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Applications

Evaluate Multi-channel Devices HP 41424A

Previous parametric testers overly

complicated the measurement of
multi-channel devices. Users had
to interconnect current/voltage
sources, nanovoltmeters, and pico-
ammeters. The HP 4142B integrates
these features into one instrument,
thereby simplify the procedure
and reducing test time. A typical
configuration includes:

1 HP 41420A (2 slots)
Source Monitor Unit
4HP41421B (4 slots)
Source Monitor Unit .
1 HP 41424A VS/VMU (1 slot) HP41421Bx4
1 HP 41425A (1 slot)
Easily
Analog Feedback Unit characterize ECL
circuits
This assortment of modules suits
most applications. You can test ECL
circuits, multiple MOSFETs, ring
oscillators, operational amplifiers, Characterize High Power and
analog/digital switches, and hybrid Smart Power Devices
circuits. For example, stimulating Combine the HP 4142B and
several MOSFETs at once lets you HP 16087A switch to automate test-
extract AL, AW, and a host of swept ing of your devices which require
parameters (ID-IDS,ITI-VGS,G,-Vos, both high power and sub-PA resolu-
and V, vs. Temperature). tion. The ability of the HP 4142B to
easily synchronize and combine
plug-in modules, allows expanded
coverage to 2000V and 20A. The
AFU Feedback
HP 16087A is a 3-input scanner
which greatly simplifies your task
of configuring HVUs, HCUs, or
SMUs for single insertion testing.
VS

The HP 4142B also provides a

general purpose 16-bit TTL output
(open collector) for extended sys-
Efficiently test
multiple tems functions, such as external
MOSFETs relay controls and/or controlling
test device internal settings. This
insures your ability to exercise your
smart power devices fully with a Automatehigh
single test setup. power testing with
the HP 16087A
3-input scanner.

10
 Applications

GaAs Test and Development

The ability to provide DC and RF in
both continuous and pulsed modes
is important for testing gallium
arsenide (GaAs) and other micro-
wave devices. To verify process
quality and device performance,
you need a versatile DC parameter
test instrument which can also act
as a bias supply during RF test. Con-
ventional power supplies and volt-
meters provide awkward solutions
which can damage high frequency
devices or produce erroneous
results if not carefully used.
The precision DC parametric
measurement capability and flexible
configuration of the HP 4142B make
it ideal for comprehensive test of
microwave devices in R&D or pro- The HP 4142B
duction. Its SMU architecture pre- obtains all DC
parameters and
vents damage due to bias supply provides RF
glitching or overshoot. Its pulse biasing for single
connection
capability reduces thermal drift
microwave testing.
error and allows testing of high
power devices, even at the wafer
Upgrade to a Full Process
level.
Monitor System
The HP 4142B was designed for
high throughput without sacrificing
accuracy or resolution. By adding
a capacitance meter, switching
matrix, and software, you can
upgrade your HP 4142B to the
HP 4062C Process Control System.
Your HP 4142B software investment
is preserved with this migration as
well. Use the HP 9000 Series 300
controller, or IBM PC compatible
with HP co-processor card to make
DC or capacitance measurements
which meet your R&D or produc-
tion test requirements. The HP
4085B switching matrix is specially
designed for overhead probing, and
guarantees full system accuracy
right down to the wafer probing
interface.
Features

Modular Architecture Create high power

plots in seconds
The HP 4142B provides eight slots by pulsing the
HCU and SMU
for a variety of plug-in measurement synchronously.
units. Reduce startup costs by cus-
tomizing the HP 4 142B for your
application. As your needs increase,
simply add more units. As you
move from benchtop to production,
easily migrate your tests by adding a
compatible wafer prober, switching
matrix, capacitance meter, and
system software.

Versatile Source Monitor Units

(SMUs)
For general purpose DC or pulsed
measurements, use the HP 4142B
Source Monitor Units. The equiva-
lent of four instruments, these pre-
cision modules force voltage while
measuring currents down to 2OfA
Or force current and simulta-
neously monitor voltages down
to 4Op.V.The HP 41421B SMU con-
serves space (1 slot) by limiting
ranges to -+ 1OOVand + 1OOmA.The
HP 41420A (2 slots) extends the
range to & 200V and -+ 1A.
Both SMUs are four-quadrant
sources using full active guard and
Kelvin connections. The active
guard minimizes voltage differen-
tials which add significant noise and
cable loss errors when measuring
currents below 1pA. The 4-wire Kel-
vin sensing on the SMUs and built-
in Ground Unit (GNDU) assure
accuracy right to the device pins,
eliminating resistive cable loss
errors when measuring low volt-
ages or large currents.
HP 41422A High Current Unit
Use the HP 41422AHigh Current
Unit to make fast 100~s pulsed mea-
surements up to + 1OVand 1OA.It is
a pulsed source/monitor unit with
the same 5-digit basic accuracy of
the standard SMUs. A specially low-
inductance cable design and built-in
ground return let you make low
level and high power tests with
equal ease.
Synchronized pulse capability has
been added to the HCU so that it
can be used in tandem with another
HCU or the standard SMUs. Prevent
thermal drift or damage by using
this dual pulse feature to sweep
your high power devices.

