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Work Instruction

WD1 HCL CLEANING


Document number: RST WI POL-024 Rev: 7 Page 1

DOCUMENT NUMBER AND REVISION

RST WI POL-024 REV: 7

DOCUMENT TITLE

WD 1 HCL CLEANING

PROPOSING PARTY DEPT NAME SIGNATURE DATE


ORIGINATOR ENGINEERING NARENDRAN
AFFECTED PARTY SIGNATURE DATE
APPROVED BY OPERATIONS TAN HOO HIN
(DEPT MANAGER)

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 2

REVISION HISTORY

REV RELEASE ORIGINATOR REASON FOR CHANGE(S) EXPIRY DATE


DATE
1 01/12/2010 Kalish New release 01/12/2012
2 28/01/2011 Rajan Added daily checklist 28/01/2013
3 02/05/2012 Madavan 1. Upgrade Table of Content (Page 3) 02/05/2014
2. Upgrade Parameter Setting (Page 4)
3. Upgrade Standard of Condition (Page
5)
4. Upgrade Standard of Procedure
(Page 6-10)
5. Attachment 1.0 - PH Scale and
method of measurement
6. Attachment 2.0 Spin Dryer Machine
Shiftily check form
7. Attachment 3.0 Wet Bench PH
Check Form
8. Attachment 4.0 WD1 Machine
Cleaning and Chemical Change
Check List
9. Attachment 5.0 WD1 Machine
Status Check List
10. Attachment 6.0 Instruction On
Preparation of Acid Hydrochloric (
HCL ) at WD1 ( Manual Preparation )
11. Attachment 7.0 Instruction On
Preparation of Voltron and Clair at
WD1 ( Manual Preparation )

4 14/06/2013 Narendran 1. Revise Attachment 2.0 Spin Dryer 14/06/2015


Shiftily
5 22/10/2013 Narendran 1. Revise Standard Operating Condition 22/10/2015
6 07/04/2014 1. Edited 3.0 Equipment Required 07/04/2016
Added Kilala in the list
2. Edited 4.0 Standard Operating
Procedure Added Kilala solution in
the machine settings
7 06/05/2014 Narendran 1. Edited 4.0 Standard Operating 06/05/2016
Condition Edited Bath processing
time
2. Edited Attachment 2.0 Spin Dryer
Machine Edit Spin dryer timing
3. Edited Attachment 5.0 WD1 Machine
Check List Remove Ultrasonic
monitoring

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 3

1.0 Purpose

The purpose of HCL cleaning is to clean wax and metallic contamination from the wafer surface.

2.0 Safety

2.1 Become familiarized with the Material Safety Data Sheet (MSDS) located in the MSDS folder.
2.2 Hydrochloric acid (HCL) is very toxic and corrosive chemicals.
2.3 Any direct skin or eye exposure with HCL must be avoided. HCL will burn the skin and eye tissues.
2.4 Kilala are harmful if swallowed in form of liquid or vapor or if they come in contact with your eyes
2.5 Wear safety goggles, respiratory mask, and long sleeve chemical safety gloves when running process
or preparing HCL/H202 solutions.
2.6 Report any accidents to your supervisor, immediately!
2.7 If exposed to any of the chemicals used in the cleaning process, rinse the contaminated area with cold
water for a minimum of 15 minutes.
2.8 In the event of exposure, call immediately for help, and if required, seek immediate medical attention.

