NEW One-shot 3D Measuring Macroscope

VR-3000 Series

One-Shot 3D Measurement
I n s t a n t 3 D m e a s u r e m e n t ove r a l a rg e a r e a
 Conventional Measurement Devices
With conventional equipment, only a single line can be measured, making it
challenging and time consuming to analyse an entire sample.

Measurement time: Several hours

Significant time and skill are required in order to

produce repeatable measurements.

2
NEW One-shot 3D Measuring Macroscope
The entire surface area can be measured at once, allowing for accurate
measurement of the intended region.
One-shot 3D measurements over a wide area can be performed instantly.

Example: Depression in a batter y

Measurement time:

From
4 seconds

Simply place the sample on the stage and click

Measure.
The setup is user-independent, enabling anyone to
obtain repeatable and reliable results. NEW One-shot 3D
Measuring Macroscope
VR-3000 Series

3
 One-Shot 3D Measurement
Allows non-contact 3D measurement of surfaces.
Analyse difficult-to-reach areas that could not be measured
with conventional systems.

Example: Stand for handheld device

H e re ’s t h e d i ffe re n c e !
One-shot surface measurement of 3D shapes
allows measurements such as height, angles and
radii to be taken simultaneously.

Conventional measurement devices

Shapes measured with points and lines
It is difficult to measure structures with large
height differences or shapes with steep angles.

4
One-Shot 3D Measurement
Allows 3D measurement of wide areas in seconds, including measurement
of curvature and small changes in surface texture.

Example: Irregularity and unevenness in coating

Max.-Min.: 34.3 μm

Min. height

Conventional field

Max. height

No. Measurement name Measurement value Unit

H e re ’s t h e d i ffe re n c e ! 1 Evaluated length 1200 μm

In addition to visual inspection, multiple measurements 2 Wz 34.3 μm

can be made to calculate roughness and waviness.
3 Wa 10.5 μm

Conventional measurement devices

Limited viewing area
A small field-of-view makes it difficult to measure
curvature and irregularity over wide areas.

5
 Some things can only be seen with 3D measurement.
Introducing the One-shot 3D Measuring Macroscope

Internal structure of a watch

Inspecting components now requires 3D data

KEYENCE combined the advanced optical design of our digital microscopes with the high-speed, high-accuracy
measurement and 3D technology of our displacement gauges to develop a macroscope that completes instant
3D measurements.

6
The 3 Main Benefits
of One-shot 3D Measurement
I n n ova t i ve o p t i c a l te ch n o l o gy and hardware P.8

Precise 3D measurement of a wide field with a single click

Place and push 3D measurement and measurement assistance functions P.12

User independent 3D measurements

Extensive measurement and imaging capabilities P.16

A wide range of easy 3D analysis and reporting tools

NEW

One-shot 3D
Measuring Macroscope
VR-3000 Series

7
 Precise 3D measurement of a wide field
The world’s first one-shot measurement algorithm

8
 World’s First One-shot 3D Algorithm
We combined our TMT one-shot algorithm for high-accuracy, true colour
measurements with our high resolution 3D technology to create the world’s first
CMOS Light source
algorithm for instant 3D measurement.

TMT (Telecentric Multi-Triangulation) Algorithm

We combined three, double-telecentric lenses with the multiple triangulation
technology of our displacement gauges to create a unique algorithm for high-
speed, high-accuracy 3D measurement.

Measurement Principle (right)

Receiver Transmitter lens
Bands of light from the transmitter lens are scattered across the surface of the object being lens

measured. When the reflected light is observed from another angle (receiver lens), height
differences on the object make the bands of light appear distorted. An image of these
distortions is taken using a CMOS sensor, and triangulation calculations are performed to Object being
measured
measure the height and position at each point.

Real Colour 3D Technology

Our technology produces true colour 3D images.
Red, green and blue light are shone from a dedicated
real colour lighting unit. This light are captured by
a new, high-accuracy CMOS sensor and images
obtained from each separate colour are compiled
to create a full-colour image. This process captures
accurate and vivid colour information that cannot be
obtained with a standard colour camera and white
light.

XYZ Traceability
Z X-Y
The VR-3000 Series allows any user to obtain highly
National standard National standard
reliable measurements based on an international-
National Institute of Advanced Industrial National Institute of Advanced Industrial
standard traceability system. A calibration gauge with Science and Technology (AIST) Science and Technology (AIST)
inspection results and a
calibration certificate are JCSS accredited organisation JCSS accredited organisation

included with the system.

