IMECE2013
November 15-21, 2013, San Diego, California, USA
IMECE2013-63837
Table 3 Characterized performance parameters of the device under a homogeneous PDMS specimen
1st 2nd 3rd 4th 5th Symbol
Initial resistance 3839 4178 4277 4475 4488 R0s ()
Overall stiffness of the device 3.52 Kd
Overall stiffness of the device and specimen 1.88 Keq
Rs ( ) Fs (N) zd (m)
2000 1 250
1st y = 0.00188x + 0.02286 1st
2nd 2nd
1600 3rd 0.8 200 3rd
4th 4th
5th 5th
1200 Load 0.6
150 Average
800 0.4
100
400 0.2
50
0 0
0 100 200 300 400 500 600 0
z (m) 0 200 400 600
Fig. 7: Measured resistance changes and overall load as a z (m)
function of the applied displacement of a homogeneous PDMS Fig. 8: Average deflection and the deflections of the
specimen of 10mm6mm2mm using the device microstructure at the locations of the transducers as a function
of the applied displacement of a homogeneous PDMS
Step 1: Overall equivalent stiffness, Keq, of the device and the specimen
specimen
Consequently, the overall load can be plotted as a function
The slope of the measured load-displacement (Fs-z) of the deflections of the microstructure (Fs-zd relation), as
relation in Fig. 7 gives rise to the overall equivalent stiffness shown in Fig. 9. The slope of the overall load versus the
of the device and the specimen: Keq=1.88mN/m. average deflection of the microstructure (Fs-zd-ave relation)
gives rise to the overall stiffness of the device,
Step 2: Overall stiffness, Kd, and deflection, zd, of the
microstructure Kd=3.52mN/m. The slopes of the Fs-zd relations in the figure
represent the individual stiffness at the locations of the
Based on Eq. (3), the deflection, zd, of the microstructure transducers. The similarity of the slopes among the
can be extracted from the measured resistance changes, Rs, transducers indicates identical individual stiffness of the
by: microstructure above the transducers. As expected, the overall
stiffness, Kd, of the device under a specimen is different from
1 that of the device (Kd=2.37mN/m) directly in contact with a
zd = 1 / (7)
Rs / Rs 0 + 1 hE probe, as measured in Sec. 4, since the load configuration on
where Rs0 denotes the initial resistance of a transducer after the the device is changed by the insertion of a specimen.
probe is aligned above the specimen and the device prior to Step 3: Overall stiffness, Ks, of the specimen
measurement, as summarized in Table 2; the constant, /hE, is
Since the device and the specimen are connected in series
obtained from the device characterization. The average
along the direction of the applied displacement, the overall
deflection of the microstructure can be obtained by averaging
stiffness of the specimen is related to the overall equivalent
the deflections at the locations of the transducers. The
stiffness of the device and the specimen by:
deflections of the microstructure are plotted as a function of
the applied displacement in Fig. 8. 1 1 1
= (8)
K s Keq Kd '
Here, the true displacement removes the initial offset The heterogeneous specimen is placed on the device and
misalignment between a specimen and the probe. Then, the its void is visually aligned above the 3rd transducer, as
deflection of the specimen at the location of the ith transducer illustrated in Fig. 11(a). A step displacement of 1mm at speed
is calculated as: of 3mm/s is applied to the specimen. The resistance changes
and the readout of the load cell are recorded as a function of
zs i = ztrue zd i (12) time and illustrated in Fig. 11(b). Similarly, the initial
resistances of the device are measured again and summarized
where zd-i denotes the deflection of the microstructure at the in Table 5, after the probe is aligned above the specimen prior
location of the ith transducer. to measurement.
Since the stiffness of portion of a specimen above the ith
transducer is proportional to the elastic modulus of that
portion, ks-i Es-i, the elastic modulus of a specimen at the
Table 5 Characterized performance parameters of the device under a heterogeneous PDMS specimen
1st 2nd 3rd 4th 5th Symbol
Initial resistance 2644 2776 2862 2882 2860 Rs0 ()
Maximum overload 1.4839N Fs-max (N)
Overall stiffness of the device 6.51mN/m Kd
Overall stiffness of the device and specimen 1.48mN/m Keq
Fs (t ) = Kd zd ave (t ) (16)
Rigid Probe
Void
PDMS Void 1mm Fig. 12 shows the deflection of the microstructure at the
locations of the transducers and its average deflection as a
function of time. The calculated overall load acting on the
1 2 3 4 5 specimen is also included in the figure.
(a) For simplicity, the average elastic modulus of the specimen
Rs ( ) Load cell (N) is calculated as:
2000 2
Fs (t ) h
Es ave (t ) = s (17)
1500 1.5 z zd ave (t ) As
where the applied step displacement is z=1mm.
1000 1
zd (m) Fs (N)
500 1st 2nd 0.5 350 1.6
3rd 4th
5th Load cell 300 1.4
0 0
250 1.2
5 5.5 6 6.5 7 7.5 8
-500 -0.5 200 1st 1
t (s) 2nd
150 3rd 0.8
(b) 4th
Fig. 11: (a) Alignment schematic and picture (b) measured 100 0.6
5th
resistance changes and recorded output of the load cell as a 50 Average 0.4
function of time for the heterogeneous PDMS specimen with Load
0 0.2
its void aligned above the 3rd transducer
-50 5 6 7 8 0
Data analysis -100 -0.2
t (s)
According to Eq. (7), the deflections of the microstructure Fig. 12: Deflections of the microstructure at the locations of
at the locations of the transducers and its average deflection the five transducers, its average deflection and the overall load
are plotted as a function of time. Since the load cell is a piezo- as a function of time for a heterogeneous PDMS specimen
type, only its maximum readout, Fs-max, is utilized to obtain the
overall stiffness of the microstructure by:
The following relations hold for the individual stiffness of
Fs max a specimen and the microstructure, respectively, at the
Kd = (15) locations of the transducers:
max( zd ave )
kd
where max(zd-ave) denotes the maximum average deflection of k s ( z zd ) = k d zd and ks = Es (16)
the microstructure. Consequently, the overall load z / zd 1
corresponding to the applied step displacement is a function of
Thus, the average elastic modulus is related to the elastic
time:
modulus at the five locations are: