOSFET counterpart. Originally, designers considered strong
inversion solely, yielding the typical quadratic expression
for the saturation region between the gate voltage and the
current
1 W
I D = Cox (VG  S Vt h )2 (3)
2 L
where Cox , , W and L are device parameters, Vt h is the
threshold voltage and VG  S is the chemically dependent term
determined by Eq. 2. As an alternative to this mode of
operation, Georgiou and Toumazou [2] have introduced the
use of weak inversion pH sensing i.e. at low VG S . In this
Fig. 4. ISFET I-V curve [2]. (a) pH dependency. (b) Capacitive scaling
effect. region, diffusion of carriers dominates over drift which yields
an exponential relationship
 
VG S S N
carried out to characterise the effect of various gate materials I D = I0 exp (4)
on ion selectivity and device sensitivity [11][14], the ISFET nUt
has been mainly used for its pH detection capabilities. For where we assume V D S > 4Ut , I0 is a characteristic current, n
that purpose, the initial ISFET fabrication procedure involved is the subthreshold slope factor and Ut = kT /q is the thermal
post-processing steps on the floating gate of the ISFET to voltage. This mode of operation provides benefits such as low
make the device pH sensitive, such as the deposition of a power processing and high intrinsic voltage gain, and, as will
Ta2 O5 membrane [10]. In 1999, Bausells et al. [15] reported a be discussed in Sec. IV, has been used extensively in current
novel way of fabricating a pH-sensitive ISFET in unmodified mode readout circuits.
CMOS technology. This allowed the integration of ISFETs This section has introduced the ISFET as a chemical sensor
with standard silicon System-on-Chips with no requirements and characterised its pH dependence. Integration in CMOS
of extra fabrication step, providing major benefits such as technology has been presented to allow for inherent scalability
scalability and low cost [16]. This extended-gate technique of silicon technology at low cost. The extended-gate technique
involves using the inherent top passivation material (Si3 N4 ) also removes the requirements for post-processing steps and
as the insulating layer, granting pH sensitivity to the device. further promotes monolithic integration. Lastly, the typical
MOSER et al.: ISFETs IN CMOS AND EMERGENT TRENDS IN INSTRUMENTATION 6499

modes of operation have been described, including strong and


weak inversion, paving the way for the upcoming description
of ISFET readout methods. However, we have mostly con-
sidered ideal behaviour thus far, and must now introduce the
challenges specific to ISFETs.

III. C HALLENGES
A major contribution which the last decade has brought to
this field lies in the several nonidealities which the ISFET
suffers from. In this section, we highlight the challenges which
have often been ignored by designers at the time, but have now
become a greater priority for the conception of scalable and
reliable analogue front-ends for ISFET sensing. In particular,
we set the focus on the effects which cause a deviation from
the ISFET model described previously.
In this work, we focus on the use of inherent CMOS
passivation material for our systems, without any modifica-
tion, directly from fabrication. However, this layer is not a
perfect insulator which would typically be deposited using low
pressure chemical vapour deposition at high temperature [2],
and as a result can have defects. A CMOS passivation layer
tends to gradually degrade when in contact with the solution,
however has sufficient lifetime for short term use. This is
suitable for one time tests in which the chip is then disposed
of. Such usage makes sense at present due to the economies
of scale of CMOS which allows it to be made incredibly
cheap. Other groups have worked on post-processing to deposit
new insulating membranes which results in more reusable and
reliable devices [18], however this adds additional cost and
complexity on an already working unmodified solution which
we consider in this review.
As a consequence, we must deal with common issues Fig. 5. Non-ideal effects of CMOS based ISFETs [2]. (a) Offset and
including trapped charge and drift in the sensor. The former capacitive division. (b) Slow temporal drift.
induces an offset in the threshold voltage and hence mismatch
between devices, while the latter causes a slow variation of this
threshold with time due to surface effects on the passivation where Vt c is the offset due to trapped charge, whose value
layer. Furthermore, the incidence of temperature and noise on is different for each device. This is equivalent to a shift in
the sensor are well-known problems of MOS transistors and the I-V curve of the transistor, as demonstrated in Fig. 5a.
also affect the ISFET operation. The last nonideality consid- Provided that we use a common reference electrode for all
ered in this review has already been touched upon, and lies the sensors, this offset introduces mismatch between the pixels
within the capacitive attenuation also due to implementation as they now each exhibit a different behaviour. Therefore,
in unmodified CMOS technology. These challenges are now during signal quantisation, stringent requirements are set on
described in further details. the ADC as it must be given a high dynamic range to cover the
whole output range, with suitable resolution to cover the signal
A. Trapped Charge range. This highlights the need for an offset compensation
It is well-known that charge gets trapped on the float- scheme cancelling any discrepancy between the ISFETs and
ing gate of the ISFET, most likely due to charge transfer guaranteeing identical electrical responses for all the sensors.
during chip production, introducing an offset in its thresh-
old voltage. In 2008, Milgrew and Cumming [19] estimated B. Drift
the threshold voltage variation as standing between 4 V
and 1 V for standard AMS 0.35m, with significant Drift is exhibited through a slow monotonic change in the
discrepancies between processes, dies and throughout the threshold voltage of the ISFET and originates from a transport
array. phenomenon at the interface between the insulator and the
Trapped charge can be accommodated on the previous solution [20]. Its effects are shown experimentally in Fig. 5b,
model by considering an extra voltage source in Fig. 3 [2]. where the output voltage clearly increases with time without
The ISFET floating gate voltage is then expressed as any pH change.
The main challenge for drift compensation has always
VG = VG Vtc Vchem (5) lied in its unpredictable behaviour. In general, this effect is
6500 IEEE SENSORS JOURNAL, VOL. 16, NO. 17, SEPTEMBER 1, 2016

modelled as an exponential relationship of time. This is the


case for instance when the ISFET is operated in the feedback
mode with a constant current biasing, where the variation is
quantified as an average drift rate of 8.1 mV/min for the first
minute [21]. It has indeed been shown that drift depends on
several factors, such as the solution pH, the surface material
and the device size [22]. Hence compensation methods cannot
rely on mathematical dependencies and must be designed to
be robust to any temporal gate voltage variation.