Gauge block Standard Scale
This allows calibration to
be performed on-site by
Height difference measurement device Coordinate measurement equipment
anyone.

Calibration block Calibration chart

9
 Precise one-shot 3D measurement over a large area
An innovative combination of optical technology and hardware

Industry’s first Triple telecentric lenses Minimal distortion over the

entire measurement area.
To achieve high-accuracy 3D measurement, it is crucial that the transmitter
and receiver lenses are made in such a way to minimise distortion, and that
changes in the distance between the object and lens do not alter the size of the
image.
The VR-3000 contains a total of 3 wide telecentric lenses, used in combination
with the industry’s largest CMOS. The advanced optical design allows high-
accuracy one-shot 3D measurement of areas up to 3 cm.

High accuracy with a telecentric lens

Feature size is unchanged as the lens moves in the Z Minimal distortion throughout the field-of-view
When measuring objects with height differences, it is important A telecentric lens with minimal distortion throughout the
that the field-of-view remains constant as the lens moves in entire viewing area is essential for one-shot measurement of
the Z direction. By using a telecentric lens, the VR-3000 can areas as large as 3 cm.
accurately measure height differences up to ±5 mm.
Standard camera lens VR-3000 Series
Distortion in periphery of lens Minimal distortion throughout entire field
Standard Telecentric
lens lens
When
viewing
object
from
above

Space-saving design requires

minimal operating area
The small footprint allows the unit to be
placed anywhere that has access to a 100 VAC
power outlet.
A3 size
Installation area

Contact-type 3-dimensional
VR-3000 Series measurement
measurement device
device

10
Accurate imaging

High-accuracy CMOS sensor

The industry’s largest high-
accuracy CMOS is used,
allowing data to be obtained with
minimal noise for high-resolution
image capture.

Real Colour Light Unit

The VR-3000 has a light source
that emits red, green and blue
light for true colour reproduction.
The combination of an optical
system and optical fibres
minimises inaccuracies when
composing the colours.

No vibration isolation required

Designed to withstand
large amounts of vibration
Strength analysis was used to
create a highly-rigid frame and
remove the need for vibration
isolation equipment like an air
table. Below is a diagram of the
strength analysis on the casing
on the unit.

Specially designed
vibration-proof rubber
The VR-3000 is made of a
vibration-proof material with
over four times the vibration
prevention of conventional
materials. The material absorbs
a wide range of vibration from
low to high frequencies, allowing
for steady imaging even at high
magnifications.

11
 User-independent measurements
Place and push 3D measurement

User Measurement results

Person A 0.34
Conventional Measurement Devices
Person B 0.29

Various adjustments need to be made by the Person C 0.35

user, meaning that measurement results may be

Person X 0.31
inconsistent.

1. Positioning
Adjustments such as sample positioning
and stage alignment need to be
completed by the user.

2. Probe selection
Different contact probes need to be
selected according to the sample or
purpose of measurement.

3. Parameter selection
Various measurement conditions need to be set.

Measurement Measurement Measurement Brightness Measurement

length pitch speed adjustment range

12
 User Measurement results
Person A 0.35
One-shot 3D Measuring Macroscope
Person B 0.35

Measurements are completed instantly with just Person C 0.35

one click of the Measure button. Repeatable and

Person X 0.35
accurate results can be obtained by anyone.

Just place the sample

and click one button.

Industry’s first

AALG (Advanced Auto Light & Gain) algorithm

allows accurate data to be obtained u
The transmission method of the projected light and the receiver sensitivity
are automatically adjusted to the optimal conditions for the sample being
measured, meaning that users only need to click the Measure button. This Without AALG With AALG
prevents adjustments made by a user from causing inconsistencies when
gathering 3D data.

13
 User-independent measurements
Various measurement assistance functions are available to
eliminate inconsistencies between users
Measurement assistance tools identify edges and centres of different shapes
Extensive measurement assistance tools make it possible
Case: Axial direction of a round bar (measuring wear of axles, etc.)
to measure shapes by automatically establishing baselines
such as top, bottom or intersection points. With contact
type systems, inaccuracies tend to occur with these
measurements. Now, with the measurement assist tools,
these measurements can be made accurately and easily.

