High quality 3D structured Fabry-Pérot filter

arrays based on SCIL technology

1 1 1 2 1
Yannan Shen , Imran Memon , Edwin Elechi , Carsten Woidt , Hartmut Hillmer
1
Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Germany
2
Nano-Kassel GmbH, Germany

Motivation
Miniaturized optical spectrometers have great application potential (e.g. medicine, food analysis, security, environment...).
Traditional grating based spectrometers are difficult to be miniaturized in size without reducing resolution. However, we
propose and demonstrate spectrometers which can be enormously miniaturized (pin head) without any penalty
in resolution.
Fabry-Pérot (FP) filter arrays with cavities are nanoimprinted by Subtrate Conformal Imprint Lithography (SCIL) on top of
a detector array. This dramatically simplifies the fabrication process and increases the throughput. However, still crucial is:
• Quality of imprinted cavities
• Characterization of miniaturized FP filter arrays
• Design according to applications

Technology (SCIL) Imprinted Cavities

1) Ready to start imprinting
Concept Considered Parameters:
• Imprint Area
• FP filter transmits a narrow spectral band • Imprint Step – Time
(named transmission line). • Process Delay
• Wavelength of transmission lines depends on the heights • Cavity Material (mr-UVcur06)
Substrate
SCIL stamp of the resonance cavities.
Imprint material • The cavities with different heights are fabricated by using a single
step of SCIL process.
2) Contact sequence
Pressure supply
Vacuum supply

Fabry-Pérot filter DBR

cavities mirrors
Detectors
Imprinted Cavities
3) Ready for UV curing

FP filter arrays + detectors Master template

= ‘Nanospectrometer’ SCIL stamp

Imprinted sample
Master vs. Imprinted
Real Cavity Heights (nm)

200
Master Template
4) Separation sequence with 64 different heights
150

Fabricated sample 100

mounted on detector
50

0
0 50 100 150 200
Designed Cavity Heights (nm)
R.Ji, M.Hornung, M.Verschuuren, R.Van de Laar,
J.Van Eekelen. Nanoimprint nach dem SCIL-Prinzip.
Mikroproduktion. 2009, (04):34-38.
average difference is ~ 5%
SCIL stamp
molded from master template Fabricated sample
ready to install it on the detector

Characterization Outlook
• It works for both Visible and Infrared range. • Large sensing range can be covered by several stopband:
• 8 x 8 different cavity heights (30 nm to 181 nm).
• Laterial size is 40 x 40 µm.
• Transmission intensity is up to 70%;
FWHM is down to ~2 nm. Applications
1.45mm
smart phones

XXX Index
10
9
8
Transmission [%]

7
6
5

Data exchange
4
3
2
multi-DBR with central wavelength
1
0

Result: 8.7
@450 nm, @550 nm, @650 nm
Good
Result display

Server / Database
Data evalutaion
Da
Light source
watches
ta
ex
ch
an
ge
10
x
de

9
8
In

7
6
X
XX

5
4
3

8 .7
2

lt :
1

su
0

Re

Result display

wavelength [nm] • Environment Data detection on the back side

- Detecting detoxic gases
- Detecting pollen in the environment
Transmission [%]

- 16 selected transmission peaks

- Stopband of FP filter: 500-600 nm • Medical technology (non invasive) • Industry
- Biomarkers in human skin - Food processing control
- DBR: 9.5 periods of Si3N4/SiO2 - Safety & Security
- Imprinted polymer: mr-UVcur06 - Diet assistant
wavelength [nm]
- Glucose measurement

Acknowledgment
The financial support of EU 7FP-KBBE project “Bread-Guard” (Grant No. 613647) is gratefully acknowledged.