C. Capacitive Attenuation
In the macromodel of Fig. 3, it was already mentioned
that the additional passivation capacitance due to the imple-
mentation in standard CMOS processes led to extra attenu- Fig. 6. Temperature dependence of the ISFET (W/L = 30) [23].
ation of the signal. This can be computed as the capacitive
division [2] E. Noise Corruption
C pass The sensor noise sets the analogue readout resolution,
VG  = VG  (6)
C pass + (Cox Cd )/(Cox + Cd ) which makes its analysis essential. Additionally to the usual
MOSFET contribution, the chemical interface is also known
where Cox and Cd are the oxide and depletion capacitances to add noise to the sensing system [26].
respectively. The passivation capacitance C pass can be approx- The predominance of chemical noise over electrical noise
imated by considering the two passivation dielectrics Si 3 N4 is strongly dependent over the technology. In standard
and Si O2 used for chip insulation, which yields 0.35m CMOS technology, recent measurements taken by
Si3 N4 Si O2 Liu et al. [26] have revealed that the chemical noise exceeds
C pass = (W L)chem 0 (7)
Si3 N4 t Si O2 + Si O2 t Si3 N4 the corresponding MOSFET by one order of magnitude. In the
paper, the focus is set on flicker noise and the 1/f relationship is
with W and L the dimensions of the sensing area, 0 , Si3 N4 clearly identified for both contributions. Similarly, Miscourides
and Si O2 the permittivities of free space, silicon nitride and Georgiou [27], focusing on electrical noise, have con-
and silicon dioxide respectively, and t Si3 N4 and t Si O2 the firmed better SNR in the case of small devices for a given
passivation thicknesses. Further characterisation for the cou- CVCC test structure. Their analysis was extended to deeper
pling effects are provided through the introduction of the technologies, as they have demonstrated that scaling down
parameter in [22]. the ISFET led to an increase in input-referred noise and gate
It is obvious that this effect is present if the system is attenuation.
to be designed in unmodified CMOS technology. Replacing It is clear from this research that very few papers include
the Si 3 N4 layer with other pH-sensitive membranes might noise discussion. To this date, the field still requires a unified
improve the sensitivity of the ISFET, although the trade-off model including both MOS and chemical contributions for the
would be to allow special technologies or extra processing. flicker and thermal noise.
This will not be further considered in this review. The aforementioned design challenges, all originating from
the physics of the ISFET, are the main factors to consider when
D. Temperature Effect building systems for embedded chemical sensing. Although
the next sections will focus on ISFET analogue front-end
As an electronic device, the ISFET is influenced by temper-
topologies, these nonidealities will be the conductive thread
ature variations due to thermal agitation affecting the electron
throughout this review, as the authors strongly believe that
flow, but also to a variation in the solution pH. A typical
they must be addressed to conceive the autonomous sensing
temperature curve for the sensor is shown in Fig. 6 [23]. As a
platform which fields such as DNA sequencing require. One
rule of thumb, it has been reported that the ISFET undergoes
can find surprising that most papers describe only a few of
a significant output change equivalent to 1 pH every 7 K
these effects, which is the reason why this review has aimed
around the ambient temperature [24]. Therefore, temperature
at describing them more extensively. Fortunately many tech-
instability of the device can not be overlooked, although it
niques have been reported to compensate, often independently,
is far more complicated than for its MOSFET counterpart.
for these effects. However, before describing these, we need
Several additional chemical contributions are indeed to be
to take a step back and focus on the general instrumentation
considered [23], [25] : the reference electrode, the pH sensitive
used for ISFET readout.
electrolyte/insulator interface, which is usually predominant,
the semiconductor part and the solution pH. Similarly to drift,
it seems that the research focus has been set on developing IV. I NSTRUMENTATION FOR C HEMICAL R EADOUT
robust compensation methods, at the expense of deriving an We have emphasised that the use of ISFETs as chemical
accurate analytical temperature dependence for the sensor. sensors has grown over the past few years. This has led
MOSER et al.: ISFETs IN CMOS AND EMERGENT TRENDS IN INSTRUMENTATION 6501

researchers to move on from the early differential and source- Nemeth et al. [29] introduced a pixel with an ISFET and two
and-drain follower topologies, and develop novel front-end switches, shown in Fig. 7(c). Although the resemblance of this
architectures for pH readout. The main configurations are structure with simple CVCC is undeniable, they have paved
presented in this Section, and their characteristics are identi- the way to the development of a reset scheme inside the pixel,
fied. In particular, we will be classifying the implementations enabled through an in-pixel switch such as M2 .
according to two criteria : single or differential sensing, dis- Still in the context of pixel architectures, it is interesting
crete or continuous encoding. All of the mentioned techniques to see that the ISFET field has only recently started to find
and their main features are summarised in Table I. inspiration in the imaging area, which has developed multiple
techniques for the design of robust and massively parallel
arrays. Several papers have started to focus on the integration
A. Single Measurements of Active Pixel Sensors (APS) using ISFETs, which happen to
Most of the ISFET front-end configurations involve a single similarly share the reset scheme previously mentioned. Ways
device topology achieving continuous time sensing. Among of implementing an ISFET APS include the replacement of
these, we distinguish two main categories of readout methods. the photodiode by the ISFET [35], or the use of the ISFET as
Firstly, the device can be operated in feedback mode i.e. it the standard buffer [30], which is illustrated in Fig. 7(d).
is biased at a constant current and its output is fed back to In turns, this search for novel ISFET front-end architectures
the reference electrode, whose voltage Vref varies with the paves the way to opportunities for encoding the pH value in
pH [4], [21]. This method is however not very convenient since other domains than analogue, providing improved robustness
the non-constant biasing requires a distinct reference electrode and additional benefits compared to traditional methods. In
for each pixel, which leads to a rather complex experimental particular, the integrate-and-fire topology, which encodes the
setup. For that reason, it was generally left out by the research pH in frequency, is inherently compatible with event driven
area over the past few years and will not be further considered readout [36], which grants new opportunity for conceiving
in this review. A common alternative is to globally bias the low-power array designs. However, this solution was aban-
reference electrode, so that the threshold voltage directly varies doned probably due to the complexity of signal processing in
with the pH, as reflected by the ISFET theory. This technique the spike domain, involving specific ADC topologies.
is widely used in current systems and typically consists of two In the context of encoding the pH in digital domain, in-pixel
configurations. quantisation allows to grant robustness to the signal at device
1) Source and Drain Follower or Constant-Voltage, level to minimise degradation due to noise or interference.
Constant-Current (CVCC): In such configuration, already This represents an opportunity to push down the noise floor
introduced by Bergveld [4] and presented in Fig. 7(a), the of the system and hence improve the chemical SNR. A suitable
ISFET current I D and drain voltage V D S are fixed and the example of such topology is pH-to-time conversion, which has
source voltage VS reflects the change in pH. The main benefits been growing as a popular readout method. Its simplest and
of this technique lie in its compactness, requiring only a device most compact implementation relies solely on one inverter
and a switch for a pixel. Such a design is also immune to with complementary ISFETs [31], [37] shown in Fig. 7(e).
capacitive scaling of the pH signal at the floating gate of the The devices are capacitively coupled to a triangular wave
ISFET. and the pH modulates their switching point, hence the output
2) Current-Mode Readout: More recently, current-mode pulse width is chemically-dependent. This PWM-based pixel
readout has gained in popularity as part of the new generation has the benefit of providing in-pixel quantisation of the pH
of analogue ISFET front-ends. In such topology, it is the signal, protecting it against noise corruption and parasitics
ISFET output current I D S which is measured, allowing for degradation. It has been integrated as part of an array with
in-pixel current-mode processing and its well-known benefits, a fine on-chip Time-to-Digital Converter (TDC) as the ADC
including inherent compatibility with weak-inversion oper- with a delay line and a thermometer-to-binary coder [38].
ation [2]. Reported topologies include a current feedback More recently, the authors have reported a topology which
readout for stable DC operation [33], an adapted current mixes several of the aforementioned techniques. The circuit
conveyor using ISFETs as input transistors, which can be is adapted from the APS structure as shown in Fig. 7(f), and
arranged in numerous configurations [34], and a circuit based based on the discharge of a capacitor through the ISFET as
on the translinear principle [28] to yield an output current well as a periodic reset scheme [32].
proportional to the pH, shown in Fig. 7(b). Although large It is often the case that the need for compensation leads to
transistors dimensions might be required for matching pur- new readout architectures inherently compatible with certain
poses, current mode also paves the way to new compensation adaptation schemes. Feedback to the gate topologies are part
methods, as will be discussed in the next section. of this category, involving extra connections to the floating
Over the past decade, differential measurements and CVCC gate of the ISFET through a capacitor (PG-ISFET) [39] or a
readout have become, along with current mode configurations, switch [5]. Since the reason for which they were developed
the foundations for more advanced architectures. In particular, in the first place is to achieve trapped charge compensation,
as the field started to grow the desire to implement ISFETs these structures will be discussed in Sec. V.
as part of large and dense arrays, some papers have reported There exists another type of readout which has not been
pixel architectures with minimal readout and no compensation discussed so far. In 2009, Wong et al. [40] have introduced
methods for fast and efficient measurements. In that context, discrete ISFET logic for applications where the exact value of
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TABLE I
R EADOUT M ETHODS FOR ISFET-BASED I ON D ETECTION
MOSER et al.: ISFETs IN CMOS AND EMERGENT TRENDS IN INSTRUMENTATION 6503