Contact-type With assistance tools

Case: Angle between two surfaces (folding angle of pressed sheet metal, etc.)

Contact-type With assistance tools

Measurement baselines are created based on a surface area to improve measurement accuracy
It can be difficult to accurately set the proper baseline when using a linear incline correction, which can lead to large errors in
measurement. For example, when measuring two surfaces that are 10 mm apart, a measurement error of nearly 20 μm will occur
with an incline of just 0.1 degrees. The VR-3000 has several functions for determining the baseline based on a surface area,
allowing for accurate setting of the baseline and reducing measurement errors.

Example: Height difference of 0.35 mm set

Linear: Standard setting

Upward
slope

u
Height difference:
0.31 mm
Downward
slope

Contact-type
Results are greatly affected by the slope of the sample

Surface: Standard setting

Fixed

u Height difference:
0.35 mm
VR-3000
A base level can be set for wide surfaces,
preventing them from being affected by
the slope of the sample.

14
Eliminate variations during repeated or comparative
measurements
Template function for completing repeat measurements on similar parts
All settings and measurement specifications for an image are stored in a template that can be applied to other samples instantly.
The automatic position correction function also makes it possible to complete measurements at the same location on multiple
samples, even when the samples are not placed in the same orientation.

1. Complete a profile measurement for

sample A and save a template. 2. Use this template to automatically measure the
same location on samples B, C and D.

C
u D

Automatic position correction regardless of sample orientation

Automatic
position
correction u
function

Repeatable comparative measurement *Requires optional VR-H1P Analyser expansion module

The 3D comparative view displays the images of two samples side-by-side and quantifies differences in structure, including height
and cross-sectional area.

Visualise and quantify differences

in the same area

15
A wide range of easy 3D analysis tools
Easily complete 3D analysis on any sample

X, Y and Z measurement

Measure height, width, angle and radius

Profile measurement

Measurements such as height, width,

cross-sectional area, angle and radius can
be made by simply pointing and clicking
across the desired area.

16
 Average height difference, volume
and surface area measurement
Measure the average height difference, volume, surface area and area-to-surface area ratio of any area
selected on the screen.

Measure average height difference Measure volume and surface area

Measurement results

Comparative measurement

3D visual comparison and comparative measurement

3D visual comparison Comparative measurement

Place separately captured images side-by-side and The 3D comparison view displays the images of two samples
manipulate the 3D displays simultaneously. side-by-side and quantifies differences found between the
two shapes, including height and cross-sectional area.

Low

Measuring difference between Sample A and Sample B

17
 Line and surface roughness
measurements

Curvature, linear roughness (ISO4287:1997), surface roughness (ISO 25178)

The VR-3000 is equipped with a variety of metrology functions for quantifying roughness and surface deformations.

Measuring curvature and distortion

It is possible to visualise curvature with a height-

colour map on a 3D image and quantify the curvature
of a sample. Curvature and waviness parameters will
be automatically calculated by the system.

Measure line roughness Measure surface roughness

Roughness parameters including Ra and Rz can Various parameters, such as Sa and Sz can be
be measured for the intended area whilst viewing measured for a selected area in accordance with
either a 2D or 3D image. ISO 25178. Differences in appearance and texture
can be quantified easily.

18
 Wide-field 3D Measurement
Stitching

For those wanting to measure a larger area in 3D, a stitching module

allows for 3D measurement of an area up to 270 mm.

*Requires VR-H1J Stitching module (optional)

19
 A wide variety of easy-to-use 3D analysis
and reporting tools
One-click measurement and simple report creation
STEP
1 2
Data capture
Gather and analyse 3D data
By simply placing the sample on the stage and
pressing the “Measure” button, 3D data will
be collected in just a matter of seconds. Once
the data has been obtained, measurement
and analysis can be performed in the Analyser
software.
20
STEP
Measurement
A function guide is included for
data analysis - eliminating the need
for training!
Intuitive software design makes analysis
incredibly easy. The user can simply move their
mouse over each measurement icon in the
function guide to see a brief description of the
measurement type, eliminating confusion when
completing measurements.
 STEP
3
Report CAD compatible
3D data collected by the VR-3000 can
be saved as an .stp file and output to
After completing a measurement, a variety of CAD programmes.

a report can be generated instantly

with a single click

Formatted reports can be created and saved easily,

eliminating the trouble of making a report from
scratch for each sample. The Template function
(see page 15) can also automatically perform
measurements and create reports over the same
location on a sample.