3.0 Equipment Required

3.1 Flexible DI water hose with nozzle


3.2 Safety goggles
3.3 Respiratory mask
3.4 Long sleeve chemical safety gloves
3.5 Wipers (Cloth)
3.6 Concentrated HCL (36%), MB-G
3.7 Hydrogen Peroxide, H2O2 (31% concentration)
3.8 Kilala
3.9 pH indicator strips (pH 0 14)
3.10 2, 4 and 6 Teflon white cassettes and Cassette Carrier
3.11 Beaker

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 4

4.0 Standard Operation Condition (SOC)

Machine Process Parameter setting


Standard Operation Condition For WD1 (Post CMP Cleaning)

Stage No. 1 2 3 4 5 6 7 8 9 10

Stage DIW Kilala Kilala QDR Kilala QDR HCL QDR HCL QDR

Beaker Type stainless steel stainless steel stainless steel Teflon stainless steel Teflon Teflon Teflon Teflon Teflon
DI Water 96.7L 96.7L 96.7L 55litre 55 litre
Kilala 3.3 Liter 3.3 Liter 3.3 Liter
Clair
Chemical
Mix Time HCL 5 litre 5 litre
Setting H202 3 litre 3 litre
(s)
Interval (min)
Spiking
Volume
Lifetime 24 hours / 500 wafers

US Power

30 30 30 30
(shower) (shower) (shower) (shower)
Process Time (s) 30 600 600 600 600 600
120 120 120 120
(bubble) (bubble) (bubble) (bubble)
QDR cycle 3 3 3 3

Temperature (C) 40.0 5?C 40.0 5?C

DI In
Tank Cleaning Time
Drain
Setting (s)
Cycle
Pore size (m)
Filter
Lifetime

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 5

5.0 Standard Operation Procedure (SOP)


5.1 WD1 Cleaning

No. Procedure Remark


1.0 Procedure of Receiving Materials
1.1 Wear complete lint-free suit and nitrile gloves and go in the area through Class 10K
air-shower.
1.2 Wear safety goggle
1.3 Receive material from polishing P2 wafers for WD1 cleaning from pass If the information and
door CR10K, and put on transfer table number of pieces is not
1.4 Check the information from the lot traveler and make sure the information correct:
is correct with the number of pieces received. a) a) Inform P1 personnel or
- a) Lot ID area supervisor accordingly
- b) Number of pieces b) b) Do not process the lot

1.5 Transfer the material into Cleaning cassette using transfer jig and materials
are ready for cleaning
1.6 Record the detail into the activity log:
a) Date
b) Lot ID
c) PFA/PVDF cleaning cassette ID
d) Number of pieces
e) Load in Time
f) Unload Time
g) Operator ID
h) Remark (Post P1)

2.0 Before Operation


2.1 Make sure the three-phase power is ON from the side panel and visual Related Doc: WD1 Daily
check for any machine abnormality. Checklist
2.2 Check the chemical is enough with sufficient chemical volumes. If it is not, Refer to Chemical Supply
replace with a full chemical carboy as per chemical supply preparation preparation procedure at
procedure. section 5.2, item 5.0

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 6
3.0 Chemical Preparation, Auto Tank Cleaning and Cleaning Procedure Three-colour signal light of
3.1 Press POWER ON button on machine panel, turn to MANUAL. the machine:
Welcome page will appear on the panel monitor. Press Welcome on the Green: Automatic operation
touch screen and the screen will switch to Main Menu: Yellow: Manual Operation
(Blinking with Home
position)
Red: Alarm

No. Procedure Remark

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 7

3.2 To Prepare new chemicals or tank cleaning, at machine panel:

3.2.1 Select ULTRASONIC HEATER, make sure Heating Condition Tank#7


Reservoir HCL and Tank #9 Reservoir HCL are OFF; Make sure Tank#3 and Heater & Ultrasonic need to be
Tank#5 Ultrasonic are OFF OFF first before draining out
chemicals
3.2.2 Select PUMP,
Click OFF for Circulate pump 7#HCL and 9#HCL. Change the chemical based on
the chemical lifetime as per
3.2.3 Select PNEUMATIC, click Next Page, standard of condition
At Tank #3, #5, #7 and #9 Operation:
Click OFF for DI In, Chemical In, Bubble
Click ON for Drain Make sure to fill up DIW
minimum tank before top-up
At Tank#2, #4, #6, #8, #10 (QDR Stages): chemical
Click OFF for DI In, Bubble, Shower, Slow Flow, Reservoir Fill
Click ON for Drain
Once all stages are empty, Drain will be off automatically (blinking light off).