Fig. 7. Overview of the main analogue front end topologies for single ISFET readout. (a) CVCC or source and drain follower readout [4]. (b) Current-mode
topology based on the translinear principle [28]. (c) Standard CVCC pixel readout [29]. (d) APS-based structure [30]. (e) ISFET inverter [31].
(f) pH-to-Time encoding [32].

pH does not need to be determined, such as detecting a specific common to the input transistors as well as drift in both ISFETs.
gene in a DNA sequence. Once again, this is based on the In this early implementation, the sensors were processed
pH variation of the switching threshold of an inverter, although with special coating on the gate of the ISFETs to yield
this time it is not quantified but rather used to offer a simple different pH sensitivities, such that one of them was used as a
yes/no answer due to small pH changes. The same principle reference device, submerged in a buffer solution of known pH.
can then be applied to other components which can be used Indeed, since the ISFET is not suited for absolute pH readout,
as comparators, such as a NAND gate [40], a switch [41] or it only makes sense to use a reference sensor to compare pH
a Schmitt trigger [42]. However, as far as the authors know, variations with respect to another solution.
a complete system has never been reported and tested for the In that context, similar topologies have attempted to pair
target application, hence the idea is still in need of validation. the ISFET with an ion-insensitive sensor adopting the same
electrical behaviour and denoted as REFET. Bergveld [4]
B. Differential Measurements devoted a major part of his review to the fabrication of
Bergveld already reported several differential topologies in these REFETs, typically achieved once again by depositing
his review paper [4], which makes it one of the first ISFET a polymer membrane on top of the floating gate of the ISFET,
readout configurations. Its attractiveness is apparent, since dif- which however inevitably leads to discrepancies in electrical
ferential sensing allows for cancellation of any common-mode behaviour between the two FETs. Although a detailed descrip-
voltage between the two sensors, minimising the effects of tion of the evolution of REFET fabrication methods over time
drift, noise and temperature on the measurements. Wong and is beyond the scope of this review, the device is still popular
Whites ISFET-operational amplifier [43], shown in Fig. 8(a), nowadays as it is still extensively described in the literature.
was the first reported differential sensing scheme. Its structure The ISFET-REFET sensing front-end is usually implemented
is based on two ISFET/MOSFET differential pairs in a buffer directly as part of an input pair [44], [47], in which case
configuration, followed by a differential amplifier, causing any the main challenges, as highlighted by Sohbati et al. [47],
change in pH between the two sensors to be reflected at include the unknown offset due to trapped charge and
the output. This provides cancellation of temperature effects the intrinsic high gain of the input pair. An example of
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Fig. 8. Overview of the main analogue front end topologies for differential ISFET readout. (a) ISFET-ISFET differential amplifier configuration [43].
(b) ISFET-REFET voltage-clamped configuration [44]. (c) ISFET and REFET pixels in sensing arrays [45]. (d) ISFET-ISFET chemical Gilbert cell [46].

ISFET-REFET input pair is illustrated in Fig. 8(b) in the form the two sensors directly as part of a differential configuration
of a differential voltage clamped circuit [44]. As opposed which combines differential measurements with current mode
to this direct pairing, other systems prefer the use of processing to yield an output proportional to the pH difference,
a single device topology such as a source-drain-follower which they quantise using a sigma delta modulator. Similarly,
configuration, followed by an instrumentation amplifier Kalofonou and Toumazou [46] presented a chemical Gilbert
between the outputs of the ISFET and REFET cells [45], as cell (cf. Fig. 8(d)) where the differential pair consists of two
shown in Fig. 8(c). Such a structure requires an additional ISFETs, enabled by the aforementioned chemical translinear
amplifying stage, which occupies more silicon area and does principle [28]. Such ISFET pairs are essential for applications
not solve the unknown offset issue. Nevertheless, systems have where several chambers are needed. Indeed, it is often the case
been reported for ISFET-REFET differential measurements in that the application ultimately orients the decision between
the context of sensing arrays, especially in the case where the differential and single architectures. As far as the literature is
pixel output is quantised as the values can be subtracted easily. concerned, it is still the case that most reported systems use
Milgrew et al. [45] have indeed characterised the above pixel one device for sensing.
as part of a small array, and Garner et al. [48] have reported So far, we have focused on analogue front-end architectures,
the same concept of reference pixel as part of a full system. in particular for ISFET pixels. We now need to review the
Although we have already mentioned the use of various compensation methods reported in the literature and
ISFET-ISFET differential measurements, so far one of the used in ion detection systems to ensure the best operation of
sensors was always post-processed to reduce its pH sensi- the ISFET as a chemical sensor.
tivity. Instead, it may be desirable to yield the differential
output of two similar ISFETs measuring different ion con- V. I NSTRUMENTATION FOR C OMPENSATION
centrations. Such a system was presented in a conventional We have demonstrated that ISFETs in unmodified CMOS
way by Chodavarapu et al. [49], subtracting the outputs of technology suffered from significant non-idealities in their
two pixels in a similar manner than described previously. electrical behaviour, including trapped charge, drift, tempera-
Nabovati et al. [50], on the other hand, have implemented ture instability, capacitive scaling and noise corruption. When
MOSER et al.: ISFETs IN CMOS AND EMERGENT TRENDS IN INSTRUMENTATION 6505

