Sheet1

Before passivaAfter passivation

-20 4.35995E-11 8.92619E-11
-19.5 4.35966E-11 8.92575E-11
-19 4.35931E-11 8.92525E-11
-18.5 4.35913E-11 8.92454E-11
-18 4.35896E-11 8.92389E-11
-17.5 4.35674E-11 8.92325E-11
-17 4.35823E-11 8.92246E-11
-16.5 4.35798E-11 8.92192E-11
-16 4.35755E-11 8.92116E-11
-15.5 4.35719E-11 8.92072E-11
-15 4.35683E-11 8.92023E-11
-14.5 4.35628E-11 8.91915E-11
-14 4.35618E-11 8.91832E-11
-13.5 4.35572E-11 8.9174E-11
-13 4.35529E-11 8.91652E-11
-12.5 4.35293E-11 8.91578E-11
-12 4.3524E-11 8.91482E-11
-11.5 4.35364E-11 8.9141E-11
-11 4.35316E-11 8.91328E-11
-10.5 4.35264E-11 8.91236E-11
-10 4.35191E-11 8.91218E-11
-9.5 4.35133E-11 8.90988E-11
-9 4.35052E-11 8.91206E-11
-8.5 4.34995E-11 8.91197E-11
-8 4.34926E-11 8.91185E-11
-7.5 4.34856E-11 8.9119E-11
-7 4.3479E-11 8.91196E-11
-6.5 4.34698E-11 8.91289E-11
-6 4.34632E-11 8.9152E-11
-5.5 4.34549E-11 8.91759E-11
-5 4.34457E-11 8.91755E-11
-4.5 4.3446E-11 8.92078E-11
-4 4.34479E-11 8.92449E-11
-3.5 4.34631E-11 8.9286E-11
-3 4.34852E-11 8.93276E-11
-2.5 4.35244E-11 8.93737E-11
-2 4.35925E-11 8.94345E-11
-1.5 4.36723E-11 8.95087E-11
-1 4.38478E-11 8.96018E-11
-0.5 4.40777E-11 8.97107E-11
0 4.44082E-11 8.98468E-11
0.5 4.48805E-11 9.00241E-11

Page 1
 Sheet1

1 4.55356E-11 9.02548E-11
1.5 4.63528E-11 9.05501E-11
2 4.7581E-11 9.08818E-11
2.5 4.92032E-11 9.12096E-11
3 5.12908E-11 9.14937E-11
3.5 5.39271E-11 9.17317E-11
4 5.7107E-11 9.19372E-11
4.5 6.07561E-11 9.21081E-11
5 6.47403E-11 9.22368E-11
5.5 6.88148E-11 9.23228E-11
6 7.26707E-11 9.2367E-11
6.5 7.61526E-11 9.23707E-11
7 7.91075E-11 9.23413E-11
7.5 8.14999E-11 9.22917E-11
8 8.33947E-11 9.22221E-11
8.5 8.48616E-11 9.21444E-11
9 8.59823E-11 9.20559E-11
9.5 8.68561E-11 9.1962E-11
10 8.75616E-11 9.1864E-11
10.5 8.8157E-11 9.17645E-11
11 8.86901E-11 9.16615E-11
11.5 8.91643E-11 9.15551E-11
12 8.95238E-11 9.1446E-11
12.5 8.98842E-11 9.13344E-11
13 9.01387E-11 9.12189E-11
13.5 9.03119E-11 9.1104E-11
14 9.04136E-11 9.09832E-11
14.5 9.046E-11 9.08634E-11
15 9.04636E-11 9.07424E-11
15.5 9.04382E-11 9.06256E-11
16 9.03919E-11 9.0508E-11
16.5 9.03292E-11 9.03951E-11
17 9.02579E-11 9.02827E-11
17.5 9.01803E-11 9.01772E-11
18 9.01019E-11 9.00731E-11
18.5 9.00234E-11 8.99761E-11
19 8.99503E-11 8.98839E-11
19.5 8.99015E-11 8.98144E-11
20 8.98773E-11 8.97768E-11
20.5 8.98694E-11 8.97552E-11
21 8.98657E-11 8.97475E-11
21.5 8.98647E-11 8.97388E-11
22 8.98618E-11 8.97348E-11