21
 An easy-to-use microscope for everyday inspection

Large depth-of-field

Telecentric lenses with a large depth-of-field

The VR-3000 is designed with

unique telecentric lenses created
by advanced optical technology
developed through 20 years of
microscope design experience.
The high-quality lenses provide
u
large depth-of-field observation
with minimal distortion.

Conventional microscope VR-3000 Connector 12x

Extended depth-of-field function

Telecentric lenses combined with

the KEYENCE depth composition
function allows for sharp focus of
the entire surface without the need
for any manual manipulation of
the part. This function produces
u
fully-focused images of samples,
even when working at high
magnification, where depth-of-field
is limited. Conventional microscope VR-3000 PCB 12x

22
Capture high-quality microscope images

High-definition imaging

9 megapixel 3 CMOS camera

9 megapixel 3 CMOS camera
Red, green and blue data are
Samples can be imaged under magnifications ranging from obtained for each pixel, allowing
12x to 160x. High resolution images of 9 megapixels can be for clear observation with excellent
captured and saved by simply pushing the Capture button. colour reproduction.

Observation that surpasses

8-bit 16-bit
the limits of optics (256-colour)
Conventional
(65,536-colour)
HDR function
method 256 times
With one click the system
more levels of
will capture additional
16-bit HDR function colour data by varying
the shutter speed
colour than a
conventional
Pro bl e m s Effects device
The VR-3000 is able to capture up to 16 bits of red, green — Reflective samples cannot be — By increasing the levels of colour
and blue colour data to perform significantly more accurate imaged clearly due to the limited gradation, samples with bright spots
levels of colour that can be captured. or dark spots can be imaged clearly.
imaging of a sample than what can be captured with
— Details in low contrast samples — Low contrast samples can be
traditional 8-bit devices. cannot be seen. imaged clearly.

Without HDR With HDR Resin surface 40x

Extensive 2D measurement functions

Various measurements, such

as distance, angle and radius,
can be taken simply by clicking
the desired points on an image.
An edge extraction function and
measurement assistance tools also
eliminate human error, allowing
for consistent and repeatable
measurements between different
users.

23
 Example applications

Case: BGA height

Captures information that traditional profile measurement tools cannot

Linear measurement device

• Contact-type measurement takes a long time even when measuring a single
line.
• In some cases, the intended area, such as a BGA peak, is not correctly measured.
u

With One-Shot 3D
The 3D shapes of all BGAs are captured
simultaneously, meaning that in addition to
seeing the peak, the entire BGA shape can
be seen instantly.

Case: Surface height of substrate

Captures data that could not be seen with a limited viewing area

• Two areas of interest that are far apart cannot be measured simultaneously,
and stitching them together takes a long time.
• Positioning the sample for accurate measurement is extremely difficult.
u

With One-Shot 3D
A wide area can be measured in one 3D
image. Surface preparation, like adjusting for
tilt, can be done with a single click.

24
Case: Cur vature of a die-casting

Captures data that cannot be obtained with point measurement systems

3D measurement device
• Curvature can only be measured at selected points.
• Figures cannot be seen visually. ! -------Red point: point being
measured
u

With One-Shot 3D
Height differences are displayed in 3D
with colour coding, providing a visual
representation of curvature. It is also
possible to instantly measure the highest
and lowest points on a surface that is several
centimetres wide.

Case: Depressions in O-rings

Captures data that cannot be seen with traditional microscopes

Optical microscope
• The location of air leakage cannot be seen, even when viewing under high
magnification.
• Small changes in shape cannot be quantified.
u

With One-Shot 3D
3D data is obtained and height differences
are colour coded even for shapes with minute
height differences, ensuring that no surface
changes are missed during inspection.
Targeted areas can also be quantified to create
specifications for acceptable or defective parts.

25
 Optional Items
OP-87708 100 mm Spacer OP-87709 Tilt Stage
Inserting this 100 mm-high spacer between the Install this on the XY stage to observe and measure
measurement section and the base allows you to objects from any angle without having to manipulate the
measure objects up to 188 mm in height. object by hand. The stage is designed so that the sample
securely adheres to the stage when positioned at an angle.

OP-87717 Manual Slider for Image Stitching

For those wanting to measure a wider area, a stitching
188 mm module (optional) allows for an area of up to 270 mm
to be measured.

