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APPLIED PHYSICS LETTERS 93, 112112 2008
Wide band gap semiconductor zinc oxide ZnO thin In this study, transparent p-NiO/ n-MgZnO heterojunc-
films have attracted extensive attention recently for their tions with different Mg contents were fabricated on indium-
various optoelectronic device applications.1 The band gap of tin-oxide ITO-coated glass substrates. The p-n junctions
ZnO can be extended by formation of the solid solution of exhibit typical current-voltage I-V behaviors with good
MgxZn1xO, i.e., so-called band gap engineering of ZnO.1,2 rectifying characteristics. It has been confirmed that the elec-
Through the band gap engineering technique, some MgZnO- trical properties of the p-n junctions can be effectively tuned
based semiconductor materials and devices with tunable by band gap engineering of n-MgZnO and can be further
properties can be designed.3 Meanwhile, high optical trans- improved by using compositionally graded n-MgZnO layer
parency can be maintained in MgZnO system, which is es- instead of single n-MgZnO layer in the p-n junctions.
sential for transparent electronic device applications. In our p-n junction diodes with the configuration
It is well known that p-n junction is the key structure for of Pt/ p-NiO/ n-MgZnO/ ITO/ glass, both the p-NiO
most semiconductor devices. So far, many efforts have been and n-MgZnO layers were prepared by sol-gel tech-
made to prepare the p-type ZnO or MgZnO, but there is nique. MgZnO solutions were synthesized by using
difficulty in reproducing p-type MgZnO.4,5 Recently, p-n ZnCH3COO2 2H2O and MgCH3COO2 4H2O as
heterojunction devices combining intrinsic n-type ZnO with source materials and 2-methoxyethanol and diethanola-
various p-type materials including ZnRh2O4, NiO, and mine as solvent and stabilizer, respectively. NiO solution
SrCu2O2 have been studied,1,6 among which NiO is prefer- 0.3 mol/L was synthesized using similar method with
able for its simple structure and composition. Several re- NiCH3COO2 4H2O as nickel source. The film layers were
search groups reported on fabrication and photoresponse prepared by spin coating solution on ITO-coated glass sub-
of p-NiO/ n-ZnO heterojunctions for UV detector applica- strates at 2500 rpm for 20 s. Each layer was preheated at
tions.79 However, few efforts have been made to investigate 350 C for 5 min to evaporate solvent and remove organic
transparent p-NiO/ n-MgZnO heterostructures. Since band residuals. The procedure above was repeated until the de-
gaps of ZnO thin films can be adjusted by Mg incorporation, sired film thickness was achieved. Then, the NiO/MgZnO
heterojunctions were annealed at 600 C for 1 h at ambient
it should be of much interest to check whether electrical
air. The thicknesses of the resultant NiO and MgZnO layers
properties of p-NiO/ n-MgZnO junctions can be tuned by the
are about 100 and 300 nm, respectively. The preparation pro-
band gap engineering of MgZnO.
cess of the CGL of n-MgZnO is similar to that of composi-
In addition, it is known that in graded band gap semi- tionally graded ferroelectric films reported before.13,14 In
conductor, the carrier transport properties can be influenced brief, three MgZnO layers with different Mg contents were
by quasielectric fields due to the spatial dependence of band prepared on ITO-coated glass substrates in sequence and
gap,10,11 which have led to some physical phenomena or im- then a suitable annealing process was used to realize compo-
proved properties in graded band gap semiconductors.12 sition gradient along thickness direction.
Since band gap of hexagonal MgZnO almost linearly in- The crystalline phases of the p-n junctions were charac-
creases with increasing Mg content, an attempt of using terized in -2 mode by a Rigaku D-MAX 2200 VPC x-ray
compositionally graded layer CGL of MgZnO also having diffractometer XRD with Cu K radiation = 0.154 nm.
graded band gap to replace n-MgZnO layer was worth mak- The transmission spectra were measured in the range of
ing to improve electrical properties of the p-n junctions. 300800 nm at room temperature by Shimadzu UV-3150
UV-visible-near-infrared spectrophotometer. The surface
a
Author to whom correspondence should be addressed. Electronic mail: morphologies were observed by JSM-6330F scanning elec-
stsbdh@mail.sysu.edu.cn. tron microscopy SEM. The current-voltage I-V curves
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112112-2 Chen et al. Appl. Phys. Lett. 93, 112112 2008
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112112-3 Chen et al. Appl. Phys. Lett. 93, 112112 2008
TABLE I. Threshold voltage and breakdown voltage values for the p-n the reverse breakdown voltage of p-NiO/ n-CGL increases
junctions with different Mg contents. up to about 6.0 V, and the reverse saturation current de-
creases. The increasing reverse breakdown voltage and de-
Eg Von VBR
Mg content eV V V creasing reverse saturation current of p-n junction devices
are desirable for some device applications. Previous theoret-
0 3.26 1.5 1.8 ical prediction also indicated that similar graded band gap
0.05 3.34 3.1 3.5 p-n structure can effectively reduce the reverse saturation
0.1 3.41 3.5 5.0 current.17
CGL 3.32 3.1 6.0
In conclusion, transparent p-n heterojunctions composed
of p-type NiO and n-type MgZnO film layers have been
fabricated on ITO-coated glass substrates by sol-gel spin
junctions with different Mg contents. In addition, Mg doping
coating technique. The resultant p-n heterojunctions exhibit
also leads to lower leakage current in the junctions. The in-
typical I-V behaviors with good rectifying characteristics.
creasing threshold voltage corresponds to the higher built-in
The electrical properties of the p-n junctions can be effec-
potential generated by difference of Femi-level of p-type
tively tuned by band gap engineering of n-MgZnO, and can
NiO and n-type MgZnO, which can be attributed to the en-
larged band gap. As for the increased reverse breakdown be further improved by using compositionally graded
voltage, the resistivity should be taken into consideration. It n-MgZnO layer instead of single n-MgZnO layer. The trans-
is recognized that the reverse current consists of hole current parent p-NiO/ n-MgZnO heterojunctions can find applica-
tunneling from n base region to p base region and electron tions in transparent electronic devices.
current moving in opposite direction. Partial substitution of The authors gratefully acknowledge support from the
Mg2+ for Zn2+ can depress formation of oxygen defects due Natural Science Foundation of Guangdong Province, China
to the more ionic character of MgO bond, enhancing the Grant No. 05003289, the Specialized Research Fund
resistivity.15,16 Thus, the lower leakage current and higher
for the Doctoral Program of Higher Education of China
reverse breakdown voltage can be obtained by increasing Mg
Grant No. 20060558068, and NSFC Grant Nos. 10574164
content. In addition, it can be seen that the reverse saturation
and U0634006.
current decreases with increasing Mg content. These results
suggest that the properties of the p-NiO/ n-MgZnO junctions 1
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