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Quality Manual 9001

Engineering Test Results Form RT ETR-001 Part B
Rev C 05/12/09

Department/ Area: Engineering Process: Wet bench ( WD3 &

WD4 )
Initiator: S.Narendran Date: 24June ETR#:13-102
2013
Title: Running WD3 by changing Tank 9 from Clair to DIW
Summary of Test Results:

The wafers Metal level tested after WD3 and WD4. As expected the metal level of
the wafers in WD3 is more than WD4. The metal level is showing improvement. So,
the WD3 will be running without Clair by using DIW.

Did test achieve goal(s) (circle): Yes No

Recommendation/Next steps:

Continue the process using DIW and not Clair. WD3 and WD4 passed internal
specification. More improvement needed to get better results of metal impurities such as
frequent tank cleaning and frequent entire checking of the cleaning machine.

Appendix (List attachments):

Reviewed by : Operations: Engineering: Quality: Supply Line

Management (if
required):

Date:
RT ETR-001 Rev C Part B Page 1
Rubicon Rubicon

Quality Manual 9001

Engineering Test Results Form RT ETR-001 Part B
Rev C 05/12/09

RT ETR-001 Rev C Part B Page 2