DUT The force-sense-

guard and stable
ground reference
(GNDU) eliminate
system noise and
cable errors.
Simplified
SMU block
diagram

12
 Features

HP 41423A High Voltage Unit

Safely and reliably make DC or Voltage
pulsed measurements to + 1000 V
with the HVU source monitor unit.
Its low leakage design allows cur-
rent measurements down to 2 PA.
A special high voltage triaxial cable, Stop value
connectors, fixture interlock, and a Breakdown
LED status indicator provide hazard voltage
protection and convenience while
maintaining full system accuracy.

The HVU has the same pulse

capability as the standard SMUs,
including the unique quasi-pulse Start value
mode. Quasi-pulse is an advanced
pulse feature allowing a source to
Time
monitor its slew rate and abruptly
power down when a specific voltage Quickly and safely
or current compliance condition is find breakdown
voltages using the
met. You can very rapidly determine smart quasi-pulse
voltage breakdowns while minimiz- mode.
ing the risk of damage due to exces-
sive stress. Or speed up leakage
current measurement times by
monitoring the current automati-
cally when the voltage reaches a
specified stop value.

HP 41425A Analog Feedback You can perform useful measure-

Unit ments which were previously
impractical using lengthy binary
To find important parameters that
searches. For example, quickly
are specified at a given voltage or
monitor V,, vs substrate bias or V,,
current, such as V;, or h,, connect
vs Temperature. Or use the AFU
the HP 41425A Analog Feedback
with a network analyzer to quickly
Unit between two SMUs. The AFU
search for bias conditions during
modulates the output voltage of one
characterization of a microwave
SMU while monitoring the current
transistor.
or voltage of the second SMU. I&+-
get currents and voltages are found mica1 AFW
application-
with blazing speed (12 msec). Controlliig the
The AFU is connected internally, gate bias of a MOS
so no external hookup is transistor using
the drain current.
necessary.

13
Features

Measurement Modes

The plug-in units may be operated individually or in synchronized modes to perform ten different types of
measurements. The table below describes each mode and the plug-in units supporting each mode.

Available units in each Measurement Mode.

etiurement Mode

1 channel pulsed spot

14
 Accessories

Improve the reliability of your test
results by using accessories that
were designed to take full advan-
tage of the HP 4142Bs wide mea-
surement range. The HP 16088B test
fixture is a 13-channel shielded
dark box, with low leakage Kelvin
connections. An array of optional
plug-in socket modules provide
hassle free hookup to most indus-
try standard packaged parts.
For wafer probing, the HP 16087A
control module is provided with its
associated on/off status indicator
and connector plate. Order addi-
tional cables or a variety of connec-
tor plates to meet your particular
interfacing application.
. \

When ordered with opt 300, the

HP 16088B includes a built-in
HP 16087A control module (3-input
scanner) for accurate and safe
switching of a HW, HCU, or SMU i

to a single device pin. For your con-

venience, the HP 16088B is com-
BP 16088B Test
Fixture and patible with both triaxial or SMU
Accessories quadraxial style cables.

HP 16087A
Control Module,
On/Off status
Indicator, and
Connector Plate.
Specifications

