EGT-280-Midterm Exam Study Guide

Study Guide for Midterm Exam for EGT280

Material to Study
• Introduction to Microtechnology, See Notes-1 (or Presentation-1), Read Section 4.1 of Allameh’s Si-
MEMS Chapter 4 (Allameh-1) ; Read Madou’s Book: Chap. 9: pp. 535-546, Chap. 10: pp. 615-630, (If
you have the 3rd edition, Read Madou's 3rd edition, third book, Ch. 7 pp. 359-385). Read Senturia’s
Book: Chap. 1
• S-2: See Notes-2 or Presentation-2, Fundamentals (Electronic and thermal properties), Read Sections
4.2.1.3-4 of Allameh-1
• S-3: See Notes-3 or Presentation-3, Fundamentals (Mechanical properties) Read Allameh’s Paper on
MEMS Mechanical Properties (Allameh-2)
• S-4: See Notes-4 (or Presentation 4), Materials, Read Section 4.2.1 and 4.2.3 of Allameh-1, Read
Materials section of Allameh’s Processing of MEMS and NEMS (Allameh-3), Read Madou’s Chap. 4 pp.
186-206.

Practice Test
• Examples of test problems are submitted to Blackboard. You may try them as many times as you
want. You will see the correct answers right away.
• Use the accompanied Exercises for examples provided

Contents of Study Guide

• Contents page (Page 1)
• Exercises with their solution for the last four sessions

Midterm Exam:
• Tests will be available at 2pm EST (9pm SA time) on the date announced in the syllabus. There will be
no makeup test for missed exams.
• Online exams start right on the minute and will be automatically submitted after 15 min (for
questions) and after 1 h ( for problems)
• Establish a reliable internet connection at least 5 min. before the exam.
• Problems Section (Open Book)
• Questions Section (Closed Book) about Microtechnology
• Covers the first 4 sessions
• You have 15 minutes to complete the questions part and 1 h to complete the problems section.
• There are 20 questions worth 100 points
• There are 10 problems worth 100 points
• The Problem sections starts a half hour after the theory part Please do not leave after the theory
Part!

Lock Down Browser and Webcam Monitoring:

• Find a computer that is connected by cable to an electric outlet (batteries are not reliable and can
cost you your grade). The computer must be equipped with a webcam that is good enough for face
detection.
EGT-280-Midterm Exam Study Guide
• Establish a reliable internet (e.g. come to NKU or another place where internet is fast and
trustworthy)
• Test your webcam and Lock-Down Browser a few days before the exam and try to troubleshoot by
the help of NKU IT staff. Call 859-572-6911 for getting assistance
• Be reminded that students who turn their webcam off during the theory part, dim the room light,
change the angle of the camera, or do things that disturb face detection of the webcam monitoring
will lose the credit for the theory part.

Questions?
• The easiest way is to email the instructor at allamehs1@nku.edu
• Good Luck!

Exercises
Problem 1: Calculate the flexural rigidity of the following cantilever.

H: height of the beam = 2 µm

E: Young’s Modulus =160 GPa
D: Flexural Rigidity
ν: Poisson’s Ration = 0.25

.
EH 3
D plate =
12(1 −ν )

D plate =
EH 3
=
(
160 ×109 Pa × 2 ×10 −6 )
3

12(1 −ν ) 12 × (1 − 0.25)
D plate = 1.422 ×10 −7 N − m

Problem 2: Calculate the stiffness of the following cantilever.

L = length of the beam=100 µm

W: width of the beam = 2 µm
H: height of the beam = 2 µm
E: Young’s Modulus =160 GPa
K: Spring constant

k axial beam =
(
EWH 3 160 ×109 Pa × 2 ×10 −6 × 2 ×10 −6
=
)
3

4 L3 (
4 × 100 ×10 −6
3
)
k axial beam = 0.64 N / m

Problem 3: Calculate the maximum stress in a cantilever under a load of 3 µN.