Page 2
 Sheet1

22.5 8.98614E-11 8.97279E-11

23 8.98571E-11 8.97222E-11
23.5 8.98563E-11 8.97188E-11
24 8.98536E-11 8.97126E-11
24.5 8.98559E-11 8.97086E-11
25 8.98559E-11 8.97047E-11
25.5 8.98555E-11 8.97007E-11
26 8.98552E-11 8.97011E-11
26.5 8.98563E-11 8.96986E-11
27 8.98585E-11 8.96982E-11
27.5 8.98613E-11 8.96972E-11
28 8.98637E-11 8.96782E-11
28.5 8.98634E-11 8.96955E-11
29 8.98661E-11 8.96954E-11
29.5 8.98694E-11 8.96986E-11
30 8.98714E-11 8.96992E-11
30.5 8.98773E-11 8.96993E-11
31 8.98797E-11 8.97018E-11
31.5 8.98834E-11 8.97043E-11
32 8.98865E-11 8.97041E-11
32.5 8.9891E-11 8.96897E-11
33 8.98945E-11 8.9711E-11
33.5 8.98986E-11 8.97139E-11
34 8.99048E-11 8.97184E-11
34.5 8.99062E-11 8.97212E-11
35 8.99094E-11 8.97247E-11
35.5 8.9914E-11 8.97268E-11
36 8.99189E-11 8.9731E-11
36.5 8.99211E-11 8.97364E-11
37 8.99257E-11 8.97409E-11
37.5 8.99324E-11 8.97429E-11
38 8.99359E-11 8.97293E-11
38.5 8.99406E-11 8.97537E-11
39 8.99449E-11 8.97557E-11
39.5 8.99497E-11 8.97616E-11
40 8.99535E-11 8.97629E-11
40.5 8.99582E-11 8.9768E-11
41 8.99582E-11 8.97693E-11
41.5 8.99639E-11 8.9772E-11
42 8.99666E-11 8.97745E-11
42.5 8.99681E-11 8.97769E-11
43 8.99682E-11 8.97798E-11
43.5 8.99704E-11 8.97788E-11

Page 3
 Sheet1

44 8.99741E-11 8.97814E-11
44.5 8.99753E-11 8.97838E-11
45 8.99762E-11 8.97678E-11
45.5 8.99777E-11 8.97838E-11
46 8.99797E-11 8.97869E-11
46.5 8.99838E-11 8.97868E-11
47 8.99846E-11 8.97889E-11
47.5 8.99863E-11 8.97892E-11
48 8.99865E-11 8.97915E-11
48.5 8.99872E-11 8.97932E-11
49 8.99713E-11 8.97932E-11
49.5 8.9992E-11 8.97968E-11
50 8.99943E-11 8.97962E-11
50 8.99942E-11 8.97748E-11
49.5 8.99967E-11 8.97968E-11
49 8.99975E-11 8.98006E-11
48.5 8.99976E-11 8.98019E-11
48 9E-11 8.98009E-11
47.5 9.00018E-11 8.98022E-11
47 9.00036E-11 8.98029E-11
46.5 9.00046E-11 8.98051E-11
46 9.00052E-11 8.9805E-11
45.5 9.00086E-11 8.98064E-11
45 9.00095E-11 8.98072E-11
44.5 9.00089E-11 8.98092E-11
44 9.00134E-11 8.97917E-11
43.5 9.00137E-11 8.98106E-11
43 9.00133E-11 8.98107E-11
42.5 9.00158E-11 8.98132E-11
42 9.00165E-11 8.98145E-11
41.5 9.00168E-11 8.98147E-11
41 9.00185E-11 8.98161E-11
40.5 9.00214E-11 8.98184E-11
40 9.00034E-11 8.98196E-11
39.5 9.00209E-11 8.98179E-11
39 9.00211E-11 8.9818E-11
38.5 9.00191E-11 8.9816E-11
38 9.00218E-11 8.98165E-11
37.5 9.00198E-11 8.98149E-11
37 9.00203E-11 8.98138E-11
36.5 9.00179E-11 8.98124E-11
36 9.00168E-11 8.98136E-11
35.5 9.00157E-11 8.98081E-11

Page 4
 Sheet1

35 9.00142E-11 8.98066E-11
34.5 9.00135E-11 8.98051E-11
34 9.00127E-11 8.98045E-11
33.5 8.99558E-11 8.9803E-11
33 9.00085E-11 8.97989E-11
32.5 8.99901E-11 8.97995E-11
32 9.0004E-11 8.97979E-11
31.5 9.00037E-11 8.97952E-11
31 9.00012E-11 8.97778E-11
30.5 8.99984E-11 8.97915E-11
30 8.99961E-11 8.97903E-11
29.5 8.99913E-11 8.97885E-11
29 8.99911E-11 8.97863E-11
28.5 8.9969E-11 8.97827E-11
28 8.99844E-11 8.97811E-11
27.5 8.99817E-11 8.9779E-11
27 8.99782E-11 8.97767E-11
26.5 8.99754E-11 8.9775E-11
26 8.9971E-11 8.97724E-11
25.5 8.99694E-11 8.97738E-11
25 8.99623E-11 8.97676E-11
24.5 8.996E-11 8.9771E-11
24 8.99548E-11 8.97701E-11
23.5 8.99525E-11 8.97712E-11
23 8.99437E-11 8.97724E-11
22.5 8.9937E-11 8.97742E-11
22 8.99283E-11 8.97785E-11
21.5 8.9917E-11 8.97835E-11
21 8.99004E-11 8.9787E-11
20.5 8.98836E-11 8.97969E-11
20 8.98649E-11 8.98163E-11
19.5 8.98542E-11 8.98587E-11
19 8.98535E-11 8.9926E-11
18.5 8.98614E-11 9.0009E-11
18 8.98582E-11 9.01005E-11
17.5 8.98263E-11 9.02011E-11
17 8.97554E-11 9.03013E-11
16.5 8.96234E-11 9.0409E-11
16 8.94172E-11 9.05222E-11
15.5 8.91224E-11 9.06344E-11
15 8.87356E-11 9.07502E-11
14.5 8.82721E-11 9.08709E-11
14 8.77531E-11 9.09862E-11