HP 4142B Mainframe Memory

The HP 4142B mainframe contains two types of memory which increase
Chassis test speed. The program memory allows high-speed testing of multiple
8 slots for plug-in measurement units. devices without the need to communicate overthe HP-IB interface. The
No more than one HP 41425A Analog Feedback Unit per mainframe. data memory collects and sends spot or swept data efficiently over the
Maximum Common to Ground Voltage: t42V. HP-IB interface.
Supported Plug-in Measurement Units Program memory: Stores appox. 2000 program steps, which can be
Model Numbsrot Slots grouped into 99 subroutines.
Number Occupied Range of Opsrativn
Data memory: Maximum of 4095 data values (binary)
HP 41420A HPSMU 2 4OpV to ZOOV,20fA to 1A
Maximum of 1023 data values (ASCII)
HP414218 MPSMU 1 4OpV to lOOV,20fA to IOOmA
Interfaces
HP 41422A HCU 2 4OuV tc 1OV.20nA to IOA External trigger input: TTL level negative logic
HP41423A HVU 2 2mV to IOOOV,2pA to IOmA Minimum pulse width: 1OOpsec
HP41424AVSNMU 1 4wV to 4OV,20pA to IOOmA External trigger output: TTL level negative logic
HP41425AAFU I Used with two SMUs to make analog Approx pulse width: 100psec
voltaselcurrent searches HP-IB interface: SHl, AHl,TG, L4, SRI, RLl, PPO, OCl,
l 2OOOVmax using two HVUs or 20A (pulsed) using two HCUs DTl,CO,El.
General Reference
Maximum Output Power Self-Test
The sum of all measurement units instantaneous output power At power-up the HP 41428 checks the operation of its own operational
(product of Voltage Range and Current Output or Current Compliance) status. The self-test can be performed at any time via HP-IB.
cannot exceed 32W. Each unit can be switched off to consume OW
power when in standbv (power save) mode. Auto-Calibration
The offset errors in each measurement unit are automatically
calibrated every 30 minutes.
Environmental Information
Operating temperature: 5C to 40C
Allowable temperature drift: 23C (after auto-calibration)
HP 41423A HVU low + VobrV~~xl~lorl~~ Operating humidity: 5% to 80% RH
HP41424AVSNMU 2.2W (2OV rangel for each VS Storage temperature: ~ 40C to 65C
O.OSW14OVrange) for each VS c90% RH at 65C
Storage humidity:
HP 41425A AFU ow Operating inclination: +- 20 from horizontal
GNDU SMU ow
Power requirements
Vo: V output set, Vc: V compliance, 10 I output set, Ic I compliance 100/120/220v: t 10%
2V range IS calculated as 20Vforthe HP 41420A and HP 414218
Max pulse duty cycle lmA-1A range 10% 10A range:l% 240V: - 10% to + 5%
Maximum VA: 750 (48866 Hz)
Ground Unit (GNOUI Dimensions
The GNOU is part of the HP 41428 mainframe. It is configured as a high 426mm W by 235mm H by 676mm D
current SMU set to 0 Volts. Used as measurement ground.
Weight (approx.)
Connection: 0 Volt, Kelvin HP 4142B mainframe: 23kg HP 41423A: 3kg
Maximum offset voltage: + 5oopv HP 41420A: 3kg HP 41424A: 2kg
Current range: + 1.6A HP41421B: 2kg HP 41425A: 2kg
Maximum cable resistance HP 41422A: 2kg
FORCE terminal: Clfl
SENSE terminal: GlOR Reference Data for HP 4142B
Maximum capacitive load: 1OpF
Recommended Computer
Control Unit (CTLU) Consult the HP 41428 configuration, guide Lit. no 5091.0634E. for
The control unit provides two functions. It controls the HP 16087A computers supported on each of the following three platforms:
3-input module selector, and provides a general purpose i6-bit TTL BASIC operating system on HP 9000 Series 300 workstations
output (open collector) for extended system functions. Intended use of
BASIC/UX operating system on HP 9000 Series 300 workstations
the TTL output is for external relay control and/or setting of test device
BASIC/MS-DOS operating system on HP Vectra or IBM compatible PCs
internal settings.
Software
Module Selector Relay Control Reference Oata Included with the HP 4142B
Output voltage: 24V Parameter Measurement Library: Resistance, MOS, and bipolar
Current limit: 30mA transistor algorithm sets
Typical control speed: 30msec Test Instruction Set: Initialize, Force, Measure, Pulse, Sweep, Graphics,
16.Bit Relay Control Reference Oata and Data Storage.
Maximum voltage: 2ov Additional software
Saturation voltage: 0.7V (at sink current = 50mA) HP IMA (Interactive Measurement and Analysis) WS. UX, or PC
Pull-up voltage/resistor: 4.5VilOkn HP ITG (Interactive Test Generator) WS, UX, or PC
Typical control speed: 1Oms
HP IC-CAP (Integrated Circuit Characterization and Analysis Program) UX