the first readout techniques were described in the Isfetology any offset, while guaranteeing through capacitive coupling that
review [4], it seems that compensating for these effects was the gate is kept a floating node. Also, it can be easily integrated
not part of the research objectives. Since then, it has become as part of an autonomous calibration scheme, to determine the
clear that the robustness and efficiency of the system rely correct bias voltage. However, the extra capacitor results in a
on our effort to address these non-idealities through various reduction in chemical sensitivity, scaling down the chemical
C
compensation techniques. As an illustration, let us consider the voltage by CpassT
, where C T is the total capacitance at the
shift in threshold voltage due to trapped charge. Such an offset floating gate. Also, the addition of a component leads to extra
induces an uncertainty on the operating point of the device, silicon area. Nevertheless, the prospects of additional control
hence setting stringent requirements on the range of the ADC on the ISFET for on-chip calibration may make up for its
for output quantisation, which can be relaxed by considering drawbacks.
compensation at device level. Along with the introduction of the device, several topologies
Out of all these techniques, the most promising are gathered using PG-ISFETs were proposed for pH readout and device-
in Table II and sorted accordingly. We will now look more level compensation. The same authors have introduced an
closely into these methods, introducing two categories, sensor adaptive readout with a feedback to the reference electrode
adaptation and system compensation. voltage to determine the pH value [52]. However, as explained
previously, reference electrode feedback is highly inconvenient
A. Sensor Adaptation in the case of arrays, for issues related to a common refer-
In the first category, we incorporate the techniques which ence electrode. Nevertheless, to compensate for the sensitivity
affect the DC operating point of the ISFET to achieve sensor loss, architectures have been reported which apply capacitive
compensation. These methods are performed at device-level feedback from the floating gate to a source-and-drain follower
and as such, are usually the most efficient solutions in terms of ISFET readout [51], [61]. In both cases, the scheme uses a
robustness and longevity of compensation. However, it should complex sequence of phases for its operation, including gate
be noted that most of these methods are combined with a offset reset and pH sensing. Alternatively, a unity-gain buffer
system-level compensation scheme, which handles the device topology represented in Fig. 9(b) was also used to track the
biasing accordingly. chemical signal in-pixel [62], while biasing the programmable
Trapped charge is by far the most tackled ISFET non- gate through a DAC. This PG-ISFET technology is currently
ideality in the literature, and a simple way of compensating for not being used extensively for the design of large, scalable
this effect involves UV exposure. Milgrew and Cumming [19] and reliable ISFET arrays.
have shown in 2008 that exposing the ISFET to ultraviolet Similarly to the PG-ISFET, charge modulation at the float-
light, through a small aperture directly above the device, ing gate has been achieved using electron tunnelling. The
induces a gradual shift in the threshold voltage. The electrons idea originates from an early paper reporting hot-electron
at the floating gate are indeed excited to overcome the potential injection to cancel offset in p-ISFET [64]. By increasing
barrier at the sensor gate, allowing the threshold voltages to VS D to large voltages, the probability of impact ionisation
converge with an accuracy of less than 10 mV after 10 hours of is increased and hence charges are able to cross the oxide
exposure. However, this solution may not be convenient as it barrier and reach the floating gate. The work was then
involves post-processing for each die, which does not represent pushed further by inducing electron tunnelling through the
a fast and scalable technique for large ISFET arrays. gate oxide using an extra capacitance and diode connected
Let us then focus on circuit-based methods, rather than to the floating gate [65]. The solution was finally extended
using extra processing on the dies. Most of the on-chip and for bidirectional use, to both add and remove electrons [63],
device-level techniques involve accessing the floating gate which is represented in Fig. 9(c). Although the architecture
of the ISFET. Although this is a straightforward solution, it looks similar to the PG-ISFET, it requires significantly higher
comes with major drawbacks, since it systematically reduces voltages to induce tunnelling, going as high as tenths of
the sensing performance of the device due to extra connectivity Volts, as well as additional components. It was therefore
at the floating node. not pursued further in the literature or as part of a full
Let us consider for instance the Programmable system.
Gate-ISFET, or PG-ISFET, introduced in 2008 by As opposed to techniques which maintain a floating
Georgiou and Toumazou [39] and seen as one of the gate for the ISFET, architectures have been reported which
most promising techniques for trapped charge compensation connect a switch to the gate for offset reset [59], [66].
through gate voltage modulation. The floating gate is accessed Hu and Georgiou [5] have reported a pixel configuration with a
through a physical capacitor CC G , which allows to modulate direct feedback to the floating gate through a switch, illustrated
the trapped charge through a tuning voltage VC G , as illustrated in Fig. 9(d). The readout involves two phases of operation.
in Fig. 9(a). The trapped charge is thus cancelled provided In the reset phase, S0 is closed and the feedback fixes the
that output voltage through the OTA to a constant value, indepen-
dent of the trapped charge. During the measurement phase,
C pass Vt c = CC G VC G (8)
S0 is open and the output tracks the pH change through the
This technique is mainly beneficial because it sets the DC capacitive division between the passivation capacitance and the
operating point of the device in a robust manner, cancelling feedback capacitors. However, compensation is achieved at the
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TABLE II
C OMPENSATION T ECHNIQUES FOR OVERCOMING THE ISFET C HALLENGES
MOSER et al.: ISFETs IN CMOS AND EMERGENT TRENDS IN INSTRUMENTATION 6507

Fig. 9. Architectures for ISFET sensor adaptation. (a) PG-ISFET [39]. (b) PG-ISFET Unity-Gain Buffer [62]. (c) Bidirectional Electron Tunnelling [63].
(d) Feedback to the Gate Topology through a Switch [5].

