10/11/2017 Wavelength dispersive X-ray fluorescence spectrometer | Rigaku

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Wavelength dispersive X-ray fluorescence spectrometer

Elemental analysis by XRF of large objects with micro-mapping

Overview (/en/products/xrf/primus400?qt-zsx_primus_400=0#qt-zsx_primus_400)
Specifications (/en/products/xrf/primus400?qt-zsx_primus_400=1#qt-zsx_primus_400)
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ZSX Primus 400

Rigaku's unique ZSX Primus 400 sequential

wavelength dispersive X-ray fluorescence (WD-
XRF) spectrometer was specifically designed to
handle very large and/or heavy samples. Accepting
samples up to 400 mm diameter, 50 mm thick and
30 kg mass, this system is ideal for analyzing
sputtering targets, magnetic disks, or for multilayer
film metrology or elemental analysis of large
samples.

XRF with customized sample adapter system

Having the versatility to adapt to your specific

sample types and analysis needs, this WDXRF
spectrometer is adaptable to various sample sizes
(/products/xrf/formview)
and shapes using optional (made to order) adapter
inserts. With a variable measurement spot (30 mm
Features
to 0.5 mm diameter, with 5-step automatic
selection) and mapping capability with multi-point
Large sample analysis
measurements to check for sample uniformity, this
Up to 400 mm (diameter)
uniquely flexible instrument can dramatically
Up to 50 mm (thickness)
streamline your quality control processes.
Up to 30 kg (mass)
Sample adapter system
XRF with available camera and special lighting
Adaptable to various sample sizes
Measurement spot
Optional real-time camera allows the analysis area
30 mm to 0.5 mm diameter
to be viewed within software. The operator has
5-step automatic selection
complete certainty as to what is being measured.
Mapping capability
Allows multipoint measurements
Traditional WDXRF analytical capabilities
Sample view camera (option)
General purpose
All analytical capabilities of a traditional instrument
are retained in this "large sample" variant. Analyze Analyze Be - U
Elemental range: ppm to %
beryllium (Be) through uranium (U) with high-
resolution, high-precision WDXRF spectroscopy, Thickness range: sub to mm
Diffraction interference rejection (option)
from solids to liquids and powders to thin films.
Analyze wide composition ranges (ppm to tens of Accurate results for single-crystal
substrates
percent) and thicknesses (sub to mm). Optionally
available is diffraction peak interference rejection, Compliance with industry standards
SEMI, CE marking
for optimal results for single-crystal substrates.
Rigaku ZSX Primus 400 wavelength dispersive X- Small footprint
50% footprint of the previous model
ray fluorescence (WD-XRF) spectrometer complies
with industry standards SEMI and CE.

https://www.rigaku.com/en/products/xrf/primus400 1/2
10/11/2017 Wavelength dispersive X-ray fluorescence spectrometer | Rigaku

ZSX Primus 400 applications

Sputtering target composition

Isolation films: SiO2, BPSG, PSG, AsSG, SiN,
SiOF, SiON, etc.
High-k and ferro-dielectric films: PZT, BST, SBT,
TaO, HfSiOx
Metal films: Al-Cu-Si, W, TiW, Co, TiN, TaN, Ta-
Al, Ir, Pt, Ru, Au, Ni, etc.
Electrode films: doped poly-Si (dopant: B, N,
O, P, As), amorphous-Si, WSix, Pt, etc.
Other doped films (As, P), trapped inert gas
(Ne, Ar, Kr, etc.), C (DLC)
Ferroelectric thin films, FRAM, MRAM, GMR,
TMR; PCM, GST, GeTe
Solder bump composition: SnAg, SnAgCuNi
MEMS: thickness and composition of ZnO, AlN,
PZT
SAW device process: thickness and
composition of AlN, ZnO, ZnS, SiO2 (piezo
film); Al, AlCu, AlSc, AlTi (electrode film)

ZSX Primus 400 accessories

Sample camera with special lighting allows the

analysis point to be viewed on screen
Diffraction interference rejection provides
accurate results for single-crystal substrates
Fundamental Parameters software for thin film
analysis

https://www.rigaku.com/en/products/xrf/primus400 2/2