16
Specifications

Typical Measurement Times Current Over-range

HP 9000 Series 332 computer. lnA-lOOmA range: 15% of range
ASCII data transfertime is included 1A range: 0%
HP 41420A/HP 41421 B SMU
(20WlOOmA range, spot measurement) Reference Data for HP 41420A
Force I or V: 3.5msec Maximum capacitive load: 1OOOpF
Measure I or V: 4.0msec Maximum guard capacitance: 9OOpF
HP 41425A AFU Maximum shield capacitance: 5OOOpF
V,at I0 = IpA: 12msec Maximum cable resistance
FORCE terminal: 1062 (lOOmA)
HP-IB Data Transfer Rate 0.70 (IA)
ASCII format: 1300ksecipoint 10R
SENSE terminal:
Binary format: 450psecipoint Typical voltage source output
Measurement Accuracy resistance/current measurement
Is specified at front panel connectorterminals, referenced to SMU input resistance (non-Kelvin
common, under the following conditions: connection): 0.20
Typical voltage measurement input
1. 23C 25C resistance/current source output
2. 40 minute warm-up period resistance: ZlOY1
3. Auto Calibration enabled Guard offset voltage: klmV
4. Kelvin connection Noise (typical)
(2OV range, lOwA or above)
HP 41420A High Power Source/Monitor Unit Voltage source: 0.005% of V range (rms)
Current source: 0.005% of I range (rms)
The HP 41420A HPSMU occupies two slots in the HP 4142B mamframe. 0.01% of V range (p-p)
Voltage monitor:
It sources voltage and monitors current, or sources current and
Current monitor: 0.05% of I range (p-p)
monitors voltage. Separate FORCE and SENSE terminals enable Kelvin
Output overshoot (typical)
connections (remote sensing).
Voltage source: 0.03% of V range
Output/Measurement Range, Resolution and Accuracy. Current source: 0.03% of I range
Typical range switching transient noise
Voltage ranging: 250mV
+2v IOOpV 40&V + (0.05% + 1mV) *IA Current ranging: 1OmV
Maximum slew rate: .2V/psec
+ 2ov fmV 4oopv f (0.05% + 10mV) 11A(/+14V)
-+0.7AllV1>14V)
f 4ov 2mV BOOLLV f (0.05% + 20mVI f 350mA HP 41421B Medium Power Source/Monitor Unit
CIOOV 5mV 2mV f (0.05% + 50mVl + l25mA
The HP 414216 MPSMU requires one slot in the HP 4142B mainframe.
2 ZOOV IOmV 4mV * 10.05%+ 1OOmVl *SOmA It sources voltage and monitors current, or sources current and
monitors voltage. Separate FORCE and SENSE terminals enable Kelvin
CttFretn set. Mea% Maximum connections (remote sensing).
Range ResoluRon Rosalution ACCclr8Gy wtags
?lnA 5OfA 20fA -r (I% + CipA+ 20fA x Vou,) Output/Measurement Range, Resolution and Accuracy.
-t 1OnA 500fA ZOMA k (1% + 15pA + 200fA x V& voltapa set. Msas. Maximum
Ratwe Rasolrtion Rseolution ACCWllCV Current
2 lOOnA 5oA 2oA +-tO.5%+ lOOoA+ 2oA x VmwI
+lpA 50pA 20pA + 10.5%+ lnA + 20pA x L&l e (0.05% + I mV)
f 2oov +2v 1OOpv QW
k 1OOmA
r IOuA 500oA 200oA k 10.2%+ 1OnA+ 200oA x Vrd + (0 05% + IOmVl
f 2ov ImV QJkV
t- lOOpA 5nA 2nA t (0.2% + lOOnA+ 2nA x Vau,J 8OOuV -r 10.05%+ 20mVl k 50mA
+4OV 2mV
+lmA 50nA 20nA + 10.2%+ 1&A + 2OnAx Vnd 5mV 2mV f (0.05% + 50mVl -t 20mA
+ IOOV
? 1OmA MOnA 2OOnA t (0.2% + IOpvA+ 200nA x V,,,)
2 1OOmA 5cA W +lO.Z%+ lOOpA+ZpAxV& iZOOV(~l~~50mA) Currant set. Maas. Maximum
5 lOOV(/l~~50mA) Range Resolrtisn Rst~l~tiot~ ACCIWCV v&age
?lA 50pA 20pA ? (0.5X+ ImA + 20pA x V,,url +ZOOV~~l~~50mA) *InA 50fA 20fA +l1fo+6pA+ 20fA x dour)
~lOOV(125mA~ll~
2 1OnA 500fA 2OOfA +ll%+l5pA+200firxV~~,l
>50mA)
-c 40V (350mAall/ + 1OOnA 5pA 2pA klO.5% + lOOpA+ 2pA x VW,)
>125mAI ?lpA 50pA 20pA + (0.5% + 1nA + 20pA x VOu~)
2 2OV(0.7A LII/ i toov
>350mAJ rt 10t~A 500pA ZOOpA + IO.22 + 1OnA+ 200pA x You,)
~14Vllll>O7Al
-t lOOkA 5nA 2nA + (0.2% + 1OOnA+ 2nA x Vourl
Note: lo, IS the SMU output voltage I volts ?lmA 50nA 20nA 5 (0.2% + 1pA + 20nA x VW,)
Voltage/Current Compliance f 1OmA 5OOnA 200nA t 10.2%+ 10&A + 200nA x Vd
The SMU can limit output voltage or current to prevent damage 2 1OOmA 5kA W k (0.2% + 10Ot~A+ 2pA x Vd f lOOV~~l~~20mA)
to a device under test. c4OV (SOmArll/
>ZOmA)
Compliance voltage and current resolutions are the same as the f 2OVIilb5OmAl
Setting Resolutions in the table above, howeverthe maximum Note V,,u, IS the SMU output voltage I volts
comphance current resolution is 1pA. The Accuracy specifications,
listed in the above table, apply also to the accuracy of compliance
settings.

17
Specifications

Voltage/Current Compliance Hold time accuracy: 0.5% + lmsec

Same as the HP41420A HPSMU Delay time accuracy: 0.5% -t lmsec
Pulse period accuracy: 0.5% k 100ksec
Current Over-range Pulse width accuracy: 0.5% + 20psec
1 nA-1OmA range: 15% of range
lOOmA range: 0% Reference Data for HP 41422A
Reference Data for HP 41421B Maximum capacitive load: 3.5nF
Maximum inductive load: 1f~H on 10A range
Same as the HP 41420A HPSMU
Maximum cable resistance
HP 41422A High Current Source/Monitor Unit FORCE terminal: 150m0 @L lOV,lOA
SENSE terminal: 10R
The HP 41422A HCU occupies two slots and operates in pulse mode
Maximum cable inductance
only. It sources voltage and monitors current, or sources current and
FORCE terminal: 200nH max
monitors voltage. Separate FORCE and SENSE terminals enable Kelvin
Noise (typical)
connections (remote sensing).
Voltage source: 0.01% of V range (rms)
Output/Measurement Range, Resolution and Accuracy. (PULSE ONLY) Current source: 0.1% of I range (rms)
so% lAao0. M8xlmna Voltage monitor: 0.02% of V range (p-p)
-80
-8 %8OlUtiOO Aooolnlioa Acoor8o~ eumln Current monitor: 0.2% of I range (p-p)
?2V 2oopv k 10.5%+ 1OmV) Maximum slew rate: 0.3Wpsec
WV
? 10A
f 2ov 2mV 4oopv 2 10.5%+ IOOmVl IUnipolarl
It 1OVmax.1 HP 41423A High Voltage Source/Monitor Unit
The HP 41423A HVU occupies two slots in the HP 4142B mainframe. It
l%rmni tat. Maxinnm sources voltage and monitors current, or sources current and monitors
ttO8OlUtEOll ammor ~lwm voltage.
zlmA lOOnA 20nA 2 IO.%+ 21rA+ lOOnAx Vn,,rl
k 1OmA 200nA -c 10.5%+ 20pA + 1pA x /ourI Outout/Measurement flanse.- Resolution and Accuracv.
1wA
2 1ov v8tlags SW. Maas. klsxfmnm
-t 10OmA lOpA W t (0.5% + ZOOpA + lO@Ax V&
Wnipolar) bg* n88ol8tlon n88al8tioo Aooun8y faron
+lA lOOpA 20&A 2 ll%+ 2mA+ lOOkA x V&
t 1oov 1OmV 2mV f (0.5% + 0.5Vl
+lOA 1mA 2OOrrA tl2%+20mA+ImAxVnurl
k 2oov 20mV 4mV +(0.5%+lv) k 1OmA
Note Vo,,r IS the HCU output voltage I volts. Wnipolarl
Pulse IS unipolar (voltage and current are the same polarItyI -t 5oov 50mV IOmV k l0.Y~ + 2.5V)
Pulse base value IS foxed to 0 volts. + loeov IOOmV 20mV k 10.5%+ 5Vl