EGT-280-Midterm Exam Study Guide
L = length of the beam=100 µm
W: width of the beam = 2 µm
H: height of the beam = 2 µm
E: Young’s Modulus =160 GPa
F = Force applied at the end = 3 µN

σ max = 
 6L 
 F =

 (
6 × 100 ×10 −6 m ) 
 × 3 ×10 −6 N
H W 
2
 ( ) (
 2 ×10 −6 m 2 × 2 ×10 −6 m ) 

σ max = 2.25 ×108 Pa = 225MPa

Problem 4: Calculate the maximum bending of a cantilever under a load of 3 µN.

L = length of the beam=100 µm

W: width of the beam = 2 µm
H: height of the beam = 2 µm
E: Young’s Modulus =160 GPa
F = Force applied at the end = 3 µN

I=
(
WH 3 2 ×10 −6 m × 2 ×10 −6 m
=
)
3

= 1.333 ×10 − 24 m 4
12 12
 L3 
wmax =   F =

 (
100 ×10 −6 m
3
) 
 × 3 ×10 −6 N
 3EI   3 ×160 ×10 Pa ×1.333 ×10 m 
9 − 24 4
 
wmax = 4.67 ×10 m = 4.67 µm
−6

Problem 5: An axially loaded beam has a length 100µm and a square cross section of 2 µm on one side.
Assume the Young’s Modulus is 160 GPa and the beam is clamped between two immovable ends Calculate
the thermal stress that will develop upon heating.

E: Young’s Modulus =160 GPa

Assume: α = 3.2x 10-6
∆T =Temperature rise: 100 C

σ thermal = E × α × ∆T
σ thermal = 160 ×109 Pa × 3.2 ×10 −6 ×100 = 51200 Pa
σ thermal = 51.2MPa

Problem 6: Find the spring constant for an axially loaded beam of length 100mm and a square cross section
of 2 µm on one side. Assume the Young’s Modulus is 160 GPa.

k axial beam = =
( )
2
EWH 160 ×109 × 2 ×10 −6 Pa − m 2
= 6400 N / m
L 100 ×10 −6 m
EGT-280-Midterm Exam Study Guide
Problem 7: Calculate thermal strain developed in polyimide film during deposition at 120 C. Assume room
temperature is kept at 18C,and thermal coefficient of expansion for the film and the substrate are 70 x 10-6C-1
and 2.6 x 10-6C-1 respectively.

ε = (α f − α s ) (Td − Tr )
. ε = (70 × 10 −6 − 2.6 × 10 −6 ) (120 − 18)
ε = 6.87 × 10 −3
ε = 0.00687

Problem 8: Calculate residual stress for a polyimide film on Si with E = 3GPa, ν =0.4 and strain of 0.0025

 E 
σ = ε
 1 −ν 
 3 ×109 Pa 
σ =   × 0.0025
 1 − 0.4 
σ = (5 ×109 Pa ) × 0.0025
σ = (1.25 ×107 Pa ) = 125MPa

Problem 9: A length change = 0.2 m will occur for an object that is L= 20 m long. If the coefficient of thermal
expansion is 13 x 10-6/C and if the original temperature is 25 C, find the final temperature.

∆L = αL0 ∆T

0.2 µm = 13 × 10 −6 × 20 µm × ∆T
0.2 µm
∆T = = 769C
13 × 10 −6 × 20 µm
Thot = ∆T + Tcold
Thot = 769 + 25 = 794C

Problem 10: A copper-constantan thermocouple produces electric potential when placed at a hot source
according to the following equation

1
E = α ×θ − β ×θ 2
2
EGT-280-Midterm Exam Study Guide
Where α =40 mVC-1 and β = 40 x 10-3 mVC-2. If the temperature of the junction is 100 C, and if the cold source
is at 0 C, find the voltage created

E = 40 ×100 − × 40 ×10 −3 × (100 )

1 2

2
E = 4000 − 200 = 3800 mV = 3.8 V