expense of leakage, which gradually corrupts the pH signal. of their gate switch architecture for periodic drift reset, with
As a result, the measurement time is significantly reduced. a period of roughly ten seconds.
It should be noted that the scheme is also equipped with an As an alternative, Shah et al. [68], [69] have developed
automatic gain calibration [67]. a novel technique for periodic drift reset, which involves
An alternative device-level method has been reported which modulating the reference electrode voltage. They have indeed
compensates for trapped charge using another terminal of proven experimentally that cycling the vertical electric field of
the ISFET. Using source voltage modulation and in-pixel time the ISFET effectively resets the drift. Such a process is carried
encoding, the topology [32] implements an initial calibration out by cycling the reference electrode voltage Vre f between
phase to drive the ISFET at a certain biasing point. Assuming the operating voltage and the source voltage of the ISFET.
that the offset is smaller than 1.2 V, the method allows to By considering a period of around 15s, the drift was shown
cancel the offset while not degrading the chemical signal to exhibit a repeatable pattern and hence its influence on the
in terms of sensitivity or measurement time. This is still in measurements is attenuated. However, such variations in Vre f
a research phase and must be further investigated through will typically affect the readout. The feasibility of the cycling
experiments. of electric field will thus depend on the topology.
It is a fact that some of the aforementioned techniques for Both these techniques involve drift reset, which might com-
offset cancellation can be used to compensate for slow drift promise the measurement time if the resets are not performed
in the threshold voltage point of the device. The topologies often enough. For that matter, it is often the case that software
based on a reset phase may use periodic reset schemes for processing is preferred to counteract drift. We will specify
drift cancellation, by resetting the device offset before each these in further details in the next section.
measurement. In that sense, the readout time must be small In the case of temperature and noise compensation, device-
enough to guarantee proper operation of the sensing system. level adaptation techniques are not the most popular reported
As an example, Hu and Georgiou [5] have reported the use solutions. In the former case, Aw and Cheung [70] have
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reported in 1988 the existence of an athermal point for the Other differentiation techniques include baseline frame cali-
ISFET, depending on the biasing condition of the device. bration for trapped charge compensation, subtracting the mean
Almost two decades later, Chan and Chen [71], [72] presented of the 99 captures at quiescence to the measurement, on a
a system which dynamically biased the ISFET at this athermal pixel basis [74]. For drift cancellation, a software solution
point, by varying the bias current as part of a simple source- was proposed which integrates the difference in consecutive
and-drain-follower readout. Their algorithm is computational samples, assuming once again that the drift is slow compared
and based on external processing using a microcontroller, and to the electrical change due to pH variation. The outcome is
although it is considered as device adaptation, it is easy to an output with attenuated drift, even on a long time interval,
doubt its robustness due to a change in the athermal point with at the expense of external processing of the signal.
pH and hence during the measurement. Laslty, Sohbati and In the case of temperature, differentiation can be achieved
Toumazou [59] have proved that the aforementioned periodic by summing the output with a signal of complementary
gate reset used to accurately set the DC operating point of the Temperature Coefficient (TC), such that the compensated
device leads to a pH sensitivity independent of temperature, output exhibits a constant TC. This has been reported using
for a current mode readout in weak inversion operation. a diode [23], [70], but is also achieved with PTAT-CTAT
Although these conditions are restrictive, experimental con- with ISFET [75] or imaging arrays [76]. For ISFETs specifi-
firmation of these results would grant the topology interesting cally, this is typically unreliable since the temperature depen-
prospects for temperature compensation. dence might depend on the pH value, hence the robustness
As for noise cancellation, only the aforementioned reset of the method is not guaranteed. Judging by the lack
transistor is able to reduce the flicker noise, in structures such of efficient schemes for temperature compensation, it is
as APS [30], [35], [60] or pH-to-time pixel [32]. likely that the best solution lies within on-chip temperature
regulators [48], [66], [77], [78], which also enable new
B. System Compensation applications, such as on-chip PCR in the context on DNA
As opposed to device adaptation, system compensation does sequencing.
not affect the sensor operation. Instead, the signal originating The last technique which the authors have considered
from the analogue front-end is typically processed indepen- worth mentioning involves white noise cancellation through
dently through a digital method. As such, they are often useful averaging. Although this could be applied externally, several
for more than one non-ideality of the ISFET. topologies have reported embedded schemes to improve SNR
Consider for instance differential measurements, which have within the analogue front-end, including a global negative
been presented in Sec. IV. Their capability for cancelling any current feedback [58], using current mode to perform simple
common variation in the two input devices grants them with pixel averaging.
an improved drift, temperature and noise immunity, assuming In this Section, we have reviewed a diverse range of
of course that these effects behave the same way in both compensation techniques, offering design trade-off to the final
transistors. The technique has justified the large interest it was performance of the system. Several device adaptation solutions
given, although the requirement on two devices is stringent for might offer better robustness for trapped charge, whereas sys-
some applications. tem compensation still seems to be the most popular solution
The idea of differentiating the signal is definitely useful for for drift and noise. Despite several attempts, it is unsure
any type of small variations. Instead of differentiating in space, whether there is a technique allowing for robust temperature
let us now consider time difference. It should not come as a compensation. Moving forward with this review, we will now
surprise that most of the techniques for external signal process- adopt a more critical view and provide further details on the
ing are once again borrowed from the imaging field. Amongst trade-off brought by each structure for the design of an ISFET
the most popular, Correlated Double Sampling (CDS) comes sensing system.
as a global solution for system compensation. Originally, CDS
is a switched-capacitor technique which cancels the undesired VI. D ESIGN OF A C USTOM ISFET S YSTEM
offset in an amplifier, and requires two non-overlapping clocks. We now focus on guiding the reader towards the conception
Premanode et al. [73] have first applied it to ISFET sensing in of a tailored ISFET sensing system. In particular, we will
the context of drift cancellation. In such a system, the output identify the main factors to be taken into account when
of the sampling phase indeed represents the difference of the building the platform and which topologies provide the best
current and previous samples, considered drift free if the time performance for given specification. We will base our study
interval is short, and hence contains solely the information on systems reported in the literature.
on the pH variation. In a similar manner, flicker noise is
also attenuated. Later, Huang et al. [60], along with their A. Application-Driven Requirements
dual-mode APS structure, have added CDS for suppression of An essential part of the specification for the readout is
Fixed Pattern Noise (FPN), demonstrating that the sampling application-driven. In that sense, the first step towards design-
technique removed the dependence of the output over the ing an ISFET front-end is to identify the requirements from the
threshold volage, hence reducing any offset mismatch between application. The range of applications has significantly grown
pixels. As such, at the cost of a clock and extra circuitry over the last ten years, as loads of novel ways of using the
to recover the signal, such as a low-pass filter, CDS is a technology were reported to motivate the research. We will
promising compensation technique. now provide a few examples for popular ISFET applications.
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1) Ion Imaging: Similarly to CMOS imaging, ion imaging Polymorphisms (SNPs). In such cases, the requirements on
consists in mapping the ion concentration of the solution the size and the speed of the array are relaxed. We have
onto the whole array, which is typically large and dense for also touched upon the idea of ISFET logic in the case
high chemical resolution. In particular, Nemeth et al. [29] where the system aims at solely identifying the presence
have carried out imaging of the diffusion phenomenon or absence of a gene. Overall, this leaves the following
when injecting citric acid into sodium hydroxide, map- requirements:
ping the progressive pH decrease throughout the array. compact pixel architecture,
A large amount of these arrays were reported start- large array for faster sequencing,
ing from 2005, ultimately targeting imaging of simple pH resolution depending on the DNA concentration,
electrolytes [19], [29], [36], [74], [80] or extracellular typically lower than imaging,
imaging [45], [53], [54]. In general, all have demonstrated relatively short measurement time.
good performance as proton cameras. Desirable specification The frame rate represents the main difference between DNA
for such arrays includes sequencing and ion imaging. Since the chemistry of hybridis-
compact pixel architecture and dense array for high ation tends to be slow, the detection does not typically require
spatial resolution, high speed.
possibly high pH resolution, Additional functionality might be desired for a sequenc-
varying measurement time, ing system. In order to perform on-chip DNA amplification
high frame rate which may involve parallel processing. through Polymerase Chain Reaction (PCR), a temperature
2) DNA Sequencing: Without a doubt, DNA sequencing has regulation system must be embedded inside the system.
been the most popular and successful application of ISFETs as 3) DNA Methylation Detection: One might wonder why yet
part of massively parallel sensor arrays. Those so-called DNA another section of this review is dedicated to DNA sequencing.
microarrays have appeared in the early 2000s as a massive As a matter of fact, certain applications have been reported
improvement compared to chemical techniques. In such a using only several sensors, as opposed to the ISFET arrays
configuration, each cell contains DNA strands of a particular which this review has mostly focused on. For the sake of
sequence, and the chain to be analysed is flushed, so that covering a wider range of applications, we will mention the
hybridisations i.e. bondings between sequences occur inside detection of DNA methylation as a case study.
certain beads [78]. These reactions were tagged with fluores- The context of the application lies within the detection
cent markers, such that they were detected locally using optical of methylation-based biomarkers in a particular gene, which
methods [83], known to be bulky and expensive. A few solu- change its expression in the organism and may lead to an
tions were proposed for the detection of these hybridisation early stage of cancer. The technology must therefore achieve
processes on-chip, including electrochemical methods [84]. the sequencing of one methylated- and one non-methylated-
But nowadays, the ISFET has dominated the field due to its genes and compare their results to detect the presence of the
integration in standard CMOS technology, causing inherent biomarkers, which is performed by developing chambers on
sensitivity to pH and guaranteeing a scalability predicted by top of two ISFETs. Although early reports of the methodology
Moores law. Along with the invention of Ion Torrent sequenc- also include a third chamber for chemical reference [86], the
ing i.e. single nucleotide detection in a process denoted as same authors have later realised that this comparison between
pyrosequencing, this has led to the development of fast, cheap genes could be carried out easily through differential mea-
and dense CMOS DNA microarrays. This was successfully surements [46], more precisely the aforementioned chemical
demonstrated by Rothberg et al [18], who implemented more Gilbert cell, whereby each ISFET is exposed to a gene. This
than a million pixels and placed the beads at the top of represents a perfect example of application-driven readout,
each ISFET, or Toumazou et al. [78], who demonstrated the where the application allows the use of a certain topology,
use of their recent chip sequencing platform for real-time here differential readout and hence provides direct advantages
amplification and detection of DNA. A significant amount of such as attenuating all common nonidealities between the
newly reported ISFET arrays are dedicated to DNA sequencing sensors. This also significantly relaxes requirements of very
applications [19], [48], [55], [56], [60], [81], although most small sensor size and fast readout speed which are desired in
of those papers only mention the application as opposed imaging arrays.
to demonstrating the performance of their system in a real We have provided an example of specific requirements
sequencing scenario. In fact, the quest for fast and cheap which are typically not the ones of ISFET arrays. As such,
sequencing has significantly contributed to the ISFET research, we will now return to the design of specific readout to achieve
providing motivation though scientific initiatives such as the the required specification of a sensing system.
Human Genome Project, which aims at reducing the cost
of genome sequencing to $1,000. A more complete review B. Design Considerations
of DNA sequencing technologies is beyond the scope of this At this point, the authors would like to emphasise that
paper, but interested readers will find an overview of the it is inconceivable to consider readout instrumentation and
evolution in sequencing platforms in [85]. compensation schemes independently. Although the early
DNA sequencing is a vast field, and while some are indeed review [4] has solely considered readout topologies for ISFET
interested in sequencing the whole genome, others are focusing sensing, these past 12 years have enabled the existence of cus-
on specific genes or on the detection on Single Nucleotide tom readout circuitry, which integrates compensation methods
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APS-based discharging pixel [32]. As a drawback, correspond-