HCU Output and Measurement Range

cumol M800.
-fP AOOZOEJ Roouletl8o AUOrraOf
f lOOnA 50pA 2pA k(l%+lnA)
?IUA 500oA 2OpA +(l%+lOnA)
+ lOpA 5nA 200pA f (1% + lOOnA f 1ooov
k lOOpA 50nA 2nA +ll%+lpAl IUnipolar)

elmA 500nA 20nA +(l%+lOpAl

+- 1OmA 5pA 200nA ~ll%+lOO~A~
Note- Un~polar output means non-zero crossing
In pulse mode the output may be offset with a base value.

HVU Output and Measurement Range

Voltage/Current Compliance
The HCU can limit output voltage or current to prevent damage to a
device under test. Compliance voltage and current resolutions are
the same as the Setting Resolutions in the table above, however the
maximum compliance current resolution is 1 FA. The Accuracy
specifications, listed in the above table, apply also to the accuracy
of compliance settings.
Current Over-range
lmA-IA range: 15% of range
10A range: 0%
Pulse Settings and Accuracy Voltage/Current Compliance
Single pulse width: lOOtks.ec-lmsec The HVU can limit output voltage or current to prevent damage
(lOOt~.s resolution) to a device under test.
Oual pulse width: lOOpsec-800psec
(lOOt.6 resolution) Compliance voltage and current resolutions are the same as the
Maximum pulse duty cycle: Setting Resolutions in the table above, howeverthe maximum
lmA-IA range: 10% compliance current resolution is 2pA. The Accuracy specifications,
10A range: 1% listed in the above table, apply also to the accuracy of compliance
Maximum pulse power: 1OOmJ settings.

18
Specifications

Reference Data for HP 41423A HP 41425A Analog Feedback Unit

Maximum capacitive load: The HP 41425A AFU searches for a target current or voltage on one
Maximum guard capacitance: 3oop-F SMU by controlling (sweeping) the output voltage of another SMU.
Maximum shield capacitance: 8OOpF It requires one slot and two SMUs. Only one AFU can be used per
Typical output resistance: 0.261 HP 4142B mainframe. SMUs may be either the HP 41420A HPSMU or
Guard offset voltage: t 1mV HP 41421 B MPSMU. The analog search capability of the AFU reduces
Noise (typical) the time required for measurements like h,, or V,, which would
Voltage source: 0.01% of V range (rms) otherwise require a more lengthy binary search technique.
Current source: 0.1% of I range (rms)
Voltage monitor: 0.02% of V range (p-p) Analog Feedback Unit
Current monitor: 1% of I range (p-p)
Change polarity time: 1OOmsec
Channel off/on time: 1OOmsec
Maximum slew rate: 12V/msec