Page 5
 Sheet1

13.5 8.71808E-11 9.11013E-11

13 8.65435E-11 9.12199E-11
12.5 8.5801E-11 9.13293E-11
12 8.48841E-11 9.14362E-11
11.5 8.37372E-11 9.15404E-11
11 8.23106E-11 9.16401E-11
10.5 8.058E-11 9.17317E-11
10 7.85206E-11 9.18215E-11
9.5 7.61023E-11 9.19026E-11
9 7.33596E-11 9.19735E-11
8.5 7.04057E-11 9.20227E-11
8 6.73447E-11 9.20491E-11
7.5 6.42405E-11 9.20435E-11
7 6.12365E-11 9.1995E-11
6.5 5.83787E-11 9.18974E-11
6 5.57306E-11 9.17557E-11
5.5 5.33771E-11 9.15698E-11
5 5.13105E-11 9.13516E-11
4.5 4.95678E-11 9.10824E-11
4 4.81223E-11 9.07611E-11
3.5 4.69419E-11 9.04034E-11
3 4.60111E-11 9.00712E-11
2.5 4.52789E-11 8.98085E-11
2 4.47222E-11 8.96089E-11
1.5 4.43084E-11 8.94701E-11
1 4.40052E-11 8.93601E-11
0.5 4.37877E-11 8.92708E-11
0 4.36353E-11 8.9199E-11
-0.5 4.35351E-11 8.91503E-11
-1 4.34691E-11 8.91075E-11
-1.5 4.34293E-11 8.90735E-11
-2 4.34078E-11 8.90476E-11
-2.5 4.33991E-11 8.90252E-11
-3 4.33983E-11 8.90089E-11
-3.5 4.34031E-11 8.89771E-11
-4 4.34092E-11 8.89844E-11
-4.5 4.34203E-11 8.89851E-11
-5 4.34274E-11 8.89933E-11
-5.5 4.344E-11 8.90055E-11
-6 4.34364E-11 8.90144E-11
-6.5 4.34604E-11 8.90224E-11
-7 4.34696E-11 8.90258E-11
-7.5 4.34769E-11 8.90331E-11

Page 6
 Sheet1

-8 4.3486E-11 8.9044E-11
-8.5 4.34943E-11 8.90569E-11
-9 4.35019E-11 8.90683E-11
-9.5 4.35082E-11 8.9083E-11
-10 4.35172E-11 8.90942E-11
-10.5 4.35246E-11 8.91097E-11
-11 4.35289E-11 8.91188E-11
-11.5 4.35347E-11 8.91304E-11
-12 4.35413E-11 8.91431E-11
-12.5 4.35454E-11 8.91509E-11
-13 4.35482E-11 8.91611E-11
-13.5 4.35535E-11 8.91699E-11
-14 4.35585E-11 8.91817E-11
-14.5 4.35634E-11 8.91893E-11
-15 4.35662E-11 8.91963E-11
-15.5 4.3571E-11 8.9203E-11
-16 4.3574E-11 8.92099E-11
-16.5 4.35794E-11 8.92181E-11
-17 4.35817E-11 8.92264E-11
-17.5 4.35836E-11 8.92322E-11
-18 4.35898E-11 8.92385E-11
Imped
-18.5 4.3592E-11 8.9246E-11 9.27E-11
-19 4.35941E-11 8.92527E-11
9.22E-11
-19.5 4.35979E-11 8.92597E-11
-20 4.3599E-11 8.92623E-11 9.17E-11

9.12E-11

9.07E-11
C(F)

9.02E-11

8.97E-11

8.92E-11

8.87E-11
-30 -20 -10 0

Impedance cur
1E-10

Page 7
9E-11

8E-11
 Impedance cur
1E-10
Sheet1

9E-11

8E-11

7E-11

C(F)

6E-11

5E-11

4E-11
-30 -20 -10 0 10 20

Vgs(V)

Page 8
 Sheet1

Impedance curve after passivation

9.27E-11

9.22E-11

9.17E-11

9.12E-11

9.07E-11

9.02E-11

8.97E-11

8.92E-11

8.87E-11
-30 -20 -10 0 10 20 30 40 50 60
Vgs(V)

Impedance curve

Page 9
 Impedance curve

Sheet1

Before passivation
After passivation

10 20 30 40 50 60

Vgs(V)

Page 10
Sheet1

Page 11
 Sheet1

passivation
assivation

Page 12