ing processing circuits need to be specific to PWM signals,
which differ from the general readout. Other encoding methods
such as spike processing [36] exhibit a large pixel size and
have yet to be improved to be considered in the design of
ISFET arrays.
It should be noted that although we are mentioning these
architectures without compensation, some baseline frame cali-
bration will need to be performed to estimate the initial trapped
charge and subtract it from the measurements, which can
be done externally. Overall, compensation techniques are
essential for robustness of the readout, and we now focus on
introducing these into the system.
2) Measurement Time: Should drift compensation be
desired additionally to offset cancellation, the time window
during which the measurement must be taken is essential to
determine whether a reset scheme can be used. For short
Fig. 10. Simplified guidelines for the design of ISFET sensing system. measurements, which the drift will not corrupt significantly,
any accumulated charge on the surface of the ISFET can
within their operation, as opposed to adding those techniques
be cancelled between two readout phases. However, reset
to existing readout. This is the case for instance for the
schemes which involve a switch to the gate further reduce the
PG-ISFET configurations [39], [51], [52], which has initiated
measurement time due to leakage. This effect has not been
novel architectures including feedback to the reference elec-
quantified so far in the literature, but it is estimated that drift
trode or to the gate.
will corrupt the signal after 5 to 10 seconds. As an alternative,
It is therefore difficult to present a golden rule to select the
source voltage compensation is expected to offer a longer
best ISFET topology. Instead, we will be providing guidelines
readout time, but exhibits a limited trapped charge range. More
regarding the specification to be considered when designing
experimental tests need to be carried out on these structures
the circuit. Fig. 10 represents a simplified schematic of these
for further characterisation. Overall , this solution sums up to
guidelines and will be used to support our discussion.
using in-pixel device adaptation for both trapped charge and
1) Compensation Techniques: We start by focusing on
drift which, as stated before, tend to lead to a more robust and
trapped charge and drift, which have been reported extensively
scalable array.
in the literature. In some situations, an embedded compen-
Longer measurements do not allow the use of reset and
sation is not needed e.g. if the application allows for post-
therefore, drift compensation can only be achieved through
processing of the dies through UV exposure, or if there
system compensation. These include CDS or software process-
is no limitation on the range of the output ADC, with no
ing, such as baseline frame calibration or other differentiation
requirements on silicon area or power consumption. The same
techniques. Overall, they have shown good performance for
holds for the drift, which tends to decrease significantly as the
drift cancellation, although they involve external computa-
reaction reaches equilibrium and hence some systems let some
tional techniques which can sometimes be avoided by consid-
time elapse before carrying out the measurements [29].
ering embedded schemes described previously. As for readout,
The lack of requirement for compensation methods allows
classical configurations such as CVCC and current-mode are
for high compactness of the array, at the expense of robustness.
once again acceptable. The PG-ISFET is an alternative for
CVCC readout or current-mode may involve a structure as
achieving trapped charge adaptation, although to avoid a
small as the combination of an ISFET and a switch per pixel.
reduction in sensitivity, several phases of operation must be
In this particular situation, voltage-mode might be more ben-
considered which increases the complexity as well as the
eficial than current-mode, since it is immune to the capacitive
silicon area.
scaling effect at the floating gate and tends to involve smaller
transistors. 3) Temperature Effect: We have demonstrated that temper-
Increasing the size of the cell by adding the biasing circuit to ature was rarely tackled in ISFET sensing systems. As such,
the simple two-device pixel offers several advantages, includ- on-chip temperature regulation appears to be the most efficient
ing scalability, higher frame rate and larger ISFET chemical scheme. In-pixel heaters and sensors can be used to embed
sensing area, which in turns attenuates the capacitive scaling. a temperature system as part of the ISFET array. It is of
Should this be of interest, standard pixel structures such as course debatable whether this method can really be qualified
3-T or chemical APS are other candidates for a full sensing as system compensation, but the limitations of the athermal
array. This is the direction adopted by the imaging field. point biasing or the temperature coefficient cancellation are too
Lastly, strong requirements on the minimisation of noise important for the temperature-insensitivity requirements. For a
degradation of the signal may lead to the use of in- current mode readout in weak inversion operation, temperature
pixel quantisation. In particular, pH-to-time encoding can be insensitivity of the current to the pH through periodic reset
implemented easily in the form of an inverter [31] or an might also be investigated.
MOSER et al.: ISFETs IN CMOS AND EMERGENT TRENDS IN INSTRUMENTATION 6511