HP 41424A Voltage Source/Voltage Monitor Unit

The HP 41424A VSNMU provides two voltage monitors and two voltage
supplies with built-in ammeters. The voltage monitors can be
connected in a differential measurement configuration for improved
resolution. This module occupies a single slot.
Voltaoe Source Outout/Measurement Range, Resolution and Accuracy.
Reference Data for HP 41425A
+J@hge sol Maxisnam
-se Uaolwtlwt ACCWtWO~ conwnt Monitor Specifications
-r 2ov 1mV f (0.1% + 1OmV) 10OmA Range and resolution: Same as SMUs.
+ 4nv 2mV t10.1%+20mVI 20mA Setting accuracy: SMUs accuracy +O.l% of value + 0.1%
of range.
cwsel Pdser. Monitor accuracy: Same as SMUs.
@WI@ Nsrolotlwn ACOW= Overrange: 0%
k 20mA 20&A f (3% + 200t~AI Maximum target voltage: 180V (HP 41420A HPSMU)
t lOOmA 1OOrrA f (3% + ImA) 9OV (HP 41421B MPSMU)
Maximum current: 900mA (HP 41420A HPSMU)
Voltage Monitor Range, Resolution and Accuracy 90mA (HP 414218 MPSMU)
veltegs HWOh Search Specifications
Rae?@ Reenletfwn AS?\crWMy Voltage ranges: 2V, 2OV, 4OV. lOOV, or 2OOV (HP 41420A only)
i-2v 40&V + (0.05% + 1mV) Slew rates: O.SmV/ms to lOOOV/ms in decade steps
+ 2tlv 4oouv + 10.05%+ 1OmVI Slew rate resolution: 11100 of slew rate range
f 4ov rJoopv t (0.05% + 20mW Slew rate accuracy: 35% of setting + 5% of range
Start voltage accuracy: 0.5% of setting + 0.5% of voltage range
Differential Voltage Monitor Range, Resolution and Accuracy Stop voltage accuracy: 3% of voltage range
Wwx. coolelon Ramp stop delay time: S+sec (typically)
+JwP Mwee.
Reuse ROWWlWtkJtl Accwrrty VOttOg0
-t 0.2v 4PV t (0.2% + 0.4mV + 2.5pV x VIN) HP 16087A Module Selector
t 4ov
12v 40eV t(o.z% + 2mV+25LLV x V,Nl
The HP 16087A module selector is a 3-input scanner which allows
Note: V,,, IS the VM Input voltage lcommon mode) m volts. remote control of the connection of an SMU, HCU, or HVU to a single
Voltage/Current Compliance OUT pin. Only one module selector per HP 4142B mainframe is allowed.
The VS has a current limiter. The limiter value is automatically It may be used by itself or as a built-In option of the 16088B test fixture.
determined by the output voltage range. If the output range is 2OV. Input Channels
the current limit is lOOmA. If the output range is 4OV, the current limit
is 20mA. Cbeenwl Type Numlmr of Cftmt@r cwewwctlee
SMU (HP41420A/41421B) 1 KelWl
HCU (HP 41422Al 1 Kelvin
Reference Data for HP 41424A
HVU IHP41423A) 1 Non-Kelvin
VS typical output resistance: 0.2f2
VS maximum capacitive load: 10r.~F Allowable Voltage and Current
VS maximum slew rate: O.ZV/psec Men cntront
Clnmowl h%&WNtt#W
VS current limit accuracy: ~ 0%. + 10%
SMU 2oov 1A
VS typical output noise: 0.005% of V range (rms)
HCU 1ov 10A

VM typical input resistance: z100Mn HVU 1ooov IOmA

VM maximum leakage current (((IOV): 2nA
VM typical noise level at input: 0.01% of V range (p-p)

OVM typical differential

measurement noise: 0.02% of V range (p-p)

19
Specifications

SMU Channel Reference Data HCU Channel Reference Data

Maximum leakage current Maximum leakage current
FORCE (or SENSE) to COM: 15pA cil 200V Hi FORCE to Lo FORCE: 1nA @ 1OV
Maximum stray capacitance Hi SENSE to Lo SENSE: lnA@ 1OV
FORCE (or SENSE) to COM: 15pF Maximum stray capacitance
FORCE (or SENSE) to other SMU 3pF Hi FORCE to Lo FORCE: 3OOpF
Maximum guard capacitance Hi SENSE to Lo SENSE: 1OOpF
FORCE (or SENSE) to guard: 6OpF Typical residual resistance
Typical resrdual resistance FORCE(Hi + Lo): 70mfl
FORCE: 200mf2 (lOLima with opt 300)
Minrmum channel off resistance: lOOGl1
HVU Channel Reference Data
HCU Channel Reference Data Maximum leakage current
Maximum leakage current FORCE to COM: 1OpA (ic 200V
Hi FORCE to Lo FORCE: 1nA ((18 1OV Maximum stray capacitance
Hi SENSE to Lo SENSE: 1nA (if 1OV FORCE to COM: 15pF
Maximum stray capacitance FORCE to other SMU: 3pF
Hi FORCE to Lo FORCE: 4OOpF Maximum guard capacitance
Hi SENSE to Lo SENSE: 2OOpF FORCE to guard: 4OpF
Typical residual resistance (6OpF with opt 300)
FORCE(Hi + Lo) 95mil Typical residual resistance: 300mn
Minimum channel off resistance: 100GQ (500m0 with opt 300)
HVU Channel Reference Data VSNMU Channel Reference Data
Maximum leakage current Typical residual resistance: 70m0
FORCE to COM: 15pA ti/ 200V
Maximum stray capamtance GNDU Channel reference Data
Typical residual resistance
FORCE to COM: 15pF
FORCE or SENSE: 40m0
FORCE to other SMU: 3pF
Maximum guard capacitance
FORCE to guard: 3OpF HP 16276Bl16277Bl16278B
Typical residual resistance: 400mR Interactive Measurement and Analysis (IMA) Software
Minimum channel off resistance: 1OOGCl
The HP IMA software turns the HP 41428 into a full feature parameter
analyzer. Software compatibility is maintained to allow HP 4145B test
HP 160886 Test Fixture programs to run on the HP 41428.
The HP 16088B is a 13.channel fixture designed to test packaged parts Computers operating on three platforms are supported.
over the entire measurement range of the HP 4142B. Optron 300 adds a
HP 162768 IMANVS
built-in HP 16087A module selector.
BASIC operating system on HP 9000 Series 300 workstations
Input Channels HP 162778 IMAAJX
Cbannsl &pa lDumberof Chaanalr Canrection BASICAJX operating system on HP 9000 Series 300 workstations
SW IHP41420&41421G1 4 Kelvin (8: Non-Kelvin) HP 162788 IMA/PC
BASIC/MS-DOS operating system on HP Vectra or IBM AT
HCU (HP 41422A) 2 Kelvin
compatible PCs. Requires an HP measurement coprocessor card
HVU IHP 41423Al 2 Non-Kelvin
with at least 4M bytes of memory.
VS IHP41424Al 2 Non-Kelvin
Consultthe HP4142B configuration guide, Literature number 5091-
VMU IHP 41424Al 2 Non-Kelvin
0634E,for details of supported controllers, peripherals, and operating
GNDU I Kelvin system software revisions.
Allowable Voltage and Current Basic Functions
Ch~iltWl wsx vouaos Max Cunent l Sets the HP 41428 measurement parameters
l Measurement control
SMU 2oov IA
HCU IOV 1OA l Arithmetic calculations
HVU 1ooov 1OmA l Displays measurement and calculation results
vs 4ov lOOmA l Graphical analysis
VMU 4ov -
- a Printer and plotter hard copy support
GNOU LSA
l HP BASIC programming environment for automatic measurement
and analysis
SMU Channel Reference Data l Stores and recalls measurement setups and measurement data
Maximum leakage current l Performs calibration of the HP 41428
FORCE (or SENSE) to COM: 1OpA (i18 200V
Maximum stray capacitance Number of HP 41428 mainframes supported: 1
FORCE (or SENSE) to COM: 15pF Number of total HP 41428 units supported: 8 (16 VSNMU channels)
FORCE (or SENSE) to other SMU: 3pF HP 4142B units supported
Maximum guard capacitance HP 41420A High Power Source/Monitor Unit (HPSMU)
FORCE (or SENSE) to guard: 7OpF HP 414218 Medium Power Source/Monitor Unit (MPSMU)
Typical residual resistance HP 41422A High Current Unit (HCU)
FORCE: 60mll HP 41423A High Voltage Unit (HVU)
(300mll with opt 300) HP 41424AV SourceN Monitor Unit (VSiVMU)

