metal
m1 m2 m3 m4 m5
well
nw
polysilicon
poly
active area
and FETs
ndif pdif nfet pfet
select
m1 0.36
m2
via contact
0.14 (poly to contact)
poly
poly-m1
poly-m1-m2 overlap overlap
0.14 (ndif to contact)
m1
well (n)
0.6 m1 0.32 m2 0.4
1.2
0.4
0.32
active (n) 0.4
0.3
0.4 m4 0.4
polysilicon m3
0.36
0.24
0.4 0.4
0.44
m5 0.46
0.44 n+
0.1 0.44
select 0.44
p+
contact via
0.44
0.3 0.35
p+
poly
0.14
0.36
transistor 0.44
0.6
well boundary
n+ select p+ select
n-well contact p-well contact
implicit p-substrate
n-well contact
Vdd
PMOS
In Out
poly-metal
contact
NMOS
GND
p-well contact