4) SNR: The main factor which influences the SNR of the will further split into branches with different requirements and
system is typically the front-end input-referred noise, and min- hence various structures of the arrays. On the other hand, it is
imising this often comes down to minimising the uncorrelated also possible that the field will come up with generic versions
noise through averaging techniques. On the one hand, this of arrays which can easily be applied to a wide range of
can be done spatially. Considering a current mode topology is applications, although such versatility will take more time and
beneficial for the reader at this point, since current averaging effort to build.
can be realised more effectively than voltage averaging, which Overall, the next generation of ISFET arrays should be
usually involves external signal processing. However, there is made scalable and reliable, with most of the functionalities
a trade-off between spatial averaging and spatial resolution, embedded on silicon. We are expecting a system which
since computing over more pixels reduces the effective size of performs initial calibration to cancel any unwanted effects,
the array. On the other hand, temporal averaging constitutes a and rectify any further issues during or between the measure-
trade-off with the frame rate. It is typically not worth being ments. This way, data acquisition to the external controller is
performed on-chip since it involves memory, and once again straightforward and the user treats the SPI output to display
external processing is a simple alternative. The preference the array on a user-friendly interface.
on either of the techniques is therefore dependent on the We are closer to introducing such a system than most
requirements on spatial resolution and frame rate. researchers believe. In the next review of this kind, the
discussion will not tackle the various techniques implemented
for readout and compensation to put together a full system.
VII. T HE F UTURE OF ISFET R ESEARCH
Instead, because each system will be closer to a finished
We have now reviewed more than the last decade of the product, it will focus on the performance of each array in terms
research carried out in ISFET instrumentation. If the focus of pH sensitivity, resolution, frame rate, density, parallelisation
of this review has been set on arrays, it is because the and other criteria.
authors strongly believe that they represent the future of ISFET It is now up to the research groups to start orienting their
sensing. More and more arrays are currently being reported work towards the ultimate goal of the autonomous array, driven
in the literature, with an increasing number of pixels and by an application that they ought to identify out of all the
improved sensor density. However, the field has started to possibilities brought by a chemical sensing array.
look past building the biggest array and the smallest pixels,
instead dedicating more efforts to finding new topologies and VIII. C ONCLUSION
compensation schemes. It is expected that this will be carried In this review, we have provided a general overview of
out over the next few years to ultimately come up with more the state of the ISFET instrumentation research field, starting
efficient and robust analogue front-end instrumentation. with a general background on the sensor as a floating gate
In fact, the whole idea of a compact pixel is bound to transistor. We have emphasised that its integration in CMOS
be revisited soon, since the ISFET chemical sensing area technology has provided many advantages, including inherent
should be made large enough to minimise both chemical scalability, low power and low cost. Furthermore, we have
noise and capacitive scaling, enhancing SNR in the process. summarised the challenges related to common nonidealities of
This could be the opportunity to start introducing in-pixel the device i.e. trapped charge, drift, temperature instability and
quantisation in the novel architectures, improving once again noise corruption. We have stated that these deviations from the
the signal immunity against any sort of interference or noise. ideal ISFET operation had only been thoroughly characterised
For that reason, the authors are particularly keen on in-pixel in the last decade, which has triggered an deep investigation
pH encoding in different domains than analogue, justifying of compensation methods.
their work on time and spike domain processing. Additional Classical readout topologies such as source and drain fol-
investigation might lead to a different perspective of the system lower and differential measurements, already described by
than analogue readout, paving the way to novel calibration Bergveld in his review [4], are still reported nowadays. How-
schemes specific to these types of signals. ever, their failure in conceiving a full sensing system has led
More importantly, the recent tendency to turn towards the new generation of researchers to innovate and develop
device adaptation as opposed to system compensation should novel analogue front-end topologies. Each of them brings a
carry on for offset and drift. Additional circuitry could be new concept, from embedded compensation to special encod-
required to achieve adaptation at device level, and will be ing of the signal. Despite these breakthroughs, several papers
implemented locally as part of the larger pixel. Once efficient still focus on stacking external schemes to existing readout,
adaptation is achieved for these nonidealities, it is expected although this involves a decreasing amount of publications, in
that more strategies will be reported for factors such as favour of more robust ISFET adaptation methods.
temperature stability, noise immunity or even light sensitivity. Using the technology and techniques accessible at the time
Once again, these advances will be new requirements orig- of writing, we have provided guidelines for the design of
inating from new emerging applications for ISFET arrays. an application-specific ISFET sensing array. These involve
We are indeed expecting that a functional ion sensing system identifying the requirements in details, and determining the
will not go unnoticed, and several applications will emerge best topologies to match them. Additionally to the usual
which will provide other purposes to the platforms than DNA analogue front-end, we have provided recommendations for
sequencing. If this indeed occurs, it is likely that the research temperature compensation or improved pH resolution.
6512 IEEE SENSORS JOURNAL, VOL. 16, NO. 17, SEPTEMBER 1, 2016