20
 Specifications

HP 16087A Control Unit (3-input scanner and 16-bit TTL output) Display Functions
HP 41428 Ground Unit (GNDU) Up to two user DISPLAY FUNCTIONS can be defined as arithmetic
expressions, These functions are executed in conjunction with the
The HP 41425A (AFU) is not supported.
Marker, Cursor, or line operations to get direct output of parameters
Measurement Control such as V,, GM,,, Ros, etc.
VARl Sweep The following graphic analysis parameters may be used in the
The main sweep. Voltage or current sourcing is controllable overthe DISPLAY FUNCTIONS:
full range of each supported HP 4142B unit. l Marker position
l Cursor position
Max number of steps: 1001 l Line gradient
Max number of data points: 4004,8008 including VAFil l Lure intersectto axis
Sweep modes: Linear or logarithmic 0 Intersect of two lines
Single or double staircase l Regression coefficient of REGRESSION function
Sweep parameters: START, STEP, No. of STEPS Arithmetic Operators
Hold time: 0 to 655.35 seconds with 1Oms
resolution USER and DISPLAY functions may use the following operators:
Delay time: 0 to 65.535 seconds with 1 ms +, ~, x ,/,SQRT(square root), EXPfNapierian constant), LOG (natural
resolution log), LGT (common log), ^ (exponentiation), ABSfabsolute value),
VARl Sweep SGNfsign), DELTA (drfferential calculation), FRACTffractional),
Starrcase sweep of a second unit which can be slaved to the first. Trigonometric functions (SlN,COS,TAN,ASN,ACS,ATN), and E
The sweep is made with a user specified fixed ratio and offset value. (scientific notation).
VARl output is calculated as: Graohical Analvsis Functions
VARlfStart) = a x VARl(Start) + b Ma;ker functions
VARlfStooI = a x VARl (Stool + b Interpolation: x 10 resolution between measurement data
where a is the user-specified ratio and b is the user specified points
offset value. +min or +max: Moves markerto minimum or maximum data
VAR2 Sweep point
A subordinate linear staircase or pulsed sweep. The VAR2 unit output is Direct: Finds closest data point to user specified value
incremented one STEP each time the VARl units completes one sweep. Mouse control: Finds closest data point to user mouse click

Sweep parameters: START, STEP, No. of STEPS Cursor functions

Max number of steps: 32 Cursor-Marker Moves cursorto the marker position
Mouse control: Cursor follows point where mouse is clicked
Pulse modes supported*
Line functions
Single channel: Measurement limited to one channel Regression: Draws a line calculated by the least squares fit
Dual channel: Two channels can be synchronously pulse method around the marker. Linear scale only.
One channel must be an HCU. Tangent: Draws a tangent line to a curve atthe marker.
Measurement limited to one channel. Line: Draws a line between the marker and cursor.

