Gas inlet
UHV
chamber
(120 l ) RF RF
matching generator
Turbomolecular
pump
Methods:
XPS: surface composition, chemical bonding
Raman: molecular structure
Nanomechanical tests: hardness, modulus, roughness,
resistance to scratch & wear
Wettability:surface free energy, polar and dispersive
components
Electrical conductivity: changes in electric resistance
Colorimetry: lightness, colourfulness
Applications of PI3 treatment
N9
N6
N3
N2
N1
Untreated
Wear resistance and lifetime of hip joint PET/He PIII: a-C:H forms
prostheses can be increased
Surface treatment by atmospheric low temperature
plasma: DBD
12000
300
9000
200
6000
Current [mA]
Voltage [V]
3000 100
0
0
-3000
-100
-6000
-9000 -200
-12000 -300
0 25 50 75 100 125 150 175 200 225 250
Time [μs]
Advantages:
• no vacuum is needed
• small contact times
• continuous, in-line technology
Electron
Ion detector Data
gun acquisition
X-ray I
and
gun processing
Sample B.E.
lock
UHV
system
XPS MultiQuant - Quantification
models
The XPS intensity data
sensitively reflect the
sample geometry: in all
Homogeneous Oxide-Layer
cases a geometry model
is applied
Website: ttk.mta.hu