3.2.4 Tank cleaning will be done manually by Operator/Tech by fill in DIW and
circulate the DIW for 10 min before drain the DIW out

3.2.5 Chemical is mixed manually. Manual Chemical and Detergent mixing


method:- Time has been set as per
Standard Operation Condition.
Inform Supervisor if time
KILALA HCL H202 DIW setting shown is different
Tank 2 3.3L - - 96.7L
Tank 3 3.3L - - 96.7L
Tank 5 3.3L - - 96.7L Once complete the Chemical
Tank 7 - 5L 3L 40L mixing need to check the PH
Tank 9 - 5L 3L 40L level for all the tank and record
down in the PH level shiftily
checklist

No Procedure Remark

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 8
3.2.6 Tank#7 and Tank#9 Heating condition need to be start manually at
circulation unit behind WD0.

3.2.7 Go to PUMP, at diaphragm pump condition,


Click ON for Circulate pump 7#SC2 and 9#SC2
If only running 1pc 4
3.3 To start cleaning operation, at machine panel: cassette (any amount of
3.3.1 Go to Automatic Operation, wafers) or 1pc 6 cassette
a) Click HOME to make sure the robot arm is back to loading stage. (with < 10 wafers), put an
b) Confirm tank temperature as per SOC setting, if temperature is still low, additional 6 cassette on the
RED light is shown at temperature status, wait until it is Green light. carrier and clean together to
c) Confirm no cassette in any stages. Cassette In Tank indicator will blink avoid cassette floating due to
if any cassette is available in related stage. light materials.
3.3.2 Twist the control button from MANUAL to AUTO.
3.3.3 Press START Check the chemical tank
3.3.4 Put the cassette carrier at the loading stage temperature from the
3.3.5 Put the cleaning cassette with wafer on the cassette carrier. Max. 2 indicator at control panel and
cassettes per carrier. only start loading cassette
3.3.6 Make sure Three-colour signal light on top of machine is GREEN: when chemical tank
Automatic Operation temperature is within
3.3.7 Press the FEEDING button next to the loading stage, Shutter door standard operation condition
will open and the operator need to manually feed in the cassette carrier and (Green indicator shown at
operation will start. monitor)

4.0 Spin Drying Procedure


4.1 Collect cassettes from cleaning machine unloading conveyor. Time and Speed has been set
4.2 Open the spin dryer door and place the cassette into spin dryer with the as per Standard Operation
cassette H-bar facing outward. Condition. Inform Supervisor
4.3 Close the spin dryer door if time setting shown is
4.4 Ensure the setting as per SOC. different
4.5 Press START button and the indicator light for door-sealed is ON
4.6 Once complete, door-sealed indicator light will OFF Stop the machine if door-
4.7 Open the door, ensure rotor is upright to prevent wafers dropping and sealed indicator is not ON
gently remove the cassette from the rotor. when START button is
4.8 Visual checks the wafer surface. If wafers are not dried properly, inform to pressed.
area supervisor.
4.9 Move the cassette to transfer table
5.0 Confirm the number of pieces and send out the cleaned materials from
pass-door CR10K

5.2 Standard Operation Procedure (SOP)

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 9
Other Procedure
No. Procedure Remark
1.0 Shutdown Procedure
1.1 Perform items 3.2.1 until 3.2.3 (procedure 5.1 above)
1.2 At PNEUMATIC, click OFF for Drain (all tanks)
1.3 At PNEUMATIC, click ON for DI In Tank#1, #2, #3, #5, #7, #9 to fill
up the tank with DI water and let it soak
1.4 Select DI In ON for Tank #4, #6, #8, #10 to fill-up the QDR tanks and
let it soak
1.5 Power OFF the machine