External Dimensions
Head: VR-3050 Head: VR-3100 Unit: mm
70
70 344
344 290 147
290 147

496 496

14.1 14.1
171 150
150 150 91 109
310 428 310 428 48
48
343 328.4
Controller:
VR-3000K
182 25.3
117
26 414
8 × M6 Depth 10 344

195
80 84
228.5 228

(77)
97 224
35 125 328

35 35
R180

26
Specifications
Controller VR-3000K
Model
Head VR-3100 VR-3050
Wide-field mode High magnification mode Wide-field mode
Magnification on a
12x 25x 38x 50x 40x 80x 120x 160x 12x 25x 38x 50x
15" monitor
Horizontal: mm 24.0 12.0 8.0 6.0 7.6 3.8 2.5 1.9 24.0 12.0 8.0 6.0
Field-of-view
Vertical: mm 18.0 9.0 6.0 4.5 5.7 2.9 1.9 1.4 18.0 9.0 6.0 4.5
Zoom 1x to 4x
Measurable height*1 10 mm (±5 mm) 1 mm (±0.5 mm) 10 mm (±5 mm)
Standard scale*2 0.1 μm 0.5 μm
Height measurement 0.5 μm
Repeatability*3
Width measurement 1 μm 0.5 μm 1 μm
Working distance 75 mm
Image receiving element 4 megapixel monochrome CMOS
Transmitter lens Double telecentric lens x2
Receiver lens Double telecentric lens
Observation light source LED ring light (red, green, blue) LED ring light (white)
Light sources
Measurement light source White LED
Image size 1024 x 768 pix, 2048 x 1536 pix
XY stroke Up to 270 mm*4 (default 70 mm*5)
Z stroke 90 mm (electric) 88 mm (manual)
Stage
Rotation ±90° –
Tilt Over ±30° –
Data processing Dedicated PC specified by KEYENCE (OS: Windows 7)*6
Supply voltage 100 to 240 VAC 50/60 Hz
Power source
Power consumption 150 VA
Environmental Ambient temperature for usage 15 to 30°C
resistance Relative humidity for usage 35 to 80%, no condensation
Controller 3.8 kg
Weight
Head 21.5 kg (weight of measurement unit: 10.8 kg)
*1 Low range ±5 mm and high range ±0.5 mm around the focal point position.
*2 Height measurement resolution.
*3 When the KEYENCE VR calibration gauge is measured with average height difference mode.
*4 When using the OP-87717 manual slider for stitching.
*5 The VR-3050 requires the XYθ stage (OP-87715, sold separately).
*6 Windows 7 Professional and Ultimate.

System Configuration Diagram

OP-87708 100 mm spacer (optional)

OP-87717 manual slider for stitching (optional)

Head

Controller
VR-3050 VR-3100 VR-3000K Control PC Monitor (optional)

OP-87709 tilt stage (optional)* VR-H1VE Viewer software

OP-87715 XYθ stage (optional)* VR-H1AE Analyser software
OP-87710 calibration standard (standard item) VR-H1P Analyser expansion module (optional)
*Comes standard with the VR-3100. VR-H1J Stitching module (optional)

27
Providing non-contact profile and roughness measurements on nearly any material

NEW

3D Laser Scanning Microscope

VK-X100/X200
❙ 200× - 24000× magnification
❙ 0.5 nanometre Z-axis resolution
❙ High-resolution, large depth-of-field observation
❙ Profile and roughness measurements with zero sample preparation
❙ Measures thickness and uniformity of clear layers
❙ Acquires data on angles approaching 90 degrees

All-in-one imaging and measurement system

NEW

Digital Microscope
VHX-2000
❙ Large depth-of-field: 20x larger than conventional optics
❙ Free-angle observation for 360 degree inspection
❙ Observe, record and measure - all with a single system
❙ 0.1x - 5000x magnification range with brightfield, darkfield, transmitted,
DIC and polarised illumination
❙ View low-contrast and highly-reflective targets
❙ 2D & 3D Image Stitching expands viewing area up to 200 times

SAFETY INFORMATION
Please visit: www.keyence.com Please read the instruction manual carefully in
order to safely operate any KEYENCE product.

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WW1-1013

The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice.
Copyright (c) 2013 KEYENCE CORPORATION. All rights reserved. VR3-WW-C-GB 1073-2 600B75 Printed in Japan
* 6 0 0 B 7 5 *