Debashis Mandal
Advanced VLSI Design Laboratory,
Indian Institute of Technology Kharagpur
I/O Buffer
p+ n+ n+ p+ p+ n+
pnp
Vss npn
Rnwell
Rsub
n-well
p-substrate
Rsub Dp Vdd
Dn
Rnwell
Vss
Advanced VLSI Design Lab, IIT KGP 7
Latch up problem (cont’d)
Vdd
Gn Gp
Bn Sn Dn Dp Sp Bp
p+ n+ n+ p+ p+ n+
pnp
Vss npn
Rnwell
Rsub
E n-well
p-substrate
Rsub Dp Vdd
Dn
Rnwell
Vss
Advanced VLSI Design Lab, IIT KGP 8
How to minimize latch up problem
¾ Use guard rings to remove the latch up problem
9 N+ ring for PMOS and connect it to Vdd
9 P+ ring for NMOS and connect it to gnd
¾ Keep spacing between NMOS and PMOS
¾ Reducing Rsub and Rnwell
9 Minimizing spacing between source and bulk
9 Increasing the substrate and nwell doping density
9 Using more number of source, substrate and nwell contacts
¾ Wider guard ring provides low resistive paths to minority
carriers
Advanced VLSI Design Lab, IIT KGP 9
Electro Static Discharge
(ESD)
1.5GΩ
DUT
Discharging
Vesd Probe
G
S D
Poly Oxide
n+ Leff n+
Ldrawn
p-substrate
p+ n+ n+ n+ p+ p+
n-substrate
p-substrate
G G
B S D D S B
p+ n+ n+ p+ p+ n+
n-well
p-substrate
Metal 1
oxide
nwell
substrate
N+ implant P+ implant
Resistors:
RND
Resistance marker
N+ Composite
Metal 1
salex
Resistors:
RPD
Resistance marker
P+
Metal 1 Composite
salex
nwell
rho ~ 79 ohm/ in 0.18µm CMOS process
Resistors:
RNP
Resistance marker
N+ Poly
Metal 1
salex
Resistors:
1) RPP
Resistance marker
P+ Poly
Metal 1
salex
Capacitor:
CPP (over the substrate) :
oxide
substrate
Capacitor:
CPP (over the Nwell) :
oxide
nwell
substrate
Capacitor:
Accumulation capacitor :
Upper plate
Lower plate
oxide poly
nwell
substrate
N+ implant
NWELL POLY
P+ Composite
Metal 1
POLY
N+ Composite
Metal 1
POLY
N+ Composite
Metal 1
Current Mirror
I1 = ½ μnCox W (VGS-Vt1)2 I1 I2
L 1
M1 M2
I2 = ½ μnCox W (VGS-Vt2)2
L 2
A B B A
D SS DD SS D
DASSBD DASSBDDBSSAD
DBSSAD
DBSSADDASSBD
R1 R2 R2 R1
N+ Diffusion (RND)
Equivalent Model
P+ Diffusion (RPD)
Equivalent Model
Equivalent Model
¾ Parasitic effect ,
¾ Process variation,
¾ Temperature variation,
simulation
There are many others capacitors :COMB cap, Interdigtized Cap, MOS Varactor cap