2.0 Procedure when there is water interruption during automatic operation

2.1 Stop loading any cassettes at loading stage.


2.2 Complete the cycle for the balance cassettes in the machine and unload it
for spin dry.
2.3 Record the cassette ID, date/time, Operator when the event happened in the
activity log.
2.4 Report to shift supervisor or facilities to check out the actual root cause and
wait for further instruction from them
2.5 Perform items 3.2.1 and 3.2.3 (procedure 5.1 above) to drain out all
chemicals
2.6 When water supply is back to normal, perform items 3.2.4 (procedure 5.1
above) auto tank cleaning and prepare new chemical as per item 3.2.5 onwards.
2.7 Re-clean the affected materials.

3.0 Procedure when there is electricity interruption


3.1 Stop loading any cassettes at loading stage.
3.2 Inform shift supervisor or facilities to check out the actual root cause and
wait for further instruction from them.
3.3 Report urgently to shift supervisor if exhaust suction is not functioned and
chemical couldnt be drained out due to power failure, and leave the clean
room seek for further action.
3.2 When power supply is back to normal, close all tank cover at
PNEUMATIC machine panel, use the MANUAL JOG at the side of machine
to transfer out those cassettes from chemical tank into QDR tanks first before
unloading.
3.3 Record the cassette ID, date/time, Operator when the event happened in the
activity log..
3.4 Perform items 3.2.1 until 3.2.7 (procedure 5.1 above) after power failure.

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 10
4.0 Procedure when there is filter, pumps or valve changed
4.1 Chemical stages need to be flushed with DI before any filters or pump
changed. First, Perform 3.2.1 to off heater and ultrasonic
4.2 Perform 3.2.2 and 3.2.3 to drain out all chemicals.
4.3 Switch to MANUAL OPERATION, at PNEUMATIC, turn ON the DI
In, once tank is filled-up with DI water, turn OFF DI In.
4.4 At PUMP, turn ON the circulate pump for the chemical stages and let it
run for 10minutes, then turn OFF the circulate pump.
4.5 Repeat items 4.2 until 4.4 above to do another DI flushing.
4.6 Perform 3.2.2 and 3.2.3 to drain out all DI water before any filter or pump
changed.
4.7 After filter changed, perform 2X DI flushing by repeating items 4.3 4.5
before new chemical preparation.

5.0 Chemical Preparation Procedure


5.1 Check the chemical is sufficient enough chemical volumes at start shift WARNING:
before operating the cleaning machine minimum 2 carboy. Wear respirator mask, acid-
5.2 Wear PPE when handling chemicals. proof long gloves when
5.3 Get ready the biker to measure and pour the chemical to the tank preparing chemical at supply
5.4 Get ready the manual suction pump to manually pump the chemical from cabinet
Carboy to Biker.
5.4 Bring the new chemical carboy to relevant tank. CHECK and Check the lifetime of the
CONFIRM the correct chemical is in-used. respirator mask cartridge
5.5 Open the cap and slot in the manual suction pump tubing into carboy and
Than start to manually pump the chemical from carboy to the biker until Wash the glove if there is
the level is reached. ( ref : 3.2.5 ) any chemical residual before
5.6 pour the chemical from the biker to the tank and repeat the process of removing and put it back to
chemical top up until reached the level of required in ( ref : 3.2.5 ) the assigned PPE storage
5.6 Close back the chemical cap and return back the chemical carboy to the area
Chemical storage located area.
5.7 Cap the empty carboy and place it at the disposal carboy storage area. CAUTION:
Transfer chemical carboys
NOTE: from warehouse into CR10K
Operator is responsible for ensuring sufficient departmental inventory of or CR100 by using trolley
chemicals. When the departmental inventory level of chemical reaches 2 and through trolley pass-
carboy or less, you are responsible for going to the inventory control door.
area (ICA) and procuring additional inventory.