quasi-pulse: SMU or HVU channel can be ramped until its Scaling functions
slew rate abruptly changes. Useful for making Auto: Graphics automatically resized for optimum
quick and safe breakdown or leakage display of measurement results,
measurements. Move: Reposition the display with cursor at center,
Zoom: Draw a box in the graphics area and expand the
*Pulse is not selectable when VARl is set. box to full scale. May be repeated.
Time Domain Reset: Resets and moves graphics to original state.
Time domain is selectable when VARl is not set. VARl sweep is
Bufferfunctions
replaced bytime sweep.
Buffer 1: Buffer 1 is the working graphics buffer, Analysis
Wait Time: 0 to 100 seconds with 50ms resolution is done here.
(Initial wait time or wait time after VAR2 step) Buffers 2-4: Stores three additional sets of graphs.
Interval: 50ms to 100 seconds with 50ms resolution Recall: Allows overlaying of buffer contents for
(Interval between measurements) comparison of similar measurements,
Display Modes Exchange: Exchanges contents between buffer 1 and buffer
Graphics: Two axes (X-Yl) orthree axes (X-Yl,YZ) plot of source, 2,3, or 4.
measurement, time, or USER FUNCTION calculations.
List: Used in conjunction with VARl or TIME sweep. Up to six HP 41458 Data Compatibility
measurement parameters and USER FUNCTION results The measurement setup and data taken by the HP 41458 is fully
can be displayed for each step of VARl. compatible with the HP IMA software (except for files containing
schmoo, or matrix display, and the ASP file).
Arithmetic and Analysis Functions
Arithmetic Functions Analysis Instruction Set (AIS)
Arithmetic expressions can be used in USER FUNCTIONS and user Over 40 subprograms are provided so that all of the capabilities of
DISPLAY functions. Each expression can contain a maximum of 80 HP IMA interactive mode may be automated for hands-off data
characters. gathering and analysis. AIS subprograms are linked to the HP BASIC
programming environment. This allows other instrument control or user
User Functions interface code to be added for complete turnkeytest solutions.
Up to four USER FUNCTIONS can be defined as arithmetic expressions.
USER FUNCTIONS are executed during the measurement and the
results displayed with measurement results

21
 HEWLETT
PACKARD

For complete ordering information, please see the HP 4142B Modular For more information, call your local
HP sales office listed in your telephone
DC Source/Monitor configuration guide (HP literature number 5091- directory or an HP regional office
06343). It suggests application specific ordering examples, including listed below for the location of your
recommended controllers, optional software, cabling, connectors, nearest sales office.
fixtures, other accessories and support services. United States:
Hewlett-Packard Company
4 Choke Cherry Road
HP 4142B Modular DC Source/Monitor
Rockville. MD 20850
Ground Unit (301) 670:4300
Safety Interlock Hewlett-Packard Company
8 slots for plug-in measurement modules 5201 Tollview Drive
Rolling Meadows, IL 60008
Mainframe Options (708) 255-9800
opt. 050 50Hz Line Frequency Hewlett-Packard Company
Opt. 060 60Hz Line Frequency 5161 Lankershim Blvd.
No. Hollywood, CA 91601
opt. 100 100/12OV Line Voltage
(818) 5055600
opt. 220 220124OV Line Voltage
Hewlett-Packard Company
opt. 300 Control unit*
2015 South Park Place
Measurement Module Options Atlanta, GA 30339
(404) 955-1500
opt. 400 HP 41420A HPSMU:200V,lA (2 slots)
opt. 410 HP 41421B MPSMU:lOOV,lOOmA (1 slot) Canada:
Hewlett-Packard Ltd.
Opt. 420 HP 41422A HCU:lOV,lOA (2 slots) 6877 Goreway Drive
opt. 430 HP 41423A HVU:lOOOV,1OmA (2 slots) Mississauga, Ontario L4V lM8
opt. 440 HP 41424A VS/VMU:4OV,lOOmA (1 slot) (416) 678-9430
opt. 450 HP 41425A AFU (1 slot) Japan:
*Required with HP 16087A and HP 16088B opt 300. Yokoeawa-Hewlett-Packard Ltd
15-7,-Nishi Shinjuki 4 Chome
Accessories Shinjuki-ku
HP 16058A Test Fixture (Non-Kelvin SMU, VSVMU) Tokyo 160, Japan
Includes set of 4 triax cables (1.5m) (03) 5371-1351

Opt. 001 Adds HP 4142B system cable Latin America:

HP 16087A Module Selector (supports SMU, HCU, HVLJ) Hewlett-Packard
Latin American Region Headquarters
(Includes connector plate and on/off status indicator) Monte Pelvoux No. 111
HP 16088B Test Fixture (Kelvin, supports all HP 4142B plug-in units) Lomas de Chapultepec
Opt. 010 Socket module set for power devices 11000 Mexico, D.F.
(525) 202-0155
Opt. 020 Socket module set for small signal devices
Opt. 030 Universal socket module for custom devices Australia/New Zealand:
Hewlett-Packard Australia Ltd
Opt. 300 Adds module selector (mounted inside fixture) 31-41 Joseph Street
Blackburn, Victoria 3130
HP 4142B Application Notes
Australia (A.C.N. 004 394 763)
. AN 356 High Speed DC Characterization of Semiconductor (031895-2895
Devices from Sub pA to IA
Far East:
0 AN 356-l Techniques and Applications for High Throughput and Hewlett-Packard Asia Ltd.
Stable Characterization 22/F Bond Centre
West Tower
0 AN 383-l Simplification of DC Characterization and Analysis of
89 Queensway
Semiconductor Devices (HP IMA measurement examples) Central, Hong Kong
0 AN 383-2 Automation of DC Characterization and Analysis of Semi- (852) 848 7777
conductor Devices (HP IMA programming examples) Europe/Africa/Middle East:
0 AN 1205 Efficient Microwave Bias and Test Using the HP 4142B Hewlett-Packard S.A.
Modular DC Source/Monitor Marcom Operations Europe
P.O. Box 529
HP 4142B Product Notes 1180 AM Amstelveen
The Netherlands
l PN 4142B-1 DC Characterization of Power Devices; Practical
Applications Using the HP 4142B Modular DC Source/ 0 Copyright 1991
Monitor Hewlett-Packard Company
Data subject to change
Printed in USA 8/91
5091-15813