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6514 IEEE SENSORS JOURNAL, VOL. 16, NO. 17, SEPTEMBER 1, 2016

Nicolas Moser (S15) received the B.Sc. degree in Christofer Toumazou (M87SM99F01) is cur-
electronic and chemical engineering from the Uni- rently the Founding Director and a Chief Scien-
versit Catholique de Louvain, Louvain-la-Neuve, tist with the Institute of Biomedical Engineering,
Belgium, in 2013, the M.Sc. degree in analogue and Impe rial College London, London, U.K., where
digital integrated circuit design from the Department he is also the Research Director of the Centre for
of Electrical and Electronic Engineering, Imperial Bio-Inspired Technology and the Winston Wong
College London, London, U.K., in 2014, and the Chair of Bio-medical Circuits with the Department
M.Res. degree in advanced computing from Imperial of Electrical and Electronic Engineering. He has
College London, London, in 2015. authored over 700 research papers and holds over
He is currently pursuing the Ph.D. degree with 40 patents in the field of semiconductors and health-
the High Performance Embedded and Distributed care many of which are currently fully granted
Systems EPSRC, Centre for Doctoral Training, with in the Centre for PCT. He is distinguished for his groundbreaking innovations in silicon
Bio-Inspired Technology, Department of Electrical and Electronic Engineer- technology and integrated circuit design. His career began with the invention
ing, Imperial College London. He received the Hertha Ayrton Prize 2015 for and development of the entirely novel concept of current-mode analog
the best M.Sc. project with significant original contribution to the topic area circuitry for ultralow-power electronic devices. For this, he became one of
and the Outstanding Achievement prize for the analogue and digital integrated the youngest ever Professors at Imperial College London. However, it has
circuit design M.Sc. His research interests include the design of mixed-signal been his success in applying silicon chip technology to biomedical and life-
integrated circuits for Lab-on-Chip applications, with a specific focus on ion science applications, most recently to DNA analysis, that is leading to new
imaging using ISFET arrays. innovations in the field of genetics, molecular biology, and personalized
medicine. He is the Founder of three technology-based companies with
applications spanning ultralow-power mobile technology (Toumaz Technology
Ltd., U.K.), DNA sequencing (DNA Electronics Ltd., U.K.), and GeneOnyx, a
company applying the DNAe technology to retail cosmetics. He has received
many awards, including the Royal Society Clifford Patterson Prize Lecture,
entitled The Bionic Man, for which he received the Royal Society Clifford
Patterson Bronze Medal in 2003. He was a recipient of the 2005 IEEE
CAS Education Award for pioneering contributions in circuits and systems
for biomedical applications, and the Royal Academy of Engineering Silver
Medal in 2007 for pioneering contributions to the British industry. In 2008,
he was appointed as a Fellow of the Royal Academy of Engineering and
the Royal Society. He was a recipient of the World Technology Award from
Time Magazine for the Health and Medicine category in 2009, and the 2011
J. J. Thompson Medal of the Institution of Engineering and Technology (IET).
In 2013, he was a Fellow of the Academy of Medical Sciences and was
conferred the title of Regius Professor in the Queens 2012 Diamond Jubilee.
He was also a recipient of the European Inventor Award from the European
Patent Office and the Michael Faraday Award from the IET in 2014.

Tor Sverre Lande (M93SM06F10) is currently Pantelis Georgiou (AM05M08SM13) received


a Professor of nanoelectronics with the Department the M.Eng. degree in electrical and electronic engi-
of Informatics, University of Oslo. He is a Visiting neering and the Ph.D. degree from Imperial College
Professor with the Institute of Biomedical Engi- London (ICL), London, U.K., in 2004 and 2008,
neering, Imperial College, London, U.K. He has respectively.
authored or co-authored over 100 scientific publi- He is currently a Senior Lecturer with the
cations with chapters in two books. His primary Department of Electrical and Electronic Engineer-
research is related to analogue and digital microelec- ing, ICL, where he is also the Head of the Bio-
tronics. Research fields are neuromorphic engineer- Inspired Metabolic Technology Laboratory, Centre
ing, analogue signal processing, micropower circuit for Bio-Inspired Technology. His research includes
and system design, biomedical circuits and systems bio-inspired circuits and systems, CMOS based
and impulse radio (IR-UWB) for wireless and radar. He is serving as an Lab-on-Chip technologies, and application of microelectronic technology to
Associate Editor of several scientific journals. create novel medical devices. He conducted pioneering work on the integration
He has served as Guest Editor of special issues for the IEEE T RANS - of ISFET sensors in CMOS, which has enabled applications, such as point of
ACTIONS ON C IRCUITS AND S YSTEMS I AND II, and a Special Issue on care diagnostics and semiconductor genetic sequencing and has also developed
Biomedical Circuits and Systems. In 2006, he was appointed Distinguished the first bio-inspired artificial pancreas for treatment of Type I diabetes using
Lecturer of the IEEE Circuits and Systems Society and an elected member the silicon-beta cell. He received the IET Mike Sergeant Medal of Outstanding
of CAS Board of Governors. He was the Editor-in-Chief of the IEEE Contribution to Engineering in 2013. He is a member of the IET and serves
T RANSACTIONS ON B IOMEDICAL C IRCUITS AND S YSTEMS from 2007 to on the BioCAS and Sensory Systems technical committees of the IEEE CAS
2010. He is also the Co-Founder of the spin-off company Novelda AS. Society. He also serves on the IET Prizes and Awards committee.

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