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 11
ATTACHMENT 1.0 - pH Scale and Method of Measurement

pH
Scale
1 2 3 4 5 6 7 8 9 10 11 12 13 14

How pH is Measured

To get accurate pH readings always remember to:

Wait a minute or two after you add an acid or a base to a solution. This will allow the reaction (ions being either
donated [acid] or accepted [base]) to complete before you measure.
Swirl or mix a solution well before measuring. This will help ensure that the solution is uniform.

When using pH test paper/indicator sticks you should also:

Make sure to only use paper/sticks that have not been previously wetted.
Wait for the color to stop changing (1-2 minutes maximum) before matching the paper/stick to the color key. Do
not wait more than 5 minutes after the color has stabilized or it may start to fade and affect the accuracy of your
reading.

Figure 1. pH indicator sticks are dipped into a solution then matched against a color key to determine the solution's
approximate pH

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 12
ATTACHMENT 2.0 - Spin Dryer Machine
Month : Year :.
Shiftily Check List DAT
ITEM

E/ 1 1 1 1 1 1 1 1 1 1 2 2 2 2 2 2 2 2 2 2 3 3
DETAILS SETTING / CONDITION SHIF 1 2 3 4 5 6 7 8 9
0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 0 1
T
a: Phase 1: Rinse DAY 1
1 Spin Dryer NIG
Time /Speed : 40s/600rpm HT
TOP Phase 2: Dry 1 DAY
b: NIG
Time /Speed : 360s/2400rpm HT
Phase 3: Dry 2 DAY
c: NIG
Time /Speed : 80s/1000rpm HT
Phase 1: Rinse DAY
a: NIG
BOT Time /Speed : 40s/600rpm HT
Phase 2: Dry 1 DAY
b: NIG
Time /Speed : 360s/2400rpm HT
Phase 3: Dry 2 DAY
c: NIG
Time /Speed : 80s/1000rpm HT
a: Ok or Not DAY 2
2 N2 Supply NIG
HT
a: Ok or Not DAY 3
3 DIW supply NIG
HT
a: no any abnormality: DAY 4
4 overall machine area NIG
( Leak,Smell, Vibration,sound ) HT
DAY
Time : NIG
HT
DAY
Check By ( Operator ID # ) NIG
HT
DAY
Acknowledged By ( Supervisor ID # ) NIG
HT
1 7 1 1 2 3
3 9 5 1
2 8 1 2 2
Any mc issue

4 0 6
/ Remarks

3 9 1 2 2
5 1 7
4 10 1 2 2
6 2 8
5 11 1 2 2
7 3 9
6 12 1 2 3
8 4 0
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 13
ATTACHMENT 3.0 Wet Bench PH Check Form

WET BENCH PH CHECK FORM

DATE TIME SHIFT PIC

UNDERLINE THE MC NAME:

MC WDO WD1 WD3 WD4

TARGET ACTUAL STATUS


SOLUTION
NO.TANK STICK PH TEST PAPER PH PH PASS/
TANK
READING READING FAIL
T#1 DIW 6-7

T#2 KILALA 11-12

T#3 KILALA 11-12

T#4 QDR 6-7

T#5 KILALA 11-12

T#6 QDR 6-7

T#7 SC2 0-1

T#8 QDR 6-7

T#9 SC2 0-1

T # 10 QDR 6-7

CHECK BY : DATE :

VERIFYED BY : DATE :

Note :- If the PH reading is out of spec please inform to line Supervisor and change back the chemical. If the DIW PH is out
of spec drain the DIW and top-up new DIW.

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 14
ATTACHMENT 4.0 WD1 - MACHINE CLEANING AND CHEMICAL
CHANGE CHECK LIST
SHIF TIME START
DATE TIME DOWN
T UP
DRAIN CHEMICAL AND DID MACHINE CLEANING
1 Make sure all the wafer completed unload
select to manual mode
2 Off heater power for tank # 7 and 9

3 Drain DIW

4 Drain Kilala Chemical ( tank # 3 )


Flushing inside tank with DI Water ( open drain valve )
Close valve and Do Auto cleaning ( 2 cycle )
5 Drain Kilala Chemical ( tank # 5 )
Flushing inside tank with DI Water ( open drain valve )
Close valve and Do manual cleaning ( 2 cycle )
6 Drain SC2 Chemical ( tank # 7 & 9 )
Close valve and Do manual cleaning ( 3 cycle )
7 Clean loader side & unloaded side
Wipe or vacuum any dust or rubbish at loader / unloaded area.
8 Cleaning all machine cover and robot movement side.

Top up New Chemical in tank # 2,3,5,7,9.


* ex: Please use PPE completely during handling / make up chemical
1 Make sure the all the chemical label is checked before proceed with Top up chemical process
2 Top up DIW ( tank # 1 )
Fill up half level DI Water inside tank.
This is to avoid the tank from get dried up
3 Top up Kilala Chemical ( tank # 2,3 & 5 )
Fill up half level DI Water inside tank. Add in Kilala solution 3.3L litres and follows by rest of DIW
Fill up DI Water until over flow level.
4 Top up SC2 Chemical ( Tank # 7 & 9 )
Fill up 3/4 level DIW inside tank. Add HCL 5L in Tank 7 & 9, H202 3L in Tank 7 and 9 and the rest DIW
Fill up DI Water until over flow level.
5 Drain DI Water - QDR tank ( tank # 4,6,8,10 )
Do manual cleaning - clear any dust or rubbish inside tank.
Fill up DI Water - until over flow level. (After cleaning or wipe machine tank cover)

Check machine condition before start up machine


1 On heater tank # 7 & 9 manually
2 Check the temperature rises until required level
3 On and check circulate pump functionality tank # 7 & 9
4 Check manually Agitation condition - bump up/down tank # 3 & 5
5 Monitor heater temperature tank # 7 & 9 must reach 40C 5C
6 After all condition OK homing machine and select auto mode for running machine

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 15

ATTACHMENT 5.0 WD1 Machine Check List


Month : Year
DA :
ITEM

1 1 1 1 1 1 1 1
DETAILS SETTING / CONDITION TE 1 2 3 4 5 6 7 8 9 18 19 20 21 22 23 24 25 26 27 28 29 30 31
/ 0 1 2 3 4 5 6 7
SHI
DA
YFT
Time : NIG
HT
DA
Process Beaker Y
1 No Abnormality NIG
Condition / Content HT
DA
No Abnormality ( sounds, Y
2 Pump Condition NIG
leak..etc); Functionality HT
DA
Y
a: Tank #7, #9 recycle pump NIG
HT
DA
Tank #4, #6, #8, #10 QDR Y
c: NIG
DI supply pump HT
DA
No Abnormality( Y
3 Robotic Arm
jerkingetc); Functionaly NIG
HT
DA
Y
4 Exhaust Functionaly NIG
HT
DA
Tank #3 and #5 Y
5 Ultrasonic NIG
( Ultrasonic 2.5 ~ 4 A ) HT
6 Recipe Setting
DA
a Process time : Y
600.0s NIG
1: Tank #3, #5, #7, #9 HT
DA
a Process time : 30s ( shower)/120s Y
NIG
2: Tank #4, #6, #8, #10 ( bubble) HT
DA
Temperature : Y
b: 40 C 5 c NIG
Tank #7 #9 HT
DA
Tank #2,3 KILALA / Y
3.3 ltrs / 96.7 ltrs NIG
DI
Chemical Mix By Liters

HT
DA
Tank #5 KILALA / Y
3.3 ltrs / 96.7 ltrs NIG
DI HT
DA
Tank #7 HCL/H202 / Y
c: 5.0 ltrs/3.0 ltrs / 55.0 ltrs NIG
DI HT
DA
Tank #9 HCL/H202 / Y
5.0 ltrs/3.0 ltrs / 55.0 ltrs NIG
DI HT
DA
Tank #4, #6, #8, #10. Y
Full Level ( DI ) NIG
DI WATER HT
DA
No Abnormality; (leak, Y
9 Overall Machine Area NIG
smell,vibration,sound ) HT
DA
Y
Check By ( Operator ID # ) NIG
HT
DA
Y
Acknowledged By ( Supervisor ID # ) NIG
HT
1 7 1 1 25 31
Any mc issue

2 8 1
3 2
9 26
/ Remarks

3 9 1
4 2
0 27
4 10 1
5 2
1 28
5 11 1
6 2 29
6 12 1
7 2
3 30
NOTE : Please inform supervisor immediately for any 8 4
abnormality or out -of-spec items

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 16

ATTACHMENT 6.0 Instruction On Preparation of Acid Hydrochloric (HCL) at WD1 (Manual


Preparation)

1 ) Wear long sleeve acid- 2) Get ready a washed and


proof gloves, chemical proof cleaned measuring beaker.
jumpsuit, respirator mask.
Use Sperian 100800 NIOSH
Cartridge

3) Fill-up the HCL tank (Tank 4) Bring the HCL chemical drum
7 or 9) with DI water (at least on the trolley to the front of Tank
level of the tank) using DI 7, open-up the cap and tranfer
IN (Pneumatic) at machine out 5L HCL in the measuring
panel. beaker with the dip-tube and pour
into Tank 7 slowly. Repeat the
same steps at Tank 9.
Always prepare DI water
first before pouring acid
into the tank

5) Fill up the balance with DI 6) Rinse and wash the beaker,


water until overflowing and dip-tube and gloves with DI water
circulating ( Confirm this by to clean off the HCL residue
checking the chemical flowing before storing.
at the circulating pump Wipe if any HCL residue dripped
behind). Before start running, on floor or side of machine
make sure the heater is ON

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Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 17

ATTACHMENT 7.0 - Instruction On Preparation of Valtron and Clair at WD1 (Manual Preparation)
Note: Prepare chemical one by one after each tank
Preparing Valtron at Tank 3 WD1 Preparing Clair at Tank 5 WD1

1) Wear long sleeve acid-proof gloves, apron,


respirator mask.
Use Sperian 100800 NIOSH Cartridge

2) After completing 2) After completing


cleaning tank, fill half cleaning tank, fill half tank
tank with DI water with with DI water with the DI
the DI IN (Pneumatic IN (Pneumatic Tank 5) at
Tank 3) at machine machine panel.
panel.
Prepare a CLEANED and
Bring the 1 drum of WASHED measuring
Valtron (20L) to the beaker, and bring the
Tank 3 and pour drum on trolley near to
slowly into the tank. the machine Tank 5.

Or if drum is too heavy, Pour out 5L of Clair into


transfer out the the beaker and transfer it
solution into a into the tank slowly
CLEANED measuring
beaker and pour slowly Rinse and wash the
into the tank beaker after using

3) At the machine panel, press DI In for Tank 3 or Tank 5 to supply DI water until filling up
the tank (stop at the drain-hole level)

Liquid level until just


below the drain-hole

Confidential For Internal Use Only


*Notice: This document is considered UNCONTROLLED when it exists in any printed form without the
official document control stamp
Work Instruction
WD1 HCL CLEANING
Document number: RST WI POL-024 Rev: 7 Page 18

4) Check the actual liquid level again before starting cleaning process, as level might be low
due to the bubbles generated when chemical preparation. If level low, repeat step 4 to fill in
DI water.

5) Wipe the drum or machine side wall if any chemical residue left during preparation. Wash
the gloves before storing.

Confidential For Internal Use Only


*Notice: This document is considered UNCONTROLLED when it exists in any printed form without the
official document control stamp